KR100247599B1 - Apparatus for vacuum treatment - Google Patents

Abstract

The present invention relates to a vacuum processing apparatus for an object to be processed in two stations, each provided with openings for supplying and discharging the object. A conveying device is rotatably mounted and a support device is provided which moves sequentially in the opening of the station.

According to the present invention, the vacuum treatment apparatus has a surface normal bounded by the surface of the opening and a spatial axis bounded by the rotational axis of the conveying device not parallel to each other, for example, at an angle of 90 ° or 45 °. It is formed to have.

This arrangement makes it possible to create a very compact and compact vacuum processing apparatus with a large number of single stations, to achieve a short delivery path, and to minimize the volume of air conditioning.

Description

Closed compartment for vacuum processing unit

The present invention relates to a vacuum treatment apparatus for at least one object according to the concept of claim 1.

DE-A 24 54 544 or Japanese Patent Abstract November 1989, Vol. 13. No. 532, JP-A2 1-218627 are provided with at least one supply opening or discharge opening for a target object, each opening having a plane-vertical axis relative to the opening face F as shown in FIG. 1 for explanation. BACKGROUND OF THE INVENTION A vacuum processing apparatus including at least two stations where (An) is determined is known. Such a device is also provided rotatably mounted about a space axis and is also provided with a conveying device with at least one object conveying portion, which conveys sequentially at the opening of the station.

In contrast to the drawing of JP-1-218627, in which the conveying device is provided with only one conveying portion for the object, which conveying portion is immovably provided on the rotating cylinder forming the conveying apparatus, DE-A- The device according to 24 54 544 is provided with four object carrying parts which are movably mounted in relation to the carrying device. The individual drive of the conveying device associated with the station is done by a drive piston through the wall.

Thus, in DE-A-24 54 544, the carrying parts can be positioned with respect to the station with respect to the station until the stations are closed by this carrying part as necessary.

However, providing a driving piston through the wall of the chamber has disadvantages in the following aspects.

1) Dynamic sliding vacuum packing should be provided for each driving piston, which is expensive in terms of vacuum technology.

2) The drive piston is fixedly arranged for each station provided. Therefore, the number of stations provided to one device must be changed or increased, which is a new construction of a device having a variable number of driving pistons that are vacuum-tightly penetrated.

The present invention is based on an apparatus of the above-mentioned kind, and aims to eliminate the above-mentioned disadvantages.

1 is a view showing a relationship of the vertical side An with respect to the opening plane F in the conventional vacuum processing apparatus.

2 is a cross-sectional view showing a vacuum processing apparatus according to the present invention.

을 가진 제2도 또는 제4도에 도시된 장치를 도시한 부분단면도이다.3 is the conical opening angle

Partial cross-sectional view of the device shown in FIG.

4 is a top view schematically showing the apparatus shown in FIG. 3 in the space axis direction.

FIG. 5 shows a disc-shaped object support device in the device shown in FIGS.

FIG. 6 schematically shows the principle of the device according to the invention shown in FIGS. 2 to 5.

FIG. 7 is a view similar to FIG. 6, schematically showing another structure of the apparatus according to the present invention.

8 shows another variant of the device according to the invention.

9 shows another embodiment of the device according to the invention.

<Explanation of symbols for main parts of drawing>

1: drive device 3: drive side

5: carrying arm 7: station

9: frame 12: packing frame

13: station opening 15: cover

19: plate 21: disk

22: tab 23: bellows

25 opening 29 flange

30: pump connection 35: cone

This object is achieved by the structure of the device according to the features of claim 1.

Thereby, there is provided a conveying device in which the driving means are integrated, which can be flexibly controlled to the maximum extent, and which can insert differently configured devices according to the number of stations, and at the same time solve the aforementioned packing problem.

Vacuum treatment devices according to DE-A-24 54 544 are currently on the market, but the space axis and normal axis on which the conveying device can rotate around it are parallel to each other with respect to the opening face of the station, and at least the opening of the station. The disadvantage is that they are arranged equidistantly around the space axis, while the openings of the station have the advantage that the conveying device can only be used by turning around the space axis described above, while on the other hand, the vacuum treatment device is arranged. The disadvantage is that several stations should be arranged in three dimensions by the opening side parallel to the space axis. This means that the stations should be placed in a given direction and, in some cases, on both sides of the plane where the conveyer passes.

According to the structure of the apparatus according to claim 2, there is a wide range of freely selectable and very compact arrangements for arranging the stations with openings on both sides in relation to the space axis for the conveying device. Is provided.

