KR100257239B1 - Advanced tma and manufacturing method thereof - Google Patents

Abstract

PURPOSE: An improved thin-film micromirror array-actuated(TMA) and manufacturing method thereof are provided to drive one actuator downwards and the other actuator upwards simultaneously, thereby providing a large driving angle. CONSTITUTION: One actuator(240) contacts with one side of a mirror and the other actuator(270) contacts with the other side the mirror. The actuator(240) has a membrane(241) in the lowest layer and a top electrode(247) in the highest layer, and the actuator(270) has a bottom electrode(271) in the lowest layer and a membrane(277) in the highest layer. When an active layer(245) is deformed by the electric field generated between a bottom electrode(243) and the top electrode(247), the free end of the actuator(240) ascends in the Y direction. When an active layer(273) is deformed by the electric field generated between the bottom electrode(271) and a top electrode(275), the free end of the actuator(270) descends in the Y' direction. Therefore, a double driving angle is acquired.

Description

Improved thin film type optical path control device and manufacturing method thereof

The present invention relates to a thin-film optical path control device, and more particularly, to an improved optical path control device suitable for securing a large actuator driving angle by deforming a membrane by an electric field formed by an applied electric field to drive an actuator. It is about a method.

In general, a spatial light modulator, which is a device for projecting optical energy onto a screen, may be variously applied to optical communication, image processing, and information display devices. Such devices are classified into a direct view type image display device and a projection type image display device according to a method of projecting a light beam incident from a light source onto a screen.

At this time, an example of a direct view type image display device includes a CRT (Cathod Ray Tube), and a projection type image display device includes a liquid crystal display (hereinafter referred to as an LCD), a DMD (Deformable Mirror Device), and an AMA (Actuated Mirror). Arrays). Here, the present invention relates to the improvement of AMA which is a projection type image display apparatus.

Among the projection-type image display devices described above, LCD has a problem that it is difficult to completely planarize the screen due to its large weight and volume and high mechanical strength, which distorts the peripheral part of the image, and requires a high voltage for light emission of the phosphor by an electron beam. It was developed as an alternative technology to replace the CRT.

However, the LCD also has the advantage of operating at a low voltage, having a low power consumption and providing an image without deformation, while having a low light efficiency of 1 to 2% due to the polarization of the light beam, and the liquid crystal material therein. The problem of slow response speed still holds.

On the other hand, image display devices such as DMD, AMA, etc. have been developed to solve the above-mentioned drawbacks of LCD, and at present, AMA can obtain at least 10% or more of light efficiency, while DMD has about 5% of light efficiency. It is known to be an image display device. In addition, the AMA is not only affected by the polarity of the incident luminous flux but also does not affect the polarity of the luminous flux.

Typically, each of the actuators formed inside the AMA causes deformation in accordance with the electric field generated by the applied image signal and bias voltage, which is applied to the top of the actuator when this actuator causes deformation (i.e., when the actuator is driven). Each of the mounted mirrors is inclined in proportion to the magnitude of the electric field, and the inclined mirrors reflect the light incident from the light source (eg, R, G, B) at a predetermined angle to target the pixel targeted for display. Will be created.

At this time, piezoelectric ceramics such as PZT (Pb (Zr, Ti) O ₃ ), PLZT ((Pb, La) (Zr, Ti) O ₃ ) are used as the constituent material of the actuator for driving the respective mirrors. As the constituent material of the actuator, electrodistorted ceramics such as PMN (Pb (Mg, Nb) O ₃ ) may be used.

As described above, one example of the thin film type optical path control device having a plurality of actuators for reflecting each light incident from the light source at a predetermined angle is one of the type shown in FIG.

1 is a cross-sectional view of the above-described conventional thin film type optical path control device module. For convenience of understanding and convenience of explanation, a plurality of optical path control devices corresponding to the number of pixels of M × N (eg, 640 × 480) are provided. The cross section for only one optical path control device is shown in the AMA panel having.

Referring to FIG. 1, the conventional thin film type optical path adjusting apparatus includes an actuator 130 connected to a panel base 110 and a support formed on an upper portion of the drain pad 112, and includes a panel base 110 and an actuator ( An air gap 120 is formed between the 130.

