KR100278639B1 - Optical integration device and method using a single flat plate and manufacturing method of the optical integration device - Google Patents

Abstract

The present invention relates to a light-integrating device and a method of manufacturing the device and a light-integrating method of integrating the three colors of red, blue, and green separated by light separation into one by a specially designed mirror structure. It has a structure to integrate. An example of the use of this system is the image projection method that independently modulates the light by a three-channel acoustic optical modulator that operates according to the image signal in each color, and projects the modulated red, green, and blue monochrome images on the screen. It is a device that can be used for the optical integration device, or also for the optical integration of color scanners and color copiers.

The optical integration device according to the present invention comprises: two or more incident lights having different wavelengths and incident at a first angle with respect to the vertical direction of the incident surface at equal intervals; An anti-reflective coating film for transmitting only the light of the first wavelength among the incident light without reflection; A broadband high reflection mirror for first reflecting light at a first wavelength transmitted from the anti-reflective coating film at a second angle different from the first angle with respect to the vertical direction of the reflection surface; Transmitting only the light of the second wavelength different from the first wavelength of the incident light and reflecting light of the other wavelength and secondly reflecting the light of the first reflected first wavelength at the second angle A dichroic mirror for forming a composite light by mixing light of a second wavelength and light of the second reflected first wavelength; A broadband anti-reflective coating film for transmitting the reflected light without reflection; And a medium through which the light transmitted from the anti-reflection coating film and the dichroic mirror and the light reflected from the broadband high reflection coating film and the dichroic mirror travel.

In the light integration method according to the present invention, three light beams each having a red wavelength, a green wavelength, and a blue wavelength are irradiated with light of a first wavelength among incident light incident in parallel at a first angle with respect to the vertical direction of the incident surface. Transmitting without reflection into the medium at the first angle;

Firstly reflecting the transmitted light of the first wavelength into a medium at a second angle different from the first angle; Only the light of the second wavelength different from the first wavelength of the incident light is transmitted into the medium at the first angle, and the light of the other wavelength is reflected and the light of the first reflected first wavelength is transmitted to the second wavelength light. Making a first composite light by secondary reflection at the second angle at the point of transmission; Third reflecting the first synthetic light into the medium at the second angle; Only the light of the third wavelength different from the first and second wavelengths of the incident light is transmitted into the medium at the first angle and reflects the light of the other wavelength, and at the same time, the third reflected first synthesized light is reflected. Making a second composite light by quaternary reflection at the second angle at the point where three wavelength light is transmitted; And transmitting the second synthetic light out of the medium without reflection.

The manufacturing method of the optical integration device according to the present invention has a thickness t and a refractive index nG without reflection on light of a first wavelength incident at a first angle from a light source to a portion of one surface on a flat substrate having excellent flatness on both surfaces. Forming an anti-reflective coating film for permeation into the substrate; A first broadband high reflection mirror for first reflecting light at a first wavelength transmitted from the non-reflective coating film at a second angle different from the first angle to a portion of the surface opposite to the surface on which the non-reflective coating film is formed; Forming a; Transmitting only light of a second wavelength different from the first wavelength into a medium and reflecting the other wavelength, and simultaneously reflecting light reflected from the first broadband high reflection mirror to the second angle at a transmission point of the second wavelength; Forming a first dichroic mirror adjacent to the antireflective coating on the same side of the substrate on which the antireflective coating is formed so as to be secondarily reflected into the furnace medium to produce the first synthetic light; Neighboring the first broadband high reflection mirror on the same side on a substrate on which the first broadband high reflection coating film is formed to third reflect the first synthetic light reflected from the first dichroic mirror into the medium at the second angle; Forming a second wideband high reflection mirror to effect; Only light of a third wavelength different from the first and second wavelengths is transmitted into the medium and reflected at other wavelengths, while at the transmission point of the third wavelength, the third reflected light from the second broadband high reflection mirror is transmitted. A second dike to be adjacent to the first dichroic mirror on the same side on the substrate on which the anti-reflective coating and the first dichroic mirror are formed to be quaternally reflected into the medium at the second angle to produce a second synthetic light Forming a row mirror; And forming a broadband antireflective coating film adjacent to the second broadband high reflection mirror on the same side on the substrate on which the first and second broadband high reflection mirrors are formed to transmit the second synthetic light out of the medium without reflection. It is characterized by.

