KR100335323B1 - Exhaust cleaning apparatus for clean room - Google Patents
Exhaust cleaning apparatus for clean room Download PDFInfo
- Publication number
- KR100335323B1 KR100335323B1 KR1019990035541A KR19990035541A KR100335323B1 KR 100335323 B1 KR100335323 B1 KR 100335323B1 KR 1019990035541 A KR1019990035541 A KR 1019990035541A KR 19990035541 A KR19990035541 A KR 19990035541A KR 100335323 B1 KR100335323 B1 KR 100335323B1
- Authority
- KR
- South Korea
- Prior art keywords
- filter member
- filter
- clean room
- exhaust
- air
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title claims description 20
- 238000001914 filtration Methods 0.000 claims abstract description 27
- 239000003086 colorant Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
- F24F11/32—Responding to malfunctions or emergencies
- F24F11/39—Monitoring filter performance
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/40—Pressure, e.g. wind pressure
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Abstract
클린룸 내에서 사용되는 공기압기구의 배기를 직접 클린룸 내로 배출할 수가 있는 정도로 공기 청정레벨을 높일 수 있는 클린룸용 배기청정장치를 얻는다.An exhaust purifier for a clean room can be obtained that can raise the air clean level to the extent that exhaust of the pneumatic mechanism used in the clean room can be directly discharged into the clean room.
필터수용체는 필터부재(1)에 의한 이물질의 포착상태를 투시가능하도록 형성하고, 상기 필터부재(1)와 배기구(6) 사이에는, 이물질의 포착에 의해 여과능력이 저하된 필터부재(1)를 투과하는 이물질을 포착하기 위한 보조필터부재(5)를 설치한다.The filter receptor is formed so as to be able to see the trapped state of the foreign matter by the filter member 1, and between the filter member 1 and the exhaust port 6, the filter member 1 whose filtration capacity is reduced by trapping the foreign matter. An auxiliary filter member 5 for capturing foreign matter that penetrates is installed.
Description
본 발명은 클린룸용 배기청정장치에 관한 것이며, 더 자세히는, 공기중의 미소립자나 유분등의 이물질의 존재가, 한정된 청정도 레벨 이하로 유지되고 있는 클린룸에 있어서, 상기 클린룸 내로의 배기를 가능하게 하기 위해서 사용되는 클린룸용 배기청정장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust cleaning apparatus for a clean room, and more particularly, to a clean room in which the presence of foreign particles such as fine particles and oil in the air is maintained at or below a limited cleanliness level. An exhaust purifying device for a clean room used to enable the same.
종래부터, 공기배관중의 미소한 진애나 유분등의 이물질을 제거하는 공기청정기는 널리 알려지고 있고, 일반적으로, 공기를 청정화하는 통형의 필터부재와, 상기 필터부재를 내부에 수용하는 필터수용체를 구비하고 있어, 상기 수용체에 있어서 송입구로부터 보내진 공기가 상기 필터부재를 통과함에 의해 여과된 뒤, 배기구로부터 배출하도록 구성되어 있다.Background Art Conventionally, air cleaners for removing foreign matters such as minute dust or oil in an air pipe are widely known. Generally, a cylindrical filter member for cleaning air and a filter receptor for accommodating the filter member therein are known. It is comprised so that the air sent from the intake port in the said container may be filtered by passing through the said filter member, and is discharged | emitted from an exhaust port.
이러한 종류의 것은, 통상, 포착된 이물질에 의해 구멍 막힘 등, 특히 유분의 포착에 있어 필터부재의 여과능력이 한계가 있음을 확인할 수 있도록 할 필요가 있는데, 예를 들면, 필터부재의 1차측과 2차측의 압력차를 검출하여 구멍 막힘을 검지하거나, 혹은, 필터부재에 유성의 착색료를 칠하여, 그 착색료가 포착된 유분의 양에 따라 점차로 상기 필터부재의 표면에 확산하는 것을 이용하는 등으로, 필터부재의 교환을 재촉했다.This kind of thing usually needs to be able to confirm that the filtering capacity of the filter member is limited in particular, such as clogging of pores by trapped foreign matters, particularly in the capture of oil. For example, By detecting the pressure difference on the secondary side and detecting the blockage, or applying an oily colorant to the filter member and gradually spreading the surface of the filter member depending on the amount of oil captured therein. Hastened to replace the member.