In addition, although the detailed illustration in the same figure is abbreviate | omitted, MxN (M and N are integer) transistors are integrated in the drive board 111 in matrix form.

Meanwhile, the panel base 110 is formed by sequentially depositing the driving substrate 111, the protection layer 113, and the etch stop layer 115 having the drain pad 112 formed on one side thereof, and the actuator 130 is air. Patterning a portion of the sacrificial layer deposited on the etch stop layer 115 (ie, the region where the air gap 120 currently exists), that is, the upper side sacrificial layer of the drain pad 112 to form the gap 120. One side is in contact with the support region formed by the other side and the other side is parallel to the air gap 120 via the membrane 131, the lower electrode 133 formed on the upper portion of the membrane 131, the upper portion of the lower electrode 133 The strained layer 135 and the upper electrode 137 formed on the strained layer 135 and functioning as a mirror are included.

In this case, the stripe 139 having a predetermined interval to prevent diffuse reflection of light incident from a light source not shown by uniformly operating the upper electrode 137 when the actuator is driven on the upper side of the upper electrode 137 which is a common electrode. ) Is formed.

In addition, the actuator 130 penetrates through the lower electrode 133, the membrane 131, the etch stop layer 115, and the protective layer 113 from one side (side, support side) of the strained layer 135 to drive substrate 111. The distribution hole 140 is vertically formed up to the drain pad 112 in the c). In the distribution hole 140, a distribution 142 electrically connecting the lower electrode 133 and the drain pad 112 is provided. Formed.

Accordingly, the conventional optical path control apparatus having the above-described configuration applies a bias voltage to the upper electrode 137 and applies an image signal to the lower electrode 133 through the drain pad 112 and the distributor 142. At this time, an electric field is generated between the upper electrode 137 and the lower electrode 133, and the deformation layer 135 formed between the upper electrode 137 and the lower electrode 133 causes deformation by the generated electric field. Therefore, the actuator 130 is driven at a predetermined angle. At this time, the strained layer 135 is contracted in the vertical direction with respect to the generated electric field, so that the actuator 130 in the direction of the arrow Y in Fig. 1 by Q angle (for example, approximately 3 to 5 degrees) Driven.

Therefore, the light R, G or B incident from the light source is reflected at a predetermined angle through the upper portion of the upper electrode 137 functioning as a mirror through the driving of the actuator 130, and the reflected light is slit ( Will be formed as pixels on the screen.

However, in a typical typical optical path adjusting device, the driving angle Q of an actuator operated by a predetermined driving voltage (for example, 0 V to 17 V) is approximately 3 to 5 degrees, as shown in FIG. 4A as an example. It has a range of degrees, but the driving angle of this degree does not have a value sufficient to obtain good contrast. That is, when displaying an image using a conventional optical path control device, there is no limit to the image quality.

Accordingly, the present invention is to solve the above problems of the prior art, to provide an improved optical path control device that can obtain a large driving angle by simultaneously cross-drive two actuators respectively supporting both ends of the mirror in the vertical direction opposite to each other. Its purpose is to.

It is another object of the present invention to provide an improved actuator manufacturing method having a dual support structure capable of simultaneously cross-driving two actuators, each supporting both ends of a mirror, in opposing up and down directions.

According to an aspect of the present invention, there is provided a driving substrate having a drain pad formed on one side thereof, a panel base having a protective layer and an etch stop layer sequentially stacked on the driving substrate, and a support base on the panel base. An optical path adjusting device including an actuator for providing a driving angle of a mirror for reflecting incident light, wherein the optical path adjusting device includes an upper part of the drain pad through a support part on one side of the panel base where one end is exposed. One end of the actuator connected to one end of the mirror, the one end of which is connected to an upper portion of the drain pad through a support of an upper portion of the other side of the panel base, which is opposite to the free end of the one side actuator. The other actuator having the other end free is parallel to the one actuator Has a double support structure connected to the other end of the bowl, the said one actuator: the etched air gap is the panel base and parallel to the membranes, the lower electrode interposed between the barrier layer, a strained layer, and an upper electrode sequentially formed; And a distribution hole penetrating through the strain layer, the lower electrode, the membrane, the etch stop layer, and the protective layer and connected to the drain pad and having a signal applying distributor therein, wherein the other actuator includes: an etch stop layer between the etch stop layer and the etch stop layer; An air gap of the lower electrode, the strain layer, the upper electrode, and the membrane are sequentially formed in parallel with the panel base; And a distribution hole connected to the drain pad through the membrane, the deforming layer, the lower electrode, the etch stop layer, and the protective layer, the distribution hole having a distribution for signal application therein. .

