KR100328588B1 - Encapsulation dispenser of manufacturing process semiconductor - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a fixed quantity dispensing apparatus for semiconductor manufacturing, which can discharge the resin covering the semiconductor components in a quantitative manner in order to prevent damage to the semiconductor components provided in the lead frame in the semiconductor manufacturing process. The invention comprises a frame (10); A drive motor 20 fastened and fixed to the frame 10; An axial type coupling 30 coupled to the drive motor 20 in an axial direction; A screw 40 connected axially by coupling between the coupling 30 and the straight protrusion and the groove; As the insertion space 51 for accommodating the screw 40 and the inflow hole 52 to allow the resin to flow into one side of the insertion space 51 and the insertion hole 53 through the lower end of the insertion space to both sides An insertion block 50 made up of; A storage tank is stored therein, and a fixed amount of resin is fastened and fixed to the frame 10 to supply a predetermined amount of resin to the inlet hole 52 of the insertion block 50 by compressed air supplied through a pump ( 60); The valve mechanism 72 inserted into the insertion hole 53 of the insertion block 50 by the withdrawal operation of the piston 71a of the straight cylinder 71 in which one end of the frame 10 is axially rotatable. Flow control means (70) for rotating the plunger (72b) of the) to open and close the flow path through which the resin passes; And a nozzle 80 for discharging the resin guided through the flow path control means 70 to the outside.

Description

Quantitative dispensing apparatus in semiconductor manufacturing process

The present invention relates to a quantitative discharging device for semiconductor manufacturing, which can discharge the resin covering the semiconductor parts in a quantitative manner in order to prevent damage to the semiconductor parts provided in the lead frame in the semiconductor manufacturing process.

In general, in a semiconductor manufacturing process, a lead wire is connected to a lead frame in which a very complex circuit is printed, and a gold wire for inputting and outputting power to the semiconductor chip.

Such semiconductor chips or gold wires can be easily damaged by contact from the outside. In particular, since a large number of semiconductor chips are attached to the lead frame, a large amount of semiconductors may be defectively fabricated at one time.

Therefore, in order to protect the semiconductor chip or gold wire attached to the lead frame at the same time, the surrounding area is coated with resin such as silicon, epoxy and phenol. The equipment for supplying such a resin is called a metered discharge device. .

The fixed-quantity discharging device is largely composed of a drive unit, a power transmission unit, a transfer unit, and a nozzle unit. The drive unit usually uses a servo motor, and the power transfer unit functions to transfer driving force from the motor.

And the conveying portion is configured as the insertion block and the screw to rotate the screw by the driving force transmitted through the power transmission portion to force the resin is pressed, the nozzle portion is to act to cause the resin conveyed by the conveying portion is discharged on the lead frame.

At this time, the transfer part is formed at the bottom of the insertion block into which the screw is inserted to form a small diameter flow path communicating with the nozzle portion, one end of the flow path is opened and closed by the lowering of the screw to interrupt the supply of the resin.

In order to elevate the screw for opening and closing the flow path, the power transmission unit is provided with a screw lift device such as an electromagnetic clutch at the same time.

In other words, the power transmission unit has a constitutive feature that allows the transmission of the rotational driving force by the motor and the lifting and lowering of the screw at the same time.

Meanwhile, the resin is introduced into one side of the insertion block into which the screw is inserted, thereby forcing the resin to be forced into the nozzle part by the rotational movement of the screw so that a certain amount of resin can be discharged through the nozzle part.

The most important action in such a metered discharge device is to ensure that an appropriate amount of resin is supplied to each semiconductor component of the lead frame.

However, in the current fixed quantity discharging device, the discharge amount is controlled by controlling the resin to raise and lower the flow path by the lifting and lowering action of the screw. There is a disadvantage that the structure of the power transmission unit is very complicated.

In addition, when the flow path from the insertion block in which the screw is accommodated to the nozzle part is opened and closed by the lifting and lowering action of the screw to control the discharge amount of the resin, the resin, which is already remaining inside the flow path, is forced when the screw is lowered to block the flow path. At the tip end of the nozzle part, some resin is always pushed out by a small amount to the outside, or the resin in the flow path and the nozzle part is discharged excessively by ejecting all of the resin in the flow path and nozzle part by the resin's own weight, so that the amount of resin applied to cover the semiconductor part is uneven. There is a problem that will result in poor manufacturing of the semiconductor.