In the maintenance of the conveying device which can rotate around the above-mentioned space axis, in spite of the conveying parts which can be driven and moved separately, it is not connected to the conveying device but to the axial parallel configuration of the station opening as is known. In the device structure according to the present invention, as described above, the device is compactly configured, the space for making a vacuum is provided to the minimum, and the maximum configuration time can be minimized so as to minimize the processing cycle time in proportion to the interval between stations. It is known in principle to achieve elasticity.

으로 원추형면을 스쳐간다.In a suitable embodiment according to claim 5, the opening angle is given when the conveying device rotates around the space side.

Passes through the cone.

)이 제어되면서, 서로 다른 가변원추면을 스쳐갈 수 있는 것으로 도시되어 있더라도, 특허청구범위 제5항에 의한 방법에 의하면, 본 발명의 과제에서 말하는 신축성을 상실함이 없이, 간소화를 달성할 수 있음이 판명되었다. 특허청구범위 제2항에 명시된 바와 같이,

=90°일때, 운반장치가 원형면에 이르기까지 원추면을 스쳐가는 경우에는 전동 수단과 함께 운반부 또는 회전축의 방사상 길이를 조정함으로써 또한 스테이션 또는 서도 다른 원의 크기로 원추형체에 놓여 있는 그 개구가 전술한 원추면에 도달할 수 있다. 이때에는 스테이션의 개구면 법선을 무리하게 원추면 모선 방향으로 향하게 할 필요없이, 먼저 임의의 방향으로 향하게 할 수 있다. 그다음에, 운반 장치에 있는 운반부분을 해당 스테이션 개구쪽으로 안내되도록 선회시킨다.The above-mentioned opening angle of the conveying apparatus according to the present invention (

Even though it is shown that it can pass through different variable cone surfaces while controlling, according to the method according to claim 5, the simplification can be achieved without losing the elasticity in the object of the present invention. It turned out. As stated in claim 2,

At 90 °, if the conveying device traverses the conical surface up to the circular surface, the opening, lying on the conical body by adjusting the radial length of the conveying part or axis of rotation, together with the transmission means and the size of the station or another circle, The above conical surface can be reached. At this time, the opening surface normal of the station can be oriented first in an arbitrary direction without forcing the cone surface normal direction. Then, the conveying portion of the conveying device is pivoted to be guided toward the corresponding station opening.

Another simplified solution in this regard is, in a suitable embodiment according to claim 6, that the stations are arranged such that the opening normals point in the direction of the busbar and the conical surface is traversed by the conveying device during the rotational movement.

The stations or their openings may be staircased on differently sized circles on the conical surface, but such cascading arrangements are unnecessary in many cases, and stations that are cascaded back and forth in series in the same direction along the busbar direction The casing is eliminated because the cover is peeled off by the conveying device.

According to claim 7, the same applies to the case where the openings are arranged along the conical circle.

The conveying device may be formed, for example, as a conveying cone or conveying disk, but in claim 8 there is provided at least one conveying arm mounted on the spatial axis so as to be rotatable in one side, with another end The carrying section is provided.

According to claim 9, the stations are joined by a chamber wall such that the conveying device can form a chamber therein, whereby the conveying device is protected on the one hand and on the other hand of the station. Since the openings are through the chamber, the risk of contaminating the station is reduced.

According to claim 10, a gas supply and suction filtration device is provided in a chamber containing a station or a conveying device according to an operation cycle, a vacuum process adjusted at a station, and the like. Therefore, the air in the station and the chamber can be selected depending on whether or not the vacuum air in one station is affected by the chamber or the vacuum air in another station during processing.

According to claim 11, a disk is provided in the conveying part which is movable in the surface vertical direction with respect to at least one of the openings, by which the at least one station is sealed against the space in which the conveying device is located.

In this case, for example, when the above-mentioned space is a chamber, the disk forms part of the supply lock for the target object in the chamber, or as a target support formed in correspondence with the disk, for example, to guide the target into the process. The sputter station may, on the other hand, be a support sealed to the sputter station against the space in which the conveying device is contained.

The present invention will be described in more detail with reference to the accompanying drawings.