According to another aspect of the present invention, there is provided a driving substrate having a drain pad formed on one side thereof, a panel base having a protective layer and an etch stop layer sequentially stacked on the driving substrate, and a support base on the panel base. A method of manufacturing an optical path control apparatus including an actuator for providing a driving angle of a mirror for reflecting incident light, the method comprising: forming a sacrificial layer having a predetermined thickness on the etch stop layer and an upper part of the drain pad. Exposing a portion of the etch stop layer by removing a portion of the sacrificial layer formed on the substrate; Stacking a membrane material on top of the exposed etch stop layer and on both sacrificial layers, and etching through patterning to form a membrane on top of a portion of the exposed etch stop layer and on top of the one sacrificial layer; Depositing a lower electrode material on top of the sacrificial layer, on top of the other part of the exposed etch stop layer, and on top of the membrane, and etching through patterning to form a bottom electrode on top of the sacrificial layer and a bottom electrode on top of the membrane step; Stacking a strain material on each of the lower electrodes and etching through patterning to form each strain layer having a predetermined thickness; Stacking upper electrode materials on top of each of the strained layers and etching through patterning to form respective upper electrodes; Stacking a membrane material on top of each top electrode and etching through patterning to form a membrane over the top of the top electrode from the top of another portion of the exposed etch stop layer; In a vertical direction corresponding to the drain pad, a portion of the strained layer, the lower electrode, the membrane, the etch stop layer, and the protective layer is sequentially etched to form a distribution hole having a distributor, and the membrane, the strained layer, the lower electrode, and the etching Sequentially etching a portion of the protective layer and the protective layer to form a distribution hole having a power distribution; And removing each of the sacrificial layers interposed between the membrane, the lower electrode, and the etch stop layer to form respective air gaps.

1 is a cross-sectional view of a conventional thin film type optical path control device,

2 is a cross-sectional view of an improved thin film type optical path control device according to a preferred embodiment of the present invention;

3a to 3f is a process diagram showing the manufacturing process of the improved optical path control apparatus according to the present invention,

4 is a view showing a comparative example of a driving angle according to a conventional thin film type optical path adjusting device and a driving angle according to the improved thin film type optical path adjusting device of the present invention.

<Description of the code | symbol about the principal part of drawing>

220: panel base 221: driving substrate

222: drain pad 223: protective layer

225: etch stop layer 227, 229: sacrificial layer

230, 260: Air gap 240, 270: Actuator

241, 277: membrane 243, 271: lower electrode

245, 273, strained layer 247, 275: upper electrode

250, 280: Power distribution hall 252, 282: Power distribution

The above and other objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention described below with reference to the accompanying drawings by those skilled in the art.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First and foremost, the main core technical aspect of the present invention is that the optical path adjusting device according to the present invention drives a double supporting structure, that is, a mirror (that is, a mirror corresponding to each pixel) that reflects light incident from a light source not shown. The actuator is formed of a double support structure consisting of two T-shaped actuators which are cross-driven in an upward or downward direction at both ends of the mirror. The purpose of the present invention is achieved by using two actuators having such a T-shaped double support structure. Can be achieved.

That is, in the optical path adjusting device of the present invention, when the actuator of one side connected to one end of the mirror is driven upward by, for example, the generated electric field, the actuator of the other side connected to the other end of the mirror is driven downward. Using the principle, the device of the present invention can achieve a drive angle of 6-10 degrees when a larger drive angle, for example the above-mentioned conventional apparatus, obtains a drive angle of approximately 3-5 degrees.

2 is a cross-sectional view of an improved thin film type optical path control device according to a preferred embodiment of the present invention cut at approximately the center portion.

