KR100280006B1 - Lens characteristic inspection device - Google Patents

Abstract

The present invention relates to an inspection apparatus for lens characteristics to enable measurement in an in-line state, and to maintain an optical path in a prism to reduce an error caused by an external environment. ,

A laser unit for emitting light from a light source; A lens holder unit for forming a pin hole for increasing the purity of the light emitted from the laser unit and supporting the condensing lens and the measuring lens; A dove prism unit which inverts the image formed by the light passing through the measurement lens of the lens holder unit up, down, left and right, and rotates the image according to a user's manipulation; A prism drive unit for dividing the light passing through the dove prism unit to generate an interference fringe by lateral shearing and phase shifting; And a camera unit which acquires the interference fringe generated by the prism drive unit as image information and analyzes the shape and transmission wavefront of the measurement lens.

Description

Lens characteristic inspection device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens characteristic inspection apparatus, and more particularly, to a lens characteristic inspection apparatus which enables to accurately inspect a characteristic of a spherical or aspherical lens applied to an optical system regardless of an external environment.

Recently, according to the trend of miniaturization and high quality of optical products, various types of optical lenses have been developed and applied to products. Accordingly, there is a need to accurately inspect the characteristics of the optical lens.

However, at present, there is no lens characteristic inspection device that can measure the performance of aspherical lens of a single product regardless of the surrounding environment. Therefore, a comprehensive evaluation is conducted by sampling inspection during mass production of parts and assembly of products. .

Due to the reasons described above, product defects frequently occur, and when a defect occurs, difficulties in solving the root of the problem occur.

1 is a diagram illustrating a method for measuring a spherical lens in a non-contact manner using an interferometer according to the prior art.

As shown in FIG. 1, after the test lens is disposed between the light transmission unit and the reference reflecting surface for measuring the characteristics of the lens, the light emitted from the light generating unit is a lens, the reference reflecting surface, When the incident light enters the light generating part through the path of the lens, the incident light is analyzed to analyze the shape of the lens and the degree of the transmission wavefront. In this case, the light generating unit and the reference reflecting surface may have a flat or spherical shape.

On the other hand, when the lens has an aspherical shape, as shown in FIG. 2A, a large amount of deviation is generated between the emitted light and the incident light due to the aspheric amount, thereby analyzing the shape of the lens and the transmitted wavefront. You won't be able to. Therefore, the measurement of the aspherical surface by using a null lens as shown in Fig. 2 (B) in the prior art, to make a measurement by making a wavefront deformed by the aspherical surface or a spherical wave. At this time, the null lens should also be produced as an aspherical surface by a complex calculation formula using a computer, and since this null lens is also an aspherical surface, there is a problem in making a standard (master lens) for accurate measurement.

When the null lens is used as described above, a null lens must be manufactured separately according to the shape of the lens to be measured. However, since the null lens is expensive, a problem of increasing the production price of the product occurs.

For the above reasons, a method of configuring and measuring an optical system that can correct an error due to an aspherical surface has been proposed.

Currently, pick-up optics used to indirectly measure aspherical lenses include laser diodes, cover glass, collimate lenses, objective lenses, And a disk, a mirror, and the like. At this time, the aspherical surface of the lens is designed so that the aberration of the optical system becomes "0".

However, the measurement of the aspherical surface using the pickup optical system described above shows a sensitive response to changes in the external environment such as vibration or contamination since the optical path is exposed to the outside, and the five or more factors of each component It is unavoidable to make a jig with an adjustment function to be adjusted. At this time, since a different structure must be manufactured according to the model of the lens to be measured, there is a problem in that the construction of the general-purpose measuring instrument becomes impossible. In addition, according to the characteristics of the aspherical surface of the lens to be measured, a problem arises in that a separate expensive aspherical reference lens must be manufactured.

As a result, in the case of inspecting the lens characteristics according to the prior art, it is necessary to manufacture expensive master lenses, thereby increasing the production price, and in order to change the shape of the lens, the master lens or the reference lens has to be different, so the setting and measurement of the device There is a problem that the time for the increase.