[Description of Preferred Embodiment]

)으로 스치고 지나간다. 도 2에는 2개의 스테이션이 도시된 바와 같이, 록(lock)으로서 형성되어 있다. 이 스테이션에는 프레임(9)이 포함되어 있고, 이러한 프레임에는 상·하로 움직이는 프레임(11)이 접합되어 있다. 상하로 구동되는 프레임(11)의 내부에는 스테이션 개구(13)의 범위를 한정하고, 개구면 수직선(A₁₃)이 있는 패킹 프레임(12)이 놓여있다. 록 스테이션(7)에는 그외에도, 방향(X)에 따라 선형으로 이동할 수 있는 덮개(15)가 포함되어 있다. 이러한 덮개는 도 2에서 개구와 셔터에 대하여 수직으로 된 축 둘레를 선회할 수 있다. 이 덮개는 도시되어 있는 폐쇄위치에서 중간프레임(11)이 y방향으로 내려않음으로서 패킹 프레임(12)상에 밀폐된 상태로 놓이게 된다.2 is a cross-sectional view showing a first shape of the vacuum processing apparatus according to the present invention. Such a vacuum processing apparatus includes a drive motor 1, and at least one transport arm 5 having an axis A on the space axis A and its axis as the physical drive axis 3 is for example a space. It is fixed at an angle of 45 ° with respect to the axis A. When the drive shaft 3 is rotated and transposed as shown by ω by the motor, the carrying arm moves the cone surface at a 45 ° cone opening angle

Rubbing) Two stations are formed as locks, as shown in FIG. The station includes a frame 9, and a frame 11 moving up and down is joined to the frame. Inside the frame 11, which is driven up and down, a packing frame 12 is defined which limits the range of the station opening 13 and has an opening face vertical line A ₁₃ . In addition, the lock station 7 includes a lid 15 which can move linearly along the direction X. Such a cover can pivot around an axis perpendicular to the opening and shutter in FIG. 2. This cover is placed in a closed state on the packing frame 12 by the intermediate frame 11 not lowering in the y direction in the closed position shown.

As a result, the lock station 7 is sealed about the periphery U.

The carrying arm 5 is provided with a disc 19 as a support member at its end, on which the object to be treated, in the illustrated embodiment a CD disc or magneto-optical memory disc 21, is placed on the pegs 17. Is centered on the disc 19. As shown by the dotted line, in the support arm 5 the disk 19 is supported against the space axis A by its seat in the packing frame 12, whereby the lock can be opened to the conveying device side. . In the apparatus shown in FIG. 2, the conveying devices 3, 5, 19 are placed in the vacuum-tight chamber K, so that the disk 19 does not need to be in close contact with the frame 12 here. This is different if the chamber K itself is not vacuum sealed. The object 21 is conveyed to the second station 27 shown by the carrier arm as the rotation shaft 3 rotates by the motor 1. Irrespective of the specific configuration of the present invention, the support mechanism of the transport arm 5, which is open to many experts for practical use, is vacuum-sealed from the surroundings in the chamber K by the bellows 23. Rotation of the carrying arm 5 carries the object, disc 21, into the area of the opening 25 of the second station 27 shown. The opening 25 defines the range of the opening surface vertical line A25. Since the conveying disk 19 is lifted again together with the disk 21 in the proximal position shown by the dotted line, for example by a compressed air lifting mechanism in the arm 5, the disk 19 is for example It may be hermetically adjacent to the end of the station opening 25, which may be formed as a stratified station.

As shown in FIG. 2, the flanges 29 of the station 7, 27 and the motor 1 are coupled to each other so that the conveying mechanism surrounds the closed chamber X moving therein with the arm 5. . The carrier chamber K is configured to be vacuum sealed to the surroundings. Depending on the application there is provided a device for adjusting the air suitable for the station 27, chamber K or station 7. That is, a volleyball connection part or a gas inlet port is provided. 2 shows the pump connection 30 for the chamber K and the lock 7.

If the device is formed such that all the station openings can be closed at any time by one of the provided arms 5, it is possible to pre-introduce air into several stations, irrespective of the air in the chamber K. In some cases, however, it is sufficient to provide common air for the station and carrier chamber K, in which case, for example, like the lock station 7 and the chamber K shown in FIG. Only chamber K is ventilated or exhausted.

는 90°가 된다.3 shows a partially cut device, in which the arm 5 rises vertically from the axis 3 of the motor 1,

Becomes 90 °.

4 is a top view of the device shown in FIG. 3. In this case, the same reference numerals are used. As shown in FIG. 3, six conveying arms 5a to 5f are arranged around the axis A, which carries the lock station 7 and the other 5 for inserting and extracting the disk 21. Two processing stations 27a to 27e are operated alternately.

