KR100417403B1 - Near-field magneto-optical disk and manufacturing method thereof - Google Patents
Near-field magneto-optical disk and manufacturing method thereof Download PDFInfo
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- KR100417403B1 KR100417403B1 KR10-2001-0020200A KR20010020200A KR100417403B1 KR 100417403 B1 KR100417403 B1 KR 100417403B1 KR 20010020200 A KR20010020200 A KR 20010020200A KR 100417403 B1 KR100417403 B1 KR 100417403B1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/24—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by near-field interactions
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
Abstract
본 발명은 근접장용 광자기 기록매체 및 그 제조방법에 관한 것으로, 종래 근접장용 광자기 기록매체 제조방법은 윤활막을 스핀코팅 또는 디핑법으로 형성해야 하기 때문에 하지막인 보호막의 형성과 연속적인 공정을 수행할수 없으며 별도의 설비를 갖춰야 함으로써, 그 제조비용이 증가함과 아울러 생산효율이 낮은 문제점이 있었다. 이와 같은 문제점을 감안한 본 발명은 기판의 상부에 제1유전막을 형성하고, 그 제1유전막의 상부에 광을 반사하는 반사막을 형성하는 단계와; 상기 반사막의 상부에 제2유전막을 형성하고, 그 제2유전막의 상부에 데이터의 기록이 가능한 기록막을 형성하는 단계와; 상기 기록막 상에 제3유전막을 형성하고, 그 제3유전막의 상부측에 스퍼터링법으로 보호층을 형성하는 단계와; 상기 보호층의 상부에 헤드의 원활한 주행을 위한 윤활층을 형성하는 단계로 이루어지는 근접장용 광자기 기록매체 제조방법에 있어서, 상기 윤활층은 보호층 형성과 연속적인 공정으로 형성되며, 상기 보호층의 스퍼터링 에너지를 증가시켜 형성하여 보호막의 경도를 표면에서 낮게 형성하여, 그 보호막을 윤활막으로 사용함으로써, 윤활막을 제조하기 위한 별도의 설비를 마련하지 않아도 되고, 보호막 형성과 윤활막의 형성공정을 연속적으로 진행함이 가능해져, 제조비용을 절감함과 아울러 제조공정이 단순해지고, 생산효율이 증대되는 효과가 있다.The present invention relates to a near field magneto-optical recording medium and a method of manufacturing the same. In the conventional method of manufacturing a near field magneto-optical recording medium, since the lubricating film must be formed by spin coating or dipping, a process of forming a protective film as a base film and a continuous process are performed. There is a problem that can not be carried out by having a separate facility, the production cost increases and the production efficiency is low. In view of the above problems, the present invention includes the steps of forming a first dielectric film on top of a substrate, and forming a reflective film on the top of the first dielectric film to reflect light; Forming a second dielectric film on top of the reflective film, and forming a recording film on which data can be written on the second dielectric film; Forming a third dielectric film on the recording film, and forming a protective layer on the upper side of the third dielectric film by sputtering; In the method of manufacturing a magneto-optical recording medium for a near field, the lubricating layer is formed by a continuous process of forming the protective layer, wherein the lubricating layer is formed on the upper portion of the protective layer. It is formed by increasing the sputtering energy to make the hardness of the protective film low on the surface, and by using the protective film as a lubricating film, it is not necessary to provide separate equipment for manufacturing the lubricating film, and the process of forming the protective film and forming the lubricating film is continuously performed. It is possible to reduce the manufacturing cost, the manufacturing process is simplified, and the production efficiency is increased.
Description
본 발명은 근접장용 광자기 기록매체 및 그 제조방법에 관한 것으로, 특히 헤드의 원활한 이동을 목적으로 하는 윤활막 제조를 보호막의 특성변화를 통해 생략함으로써, 생산 효율을 향상시키는데 적당하도록 한 근접장용 광자기 기록매체 및 그 제조방법에 관한 것이다.The present invention relates to a near-field magneto-optical recording medium and a method for manufacturing the same. In particular, the manufacture of a near-field magneto-optical magnet suitable for improving production efficiency by omitting the manufacture of a lubricating film for the purpose of smooth movement of the head by changing the characteristics of the protective film. A recording medium and a method of manufacturing the same.