In order to compensate for the disadvantages with the above problems, the present invention has a main object to reduce the defect manufacturing of the semiconductor to more accurately control the discharge amount of the resin.

In another aspect, the present invention is to prevent the contact between the screw and the insertion block for accommodating the screw to reduce wear and to extend the service life.

1 is an overall structural diagram of a metered discharge device according to the present invention,

Figure 2 is an enlarged perspective view of the main portion showing the coupling structure of the coupling and screw of the present invention,

Figure 3 is a side cross-sectional view showing the configuration of the insertion block according to the present invention,

4 is a structural diagram of a flow path control means according to the present invention;

5 is an operational structure diagram of the flow path control means according to the invention,

Figure 6 is an enlarged cross-sectional view of the main portion showing an intermittent state of the flow path according to the present invention.

<Description of the symbols for the main parts of the drawings>

10 frame 20 drive motor

30 coupling 40 screw

50: insertion block 51: insertion space

52: inlet hole 53: insertion hole

60: storage tank 70: flow path control means

71 straight cylinder 72 valve mechanism

80: nozzle

The present invention as a means for achieving the above object

A frame;

A drive motor fastened and fixed to the frame;

An axial type coupling coupled to the drive motor in an axial direction;

A screw which is rotationally driven by the drive motor while being axially connected by coupling between the coupling and the straight protrusion and the groove;

An insertion space is formed to accommodate the screw, and one side of the insertion space forms an inflow hole through which resin is introduced, and a lower end portion of the insertion space communicates with the insertion hole penetrating both sides. An insertion block;

A storage tank fixed to the frame and having a predetermined amount of resin stored therein and supplying a predetermined amount of resin to the insertion space of the insertion block by compressed air supplied through a pump;

Flow passage control means for opening and closing the flow path through the resin by rotating the plunger of the valve mechanism inserted into the insertion hole of the insertion block by the draw-out operation of the piston of the straight cylinder, one end of which is fixed to the frame to enable the shaft rotation. ; And

A nozzle for discharging the resin guided through the flow path control means to the outside;

It is the most prominent feature to be provided as.

The above-described configuration will be described in more detail with reference to the accompanying drawings.

Figure 1 is a side cross-sectional view showing a metered discharge device according to the present invention, the present invention is largely stored in the frame 10, the drive motor 20, the coupling 30, the screw 40 and the insertion block 50 It consists of the tank 60, the interruption means 70, and the nozzle 80. As shown in FIG.

Frame 10 is a fixing member for supporting the discharge device of the present invention.

The drive motor 20 uses the same servo motor as the power source and is fastened and fixed to the frame 10.

The driving force generated in the driving motor 20 is transmitted to the screw 40 through the coupling 30 of the shaft type.

That is, one end of the coupling 30 is coupled to the driving shaft of the driving motor 20 so that the other end of the coupling 30 may be engaged with the upper end of the screw 40, as shown in FIG. 2. While moving in the horizontal direction is to be connected as a coupling structure of the removable straight groove and the projection.

On the other hand, the coupling 30 is formed so that the handle portion 31 for manually rotating the coupling 30 by forcibly rotating the outer diameter of a portion of the outer peripheral surface.

The screw 40 which is coupled to the coupling 30 to receive the driving force is formed so that the spiral groove is formed on the outer circumferential surface, and the protection block 41 having a larger outer diameter is integrally formed on the outer circumferential surface of the upper portion as a material having strong durability. To be axially coupled.

And the insertion block 50 is formed such that the insertion space 51 having a diameter slightly larger than the outer diameter of the screw 40 for receiving the electric screw 40 as shown in Figure 3, the insertion space 51 The lower end of the insertion hole 53 is formed so as to penetrate both sides, it is to be fixed to the frame 10 of the coupling 30 bottom.

In addition, the inlet 52 is formed in one side of the insertion space 51 of the insertion block 50 so that the resin can be smoothly supplied to the spiral groove of the screw 40 accommodated in the insertion space 51.