Description

Optical integration device and method using a single flat plate and manufacturing method of the optical integration device

The present invention relates to a light-integrating device and a method of manufacturing the device and a light-integrating method of integrating the three colors of red, blue, and green separated by light separation into one by a specially designed mirror structure. It has a structure to integrate. The system uses a three-channel acoustic-optic modulator that operates in accordance with an image signal in each color to independently modulate the light, and is used in an image projection method for projecting modulated red, green, and blue monochrome images onto a screen. It is a device that can be used for optical integration of integrated devices, color scanners and color copiers.

Exemplary conventional light integration means has integrated colors using individual elements such as prisms and dichroic mirrors as shown in FIG. 3. This made it difficult to improve optical efficiency and align light. In addition, in the case of using the color integration element in the conventional laser projection display device, the system has a problem that the size is very complicated and large. And since the system is very large, it is not easy to commercialize it. Therefore, nowadays, the trend of simplifying a large-sized system into a small system is a trend.

The present invention was devised to solve the above problems, and integrated three colors (red, green, blue) using a single color integration flat plate element, which is smaller and cheaper than conventional light integration systems. It is characterized by providing a device and a light integration method and a method of manufacturing the light integration device.

1 is a schematic configuration diagram of a light integrated hybrid dichroic mirror using a flat plate of the present invention;

2 is the size of the light integrated hybrid dichroic mirror using the flat plate of the present invention

3 is a schematic configuration diagram of a conventional light integration means;

The optical integration device according to the present invention has a different wavelength ( λ _1, λ _2, λ ₃ And the first angle with respect to the vertical direction of the incident surface at equal intervals θ ₀ At least two incident light incident on the first incident light and a first wavelength of the incident light ( λ ₁ Antireflective coating film 10 for transmitting only the light of the non-reflective coating, and a first wavelength transmitted from the antireflective coating film λ ₁ And a broadband high reflection mirror 11 for primary reflection at a second angle different from the first angle with respect to the vertical direction of the reflection surface with respect to the light of) and only light having a second wavelength different from the first wavelength of the incident light. Reflects light of a different wavelength, and simultaneously reflects light of the first reflected first wavelength at the second angle so that light of the transmitted second wavelength and the second reflected first wavelength are reflected. A dichroic mirror 12 for mixing light to form synthetic light, a broadband anti-reflective coating film 14 for transmitting without reflection to the synthetic light, the non-reflective coating film and a second dichroic mirror ( 13 transmitted from the third wavelength ( λ ₃ ) And light reflected from the broadband high reflection coating film ( λ _1, λ ₂ ) Is a light integration device, characterized in that comprises a medium in which the light reflected by the second dichroic mirror travels together.

In particular, the thickness of the medium is the point where the light of the first wavelength reflected by the broadband high reflection mirror is secondary reflected by the dichroic mirror and the second wavelength transmitted into the medium by the dichroic mirror. The antireflection coating layer and the dichroic mirror are arranged to be parallel to the broadband high reflection mirror and the broadband antireflection coating layer by the medium.

As an embodiment of the present invention, the optical integration device according to the present invention in the case where the incident light is three lights each having a red wavelength, a green wavelength, and a blue wavelength has a wavelength of red, a green wavelength, and a blue wavelength. Incident light in which each of the three light beams is incident in parallel at a first angle with respect to the vertical direction of the incident surface; and an anti-reflective coating film which transmits into the medium at the first angle without reflection of the light of the first wavelength of the incident light; A broadband high reflection mirror which first reflects the transmitted light of the first wavelength into a medium at a second angle different from the first angle; and the light of the incident light into the medium of only the light having a second wavelength different from the first wavelength; Transmits at a first angle and reflects light of a different wavelength, and at the same time, reflects light of the first reflected first wavelength at the second angle at the point where the second wavelength light is transmitted. A first dichroic mirror that produces a first composite light, and a broadband high reflection mirror that thirdly reflects the first synthetic light into the medium at the second angle; and the first and second wavelengths of the incident light; Only light of another third wavelength is transmitted into the medium at the first angle and reflects light of other wavelengths, and at the same time the third reflected first synthetic light is transmitted at the second angle at the point where the third wavelength light is transmitted. A second dichroic mirror which makes a second synthetic light by quadratic reflection; and a broadband anti-reflective coating which transmits the second synthetic light out of the medium without reflection; and the transmitted light and the first reflected light of the first wavelength, and the first composite A light integrating device comprising a medium through which light and a second synthetic light travel.