그러나, 상술의 공기청정기를 클린룸 안에 직접 배기하는 공기의 여과에 사용하는 경우, 필터부재의 여과능력의 저하가 상기 필터부재의 표면에 있어서 실제로 인지될 수 있게 될 때에는, 그 필터부재는 이미 여과능력의 한계를 넘어 있는 경우가 많을 뿐만아니라, 통상, 그 인지된 후에 필터부재를 교환하기 때문에, 보내진 공기 중의 이물질은, 필터부재를 교환하기 까지의 사이에, 필터부재를 투과하여 그대로 배기구로부터 배출되거나, 혹은 포착된 이물질이 다시 흩어지게 되어, 공기청정기로서 기능을 할 수 없다는 문제가 있었다. 또한, 그와 같은 상태로는, 공기중의 이물질이 여과되지 않기 때문에, 클린룸 내의 공기 청정레벨을 유지하는 것은곤란하고, 그 결과, 클린룸 내에서 사용되는 공기압기구의 배기를 클린룸 밖에 배관할 필요가 있었다.However, when the above-described air cleaner is used for filtration of air exhausted directly into a clean room, when the decrease in the filtration capacity of the filter member can be actually recognized on the surface of the filter member, the filter member is already filtered. In many cases, the filter member is often exceeded, and since the filter member is replaced after it is recognized, foreign matter in the sent air passes through the filter member and is discharged from the exhaust port as it is until the filter member is replaced. There is a problem that the foreign matters captured or captured are scattered again, and cannot function as an air cleaner. Also, in such a state, since foreign substances in the air are not filtered, it is difficult to maintain the air clean level in the clean room. As a result, the exhaust of the pneumatic mechanism used in the clean room is piped outside the clean room. I needed to.
본 발명의 기술적 과제는, 클린룸 내에서 사용되는 공기압기구의 배기를 직접 클린룸 내에 배출할 수가 있는 정도로 공기청정레벨을 높일 수 있는 클린룸용 배기청정장치를 제공하는 것에 있다.An object of the present invention is to provide an exhaust cleaning apparatus for a clean room which can raise the air cleaning level to the extent that the exhaust of the pneumatic mechanism used in the clean room can be directly discharged into the clean room.
본 발명의 더욱 구체적인 기술과제는, 필터부재의 여과능력의 저하가 인지될 수 있는 경우에, 상기 필터부재를 투과한 이물질이, 그대로 공기중에 배출되는 것을 막아, 클린룸 내의 공기청정레벨을 항상 고레벨로 유지할 수가 있는 클린룸용 배기청정장치를 제공하는 것에 있다.A more specific technical problem of the present invention is to prevent the foreign matter which has passed through the filter member from being directly discharged into the air as it can be noticed that the decrease in the filtration capacity of the filter member is always maintained, and the air cleaning level in the clean room is always at a high level. It is an object of the present invention to provide an exhaust cleaning apparatus for a clean room that can be maintained.
상기 과제를 해결하기 위해서, 본 발명은, 공기를 여과하는 통형의 필터부재와, 상기 필터부재를 내부에 수용하는 필터수용체를 구비하며, 상기 수용체에 있어서 송입구로부터 보내진 공기가 상기 필터부재를 통과함에 의해 여과된 다음, 배기구로부터 배출되도록 구성된 배기청정장치에 있어서, 상기 필터수용체를, 필터부재에 의한 이물질의 포착상태를 투시 가능하게 형성하고, 상기 필터부재와 배기구의 사이에, 이물질의 포착에 의하여 여과능력이 저하된 필터부재를 투과하는 이물질을 포착하기 위한 보조필터부재를 설치한 것을 특징으로 하는 것이다.MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is provided with the cylindrical filter member which filters air, and the filter receptor which accommodates the said filter member inside, The air sent from the inlet port in the said container passes through the said filter member. In the exhaust cleaning apparatus configured to be discharged from the exhaust port after filtration by filtering, the filter receptor is formed so as to be able to see the trapped state of the foreign matter by the filter member, and between the filter member and the exhaust port, It is characterized in that the auxiliary filter member for trapping the foreign matter passing through the filter member has reduced filterability.
