KR100286589B1 - Ito paste composition - Google Patents
Ito paste composition Download PDFInfo
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- KR100286589B1 KR100286589B1 KR1019990011044A KR19990011044A KR100286589B1 KR 100286589 B1 KR100286589 B1 KR 100286589B1 KR 1019990011044 A KR1019990011044 A KR 1019990011044A KR 19990011044 A KR19990011044 A KR 19990011044A KR 100286589 B1 KR100286589 B1 KR 100286589B1
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- South Korea
- Prior art keywords
- ito
- paste composition
- printing
- weight
- cps
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 15
- 238000007639 printing Methods 0.000 claims abstract description 14
- 239000002904 solvent Substances 0.000 claims abstract description 14
- 239000002952 polymeric resin Substances 0.000 claims abstract description 10
- 239000000843 powder Substances 0.000 claims abstract description 10
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 10
- 239000007787 solid Substances 0.000 claims abstract description 7
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 claims description 4
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical group CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 claims description 4
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical group CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 4
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 claims description 4
- 229940116411 terpineol Drugs 0.000 claims description 4
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 229920003174 cellulose-based polymer Polymers 0.000 claims description 3
- 239000002562 thickening agent Substances 0.000 claims description 3
- 238000009835 boiling Methods 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 5
- 238000007650 screen-printing Methods 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4867—Applying pastes or inks, e.g. screen printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
- H01L23/49883—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials the conductive materials containing organic materials or pastes, e.g. for thick films
Abstract
본 발명은 고비점 및 고점도를 가지는 인쇄용 ITO 페이스트 조성물에 관한 것으로서, 고형분인 ITO분말의 함량이 10 내지 80중량%이고, 고분자 수지를 포함하는 용매의 함량이 20 내지 90 중량%이며, 점도가 1만cps 내지 10만cps인 것을 특징으로 하며, 스크린 프린팅(screen printing)에 의하여 간단하고 용이하게 유리기판 등에 전극을 형성할 수 있다.The present invention relates to a printing ITO paste composition having a high boiling point and high viscosity, the content of the solid ITO powder is 10 to 80% by weight, the content of the solvent containing the polymer resin is 20 to 90% by weight, the viscosity is 1 It is characterized in that from 10,000 cps to 100,000 cps, by the screen printing (screen printing) it is possible to simply and easily form the electrode on the glass substrate.
Description
[산업상 이용 분야][Industrial use]
본 발명은 ITO 페이스트 조성물에 관한 것으로서, 더욱 상세하게는, 스크린 프린팅(screen printing)에 의하여 전극을 형성할 수 있는 인쇄용 ITO 페이스트 조성물에 관한 것이다.The present invention relates to an ITO paste composition, and more particularly, to a printing ITO paste composition capable of forming an electrode by screen printing.
[종래 기술][Prior art]
인듐틴옥사이드(Indium tin oxide: ITO)는 In2O3에 주석(Sn)이 5-10중량% 도핑된 투명 도전성 물질로서, 플라스마 디스플레이 패널(Plasma display panel: PDP), 전계 방출 디스플레이(Field emission display: FED), 액정표시장치(Liquid Crystal Display Panel) 등과 같은 평판 표시장치에서 투명전극을 형성하는데 주로 사용된다. 이와 같이 평판 표시 장치에 ITO 막을 형성하기 위하여는 주로 스퍼터링 방법으로 유리의 전면에 ITO를 코팅한 다음, 노광, 건조 및 현상시키는 포토리소그래피 방법을 통하여 ITO 전극을 패터닝하는 방법이 주로 사용되고있다.Indium tin oxide (ITO) is a transparent conductive material doped with 5-10% by weight of tin (Sn) in In 2 O 3 , and is a plasma display panel (PDP) and a field emission display. display: mainly used to form a transparent electrode in a flat panel display such as FED, Liquid Crystal Display Panel (Liquid Crystal Display Panel). As described above, in order to form an ITO film on a flat panel display device, a method of patterning an ITO electrode through a photolithography method in which an ITO is coated on the entire surface of the glass by sputtering, followed by exposure, drying, and development is mainly used.
또한, 브라운관의 정전기를 방지하기 위하여 ITO 막을 브라운관의 외장에 코팅하기도 하는데, 이때에는 ITO분말을 알콜 같은 저비점의 용매에 녹인 현탁액을 스핀-코팅법을 사용하여 브라운관의 외장에 도포하고, 회전 건조시켜 ITO 막을 형성한다. 그러나 이와 같은 종래의 ITO 페이스트 조성물은 저점도의 스핀-코팅용 용액으로서 알콜 같은 저비점의 용매를 사용할 뿐만 아니라 점도 및 고형분의 양이 작아서 인쇄법을 사용하여 ITO 전극 패턴을 형성할 수 없다는 단점이 있다.In addition, in order to prevent static electricity of the CRT, an ITO film is coated on the CRT. In this case, a suspension obtained by dissolving ITO powder in a solvent having a low boiling point such as alcohol is applied to the CRT by using a spin-coating method, followed by rotation drying. To form an ITO film. However, such a conventional ITO paste composition has a disadvantage of not only using a low boiling point solvent such as alcohol as a low viscosity spin-coating solution, but also having a small viscosity and solid content so that the ITO electrode pattern cannot be formed using a printing method. .