In addition, since most components are exposed to the outside during measurement using the pick-up optical system, the surrounding environment affects the measurement result, which causes a problem of degrading the accuracy of the result.

The present invention has been made to solve the above problems of the prior art, an object of the present invention is to provide a lens characteristic inspection apparatus that can measure the aspherical lens without a master lens.

Another object of the present invention is to provide a lens characteristic inspection apparatus that can improve the accuracy of the measurement results by not being affected by the external environment.

1 is a view for explaining a spherical measurement according to the prior art,

2 is a view for explaining an aspherical surface measurement according to the prior art,

3 is a view showing the configuration of a lens characteristic inspection apparatus according to the present invention;

4 is a view showing the operation of the dove prism unit according to the present invention;

5 is a view showing the operation of the prism drive unit according to the present invention.

<Description of Symbols for Main Parts of Drawings>

10: base 11: laser part

12 mirror 12 lens holder

14: dove prism section 15: prism drive section

16 camera portion 17 column

According to a feature of the present invention for achieving the above object, a laser unit for emitting light from a light source; A lens holder unit for forming a pin hole for increasing the purity of the light emitted from the laser unit and supporting the condensing lens and the measuring lens; A dove prism unit which inverts the image formed by the light passing through the measurement lens of the lens holder unit up, down, left and right, and rotates the image according to a user's manipulation; A prism drive unit for dividing the light passing through the dove prism unit to generate an interference fringe by lateral shearing and phase shifting; And a camera unit which acquires the interference fringe generated by the prism drive unit as image information and analyzes the shape and transmission wavefront of the measurement lens.

At this time, according to an additional feature of the present invention, the prism drive unit is composed of a plurality of prisms bonded with an index matching oil, and as one prism moves left and right, the other prism moves up and down, and thus Phase shift is implemented to generate interference fringes.

Hereinafter, a preferred embodiment of a lens characteristic inspection apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

3 is a view showing the configuration of a lens characteristic inspection apparatus using a biaxial shear interferometer according to the present invention.

Referring to FIG. 3, reference numeral 10 denotes a base for supporting the system, 11 denotes a laser portion for emitting light from a light source, 12 denotes a mirror for changing a path of light emitted from the laser portion 11, 13 denotes a lens holder portion for supporting a condensing lens and a measuring lens. In this case, a pin hole is formed in the lens holder 13 to increase light purity.

In addition, reference numeral 14 denotes a dove prism portion for inverting the image formed by light passing through the lens holder portion 13 up, down, left and right, and rotating the image according to a user's operation, and 15 denotes the dove prism portion 14. A prism drive unit for generating an interference fringe by layer rolling and phase shifting by dividing the light passing through it, and 16 denotes the shape and transmission of the measurement lens by acquiring the interference fringe generated by the prism drive unit 15 as image information. A CCD camera for analyzing the wavefront is shown, and 17 is a column for adjusting the position of the prism drive section 15.

As shown in FIG. 4, the dove prism unit 14 inverts the image in front, rear, left, and right. When the prism is rotated about an axis parallel to the side surface, the dove prism unit 14 has a property of rotating the image at twice the angle at which the prism is rotated. have. As a result, in the non-rotated state (degree 0), the image is inverted up, down, left, and right to obtain wavefront slope information in the X-axis direction. In addition, in a state of rotating 45 degrees (degree 45), the image is rotated 90 degrees to obtain wavefront slope information in the Y-axis direction.

In addition, the prism drive unit 15 is composed of four prisms P1, P2, P3, and P4, as shown in FIG. 5, and the prism drive unit 15 of the second prism P2 by the operation of the piezoelectric actuator PZT. The first prism P1 is moved up and down according to the left and right movement to implement phase shifting. At this time, the third prism (P3) is bonded to the reference plate is maintained in a stopped state and becomes a reference of relative motion. Further, a screw for adjusting lateral shearing is attached to the fourth prism P4.

Each prism P1, P2, P3, P4 is bonded using an index matching oil having the same index as the material of the prism to minimize the amount of optical error during operation. Thus, each prism is capable of relative movement by sliding due to fluid lubrication of the index matching oil.