상기 구성을 갖는 클린룸용 배기청정장치는, 클린룸에 있어서, 미소한 진애나 유분등의 이물질이 혼입된 공기배관을 상기 송입구에 접속하여 이물질을 제거하기 위해서 사용되는 것으로, 통상, 송입구로부터 보내진 공기는, 상기 필터부재를통과함에 의해 여과되어 이물질이 제거되고, 상기 배기구로부터 배출된다.The clean room exhaust gas cleaning device having the above-described configuration is used in the clean room to connect the air pipes in which foreign matters such as fine dust or oil are mixed to the inlet, and to remove the foreign matters. The air sent is filtered by passing through the filter member to remove foreign substances and is discharged from the exhaust port.
그리고, 이물질의 포착에 의한 상기 필터부재의 구멍 막힘에 의해서, 여과능력의 저하 또는 한계를 인지할 수가 있게 된 경우에는, 그 필터부재를 교환한다.When the filter member is able to recognize a decrease or a limit in filtration capacity due to clogging of the filter member due to the trapping of foreign matter, the filter member is replaced.
이 때, 필터부재의 여과능력이 한계상태에 도달하여, 그 상태를 인지할 수 있게 된 다음부터, 필터부재를 교환하기까지의 사이에는, 통상, 이 필터부재를 이물질이 투과하지만, 그것들의 투과된 이물질은, 상기 필터부재와 배기구와의 사이에 설치된 보조필터부재에 의해 포착된다. 이 보조필터부재는 상기 필터부재의 교환까지, 능력이 저하된 필터부재를 통과하는 이물질을 포착할 수 있는 정도의 능력이 있으면 좋다.At this time, foreign matter penetrates the filter member from the time when the filtration capability of the filter member reaches the limit state and the state can be recognized, and until the filter member is replaced, but the permeation thereof The foreign matter thus collected is captured by the auxiliary filter member provided between the filter member and the exhaust port. The auxiliary filter member may be capable of capturing foreign matter passing through the filter member whose capacity is reduced until the filter member is replaced.
따라서, 종래와 같이 필터부재를 투과한 이물질이 그대로 배기구로부터 배출되어 버리지 않기 때문에, 가령 필터부재의 여과능력이 한계에 달하여, 그것이 인지될 수 있게 된 다음에 필터부재를 교환하여도, 상기 보조필터부재의 활동에 의해 배기의 공기청정레벨은 항상 정상 유지된다.Therefore, since the foreign matter which has permeated the filter member is not discharged from the exhaust port as it is conventionally, for example, the filtration capacity of the filter member reaches its limit, and even if the filter member is replaced after the filter member can be recognized, the auxiliary filter By the action of the member, the air cleaning level of the exhaust is always kept normal.
본 발명의 클린룸용 배기청정장치에 있어서는, 상기 송입구로부터 보내진 공기를 상기 필터부재의 내측에 도입하는 유로를 설치함과 동시에, 상기 필터부재의 외측에 유출된 공기를 보조필터부재에 통과시키는 유로를 형성하여, 상기 필터부재의 내측에, 포착된 유분의 양에 따라 점차 상기 필터성부의 외표면에 삼출하는 착색료를 도포함으로써, 여과능력의 저하를 표시하는 표시수단을 형성한 것으로 하고, 또한, 상기 송입구로부터 보내진 공기의, 필터부재의 1차측의 유로와 필터부재의 2차측의 유로 사이에 있어서의 압력차를 검출하여, 상기 압력차에 근거하여여과능력의 한계상태를 표시하는 구멍막힘 검출수단을 설치한 것으로 될 수 있다.In the clean room exhaust gas purifying apparatus of the present invention, a flow path for introducing air sent from the inlet port into the filter member inside the filter member and passing the air flowing out of the filter member to the auxiliary filter member. To form a display means for indicating a decrease in filtration capacity by applying a coloring agent to the inner surface of the filter member to the outer surface of the filter portion gradually in accordance with the amount of captured oil. Detecting the pressure difference between the flow path of the primary side of the filter member and the flow path of the secondary side of the filter member of the air sent from the inlet port, and detecting the hole clogging indicating the limit state of the filtration capacity based on the pressure difference. The means may be provided.