따라서 본 발명은 고비점 및 고점도를 가지는 인쇄용 ITO 페이스트 조성물을 제공하는 것을 목적으로 한다. 본 발명의 또 다른 목적은 간단하고 경제적인 방법으로 ITO 막을 형성할 수 있는 인쇄용 ITO 페이스트 조성물을 제공하는 것이다.Therefore, an object of the present invention is to provide a printing ITO paste composition having high boiling point and high viscosity. It is another object of the present invention to provide a printing ITO paste composition capable of forming an ITO film in a simple and economical way.
상기와 같은 본 발명의 목적을 달성하기 위하여, 본 발명은 고형분인 ITO 분말의 함량이 10 내지 80중량%이고, 고분자 수지를 포함하는 용매의 함량이 20 내지 90 중량%이며, 점도가 1만cps 내지 10만cps인 것을 특징으로 하는 인쇄용 ITO 페이스트 조성물을 제공하며, 이때 상기 고분자 수지는 셀룰로오스계 고분자 또는 아크릴 수지이며, 상기 용매는 부틸카비톨 아세테이트 또는 부틸카비톨인 것이 바람직하다.In order to achieve the object of the present invention as described above, the present invention is a solid content of ITO powder is 10 to 80% by weight, the content of the solvent containing a polymer resin is 20 to 90% by weight, the viscosity is 10,000 cps It provides a printing ITO paste composition, characterized in that from 10 to 100 cps, wherein the polymer resin is a cellulose-based polymer or an acrylic resin, the solvent is preferably butyl carbitol acetate or butyl carbitol.
이하, 본 발명을 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in detail.
본 발명의 인쇄용 ITO 페이스트 조성물은 스크린 프린팅(screen printing) 방법에 의하여 유리기판 등에 전극을 형성할 수 있는 인쇄용 ITO 페이스트 조성물로서, 고형분인 ITO분말의 함량이 10 내지 80중량%이고, 고분자 수지를 포함하는 용매의 함량이 20 내지 90 중량%이며, 점도가 1만cps 내지 10만cps인 것을 특징으로 한다. 여기서 상기 ITO분말의 함량이 80중량%를 초과하면, 점도가 10만cps를 초과하게 되어 인쇄가 안돼는 문제점이 있으며, 상기 ITO분말의 함량이 10중량% 미만이면, 점도가 1만cps 미만으로 저하되어 인쇄가 안돼는 문제점이 있다.The printing ITO paste composition of the present invention is a printing ITO paste composition capable of forming electrodes on a glass substrate or the like by a screen printing method, wherein the content of ITO powder, which is a solid, is 10 to 80% by weight, and includes a polymer resin. The content of the solvent is 20 to 90% by weight, the viscosity is characterized in that 10,000cps to 100,000cps. If the content of the ITO powder exceeds 80% by weight, the viscosity exceeds 100,000 cps there is a problem that can not be printed, if the content of the ITO powder is less than 10% by weight, the viscosity is lowered to less than 10,000 cps There is a problem that can not be printed.
상기 ITO 입자는 형성된 ITO막의 투명성 및 도전성을 유지하는 한도에서 그 특성에 크게 제한을 두지는 않으나, 평균 입경이 1μm이하이고, 주석(Sn)의 함량이 전체 ITO입자에 대하여 5 내지 10중량%이면 바람직하다.The ITO particles are not particularly limited in their properties within the limits of maintaining the transparency and conductivity of the formed ITO film, but if the average particle diameter is less than 1μm, the tin (Sn) content of 5 to 10% by weight relative to the total ITO particles desirable.
상기 고분자 수지를 포함하는 용매는 에틸셀룰로오스와 같은 셀룰로오스계 고분자 또는 아크릴 수지를 부틸카비톨 아세테이트, 부틸카비톨과 같은 용매에 용해시켜 제조하며, 이때 필요에 따라 터피네올(Terpineol)과 같은 증점제를 더욱 혼합하여 비이클의 형태로 제조하는 것이 바람직하다. 여기서 상기 고분자 수지와 용매의 혼합비는 중량비로 1 : 10 내지 20인 것이 바람직하며, 상기 용매가 이 범위보다 작게 사용될 경우에는 소성후에 pin-hole이 발생하는 문제점이 있고, 이 범위보다 다량 사용될 경우에는 paste의 인쇄성이 나쁜 문제점이 있다. 이와 같이 제조된 고비점의 고분자 수지를 포함하는 용매에 저저항의 ITO 분말을 전체 페이스트에 대하여 10 내지 80중량%가 되도록 혼합하여 인쇄에 적합한 ITO 페이스트를 제조한다.The solvent containing the polymer resin is prepared by dissolving a cellulose-based polymer such as ethyl cellulose or an acrylic resin in a solvent such as butyl carbitol acetate and butyl carbitol, where necessary thickener such as terpineol It is preferable to further mix and prepare in the form of a vehicle. Herein, the mixing ratio of the polymer resin and the solvent is preferably in a weight ratio of 1:10 to 20, and when the solvent is used smaller than this range, there is a problem that a pin-hole occurs after firing, and when used in a larger amount than this range. There is a problem in paste printability. A low-resistance ITO powder is mixed in a solvent containing the high boiling point polymer resin to be 10 to 80% by weight based on the whole paste to prepare an ITO paste suitable for printing.