일반적으로, 광자기 기록매체는 대용량, 고밀도의 기록이 가능한 기록매체로서 최근 컴퓨터의 대용량 파일 보존이나 동영상을 기록하기 위한 매체로 수요가 급증하고 있다. 이러한 광자기 기록매체는 플라스틱 등의 기판에 기록막을 포함하는 다층막을 형성하고, 플라스틱 기판 측으로 부터 레이저를 조사하여 기록, 재생 및 소거 동작을 수행한다. 이와 같은 광자기 기록매체에 대해서 광학 헤드를 기록막에 근접시켜 기록 재생하는, 즉 근접장 광기록이 고밀도화의 수단으로 주목되고 있으며, 이와 같은 근접장 기록방식은 SIL(Solid Immersion Lens)헤드를 사용하여 레이저빔 스폿 사이즈를 축소함으로써 광원의 레이저 파장에 의해 결정되는 종래의 기록한계보다 짧은 마크(mark)의 재생이 가능해져 초고기록밀도의 기록, 재생이 가능해 지며 이와 같은 종래 근접장용 광자기 기록매체를 첨부한 도면을 참조하여 상세히 설명하면 다음과 같다.BACKGROUND ART In general, magneto-optical recording media are recording media capable of high-capacity and high-density recording. Recently, demand for optical magnetic recording media is rapidly increasing as a medium for storing large files or recording moving images of computers. The magneto-optical recording medium forms a multilayer film including a recording film on a substrate such as plastic, and performs recording, reproducing and erasing operations by irradiating a laser from the plastic substrate side. In such a magneto-optical recording medium, an optical head is recorded and reproduced in close proximity to a recording film, that is, a near field optical recording is attracting attention as a means of densification. Such a near field recording method uses a SIL (Solid Immersion Lens) head By reducing the beam spot size, it is possible to reproduce marks shorter than the conventional recording limit determined by the laser wavelength of the light source, enabling recording and reproduction of ultra-high recording density, and attaching such a conventional near field magneto-optical recording medium. Referring to the drawings in detail as follows.
도1은 종래 근접장용 광자기 기록매체의 단면도로서, 이에 도시한 바와 같이 기판(1)의 상부에 제1유전막(2), 반사막(3), 제2유전막(4), 기록막(5),제3유전막(6), 보호막(7), 윤활막(8)을 순차적으로 형성한다.1 is a cross-sectional view of a conventional near field magneto-optical recording medium. As shown therein, a first dielectric film 2, a reflective film 3, a second dielectric film 4, and a recording film 5 are disposed on an upper portion of a substrate 1. As shown in FIG. The third dielectric film 6, the protective film 7, and the lubricating film 8 are sequentially formed.
이때 상기 기판(1)의 상부측에 형성되는 막들은 특별한 처리과정 없이 스퍼터링 또는 증착 등의 방법을 사용하여 정해진 두께로 형성하게 되며, 상기 반사막(3)은 헤드로 부터 인가되는 광을 반사하는 역할을 하며, 제3유전막(6)은 광의 재반사를 방지하고, 보호막(7)은 상기 제3유전막(6)과 윤활막(8)을 연결하며 매체의 표면 손상을 방지하는 역할을 한다.In this case, the films formed on the upper side of the substrate 1 are formed to have a predetermined thickness by using a method such as sputtering or vapor deposition without a special treatment process, and the reflective film 3 reflects light applied from the head. The third dielectric film 6 prevents rereflection of light, and the protective film 7 connects the third dielectric film 6 and the lubrication film 8 to prevent surface damage of the medium.
또한, 상기 윤활막(8)은 헤드의 주행성을 향상시키는 역할을 하게 된다. 이때의 윤활막(8)을 제조하는 방법은 스핀코팅 또는 디핑(dipping)법으로 형성하기 때문에 상기 보호막(7)의 형성공정과 연속적인 프로세스를 통해 제조할 수 없게 된다.In addition, the lubricating film 8 serves to improve the running property of the head. In this case, since the method of manufacturing the lubricating film 8 is formed by a spin coating or dipping method, the lubricating film 8 cannot be manufactured through the forming process and the continuous process of the protective film 7.