더욱, 본 발명에 있어서는, 상기 필터수용체가, 필터부재와 통형의 보조필터부재를 상하 2단에 수용하고 있어, 송입구로부터 보내진 유체를 필터부재의 내측에서 외측으로 통과시킴과 동시에, 그 통과된 유체를, 보조필터부재의 외측에서 내측으로 통과시켜 배기구로부터 배출하는 구성을 갖는 것으로 될 수 있다.Further, in the present invention, the filter receptor accommodates the filter member and the cylindrical auxiliary filter member in two upper and lower stages, and passes the fluid sent from the inlet port from the inside of the filter member to the outside and at the same time passes through the filter member. The fluid may be configured to pass from the outside of the auxiliary filter member to the inside to be discharged from the exhaust port.
도 1은 본 발명의 클린룸용 배기청정장치의 제1실시예를 나타내는 단면도이다.1 is a cross-sectional view showing a first embodiment of an exhaust cleaning apparatus for a clean room of the present invention.
도 2는 본 발명의 동 실시예의 원근투시도이다.2 is a perspective view of the same embodiment of the present invention.
(도면의 주요 부분에 대한 부호의 설명)(Explanation of symbols for the main parts of the drawing)
1 필터부재(filter element)1 filter element
2 필터수용체2 filter receptor
3 송입구(送入口)3 Inlet
4 유로(流路)4 euros
5 보조필터부재5 auxiliary filter element
6 배기구6 air vent
도 1 및, 도 2는, 본 발명의 클린룸용 배기청정장치의 제1실시예를 나타내는 것이고, 이 실시예의 배기청정장치는, 공기를 여과하는 통형의 필터부재(1) 및 보조필터부재(5)를 필터수용체(2)의 내부에 수용하고 있고, 상기 필터수용체(2)는, 필터부재(1)를 내부에 수용하는 원통형의 필터케이스(2a)와, 상기 필터케이스 (2a)의 상단부에 착탈가능하게 장착된 필터커버(2b)를 구비하고 있다.1 and 2 show a first embodiment of an exhaust cleaning apparatus for a clean room of the present invention, and the exhaust cleaning apparatus of this embodiment includes a cylindrical filter member 1 and an auxiliary filter member 5 for filtering air. ) Is accommodated inside the filter receptor 2, and the filter receptor 2 includes a cylindrical filter case 2a for accommodating the filter member 1 therein and an upper end of the filter case 2a. A filter cover 2b detachably mounted is provided.
상기 필터수용체(2)는, 필터커버(2b)에 공기의 송입구(3)가, 한 쪽, 필터케이스(2a)의 저면에 공기의 배기구(6)가 각각 설치되어 있고, 송입구(3)로부터 보내진 공기가, 필터커버(2b) 내의 유로(4)를 통하여 상기 필터부재(1)를 통과함에 의해 여과된 다음, 보조필터부재(5)를 통하여 배기구(6)로부터 배출되도록 구성되어 있다.In the filter receptor 2, an air inlet 3 is provided at the filter cover 2b, and an air exhaust port 6 is provided at the bottom of the filter case 2a, respectively. Is sent to pass through the filter member (1) through the flow passage (4) in the filter cover (2b), and then discharged from the exhaust port (6) through the auxiliary filter member (5). .