In the light integration method according to the present invention, three light beams each having a red wavelength, a green wavelength, and a blue wavelength are irradiated with light of a first wavelength among incident light incident in parallel at a first angle with respect to the vertical direction of the incident surface. Transmitting the light at the first angle into the medium without reflection; and firstly reflecting the light of the transmitted first wavelength into the medium at a second angle different from the first angle; and the first wavelength of the incident light; Only the light of the second wavelength is transmitted into the medium at the first angle and reflects the light of the other wavelength, and the light of the first reflected first wavelength is transmitted at the point where the light of the second wavelength is transmitted. Making a first composite light by secondly reflecting at an angle; and thirdly reflecting the first synthetic light into a medium at the second angle; and different from the first and second wavelengths of the incident light Only light of three wavelengths is transmitted into the medium at the first angle and reflects light of other wavelengths and at the same time the third reflected first synthetic light is fourth order at the second angle at the point where the third wavelength light is transmitted. Making a second synthetic light by reflecting the light; and transmitting the second synthetic light out of the medium without reflection.

In particular, the first reflected light of the first wavelength can be accurately reflected at the transmission point of the second wavelength light, and the third reflected first synthetic light can be accurately reflected at the transmission point of the third wavelength. To adjust the thickness or both of the first angle or medium.

On the other hand, the method of manufacturing the optical integration device according to the present invention, the thickness t, the refractive index n _G Forming a non-reflective coating film for transmitting into the substrate without reflection of light of a first wavelength incident at a first angle from a light source on a portion of one surface on a flat substrate having excellent flatness on both sides; A first broadband high reflection mirror is formed on a portion of the substrate opposite to the surface on which the reflective coating film is formed to first reflect the light of the first wavelength transmitted from the non-reflective coating film at a second angle different from the first angle. And transmitting only the light of the second wavelength different from the first wavelength into the medium and reflecting the other wavelength, while simultaneously transmitting the light reflected primarily from the first broadband high reflection mirror at the transmission point of the second wavelength. The anti-reflection on the same side of the substrate on which the anti-reflective coating film is formed to be secondly reflected into the medium at the second angle to produce the first synthetic light Forming a first dichroic mirror to be adjacent to the yarn coating film; and the first broadband high reflection to third reflect the first synthetic light reflected from the first dichroic mirror into the medium at the second angle; Forming a second broadband high reflection mirror to be adjacent to the first broadband high reflection mirror on the same side of the substrate on which the coating film is formed; and transmitting only light of the first wavelength and the third wavelength different from the second wavelength into the medium; While reflecting to other wavelengths, the third reflected light from the second broadband high reflection mirror is quaternally reflected into the medium at the second angle at the transmission point of the third wavelength to produce the second composite light. Forming a second dichroic mirror adjacent to the first dichroic mirror on the same surface on the substrate on which the anti-reflective coating film and the first dichroic mirror are formed; And broadband antireflection to neighbor the second broadband high reflection mirror on the same side on the substrate on which the first and second broadband high reflection mirrors are formed to transmit the second composite light out of the medium at the first angle without reflection. It comprises a step of forming a coating film.

That is, the present invention has a merit that the system can be compactly configured in such a way that the incident three colors are automatically integrated by focusing the above-mentioned part on one flat plate substrate 13 so that it can be supplied at low cost. . In addition, the optical alignment is not easy when each conventional dichroic mirror is used, but the above-mentioned system has the advantage of automatically aligning the light if only the flatness and parallelism of the flat plate substrate is provided.