The outer circumferential surface formed with the spiral groove of the screw 40 accommodated in the insertion space 51 allows the non-frictional state to be maintained while maintaining a fine gap with the inner diameter of the insertion space 51, and only the upper side of the portion where the spiral groove is formed. The protective block 41 coupled to each other is finely rubbed with the inner diameter of the insertion space 51 to maintain a constant rotational concentricity.

The resin supplied to the insertion block 50 allows a certain amount to be stored in the storage tank 60 fastened and fixed to the frame 10 at one side of the drive motor 20, and a pump (not shown) in the storage tank 60. As the compressed air generated by the gas is introduced, the pressure inside the storage tank 60 is increased to force the resin into the insertion space 51 through the inlet 52 of the insertion block 50.

On the other hand, the storage tank 60 is more preferably attached to the sensor 61 to check the storage capacity of the resin, that is, the capacitance.

The resin supplied from the storage tank 60 to the insertion space 51 of the insertion block 50 is forcibly supplied to the lower portion of the insertion space 51 by the screw 40. The resin supplied in this way is the flow path control means 70. Discharge is interrupted by this.

That is, the flow path control means 70 is composed of a straight cylinder 71 and a valve mechanism 72 as shown in FIG. 4, and the straight cylinder 71 has a frame 10 at one side of the drive motor 20 at an upper end thereof. The axial rotation is fixed to the valve mechanism 72, and the valve mechanism 72 is inserted into the insertion hole 53 which penetrates the lower portion of the insertion block 50 in the horizontal direction.

The valve mechanism 72 is composed of a sleeve 72a having a rectangular inner circumference and a circular inner diameter and a plunger 72b rotatably inserted into the sleeve 72a. The piston end of the straight cylinder 71 and the link 73 is to be connected.

In the sleeve 72a, a hole is formed on the same vertical line as the flow path 53 with the same diameter, and the through hole penetrating the outer diameter is also formed in the plunger 72b with the same diameter.

One end of the link 73 connecting the piston 71a of the straight cylinder 71 and the plunger 72b of the valve mechanism 72 is coupled to the end of the plunger 72b, and the other end of the straight cylinder 71 is closed. The plunger 72b is rotatable by the draw-out action of the piston 71a while being rotatably coupled to the end of the piston 71a.

Meanwhile, the nozzle 80 is provided at the bottom of the insertion block 50.

The nozzle 80 is configured to discharge the resin guided through the valve mechanism 72 inserted into the insertion hole 53 to the outside, so that the insertion block 50 can be assembled with a body solution.

Referring to the operation of the present invention according to the above configuration is as follows.

In the present invention, when the screw 30 is rotated while the coupling 30 is interlocked by the driving of the drive motor 20, the storage tank 60 simultaneously inserts the block so that a constant pressure is formed therein by the driving of the pump. The resin is discharged smoothly while the resin is smoothly supplied to the insertion space 51 in which the screw 40 is accommodated through the inflow path 52 of the 50.

The resin supplied to the insertion space 51 is forcibly guided to the lower portion of the insertion space 51 by the driving of the screw 40, and the resin thus introduced always passes the valve mechanism 72 of the flow path control means 70. do.

At this time, since the through hole formed in the plunger 72b is in communication with the hole formed in the sleeve 72a, the valve mechanism 72 of the flow path control means 70 eventually receives the resin induced in the insertion space 51. A certain amount is discharged to the lead frame through the sleeve 72a and the plunger 72b, thereby covering the semiconductor chip and the gold wire, which are semiconductor components on the lead frame, to protect it from the outside.

On the other hand, after the appropriate amount of resin is discharged, the straight cylinder 71 is driven again to rotate the plunger 72b at a predetermined angle as shown in FIG. 5, and at this time, the through hole formed in the plunger 72b as shown in FIG. 6. The resin is no longer able to flow while being displaced from the hole formed in the sleeve 72a.

In addition, immediately after the quantity of resin is discharged, the driving motor 20 is stopped with the pump supplying the compressed air to the storage tank 60, and the discharge operation is temporarily stopped while remaining in the nozzle 80. A small amount of resin will remain in that state.