FIG. 5 shows that there is a support on the disc 19 for processing a disc such as a CD disc or a magneto-optical disc having a central hole, such as the disc 21 shown in FIG. The disc 19 is provided with a peg 22 at its center, and the peg is provided with three notches 23 that are displaced at a displacement angle of 120 ° and extend in the axial direction. The spring 25 is fixed in this notch. The springs slightly protrude over the outer surface of the peg by the convexly bent portion 26 outwardly towards the raised end of the peg 22 such that the disc 21 'is pushed slightly over this convex portion by the supply robot. There is only a slight pause at 26). This depends on how strongly the bent part 26 protrudes above the laid down disc 21. Since the disc 21 rests only slightly above the vertex P of the portion 26, the disc 21 can be easily pulled out without the need for using a drive mechanism after processing.

)으로 원추면을 스쳐지나고, 스테이션(27)을 이용하고, 스테이션의 개구(25)가 표면법선(A₂₅)을 확정시킨다. 이러한 표면법선을 스쳐지나가는 원추체의 모선 방향으로 항하여 있다. 스테이션(27)의 개구(25)는 스쳐가는 원추면의 대원상에 놓여있다. 즉, 이러한 개구들은 모두 암(5)이 스쳐가는 원추형의 정점(S)으로부터 돌일한 폭으로 떨어져 있다.6 schematically illustrates the principle of the apparatus described by FIGS. 2 to 4. For example, an opening 25 is provided in three stations 27 rotating around the space axis A by three carrying arms 5a to 5c. The chamber K of the conveying device may be formed as indicated by the boundary 29. When the carrier rotates (ω), the opening angle (

Pass through the cone surface, and use the station 27, and the opening 25 of the station determines the surface normal A ₂₅ . The surface normal is crossed in the direction of the bus bar of the cone passing through the surface normal. The opening 25 of the station 27 lies on the large circle of the passing cone surface. In other words, these openings are all spaced apart from the conical vertex S through which the arm 5 passes.

Figure 7 illustrates another possibility of alternatively forming the device according to the invention. Here the stations are placed on the crew 33 on the conical 31 which is crossed by the arm 5 and another station (only one is shown) on the widened crew 35. The opening surface normal line A ₂₅ also faces in the conical mother line m direction here. In order to use the opening 25 of the station 27 lying on different faces 33, 35, the arm 5 is similar to the bellows 23 shown in FIG. 2, as shown 37 in the figure. It can be extended or shortened via a telescopic drive with compressed air covered by a bellows (not shown here). The stations can thereby be arranged not only on one circle, as arranged in the apparatus shown in FIGS.

)은 예를들어 원추체가 서로 다른 개구각(

)에 의하여 스쳐갈 수 있도록 조정할 수 있다. 따라서, 임의로 배치된 스테이션을 광범위하게 이용할 수 있다. 지지판(19a)은 β≤90°의 각으로 암(5)에 장착되어 있고, P로 도시되어 있는 바와 같이, 암축(A₅) 둘레를 회전할 수 있다. 원추각 조정(

)뿐 아니라, 암의 진입과 후퇴 및 P 점에서의 회전 등도 제어된 구동하에서 실시할 수 있고, 이러한 배열에 의하여 개구(25)가 제공되어 있는 임의로 배치된 스테이션들을 공간적으로 이용할 수 있다. 특히 조밀한 운반장치 챔버(K)는 점선으로 도시되어 있다.In a further structure of the device according to the invention shown in FIG. 8, the arm 5 can go out or return, as indicated by 37, with the carrying plate 19a attached. In addition, the cone angle (

) Is the opening angle (e.g.

You can adjust so that you can pass by). Thus, a randomly arranged station can be widely used. The support plate 19a is attached to the arm 5 at an angle of β ≦ 90 °, and as shown by P, can rotate around the arm axis A ₅ . Adjust cone angle (

As well as the entry and retraction of the arm and rotation at the point P, etc. can also be carried out under controlled driving, and by this arrangement it is possible to spatially use arbitrarily arranged stations provided with openings 25. Particularly compact carrier chamber K is shown in dashed lines.

In FIG. 9 the space axis A lies vertically. The arm 5 is formed in an L-shape and is mounted so that the carrying disk is horizontally placed. This has the advantage of not having to hold the workpiece on the disk 19. The drive unit formed integrally with the arm for moving (V) the disk 19 lies inside the bellows 23.

According to the concept of the present invention or the corresponding vacuum processing apparatus, a very compact device having a plurality of single stations can be provided, and if necessary, an optimum short delivery path can be realized or an air-controlled volume can be minimized. .