1 is a block diagram showing the general configuration of a system for explaining a light integrated hybrid mirror using a flat plate substrate (white light transparent material) of the present invention. 1 to 10 is an antireflective coating film, 11 is a broadband high reflection coating film, 12, 13 is a dichroic mirror coating film, 14 is a broadband antireflection coating film, 15 is a flat plate substrate (white light transparent material).

Equal interval tricolor light incident in FIG. λ _1, λ _2, λ ₃ ) Is one incident angle ( θ ₀ The first wavelength passed through the non-reflective coating surface 12 and the first wavelength reflected by the broadband high reflection film 11 is integrated with the second wavelength transmitted from the dichroic mirror, and then again by the broadband high reflection mirror. The light is integrated together with a third wavelength that is reflected and transmitted by the second dichroic mirror and is integrated through the broadband antireflection mirror. The size of this system is determined by the calculation below.

In FIG. 2, the incident beams red, green, and blue ( λ _1, λ _2, λ ₃ ) Incidence angle θ ₀ The beam spacing is incident while keeping the l mm, and the refractive index of the flat plate substrate is n _1, n _2, n ₃ In this case, the difference in refractive index is so small that it is negligible in the visible light range, so that the wavelengths of the wavelengths entering the flat plate substrate are the same. Obtained by

For example, ℓ = 5 mm, θ ₀ = 30 ° The length is about 17 mm. This is about 9 times smaller than conventional 15 Cm in length when using existing individual optical elements.

As described above, the present invention is simpler in structure and smaller in size than the conventional light integration unit (FIG. 3), and the three colors are automatically integrated to facilitate configuration and use. Therefore, according to the present invention, it is possible to display a large screen by directly projecting an image on a screen with a miniaturized optical system, and is very effective for miniaturizing a system integrating light such as a light integrated part of a color printer.

As described above, the present invention is advantageous in mass production and miniaturization at low cost by exhibiting the same performance as a conventional optical system with a miniaturized light integration structure. In particular, the present invention can achieve a very large effect in providing a large amount of color integration system at a low cost with a very compact structure.

Claims (8)