광디스크가 기판으로 부터 광을 조사하는 반면 근접장용 광자기 기록매체는 상기 기록막(5)에 헤드를 더 근접시키기 위해 가장 두꺼운 기판(1)측으로 부터가 아닌 윤활막(8)측으로 부터 기록막(5)에 광을 조사하여 데이터를 기록 및 재생하게 된다.While the optical disk irradiates light from the substrate, the near field magneto-optical recording medium has the recording film 5 from the lubricating film 8 side rather than from the thickest substrate 1 side in order to bring the head closer to the recording film 5. ) Is irradiated with light to record and reproduce data.
이때 헤드의 위치는 기록막(5)으로 부터 100nm 이하의 이격거리를 갖게되며, 종래 기록한계 보다 짧은 마크를 판독할 수 있게 된다.At this time, the position of the head has a separation distance of 100 nm or less from the recording film 5, and marks shorter than the conventional recording limit can be read.
또한, 상기 기록막(5)과 헤드를 근접시키기 위해 부상식 슬라이더 헤드를 사용하며, 기록시에는 레이저 빔을 조사하여 기록막(5)을 큐리온도 이상으로 올려 슬라이더 헤드에 형성된 박막 코일등에 의해 자계를 변조시켜 기록하게 된다.In addition, a floating slider head is used to bring the recording film 5 into close proximity with the head. During recording, a magnetic field is generated by a thin film coil formed on the slider head by raising the recording film 5 above the Curie temperature by irradiating a laser beam. Will be modulated and recorded.
상기와 같은 종래 근접장용 광자기 기록매체 제조방법은 윤활막을 스핀코팅 또는 디핑법으로 형성해야 하기 때문에 하지막인 보호막의 형성과 연속적인 공정을 수행할수 없으며 별도의 설비를 갖춰야 함으로써, 그 제조비용이 증가함과 아울러 생산효율이 낮은 문제점이 있었다.In the conventional method for manufacturing a near-field magneto-optical recording medium, the lubrication film must be formed by spin coating or dipping, so that the formation of the protective film, which is the underlying film, and the continuous process cannot be performed. In addition, there was a problem of low production efficiency.
이와 같은 문제점을 감안한 본 발명은 별도의 설비를 구비하지 않고, 하지막인 보호막의 형성공정과 연속적인 공정으로 윤활막 역할을 하는 박막을 제공할 수 있는 근접장용 광자기 기록매체 및 그 제조방법을 제공함에 그 목적이 있다.In view of the above problems, the present invention provides a near field magneto-optical recording medium capable of providing a thin film serving as a lubricating film in a continuous process and a process of forming a protective film as a base film, and a method of manufacturing the same. Has its purpose.
도1은 종래 근접장용 광자기 기록매체의 단면도.1 is a cross-sectional view of a conventional near field magneto-optical recording medium.
도2는 본 발명 근접장용 광자기 기록매체의 단면도.Fig. 2 is a sectional view of the near field magneto-optical recording medium of the present invention.
도3은 도2에 있어서, 스퍼터링 전력의 인가에 따른 DLC의 경도변화를 보인 그래프도.3 is a graph showing the hardness change of DLC according to the application of sputtering power in FIG.
*도면의 주요 부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
1:기판 2:제1유전막1: Substrate 2: First dielectric film
3:반사막 4:제2유전막3: reflective film 2: second dielectric film
5:기록막 6:제3유전막5: recording film 6: third dielectric film
7:보호막 8:윤활막7: Shield 8: Lubrication
상기와 같은 목적은 기판의 상부에 제1유전막을 형성하고, 그 제1유전막의 상부에 광을 반사하는 반사막을 형성하는 단계와; 상기 반사막의 상부에 제2유전막을 형성하고, 그 제2유전막의 상부에 데이터의 기록이 가능한 기록막을 형성하는 단계와; 상기 기록막 상에 제3유전막을 형성하고, 그 제3유전막의 상부측에 스퍼터링법으로 보호층을 형성하는 단계와; 상기 보호층의 상부에 헤드의 원활한 주행을 위한 윤활층을 형성하는 단계로 이루어지는 근접장용 광자기 기록매체 제조방법에 있어서, 상기 윤활층은 상기 보호층 형성과 연속적인 공정으로 형성되며, 상기 보호층의 스퍼터링 에너지를 증가시켜 형성함으로써 달성되는 것으로, 이와 같은 본 발명을 첨부한 도면을 참조하여 상세히 설명하면 다음과 같다.The above object is to form a first dielectric film on top of the substrate, and forming a reflective film on the top of the first dielectric film to reflect light; Forming a second dielectric film on top of the reflective film, and forming a recording film on which data can be written on the second dielectric film; Forming a third dielectric film on the recording film, and forming a protective layer on the upper side of the third dielectric film by sputtering; In the method of manufacturing a magneto-optical recording medium for a near field comprising the step of forming a lubricating layer for smooth running of the head on top of the protective layer, the lubricating layer is formed in a continuous process with the protective layer, the protective layer This is achieved by increasing the sputtering energy of the present invention, which will be described in detail with reference to the accompanying drawings.