Claims (20)

Closed conveying chamber for the vacuum processing device, which is provided with two or more openings and one workpiece conveying device for supplying and extracting a workpiece, wherein the conveying devices 3 and 5 can be rotated about the axis of rotation A by means of a rotational drive. And at least two conveying devices 5, which are mounted in the seal K, and which at least two workpiece supports 19 act on the workpiece by means of a moving element moving in the radial direction with respect to the axis of rotation A. With its reciprocating drive, one support 19 can optionally be positioned opposite one of the openings 21, 25 by the rotation of the conveying devices 3, 5, the workpiece being one of the conveying devices. And the conveying chamber provided by the reciprocating drive unit so as to be movable toward or from the opening in this position, the conveying device being formed as a carrying arm 5 with one integrated reciprocating drive unit. Closed transport chamber for a vacuum processing apparatus as. The transport chamber according to claim 1, wherein the reciprocating drive device is formed as a linear drive device. The transport chamber according to claim 1 or 2, wherein the reciprocating drive unit is surrounded by the swash-coated part. 2. The plane normals (A ₁₃ , A ₂₅ ) of the openings (13, 25) according to claim 1, wherein the plane normals (A ₁₃ , A ₂₅ ) are parallel to, in the radial direction or at an inclination angle with respect to the rotation axis (A) of the conveying devices (3, 5). Carrier room. The transport chamber according to claim 1, wherein the reciprocating drive acts in a radial direction or at an inclination angle with respect to the rotation axis of the transport apparatus (3, 5). The method according to claim 1, wherein when the conveying devices 3 and 5 rotate,

Carrier room characterized by passing through the cone or plane. The transport chamber according to claim 1, characterized in that when the transport device (3, 5) makes a rotary motion, it passes through the cylinder surface. The transport chamber according to claim 1, wherein a gas supply and a suction filtration device are provided in the chamber (K). 2. The support (19) according to claim 1, wherein the support (19) includes sealing means that can move about one or more of the openings, in particular in the opening plane normal direction, and at least one of the openings (7, 27) is such a sealing. Carrying chamber, characterized in that sealed by means. 10. The transport compartment as claimed in claim 9, wherein a closure means is provided in a plate for receiving a work piece. The plate 19 is provided with a projection tab 22 with a resilient portion 26 that protrudes convexly over its surface, which is viewed in the axial direction of the tab, in particular its peak ( P) A transport chamber, characterized in that it is placed in such a way that only itself can come into contact with the object 21. There are at least two openings and one workpiece conveying device for supplying and extracting a workpiece, and in the chamber K, the conveying devices 3 and 5 can be rotated about the axis A by means of a rotary drive. Two or more workpiece supports 19, together with two or more transfer devices 5 and one reciprocating device, acting on the workpiece by means of a moving element moving in the radial direction with respect to the axis of rotation A, One support 19 can be optionally positioned opposite one of the openings 21, 25 by the rotation of the conveying devices 3, 5, and the work piece by means of one of the conveying devices and the reciprocating drive, A vacuum processing apparatus having a closed conveyance chamber, which can move towards or out of an opening in this position, wherein the conveying device is formed as a conveying arm 5 with one integrated reciprocating drive, wherein at least one opening has a lock station or provisional position. Vacuum treatment apparatus, characterized in that the station is arranged. A conveying method in which two or more workpieces are rotated about a rotation axis in a plane of rotation and carried by a component moving radially about the axis of rotation, wherein the workpieces are transported at an inclined angle with respect to the axis of rotation by respective drives. A conveying method characterized by the above-mentioned. The method of claim 13, wherein the workpiece is rotated and conveyed by a device that rotates around a rotation axis. The transport chamber according to claim 1, wherein the workpiece support (19) supports a disk-shaped workpiece. 16. The transport compartment according to claim 15, wherein the workpiece support (19) supports a CD or a disk for magneto-optical storage. 13. The vacuum processing apparatus according to claim 12, wherein the reciprocating driving device is formed as a linear driving device. 13. The vacuum processing apparatus according to claim 12, wherein the reciprocating drive unit is surrounded by the copying unit. 13. The plane normals (A _13, A ₂₅ ) of the openings (13, 25) according to claim 12, characterized in that they are parallel, radially or inclined angle with respect to the rotation axis (A) of the conveying devices (3, 5). Vacuum processing apparatus. 13. The support (19) according to claim 12, wherein the support (19) comprises sealing means that can move relative to one or more of the openings, in particular in the opening plane normal direction, wherein at least one of the openings (7, 27) is such sealing means. Vacuum processing apparatus characterized in that the sealing.

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