Two or more incident lights having different wavelengths and incident at first angles with respect to the vertical direction of the incident surface at equal intervals; An anti-reflective coating film for transmitting only the light of the first wavelength among the incident light without reflection; A broadband high reflection mirror for first reflecting light at a first wavelength transmitted from the anti-reflective coating film at a second angle different from the first angle with respect to the vertical direction of the reflection surface; Transmitting only the light of the second wavelength different from the first wavelength of the incident light and reflecting light of the other wavelength and secondly reflecting the light of the first reflected first wavelength at the second angle A dichroic mirror for forming a composite light by mixing light of a second wavelength and light of the second reflected first wavelength; A broadband anti-reflective coating film for transmitting the reflected light without reflection; And Light using a single flat plate, characterized in that it comprises a medium through which the light transmitted from the anti-reflective coating film and the dichroic mirror and the light reflected from the broadband high reflection coating film and the dichroic mirror proceeds. Integrated device. 2. The medium of claim 1, wherein the thickness of the medium is at a point where light of a first wavelength reflected primarily by the broadband high reflection mirror is second reflected by the dichroic mirror and into the medium by the dichroic mirror. An optical integration apparatus using a single flat plate, characterized in that it has a predetermined thickness so as to coincide with the transmission point of the second wavelength to be transmitted. The optical integration apparatus using a single flat plate according to claim 2, wherein the anti-reflective coating film and the dichroic mirror are arranged in parallel with the broadband high reflection mirror and the broadband anti-reflection coating film by the medium. The incident light of claim 2 or 3, further comprising: incident light in which three lights each having a red wavelength, a green wavelength, and a blue wavelength are incident in parallel at a first angle with respect to the vertical direction of the incident surface; An anti-reflective coating film which transmits into the medium at the first angle without reflection of light of the first wavelength of the incident light; A broadband high reflection mirror that first reflects the transmitted light of the first wavelength into a medium at a second angle different from the first angle; Only the light of the second wavelength different from the first wavelength of the incident light is transmitted into the medium at the first angle, and the light of the other wavelength is reflected and the light of the first reflected first wavelength is transmitted to the second wavelength light. A first dichroic mirror which makes a first composite light by second reflecting at said second angle at said transmitted point; A wideband high reflection mirror which third reflects the first synthetic light into the medium at the second angle; Only the light of the third wavelength different from the first wavelength and the second wavelength of the incident light is transmitted through the first angle into the medium and reflects light of the other wavelength, and at the same time, the third reflected first synthetic light is reflected. A second dichroic mirror which makes a second composite light by quaternary reflection at the second angle at the point where wavelength light is transmitted; A broadband anti-reflective coating film for transmitting the second synthetic light out of the medium without reflection; And And a medium through which the transmitted light of the first wavelength, the first reflected light, the first synthesized light, and the second synthesized light travel. Three light having red wavelength, green wavelength and blue wavelength, respectively, are incident on the first angle of the incident light in parallel with the first angle with respect to the vertical direction of the incidence plane without reflection at the first angle into the medium. Permeating; Firstly reflecting the transmitted light of the first wavelength into a medium at a second angle different from the first angle; Only the light of the second wavelength different from the first wavelength of the incident light is transmitted into the medium at the first angle, and the light of the other wavelength is reflected and the light of the first reflected first wavelength is transmitted to the second wavelength light. Making a first composite light by secondary reflection at the second angle at the point of transmission; Third reflecting the first synthetic light into the medium at the second angle; Only the light of the third wavelength different from the first and second wavelengths of the incident light is transmitted into the medium at the first angle and reflects the light of the other wavelength, and at the same time, the third reflected first synthesized light is reflected. Making a second composite light by quaternary reflection at the second angle at the point where three wavelength light is transmitted; And Transmitting the second synthetic light out of the medium without reflection, Light integration method using a single flat plate. The method of claim 5, wherein the light of the first reflected first wavelength can be accurately reflected at the transmission point of the light of the second wavelength, wherein the first reflected reflected light of the third wavelength is the transmission point of the third wavelength And adjusting the thickness or both of the first angle or the medium so as to be accurately reflected by the flat plate. Forming a non-reflective coating film for transmitting into the substrate without reflection of light of a first wavelength incident at a first angle from a light source on a portion of one surface on a flat substrate having a thickness t and a refractive index nG having excellent flatness on both sides; step; A first broadband high reflection mirror for first reflecting light at a first wavelength transmitted from the non-reflective coating film at a second angle different from the first angle to a portion of the surface opposite to the surface on which the non-reflective coating film is formed; Forming a; Transmitting only light of a second wavelength different from the first wavelength into a medium and reflecting the other wavelength, and simultaneously reflecting light reflected from the first broadband high reflection mirror to the second angle at a transmission point of the second wavelength; Forming a first dichroic mirror adjacent to the antireflective coating on the same side of the substrate on which the antireflective coating is formed so as to be secondarily reflected into the furnace medium to produce the first synthetic light; Neighboring the first broadband high reflection mirror on the same side on a substrate on which the first broadband high reflection coating film is formed to third reflect the first synthetic light reflected from the first dichroic mirror into the medium at the second angle; Forming a second wideband high reflection mirror to effect; Only light of a third wavelength different from the first and second wavelengths is transmitted into the medium and reflected at other wavelengths, while at the transmission point of the third wavelength, the third reflected light from the second broadband high reflection mirror is transmitted. A second dike to be adjacent to the first dichroic mirror on the same side on the substrate on which the anti-reflective coating and the first dichroic mirror are formed to be quaternally reflected into the medium at the second angle to produce a second synthetic light Forming a row mirror; And Forming a broadband antireflective coating film adjacent to the second broadband high reflection mirror on the same side on the substrate on which the first and second broadband high reflection mirrors are formed to transmit the second synthetic light out of the medium without reflection; The manufacturing method of the light integration apparatus using one flat plate characterized by the above-mentioned. 8. The method of manufacturing a light integration apparatus using a single flat plate according to claim 7, wherein said first and second broadband high reflection mirrors are formed in one step.