KR100252216B1 - Test device of state of transferring the signal - Google Patents

Abstract

PURPOSE: Apparatus for testing a transfer state of signal is provided to inspect semiconductor equipment efficiently by confirming simply the input/output for the signal to make use of the RS-485 or RS-422 communication standard. CONSTITUTION: The transmitting signal(TD+, TD-) and the receiving signal(RD+, RD-) of RS-485 or RS-422 communication standard is inputted in an input terminal(30) and output to an output terminal(32). A signal counter(34) between the input terminal(30) and the output terminal(32) samples the transmitting signal(TD+, TD-) and the receiving signal(RD+, RD-) to apply to a signal level controlling unit(36). The signal level controlling unit(36) applies the sampled signal to a light emitting unit(38), and controls the light intensity of light emission diodes(LED1¯LED4) in response to the state of the transmitting signal(TD+, TD-) and the receiving signal(RD+, RD-).

Description

Signal transmission status test device

The present invention relates to a signal transmission state test apparatus, and more particularly, to a normal signal input and output of a measuring apparatus and other apparatus using RS-485 or RS-422 communication in a system in which a network for managing a semiconductor device manufacturing process is formed. It relates to a signal transmission state test apparatus for testing whether or not.

In general, a semiconductor device manufacturing line includes measurement equipment and sensors for measuring and monitoring the results of each unit process, and a repeater is installed for each unit process or sector of the manufacturing line to be connected to the corresponding measurement equipment and sensors. Each of these relays is connected to a host computer through a multiplexer.

That is, a network for online monitoring is configured as shown in FIG. 1, and the host computer 10 for central management is connected to a specific relay device of a line determined by the multiplexer 12.

Each of the repeaters 14, 16 and 18 transmits the signals input from the corresponding measuring equipment 20 and 22 and the sensor 24 to the host computer 10.

In the conventional network system configured as described above, the analog current method using the current and the RS-232-C, RS-422, and RS-485 methods are generally used for signal transmission.

In the network system for semiconductor process management where such signals are communicated, the inspection and repair work for abnormality is performed periodically or from time to time, and when the system's regular and irregular inspection is performed, the signal input / output of the measuring equipment and the output signal of the sensors are normal. Also, the signal transmission of the repeater is normal, and the operation of the multiplexer and the computer's normality are checked.

In addition, the analog current type device is used to check whether the signal is normally inputted or outputted using a digital voltage meter.In the case of a device that communicates using the RS-232-C method, the corresponding input / output signal is used. This is confirmed.

On the other hand, as the long-distance communication is required in recent years, the frequency of use of the RS-485 and RS-422 communication method is increasing. However, at present, testing for devices using the RS-485 and RS-422 communication methods is performed by using digital voltage meters, and devices using the RS-485 and RS-422 communication methods must be disassembled for testing. .

That is, in case of the device using RS-485 or RS-422 communication method, after disconnecting the cable from the corresponding signal output terminal, the digital voltage meter is connected to the output terminal, and the signal is transmitted by checking the change of voltage or current through the digital voltage meter. Whether it is confirmed.

As described above, a device using a conventional RS-485 or RS-422 communication method has an inefficient and cumbersome problem in operation such as disassembling a facility for inspection.

An object of the present invention is to provide a signal transmission state test apparatus that can easily test the signal input and output state of the device using the RS-485 or RS-422 communication method.

1 is a block diagram showing a network system configuration for a conventional semiconductor process management.

2 is a perspective view showing a preferred embodiment of a signal transmission state test apparatus according to the present invention.

3 is a circuit diagram showing an embodiment of a signal transmission state test apparatus according to the present invention.

4 is a waveform diagram of signals interfaced in a conventional RS-485 communication scheme.

※ Explanation of symbols for main parts of drawing

10: host computer 12: multiplexer

14, 16, 18: repeater 20, 22: measuring equipment

24 sensor 26 body

26-a, 26-b: protrusion 30: input end

32: output terminal 34: signal counter

36: signal level adjusting unit 38: light emitting unit

LED1 to LED4: light emitting diode

In the signal transmission state test apparatus according to the present invention for achieving the above object, in the signal transmission state test apparatus of the apparatus that the signal transmission using the RS-485 and RS-422 communication method, each of the positive and negative characteristics, respectively A signal counter for attenuating transmission rates of a transmission signal and a reception signal, a signal level adjustment unit for adjusting the level of each signal attenuated by the signal counter, and a plurality of light emitting diodes in which each signal adjusted by the signal level adjustment unit is arranged in parallel It is configured to be connected between a cable and a port for signal input and output of the device having a light emitting portion applied.