That is, when the resin has a low viscosity, the resin remaining in the nozzle 80 is very small, so the weight of the resin itself does not reach the level that can be discharged from the nozzle 80, and when using a high viscosity resin, further pressing force is required. This does not exist while remaining in the nozzle 80 as it is, it is possible to prevent the defect due to the discharge of more than the appropriate amount of the resin as before.

Meanwhile, the present invention can easily separate the screw 40 accommodated in the insertion block 50 from the coupling 30, which is coupled to each other by a straight groove and a projection, as described above. You can do it.

In addition, when the capacitance check sensor is attached to the storage tank 60 in the present invention, it is possible to accurately check the supply pressure of the resin supplied from the storage tank 60 to the insertion block 50, in case of such an abnormal supply pressure. Immediately while the driving of the present invention is stopped, it is possible to prevent the occurrence of a large amount of defects.

As described above, the present invention enables accurate control of the discharge amount of the resin by the improved flow path control means 70, thereby significantly reducing the defect rate caused by the excessive discharge of the resin, and simultaneously disassembling and assembling from each component. In particular, it is possible to easily perform maintenance and cleaning in the insertion block 50, thereby improving the durability, thereby providing an advantage of extending the service life more.

Claims (8)

A frame 10; A drive motor 20 fastened and fixed to the frame 10; An axial type coupling 30 coupled to the drive motor 20 in an axial direction; A screw 40 which is rotationally driven by the drive motor 20 while being axially connected by coupling between the coupling 30 and the straight protrusion and the groove; An insertion space 51 is formed to accommodate the screw 40, and an inflow hole 52 through which resin is introduced is formed at one side of the insertion space 51, and a lower end of the insertion space penetrates both sides. An insertion block 50 which is connected and fixed to the frame 10 by communicating with the insertion hole 53; A storage tank is stored therein, and a fixed amount of resin is fastened and fixed to the frame 10 to supply a predetermined amount of resin to the inlet hole 52 of the insertion block 50 by compressed air supplied through a pump ( 60); The valve mechanism 72 inserted into the insertion hole 53 of the insertion block 50 by the withdrawal operation of the piston 71a of the straight cylinder 71 in which one end of the frame 10 is axially rotatable. Flow control means (70) for rotating the plunger (72b) of the) to open and close the flow path through which the resin passes; And A nozzle 80 for discharging the resin guided through the flow path control means 70 to the outside; A fixed-quantity ejection apparatus in a semiconductor manufacturing process made as a The method of claim 1, wherein the coupling 30 A fixed-quantity discharging device in a semiconductor manufacturing process in which a handle portion 31 is formed integrally with a portion of the outer circumferential surface to allow the coupling 30 to be manually rotated while the outer diameter is greatly expanded. The method of claim 1, wherein the screw (40) A fixed quantity discharging device in a semiconductor manufacturing process in which a protective block 41 having a larger outer diameter is integrally axially coupled to a top outer peripheral surface as a material having strong durability. The method of claim 1, wherein the insertion space 51 of the insertion block 50 is It is formed with a finer inner diameter than the screw 40, the upper portion of the inner diameter of the discharge block in the semiconductor manufacturing process, the protective block 41 integrally coupled to the screw (40) is configured in surface contact. The method of claim 1, wherein the storage tank 60 A fixed-quantity ejection apparatus in a semiconductor manufacturing process to which a sensor 61 for checking a capacitance of a resin is attached. 2. The valve mechanism (72) of claim 1, wherein the valve mechanism (72) of the flow path control means (70) is A fixed-quantity ejection apparatus in a semiconductor manufacturing process comprising a sleeve (72a) having a rectangular outer circumferential surface and a plunger (72b) rotatably inserted into the sleeve (72a). 7. The fixed-quantity ejection apparatus according to claim 6, wherein vertical holes communicating with the flow path (53) are formed in the sleeve (72a) and the plunger (72b), respectively. 2. A fixed-quantity discharge device in a semiconductor manufacturing process according to claim 1, wherein said flow path control means (70) connects an end of a piston (71A) of said straight cylinder (71) and an end of a plunger (72b) by a link.