Referring to the operation of the present invention having the configuration as described above in detail.

Light is emitted from the light source of the laser unit 11 and reflected by the mirror 12 to the lens holder unit 13. At this time, the light passes through the pinhole and the condenser lens to form a spherical wave, and the user is fixed to the lens holder 13 to be incident to the measurement lens to be measured. If the measurement lens is a complete lens, the wavefront of the light passing through the measurement lens forms a plane wave. However, in the case of a general lens, it is distorted due to the aberration included in the lens.

The distorted wavefront penetrates the dove prism portion 14 and is incident to the second prism P2 of the prism drive portion 15. At this time, since the inclined surface of the third prism P3 is light-divided coating treatment, the light is split by partially passing the light and reflecting the light.

As a result, the light incident on the second prism P2 is divided by the light split coating of the third prism P3 and is incident on the first prism P1 and the fourth prism P4. At this time, when the fourth prism P4 is moved downward, an interference fringe due to layer rolling is generated on the exit side of the prism drive unit 15.

In order to accurately measure the interference fringe formed by the above operation, the phase shifting technique of the optical phase interference method is introduced. In order to apply the phase shifting technique, one of two interfering wavefronts must be minutely changed. At this time, the second prism P2 is pushed in the X direction at regular intervals using a piezoelectric modulator (PZT) for a minute change.

According to the operation of the piezoelectric actuator PZT, the second prism P2 moves in the Y direction on the inclined surface of the third prism P3. At this time, the second prism P2 performs a wedge action to move the first prism P1 upward. When the first prism P1 is constrained to be mechanically movable only in the vertical direction, a phase shift occurs while the optical path passing through the first prism P1 is changed.

In order to properly restore and evaluate the asymmetry of the measurement lens to be measured, biaxial lamella should be implemented, which is realized by dove prism.

Since the dove prism portion 14 has the property of rotating the image according to the rotation of the prism while inverting the image in front, rear, left and right, the wavefront entering the interferometer by rotating the prism 45 degrees in order to realize biaxial laminar rolling is 90 degrees. Rotate Accordingly, wavefront slope information in the X-axis and Y-axis directions can be obtained.

The interference fringe formed by the above operation is acquired by the CCD camera 16, and the slope information obtained by the operation of the dove prism unit 14 is integrated to restore the wavefront.

As described above, the lens characteristic inspection apparatus of the present invention comprises a prism drive unit consisting of four prisms so that the optical path is maintained in the prism during the phase shift operation, and the measurement can be performed in an in-line state. There is an effect to reduce the error caused by the environment.

In addition, since the second prism is moved by using a piezoelectric actuator, stable driving accuracy can be maintained, and by using a dove prism to obtain an image rotated by 90 degrees with 45 degrees of rotation, the rotational motion can be minimized to improve the stability of the operation. It can be effective.

In addition, since the prism layer interferometer is used, there is no need to manufacture an expensive master lens, and by measuring the lens unit alone, there is an effect of reducing an error generated in the interlocked measurement with other components.

In addition, since the wavefront of the measurement lens itself is restored by layer-rolling, the wavefront can be measured simultaneously regardless of the presence or absence of an optical system.

Claims (2)

A laser unit for emitting light from a light source; A lens holder unit for forming a pin hole for increasing the purity of the light emitted from the laser unit and supporting the condensing lens and the measuring lens; A dove prism unit which inverts the image formed by the light passing through the measurement lens of the lens holder unit up, down, left and right, and rotates the image according to a user's manipulation; A prism drive unit for dividing the light passing through the dove prism unit to generate an interference fringe by lateral shearing and phase shifting; And And a camera unit which acquires the interference fringe generated by the prism drive unit as image information and analyzes the shape and transmission wavefront of the measurement lens. The method of claim 1, The prism drive unit is composed of a plurality of prisms bonded with index matching oils, and as one prism moves left and right, the other prism moves up and down to realize layer shear and phase shift to generate an interference fringe. Lens characteristic inspection device characterized in that.