2, the optical path adjusting device of the present invention is composed of two actuators 240 and 270, that is, one actuator 240 connected to one end of the mirror (not shown) and the other connected to the other end of the mirror. The actuator 270 is formed in a T shape in a direction facing each other.

Here, the driving substrate 221 having the drain pad 222 on the upper portion, the protective layer 223 formed on the driving substrate 221, the etch stop layer 225 formed on the protective layer 223. The panel base 220 comprising a has substantially the same laminated structure of the panel base employed in a conventional device except that the width of the drain pad 222 is wider than that of the conventional device described above. Therefore, the detailed description of the laminated structure of the panel base 220 is omitted below.

In this case, the reason why the width of the drain pad 222 is enlarged in the optical path adjusting apparatus of the present invention is that the two actuators 240 and 270 formed in opposite T-shapes may be simultaneously accommodated (that is, the image signals are simultaneously applied). To ensure that

Next, one side actuator 240 connected to one end of the mirror (not shown) includes a membrane 241, a lower electrode 243, a strained layer 245, and an upper electrode 247 sequentially stacked in an upward direction, and then through a support part. It is formed on the top of the panel base 220, the laminated structure of one side actuator 240 is substantially the same as the laminated structure in the conventional device shown in FIG.

At this time, the drain pad 222 in the driving substrate 221 is formed on the lower side perpendicular to the supporting part on one actuator 240 side. In addition, one actuator 240 penetrates through the strained layer 245, the lower electrode 243, the membrane 241, the etch stop layer 225, and the protective layer 223, and the drain pad 222 in the driving substrate 221. A power distribution hole 250 connected to the power distribution hole 250 is formed, and a part of the power distribution hole 250 has a power distribution unit 252 to transmit a signal to the lower electrode 243.

Accordingly, in one actuator 240 having the structure as described above, an image signal is applied to the lower electrode 243 through the drain pad 222 and the distributor 252 so that the lower electrode 243 and the upper electrode 247 are provided. As the deformation layer 245 is deformed when an electric field is generated between the two sides, as shown in FIG. 2, the free end of the one-side actuator 240 (the support side having the distribution hole 250 is referred to as a fixed end). Side) causes an upward deformation rising in the direction of the arrow Y.

On the other hand, the other actuator 270 connected to the other end of the mirror, the lower electrode 271, the deformation layer 273, the upper electrode 275 and the membrane 277 are sequentially stacked in the upward direction, the panel base 220 through the support portion Is formed on top of the At this time, the drain pad 222 in the driving substrate 221 is formed on the lower side perpendicular to the supporting portion of the other actuator 270, as in the above-described one actuator 240.

In addition, a drain pad 222 in the driving substrate 221 is formed on a lower side perpendicular to the supporting part on the other actuator 270 side. In addition, the other actuator 270 penetrates through the membrane 277, the strain layer 273, the lower electrode 271, the etch stop layer 225, and the protective layer 223, and the drain pad 222 in the driving substrate 221. A power distribution hole 280 connected to the power distribution hole 280 is formed, and a part of the power distribution hole 280 has a power distribution unit 282 configured to transmit a signal to the lower electrode 271.

Accordingly, in the other actuator 270 having the structure as described above, an image signal is applied to the lower electrode 271 through the drain pad 222 and the distributor 252 so that the lower electrode 271 and the upper electrode 275 are applied. As the deformation layer 273 is deformed when an electric field is generated between the two sides, as shown in FIG. 2, the free end of the other actuator 270 (the support part having the distribution hole 280 is opposite to the fixed end). Side) will cause a downward deformation in the direction of the arrow Y '.

That is, as can be seen from the above, in the optical path control device of the present invention, one actuator 240 has a laminated structure in which the membrane 241 is formed at the lowermost end and the upper electrode 247 is formed at the uppermost end. The other actuator 270 is formed to have a laminated structure in which the lower electrode 271 is formed at the lowermost end and the membrane 277 is formed at the uppermost end, thereby forming a gap between each lower electrode 243 and 271 and the upper electrode 247 and 275. When the electric field is generated, as shown in FIG. 4B, the free end of one actuator 240 is deformed by + Q in the upper direction (Y direction), and the free end of the other actuator 270 is lowered ( In the Y 'direction), as large as 2Q can be obtained, unlike the above-described conventional apparatus in which the driving angle of Q can be obtained as a result of -Q. As an example, when the above-mentioned conventional apparatus has a driving angle of about 3 to 5 degrees, the optical path adjusting device of the present invention can realize a large driving angle of about 6 to 10 degrees.