또한, 상기 필터케이스(2a)는, 내부의 필터부재(1)를 투시할 수 있도록, 투명한 소재로 형성되어 있고, 상기 필터부재(1)의 이물질의 포착상태등을 눈으로 직접 확인 할 수 있다.In addition, the filter case 2a is formed of a transparent material so as to see through the filter member 1 therein, and it is possible to directly check the trapped state of the foreign matter of the filter member 1. .
상기 필터부재(1)는, 유분을 흡착하기 쉬운 활성탄소섬유를 포함한 부직포제의 여과재를 플리츠형상으로 구부린 것을 통형인 내층여과재(1A)를 형성하고, 그 외주에 글래스 화이버 섬유를 포함한 부직포제의 여과재(1B)를 붙여, 전체로 하여 2층 구조의 중공원통형으로 형성한 것으로, 오일 미스트등의 유분은 주로 활성탄소섬유를 포함하는 내층 여과재(1A)에 의해, 진애는 주로 글래스 화이버 섬유를 포함하는 여과재(1B)에 의해 각각 포착된다.The filter member (1) forms a cylindrical inner layer filter material (1A) by bending a nonwoven fabric filter material containing activated carbon fibers, which is easy to adsorb oil, into a pleated form, and has a nonwoven fabric containing glass fiber fibers on its outer periphery. The filter material 1B was attached and formed into a hollow-cylindrical cylinder of a two-layer structure as a whole. The oil, such as oil mist, is mainly composed of the inner layer filter material 1A containing activated carbon fibers, and the dust mainly contains glass fiber fibers. Each is captured by the filter medium 1B.
이 필터부재(1)의 상단에는, 상기필터커버(2b)의 유로(4) 내와 필터부재(1)의 중공부분(8) 내를 기밀적으로 연결하는 장착부재(11)가 설치되어있고, 한 쪽, 하 단에는, 필터부재(1)의 중공부분(8)을 기밀적으로 폐쇄하는 폐쇄부재(12)가 설치되어 있고, 이것에 의해, 유로(4)로부터의 공기가 중공부분(8)을 통하여 필터부재(1)의 내측에서 외측을 향해 통과하도록 되어 잇다.At the upper end of the filter member 1, there is provided a mounting member 11 for hermetically connecting the inside of the flow path 4 of the filter cover 2b and the inside of the hollow portion 8 of the filter member 1, On one side, the lower end is provided with a closing member 12 for hermetically closing the hollow portion 8 of the filter member 1, whereby air from the flow path 4 8) passes through from the inside of the filter member 1 toward the outside.
또한, 상기 필터부재(1)의 내벽에는, 여과능력의 저하 또는 한계를 표시하는 표시수단으로서, 포착된 유분의 양에 따라 점차 필터부재(1)의 외표면에 삼출하는 유성의 착색료를 도포하고 있다.In addition, the inner wall of the filter member 1 is coated with an oily colorant which exudes to the outer surface of the filter member 1 gradually as a display means for indicating a decrease or a limit of filtration capacity. have.
상기 표시수단은, 배출된 공기중의 유분의 필터부재(1)에 포착되고, 그 포착된 유분의 양의 증대에 따라 그 유분 중에 확산한 착색료가 외측의 여과재(1B)에 삼출되어 그 표면에 도달하여, 상기 표면이 여과능력의 저하 또는 한계를 표시하는 것이다.The display means is captured by the filter member 1 of the oil in the discharged air, and as the amount of the captured oil increases, the colorant diffused in the oil is exuded to the outer filter medium 1B and is applied to the surface thereof. As such, the surface indicates a drop or limit in filtration capacity.
또한, 상기 필터커버(2b) 상에는, 필터부재(1)의 1차측의 유로(4)와, 필터부재의 2차측의 유로(14) 사이에 있어서의 공기의 압력차를 검출하여, 그 압력차에 근거하여, 상기 필터부재(1)의 여과능력의 한계상태, 즉 이물질에 의한 구멍 막힘을 검지하고 표시하는 구멍막힘 검출수단(인디케이터)(15)를 설치하고 있다.Moreover, on the said filter cover 2b, the pressure difference of the air between the flow path 4 of the primary side of the filter member 1, and the flow path 14 of the secondary side of the filter member is detected, and the pressure difference Based on this, the hole blocking detection means (indicator) 15 which detects and displays the limit state of the filtration capacity of the filter member 1, that is, the hole blocking by foreign matter, is provided.