도2는 본 발명 근접장용 광자기 기록매체의 단면도로서, 이에 도시한 바와 같이 기판(1)의 상부측에 위치하는 제1유전막(2)과; 그 제1유전막(2)의 상부측에서 입사되는 광을 반사시키는 금속막인 반사막(3)과; 상기 반사막(3)의 상부측에 위치하는 제2유전막(4) 상에서 광자계에 의해 데이터가 기록되는 기록막(5)과; 상기 기록막(5)의 상부에 위치하는 제3유전막(6)과; 상기 제3유전막(6) 상에서 헤드에 의한 긁힘등을 방지하는 보호막(7)과; 상기 보호막(7)의 결합구조를 변경하여 헤드가 원활하게 주행할수 있도록 하는 윤활막(8)으로 구성된다.Fig. 2 is a cross-sectional view of the near-field magneto-optical recording medium of the present invention, as shown therein; a first dielectric film 2 located on the upper side of the substrate 1; A reflecting film 3 which is a metal film reflecting light incident from the upper side of the first dielectric film 2; A recording film (5) in which data is recorded by a magneto-optical field on a second dielectric film (4) located above the reflective film (3); A third dielectric film 6 located above the recording film 5; A protective film 7 for preventing scratches and the like caused by the head on the third dielectric film 6; It is composed of a lubrication film (8) to change the coupling structure of the protective film (7) so that the head can run smoothly.
이하, 상기와 같은 본 발명 근접장용 광자기 기록매체를 제조하는 방법을 상세히 설명한다.Hereinafter, a method of manufacturing the near-field magneto-optical recording medium of the present invention as described above will be described in detail.
먼저, 폴리카보나이트(POLYCARBONATE) 등의 플라스틱 기판(1)의 상부에 제1유전막(2)을 알루미늄 질화물 또는 실리콘 질화물을 스퍼터링법으로 형성한다. 실리콘 질화물로 성막하는 경우 압력분위기를 7mTorr, Ar:N2=10:1sccm으로 혼합하여 500W의 RF 전력을 인가하여 200Å의 두께로 성막한다.First, aluminum nitride or silicon nitride is formed by sputtering the first dielectric film 2 on top of a plastic substrate 1 such as polycarbonate (POLYCARBONATE). When the silicon nitride film is formed, the pressure atmosphere is mixed at 7 mTorr and Ar: N 2 = 10: 1 sccm to form a film having a thickness of 200 mW by applying RF power of 500 W.
그 다음, 그 제1유전막(2)의 상부전면에 알루미늄을 증착하여 반사막(3)을 형성한다.Next, aluminum is deposited on the upper surface of the first dielectric film 2 to form the reflective film 3.
이때 반사막(3)은 알루미늄 또는 알루미늄합금을 3mTorr의 압력분위기에서, Ar 10sccm을 공정분위기로 하는 증착공정으로 400Å의 두께로 증착한다.At this time, the reflective film 3 is deposited to a thickness of 400 kPa by a deposition process using aluminum or aluminum alloy in a pressure atmosphere of 3mTorr, Ar 10sccm as the process atmosphere.
그 다음, 제2유전막(4)을 상기 제1유전막(2)의 제조공정과 동일한 조건으로 200Å의 두께로 형성한다.Then, the second dielectric film 4 is formed to a thickness of 200 kPa under the same conditions as the manufacturing process of the first dielectric film 2.
그 다음, TbFeCo를 3mTorr, Ar 10sccm 등의 조건으로 250Å의 두께가 되도록 증착하여 기록막(5)을 형성한다..Then, TbFeCo is deposited to a thickness of 250 kPa under conditions of 3 mTorr, Ar 10 sccm, and the like to form the recording film 5.