Next, the manufacturing process of the improved optical path control apparatus according to the present invention having the structure as described above will be described in detail.

3A to 3F are process diagrams illustrating the manufacturing process of the improved optical path control apparatus according to the present invention.

Here, the structure and manufacturing process of the panel base 220 connected to the bottom of the two actuators 240 and 270 through the support are substantially the same as in the aforementioned conventional apparatus shown in FIG. Therefore, since the structure and manufacturing process of such a panel base 220 is disclosed in detail in the above-described prior application, a detailed description thereof will be omitted, and in the following, a T-shape employed in the improved optical path control apparatus according to the present invention will be described. It will be described with reference to the manufacturing process of the actuator having a double support structure of.

First, the driving substrate 221 having the etch stop layer 225, the protective layer 223, and the drain pad 222 is stacked on the top of the panel base 220 sequentially stacked downward, that is, on the top of the etch stop layer 225. In the state where the sacrificial layer is deposited, that is, the sacrificial layer is formed in the silicate glass having a high concentration of phosphorus (P) with a thickness of about 1.0 to 2.0 μm by the Atmospheric Pressure CVD (APCVD) method. The support forming portions of the two actuators 240 and 270 in which the drain pads 222 are formed in the lower portion of the region are etched through patterning, and as an example, as shown in FIG. 3A, the upper side of the etch stop layer 225 is etched. Expose some.

Here, the sacrificial layers 227 and 229 formed between the both ends of the exposed layer serve to facilitate the lamination required to form the AMA module, and the sacrificial layers 227 and 229 are used to complete the lamination of the AMA module. It is then removed by hydrogen fluoride (HF) vapor, and the space in which the sacrificial layers 227 and 229 are removed thus becomes the air gaps 230 and 260, for example, as shown in FIG.

Next, a membrane material is deposited on top of the exposed etch stop layer 225 and on top of the sacrificial layers 227 and 229. Such a membrane material is formed to have a thickness of about 0.1 to 1.0 μm of silicon nitride by a low pressure chemical vapor deposition method.

Then, by etching through patterning, only a portion of the exposed etch stop layer 225 and the membrane material stacked on top of the sacrificial layer 227 are left, and the membrane material in the remaining area is removed, as shown in FIG. 3B as an example. Likewise, the membrane 241 of one actuator 240 is formed. Therefore, when the current process is completed, the optical path control device has a laminated structure in which the membrane 241 is formed only on one side of the actuator 240.

In addition, platinum / tantalum (Pt / Ta) is used on the upper side of the membrane 241 of one actuator 240, the remaining upper part of the exposed etch stop layer 225, and the upper part of the sacrificial layer 229, for example, using a sputtering technique. By stacking the lower electrode material made of a material having excellent electrical conductivity, and then etching through patterning, as shown in FIG. 3C, the upper and sacrificial layers 229 of the other part of the exposed etch stop layer 225, as shown in FIG. 3C. The lower electrode 271 of the other actuator 270 distributed over the upper portion and the lower electrode 243 of the one actuator 240 distributed over the membrane 241 are formed, respectively. Here, the thickness of each lower electrode 243, 261 formed is preferably about 500 to 2000 kPa.

Again, a modified material such as PZT or PLZT, which is a piezoelectric material, is formed on the upper part of each lower electrode 243 and 271 and the remaining part of the exposed anti-etching layer 225 by using a sol-gel method, for example. By laminating and etching through patterning, as shown in FIG. 3D, each strained layer 245 and 273 is formed on each lower electrode 243 and 271, and the strained layers 245 and 273 formed therein. As for the thickness, about 0.1-1.0 micrometer is preferable. Subsequently, the strained layers 245 and 273 are phase-shifted by applying heat treatment based on a rapid thermal annealing (RTA) technique.