이하, 본 발명의 실시예를 기재한다. 그러나 하기 실시예는 본 발명을 예시하는 것일 뿐이며 본 발명을 한정하는 것은 아니다.Hereinafter, the Example of this invention is described. However, the following examples are merely to illustrate the invention and not to limit the invention.
[실시예 1]Example 1
부틸카비톨 아세테이트 70그램과 터피네올(Terpineol) 20그램을 혼합하고, 이 용액을 가열하면서 에틸셀룰로오스 10그램을 녹여서 비이클을 제조하였다. 상기 비이클 70그램에 ITO분말(일본 미쓰비시 제품, 평균직경 0.2μm) 30그램을 혼합하고, 잘 교반하여 페이스트를 제조한다. 이 경우에 고형 분량은 30중량%이고 점도는 3만cps였다. 상기 페이스트를 유리 기판 위에 스크린 인쇄하고 열처리하여 원하는 모양으로 투명전극을 형성하였으며, 상기 열처리된 투명전극의 투광성은 50%이고 막두께는 2μm였으며, 면저항은 300Ω/?였다.A vehicle was prepared by mixing 70 grams of butyl carbitol acetate and 20 grams of terpineol, and dissolving 10 grams of ethyl cellulose while heating the solution. To 70 grams of the vehicle, 30 grams of ITO powder (manufactured by Mitsubishi, Japan, having an average diameter of 0.2 µm) was mixed, and stirred well to prepare a paste. In this case, the solid amount was 30% by weight and the viscosity was 30,000 cps. The paste was screen printed onto a glass substrate and heat-treated to form a transparent electrode in a desired shape. The light-transmittance of the heat-treated transparent electrode was 50%, the film thickness was 2 μm, and the sheet resistance was 300? / ?.
[실시예 2]Example 2
부틸카비톨 70그램과 터피네올(Terpineol) 15그램을 혼합하고, 이 용액을 가열하면서 아크릴 15그램을 녹여서 비이클을 제조하였다. 상기 비이클 60그램에 ITO분말(한국 대주정밀화학제품, 평균직경 0.1μm) 40그램을 혼합하고, 잘 교반하여 페이스트를 제조한다. 이 경우에 고형분량은 40중량%이고 점도는 5만cps였다. 상기 페이스트를 유리기판에 스크린 인쇄하고 열처리하여 원하는 모양으로 투명전극을 형성하였으며, 상기 열처리된 투명전극의 투광성은 70%이고 막두께는 3μm였으며, 면저항은 200Ω/?였다.A vehicle was prepared by mixing 70 grams of butyl carbitol and 15 grams of terpineol and dissolving 15 grams of acrylic while heating the solution. 40 grams of ITO powder (Korea Daeju Fine Chemicals Co., Ltd., 0.1μm average diameter) was mixed with 60 grams of the vehicle, and stirred well to prepare a paste. In this case, the solid content was 40% by weight and the viscosity was 50,000 cps. The paste was screen printed onto a glass substrate and subjected to heat treatment to form a transparent electrode in a desired shape. The light transmittance of the heat-treated transparent electrode was 70%, the film thickness was 3 μm, and the sheet resistance was 200? / ?.
본 발명의 인쇄용 ITO 페이스트를 사용하여 스크린 프린팅 방법으로 ITO전극을 형성하게 되면 고가의 스퍼터(sputter)와 클린룸(cleen room) 설비를 설치하지 않아도 되며, 복잡한 포토리소그래피를 거치지 않아도 되므로, 초기 시설 투자비가 절감될 뿐만 아니라, 페이스트를 회수하여 계속 사용할 수 있으므로 양산 재료비가 대폭 절감되고, 공정 인덱스도 줄어드는 장점이 있다.When the ITO electrode is formed by the screen printing method using the printing ITO paste of the present invention, it is not necessary to install expensive sputter and clean room equipment, and do not go through complicated photolithography. In addition to reducing the cost, the paste can be recovered and used continuously, which significantly reduces the mass production material cost and reduces the process index.
Claims (4)
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KR1019990011044A KR100286589B1 (en) | 1999-03-30 | 1999-03-30 | Ito paste composition |
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KR1019990011044A KR100286589B1 (en) | 1999-03-30 | 1999-03-30 | Ito paste composition |
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KR20000061756A KR20000061756A (en) | 2000-10-25 |
KR100286589B1 true KR100286589B1 (en) | 2001-03-15 |
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