The signal level adjusting unit may include a zener diode configured to attenuate the level of each signal in parallel, and the light emitting device may include a light emitting diode.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Referring to Fig. 2, the embodiment according to the present invention has protrusions 26-a and 26-b formed on the side surfaces of which the main body 26 corresponds to each other, so that a cable (not shown) and a port (not shown) of the device are shown. It is formed so as to be sandwiched between, the projections 26-a, 26-b are each formed with a predetermined number of insertion holes 28 and pins (not shown) for coupling the cable and the port, respectively.

And, a detailed circuit diagram for the operation of the embodiment is shown in FIG.

Since the inherent form of the signal of the RS-485 or RS-422 communication method is the same as that of FIG. 4 in which the magnitude of the voltage changes with time, the signal can be sampled using the signal counter circuit. The signal of the RS485 communication method has a voltage level of ± 12V as shown in FIG. 4, and the signal of the RS422 communication method has a voltage level of ± 9V.

That is, the embodiment is configured such that the transmission signals TD + and TD- and the reception signals RD + and RD- of the RS-485 or RS-422 communication method are input to the input terminal 30 and output to the output terminal 32, respectively. The signal counter 34 connected to the input terminal 30 and the output terminal 32 samples the transmission signals TD + and TD- and the reception signals RD + and RD- to be input to the signal level adjusting unit 36. The signal level adjusting unit 36 applies the sampled signal to the light emitting unit 38 to emit light according to the state of the transmission signals TD + and TD- and the reception signals RD + and RD-. ) Are configured to emit light.

An embodiment according to the invention configured as described above is connected between a cable and a port of an appliance for testing.

After the projections 26-a and 26-b are connected to the cable and the port, respectively, the transmission signals TD + and TD- and the reception signals RD + and RD- having the waveforms as shown in FIG. 4 are transmitted through the input terminal 30. When applied to the signal counter 34, the transmission speeds of these signals are attenuated, and the transmission and reception signals whose transmission speeds are attenuated are applied to the signal level adjusting unit 36, respectively.

The signal level adjusting unit 36 adjusts a voltage having a ± 9V or ± 12V level to a ± 3V level and applies it to the light emitting unit 38 according to a communication method.

At this time, the signal level adjusting unit 36 has a configuration for voltage drop and is preferably configured by using a zener diode.

Therefore, the light emitting unit 38 changes the light emitting state according to each state of the transmitted signal or the received signal, and the signal of the light emitting unit 38 depends on the individual light emitting states of the light emitting diodes LED1 to LED4 constituting the light emitting unit 38. The transmission status can be determined.

Therefore, the process of confirming whether signal transmission of measurement equipment or other device using the RS-485 or RS-422 communication system forming a network is normally performed can be simplified by connection of the embodiment according to the present invention. The embodiment according to the present invention may be used only when necessary, but may always be connected and used.

Therefore, according to the present invention, the normal input and output confirmation of the signal to the device using another RS-485 or RS-422 communication method including a network for managing the semiconductor device manufacturing process can be performed easily, so that the inspection of the equipment can be efficiently performed. It has the effect of being simplified.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (3)

In the signal transmission state test apparatus of the apparatus that the signal transmission using the RS-485 and RS-422 communication method, A signal counter for attenuating transmission rates of a transmission signal and a reception signal having positive and negative characteristics, respectively; A signal level adjusting unit adjusting the level of each signal attenuated by the signal counter; And Light emitting means to which each signal adjusted by the signal level adjusting unit is applied to each of a plurality of light emitting diodes configured in parallel; The signal transmission state test apparatus, characterized in that configured to be connected between the cable and the port for signal input and output of the device. The apparatus of claim 1, wherein the signal level adjusting unit; And the Zener diodes for attenuating the level of each signal are configured in parallel. The method of claim 1, And the light emitting device is a light emitting diode.

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