Next, metals such as aluminum (Al) and platinum (Pt), which are excellent in electrical conductivity and reflectivity, are sputtered on each of the deformation layers 245 and 273, and patterned for each pixel, as shown in FIG. 3E. Upper electrodes 247 and 275 are formed on each of the strained layers 245 and 273, respectively, and the thickness of each of the upper electrodes 247 and 275 formed at this time is preferably about 500 to 2000 GPa.

Meanwhile, the upper electrodes 247 and 275 are formed on the one actuator 240 and the other actuator 260 through the above-described process, and then the membrane material is formed on the upper electrodes 247 and 275. Laminated. Such a membrane material is formed to have a thickness of about 0.1 to 1.0 μm of silicon nitride by a low pressure chemical vapor deposition method. It is then etched through patterning to form a membrane 277 on top of the upper electrode 275 of the other actuator 270, as shown in 3f. At this time, the membrane 277 formed on the other actuator 270 is formed in a shape surrounding the free end side. In this case, the free end of the other actuator 270 is surrounded by the membrane material in order to prevent a decrease in deposition force between the lower electrode 271 and the deformable layer 273 formed with a layer.

Accordingly, when the manufacturing process is completed, one actuator 240 may have a membrane 241 and a lower electrode 243 in parallel with the panel base 220 via the sacrificial layer 227 between the panel base 220 through the support. On the other hand, the deformable layer 245 and the upper electrode 247 are stacked in this order, while the other actuator 270 is provided with a lower electrode 271 via the sacrificial layer 229 between the panel base 220 through the support part. ), The strained layer 273, the upper electrode 275, and the membrane 277 are stacked in this order.

Next, by using a photolithography process, the strained layer 245, the lower electrode 243, the membrane 241, the etch stop layer 225, and one side of the strained layer 245 of the one-side actuator 240 are formed. The protective layer 223 is sequentially etched (ie, sequentially sequentially etched vertically in the direction of the arrow n in FIG. 3F), thereby distributing the distribution hole 250 vertically from the strained layer 245 to the drain pad 222 (FIG. 2). The membrane 277, the strained layer 273, the lower electrode 271, the etch stop layer 225, and the protective layer 223 from one side of the membrane 277 of the other actuator 270. Are sequentially etched (ie, sequentially sequentially etched vertically in the direction of the arrow n 'in FIG. 3F), thereby distributing the distribution hole 280 (shown in FIG. 2) perpendicularly from the membrane 277 to the drain pad 222. Form.

Subsequently, the inside of each of the distribution holes 250 and 280 is filled with a metal such as tungsten, platinum or titanium to form the power distributions 252 and 282, respectively. In this case, each of the distributors 252 and 282 is formed by a sputtering method and electrically connects the drain pad 222 and the lower electrodes 243 and 271. Accordingly, the power distribution units 252 and 282 are vertically formed from the lower electrodes 243 and 271 to the top of the drain pad 222 in the distribution holes 250 and 280.

Finally, each sacrificial layer 227, 229 formed on both ends of the etch stop layer 225 inside the support of the actuators 240, 270 is removed by, for example, hydrogen fluoride (HF) vapor. Air gaps 230 and 260 are formed to complete the improved thin film type optical path adjusting device, that is, each actuator completes an optical path adjusting device having a T-shaped dual support structure having a cross section as shown in FIG. .

On the other hand, in the present embodiment has been described as a structure having a distribution hole formed in each of the two actuators constituting the optical path control device, the present invention is not necessarily limited thereto, unlike the above-described embodiment, both sides of the support portion By forming only one distribution hole in the T-shaped actuator having a free end to share the signal application, the other free end is deformed downward when the one free end is deformed by the generated electric field. You will get the same effect as the example.

As described above, according to the present invention, one end of the mirror is formed by forming an actuator of an optical path adjusting device for driving a mirror that reflects light incident from a light source into a dual support structure that cross-drives in opposite upper and lower directions at both ends of the mirror. When one actuator connected to the other side is driven in the upper direction, the other actuator connected to the other end of the mirror is driven in the lower direction, so that a larger driving angle can be realized compared to the driving angle in the conventional apparatus, thereby improving the image quality of the displayed image. We can plan.