그 다음, 상기 기록막(5)의 상부에 제3유전막(6)을 증착하고, 그 제3유전막(6)의 상부에 보호막(7)인 탄소막(diamond like carbon, DLC)을 100Å의두께로 형성한다.Next, a third dielectric film 6 is deposited on the recording film 5, and a carbon like film (diamond-like carbon, DLC), which is a protective film 7, is formed on the third dielectric film 6 to a thickness of 100 μs. Form.
이때의 DLC는 Ar가스 분위기에서 성막하며, 공정압력이 7.5mTorr, DC 전력을 200W 사용하여 90Å이 되도록 성막한다. 그 굴절율은 1.7~2.1 정도가 되도록 한다. 굴절율이 너무 작으면 경도가 높아 헤드가 손상되고, 너무 크면 막의 투명도가 저하된다.At this time, the DLC is formed in an Ar gas atmosphere, and the process pressure is formed to be 90 kPa using 7.5 mTorr and 200 W of DC power. The refractive index is about 1.7 to 2.1. If the refractive index is too small, the hardness is high and the head is damaged. If the refractive index is too large, the transparency of the film is lowered.
이때 상기 DLC는 낮은 스퍼터링 파워로 성막하면 매체의 표면의 손상방지가 가능한 높은 경도 특성을 나타내며, 높은 스퍼터링 파워로 성막하면 낮은 경도를 갖게 되어 헤드의 주행성을 향상시키는 윤활막으로 사용할 수 있다.In this case, when the DLC is formed with a low sputtering power, the DLC has a high hardness characteristic capable of preventing damage to the surface of the medium, and when the DLC is formed with a high sputtering power, the DLC has a low hardness and can be used as a lubricating film to improve the running performance of the head.
도3은 상기 DLC의 스퍼터링 파워에 따른 빅커스(VICKERS) 경도변화 그래프로서, 이에 도시한 바와 같이 DLC는 그 증착시 사용하는 파워의 크기에 따라 경도의 변화가 빅커스 경도단위로 2000정도까지 차이가 나며, 그 스퍼터링 파워의 조절에 의해 서로 다른 경도특성을 갖는 박막을 얻을 수 있다.FIG. 3 is a graph of Vickers hardness change according to the sputtering power of the DLC. As shown in FIG. 3, the variation of hardness varies depending on the magnitude of the power used during the deposition to about 2000 in Vickers hardness unit. By controlling the sputtering power, thin films having different hardness characteristics can be obtained.
이와 같은 특성은 탄소의 본딩 구조가 낮은 스퍼터링 에너지에서는 테트라고날(TETRAGONAL) 구조를 가지며, 높은 스퍼터링 에너지에서는 트리고날(TRIGONAL) 구조를 가지기 때문이다. 즉, SP3결합구조에서 SP2결합구조로 에너지가 증가할 수록 변화하게 된다.This is because the bonding structure of carbon has a tetragonal (TETRAGONAL) structure at low sputtering energy, and a trigonal (TRIGONAL) structure at high sputtering energy. That is, as the energy increases from the SP 3 bond structure to the SP 2 bond structure changes.
그 다음, 상기의 DLC의 특성을 이용하여 상기 보호막(7)의 제조공정 후, 스퍼터링에 사용되는 에너지를 500W로 증가시켜, 상기 경도가 약한 DLC인 윤활막(8)을 10Å의 두께로 형성한다.Then, after the manufacturing process of the protective film 7 by using the characteristics of the DLC, the energy used for sputtering is increased to 500W, so that the lubricating film 8 of the weak DLC is formed to a thickness of 10 kPa.
상기한 바와 같이 본 발명은 보호막의 경도를 표면에서 낮게 형성하여, 그 보호막을 윤활막으로 사용함으로써, 윤활막을 제조하기 위한 별도의 설비를 마련하지 않아도 되고, 보호막 형성과 윤활막의 형성공정을 연속적으로 진행함이 가능해져, 제조비용을 절감함과 아울러 제조공정이 단순해지고, 생산효율이 증대대는 효과가 있다.As described above, in the present invention, the hardness of the protective film is lowered on the surface, and the protective film is used as the lubricating film, so that no separate equipment for manufacturing the lubricating film is required, and the protective film forming and the lubricating film forming process are continuously performed. It is possible to reduce the manufacturing cost, simplify the manufacturing process, and increase the production efficiency.
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