이 인디케이터는, 두부(頭部)를 투명한 합성수지로 이루어지는 투시커버 (15a)에 의하여 구성하고, 그 내부에 승강가능하게 끼워진 착색표시자(15b)를 스프링(15c)에 의해 아래 쪽으로의 몰입상태로 힘을 가하고, 이 표시자(15b)의 상하부 사이의 공기 유로를 차단하여, 그 하부를 상기 1차측의 유로(4)에 관통시키고, 그 상부를 상기 2차측의 유로(14)에 관통시킨 것이다. 따라서, 필터부재(1)의 구멍 막힘에 의해 1차측 유로(4)의 압력이 상승하면, 착색표시자(15b)가 투시커버 (15a) 내에 돌출하고, 그 투시에 의해 구멍막힘을 검지할 수가 있다.The indicator is configured by a see-through cover (15a) made of transparent synthetic resin, and the head is immersed downwardly by a spring (15c) with a colored indicator (15b) fitted therein. A force was applied to block the air flow path between the upper and lower portions of the indicator 15b, and the lower portion thereof penetrated through the primary flow passage 4, and the upper portion penetrated through the secondary flow passage 14. . Therefore, when the pressure of the primary side flow path 4 rises due to the blockage of the filter member 1, the colored indicator 15b protrudes into the see-through cover 15a, and the hole blockage can be detected by the see-through. have.
또, 이 구멍막힘 검출수단(15)은 반드시 설치할 필요는 없지만, 상기 유성 착색료에 의한 표시수단과 동시에, 혹은 상기 표시수단에 대해, 여과능력의 한계를 검출하기 위해서 설치할 수 있다.In addition, the hole clogging detecting means 15 is not necessarily provided, but may be provided at the same time as the display means of the oily colorant or for detecting the limit of the filtration capacity.
상기 폐쇄부재(12)의 하면측에는, 상기 필터부재(1)에 있어서 여과재(1b)와 같은 소재로 중공원통형에 형성된 보조필터부재(5)가 설치되고, 이것들의 필터부재 (1)와 보조필터부재(5)와는, 폐쇄부재(12)를 사이에 두고 전체로서 상하 2단으로 분리되어 구성되어 있다.On the lower surface side of the closing member 12, an auxiliary filter member 5 formed in the hollow-cylindrical cylinder of the same material as the filter material 1b in the filter member 1 is provided, and these filter member 1 and the auxiliary filter are provided. The member 5 is comprised so that it may be divided into two upper and lower stages as a whole with the closing member 12 interposed.
상기 보조필터부재(5)는, 이 보조필터부재(5)의 중공부분(9)의 상단이 상기 폐쇄부재(12)에 의해 기밀적으로 폐쇄되어 있고, 한 쪽, 중공부분(9)의 하단은 개방되어, 배기구(6)에 직접 통해 있다. 그리고, 상기 필터부재(1)를 통과한 공기는, 보조필터부재(5)를 외측으로부터 내측을 향하여 통과된 다음, 중공부분(9)을 통해 배기구(6)로부터 외부에 배출된다.In the auxiliary filter member 5, the upper end of the hollow portion 9 of the auxiliary filter member 5 is hermetically closed by the closing member 12, and the lower end of the hollow portion 9 is closed. Is open and is directly through the exhaust port 6. Then, the air passing through the filter member 1 passes the auxiliary filter member 5 from the outside toward the inside, and then is discharged from the exhaust port 6 to the outside through the hollow portion 9.