Claims (4)

The panel base 220 having a driving substrate 221 having a drain pad 222 formed on one side thereof, a protective layer 223 and an etch preventing layer 225 sequentially stacked on the driving substrate 221, and a support part. In the optical path control apparatus including an actuator formed on the panel base 220 to provide a driving angle of the mirror for the reflection of the incident light, The optical path control device is connected to an upper end of the drain pad 222 through a support part at one side of the panel base 220 where one end is exposed, and one actuator 240 having a free end at the other end thereof is connected to one end of the mirror. The other side of the actuator is connected to the upper portion of the drain pad 222 through the support of the upper portion of the other side of the panel base 220 exposed and the other end opposite to the free end of the one actuator 240 (free end) 270 has a double support structure connected to the other end of the mirror in parallel with the one-actuator 240, The one side actuator 240 is: An air gap 230 is interposed between the etch stop layer 225 and the membrane 241, the lower electrode 243, the strain layer 245, and the upper electrode 247 are parallel to the panel base 220. Sequentially formed; It is connected to the drain pad 222 through the strained layer 245, the lower electrode 243, the membrane 241, the etch stop layer 225, and the protective layer 223, and a signal applying distributor therein ( And a distribution hole 250 having a 252. The other actuator 270 is: An air gap 260 between the etch stop layer 225 is interposed so that the lower electrode 271, the strain layer 273, the upper electrode 275, and the membrane 277 are parallel to the panel base 220. Sequentially formed; Through the membrane 277, the strained layer 273, the lower electrode 271, the etch stop layer 225, and the protective layer 223, the drain pad 222 is connected to the drain pad 222. Improved light path control device, characterized in that it comprises a distribution hole (280) having a. 2. The improved optical path control apparatus as claimed in claim 1, wherein the free end of the other actuator 270 has a shape surrounded by the membrane 277 to coincide with the end of the lower electrode 271. . The panel base 220 having a driving substrate 221 having a drain pad 222 formed on one side thereof, a protective layer 223 and an etch preventing layer 225 sequentially stacked on the driving substrate 221, and a support part. In the method for manufacturing an optical path control device comprising an actuator formed on the panel base 220 to provide a driving angle of the mirror for the reflection of the incident light, Exposing a portion of the etch stop layer 225 by forming a sacrificial layer having a predetermined thickness on the etch stop layer 225 and removing a portion of the sacrificial layer formed on the drain pad 222; The membrane material is deposited on the exposed top of the etch stop layer 225 and the top of the two sacrificial layers 227 and 229, and etched through patterning to form a portion of the exposed etch stop layer 225 and the one side sacrificial layer. Forming a membrane 241 on top of 227; A lower electrode material is stacked on the sacrificial layer 229, on the other portion of the exposed etch stop layer 225, and on the membrane 241, and etched through patterning to form an upper portion of the sacrificial layer 229. Forming a lower electrode 271 and a lower electrode 243 on the membrane 241; Stacking a strain material on each lower electrode (243, 271) and etching through patterning to form each strain layer (245, 273) having a predetermined thickness; Stacking an upper electrode material on each of the strained layers (245, 273) and etching through patterning to form each upper electrode (247, 275); A membrane material is deposited on top of each of the upper electrodes 247 and 275 and etched through patterning to form a membrane over the top of the upper electrode 275 from the top of the other portion of the exposed etch stop layer 225. 277); In the vertical direction corresponding to the drain pad 222, a portion of the strained layer 245, the lower electrode 243, the membrane 241, the etch stop layer 225, and the protective layer 223 may be sequentially etched to distribute the same. A distribution hole 250 having a 252 is formed, and a portion of the membrane 277, the strained layer 273, the lower electrode 271, the etch stop layer 225, and the protective layer 223 are sequentially etched. Forming a power distribution hole 280 having a power distribution 282; And Forming each air gap 230 and 260 by removing the sacrificial layers 227 and 229 interposed between the membrane 241, the lower electrode 271 and the etch stop layer 225, respectively. Method of manufacturing the optical path control device. The apparatus of claim 3, wherein the free end of the other actuator 270 is formed to be surrounded by the membrane 277 so as to coincide with the end of the lower electrode 271. Manufacturing method.

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