또, 상기 보조필터부재(5)의 하단에는, 필터부재(1)를 통과한 공기가, 필터케이스(2a)와 보조필터부재(5)의 하단과의 사이로부터 새어나올 수가 있어, 보조필터부재(5)를 통과하지 않고 직접 배기구(6)로부터 배출되지 않도록, 그 부분을 기밀적으로 폐쇄하는 고리모양의 밀봉부재(13)가 설치되어 있다.In addition, at the lower end of the auxiliary filter member 5, air passing through the filter member 1 can leak out between the filter case 2a and the lower end of the auxiliary filter member 5, and thus, the auxiliary filter member. A ring-shaped sealing member 13 is provided to hermetically close the part so as not to pass through (5) and be discharged directly from the exhaust port 6.
상기 구성을 갖는 클린룸용 배기청정장치는, 클린룸에 있어서, 미소한 진애나 유분등의 이물질이 혼입된 공기배관을 상기 송입구(3)에 접속하여 사용하는 것으로, 송입구(3)로부터 보내진 공기는, 유로(4)를 통해 필터부재(1)의 중공부분(8)에 도달하고, 필터부재(1)를 통과함에 의해 여과되어 이물질이 제거되고, 그 청정된 공기는 그대로 보조필터부재(5)를 통과하여 배기구(6)로부터 배출된다.The clean room exhaust gas cleaning device having the above-described configuration is used in a clean room by connecting an air pipe in which foreign matters such as fine dust and oil are mixed to the inlet port 3 to be used. The air reaches the hollow portion 8 of the filter member 1 through the flow path 4, and is filtered by passing through the filter member 1 to remove foreign matters, and the purified air is left as it is. It passes through 5) and is discharged | emitted from the exhaust port 6.
그리고, 이물질의 포착에 의해서 상기 필터부재(1)의 여과능력이 현저히 저하되거나, 혹은 여과능력의 한계상태에 이르게 되고, 그 상태가 표시수단 또는 구멍 막힘 검출수단(15)에 의해 표시되어, 그 표시가 투명한 필터케이스(2a) 혹은 투시커버(15a)를 통해서 인지가능한 상태로 되어 필터부재(1)의 교환이 재촉된다.The trapping of foreign matter causes the filtration capacity of the filter member 1 to be remarkably lowered or reaches a limit state of the filtration capacity. The state is displayed by the display means or the hole clogging detecting means 15, The display becomes recognizable through the transparent filter case 2a or the see-through cover 15a, so that the filter member 1 is promptly replaced.
이 때, 필터부재(1)의 여과능력이 한계상태에 달해, 그 상태가 표시수단에 의해 인지되어서, 상기 필터부재(1)를 교환하기 까지의 사이에는, 통상, 상기 필터부재(1)를 이물질이 투과하지만, 그것들의 투과된 이물질은, 필터부재(1)와 배기구 (6) 사이에 설치된 보조필터부재(5)에 의해 포착된다.At this time, the filtration capacity of the filter member 1 reaches a limit state, and the state is recognized by the display means, and the filter member 1 is normally removed until the filter member 1 is replaced. Although foreign matter permeates, these permeate foreign matters are captured by the auxiliary filter member 5 provided between the filter member 1 and the exhaust port 6.
따라서, 종래와 같이 필터부재(1)를 투과한 이물질은 그대로 배기구(6)로부터 배출되어 버리지않기 때문에, 가령 필터부재(1)의 여과능력이 한계에 달한후 상기 필터부재(1)를 교환하더라도, 상기 보조필터부재(5)의 활동에 의해 배기의 공기청정레벨은 항상 정상으로 유지된다.Therefore, the foreign matter that has passed through the filter member 1 is not discharged from the exhaust port 6 as it is conventionally, so that even if the filter member 1 is replaced after the filtration capacity of the filter member 1 reaches its limit, By the activity of the auxiliary filter member 5, the air cleaning level of the exhaust is always kept normal.
더구나, 필터부재(1)의 여과능력의 한계가, 착색료에 의한 표시수단에 의해 색깔로 인지될 수 있고, 혹은 필터부재(1)의 1차측과 2차측과의 압력차에 근거하는 표시로 검지 가능하기 때문에, 필터부재(1)의 교환시기를 대단히 간단히 확인 할 수 있어, 교환작업등의 대응을 신속히 행할 수 있다.Moreover, the limit of the filtration capacity of the filter member 1 can be perceived as color by the display means by the colorant, or is detected by the display based on the pressure difference between the primary side and the secondary side of the filter member 1. Since it is possible, the replacement time of the filter member 1 can be confirmed very easily, and the correspondence of replacement work etc. can be performed quickly.
이 실시예로서는, 상기 필터케이스(2a)의 내부를 투시가능하도록, 필터케이스(2a) 전체를 투명 소재로 형성하고 있지만, 이것에 한하지 않고, 필터케이스에 투명한 소창문을 설치하여, 그 소창문으로부터 내부의 상태를 투시할 수 있도록 해도 좋다.In this embodiment, the entire filter case 2a is formed of a transparent material so that the inside of the filter case 2a can be viewed, but not limited to this, a transparent small window is provided in the filter case, and the small window is You may be able to see the internal state from the inside.
상술한 것과 같이, 본 발명의 클린룸용 배기청정장치에 의하면, 필터부재와 배기구 사이에 보조필터부재를 설치하고, 필터부재의 여과능력이 한계에 달해, 그 능력의 한계를 인지할 수 있게 된 다음부터 필터부재를 교환하기 까지의 사이에, 상기 필터부재를 이물질이 투과하더라도, 그것들의 투과된 이물질은, 보조필터부재에 의해 포착되기 때문에, 종래와 같이 필터부재를 투과한 이물질이 그대로 배기구로부터 배출되어 버리지 않게 되고, 이것에 의해, 배기의 공기청정레벨은 항상 고레벨로 유지된다.As described above, according to the clean room exhaust cleaning apparatus of the present invention, an auxiliary filter member is provided between the filter member and the exhaust port, and the filtration capacity of the filter member reaches a limit, so that the limit of the capacity can be recognized. Even if foreign matter penetrates the filter member from the time of replacing the filter member to the filter member, the foreign substance that has penetrated is captured by the auxiliary filter member, so that the foreign substance which has passed through the filter member is discharged from the exhaust port as it is. In this way, the air cleaning level of the exhaust gas is always maintained at a high level.
Claims (4)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP98-241886 | 1998-08-27 | ||
| JP24188698A JP3863673B2 (en) | 1998-08-27 | 1998-08-27 | Clean room exhaust purification system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20000017544A KR20000017544A (en) | 2000-03-25 |
| KR100335323B1 true KR100335323B1 (en) | 2002-05-06 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019990035541A KR100335323B1 (en) | 1998-08-27 | 1999-08-26 | Exhaust cleaning apparatus for clean room |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3863673B2 (en) |
| KR (1) | KR100335323B1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005211886A (en) * | 2004-02-02 | 2005-08-11 | Ckd Corp | Exhaust gas cleaner for clean room |
| JP2012115810A (en) * | 2010-12-03 | 2012-06-21 | Kurita Water Ind Ltd | System for trapping fine particle in ultra-pure water, and method for measuring fine particle concentration |
| KR101684126B1 (en) * | 2015-06-12 | 2016-12-08 | 현대자동차주식회사 | Fuel filter for vehicle |
| CN107261683A (en) * | 2017-07-28 | 2017-10-20 | 安徽科浦环保科技有限公司 | A kind of filter cartridge construction of clarifier |
| CN112303797B (en) * | 2020-10-14 | 2021-12-03 | 深圳市高度标识设计有限公司 | Intelligent environmental protection oxygen supply equipment of building |
-
1998
- 1998-08-27 JP JP24188698A patent/JP3863673B2/en not_active Expired - Fee Related
-
1999
- 1999-08-26 KR KR1019990035541A patent/KR100335323B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20000017544A (en) | 2000-03-25 |
| JP2000070636A (en) | 2000-03-07 |
| JP3863673B2 (en) | 2006-12-27 |
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