KR100244893B1 - Device and method of manufacturing diamond-carbon field emitter having resistance layer - Google Patents

Abstract

The present invention relates to a manufacturing apparatus and a method for forming a resistive layer under a diamond-like carbon thin film used as an emitter in a diamond field emission display, wherein the diamond-like carbon thin film containing hydrogen is continuously formed as the resistive layer. The present invention provides an apparatus and method for manufacturing a diamond carbon thin film having a resistive layer that can simplify the manufacturing process and improve the performance of a field emission display by forming a diamond carbon thin film as an emitter.

Description

Apparatus for manufacturing diamond-like carbon field emitters having a resistive layer and a method of manufacturing the same

1 is a cross-sectional view of a conventional non-gate diametric carbon field emission display.

2 is a cross-sectional view of a non-gate diamondoid carbon field emission display made in accordance with the present invention.

3 is a cross-sectional view of a laser ablation apparatus for manufacturing a resistive layer and a non-gate diamondaceous carbon field emitter according to the present invention.

* Explanation of symbols for main parts of the drawings

10,20: cathode substrate 11,21: cathode electrode

12,22: diamondoid carbon field emitter 14,24: emitting electrons

15,25 phosphor 16,26 anode electrode

17,27: anode substrate 18,28: spacer

29: resistive layer 30: laser ablation

31: laser generating device 32: laser beam

33: focusing lens 34: optical window

35: ablation chamber 36: target holder

37: graphite target 38: substrate holder

39: substrate 40: plum containing carbon ions

41: hydrogen gas supply pipe 42: hydrogen gas flow controller

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to field emission displays using diamond carbon, which does not require a gate electrode, and more particularly to a diamond carbon field in which a diamond-like carbon thin film containing hydrogen is formed between a diamond carbon emitter and a cathode electrode as a resistive layer. It relates to a method of manufacturing an emission display.

A field emission display having diamondlilk carbon as a field emitter without a conventional gate electrode is as shown in FIG.

The field emission display includes a cathode substrate 10 having a cathode electrode 11 and a thin diamond-like diamond field emitter 12 formed on the cathode electrode 11, an anode electrode 16, and the anode An anode substrate 17 having a phosphor 15 formed below the electrode 16 and a spacer 18 for maintaining a space between the two substrates 10 and 17.

The anode substrate 17 and the cathode substrate 10 use a common glass, and the anode electrode 16 uses a transparent electrode such as ITO. Also, the distance between the two substrates 10.17 is about 10-25 μm, and the vacuum degree between the two substrates should be maintained at least 10 ⁻⁶ torr. In the operation of the field emission display, when an electric field of about 20 V / μm is applied between the two substrates, electrons 13 are emitted by the principle of field emission, and the emitted electrons 13 are phosphors 15. Image is displayed by stimulating.

The diamond-like carbon field emission display is characterized in that one flat diamond-like carbon film forms a pixel that is a basic element of the display configuration and has a diode structure without a gate electrode.

Diamonds do not need to be processed in the form of tips, nor do they need to be manufactured with a triode structure that requires gates because they have excellent properties for emitting electrons at lower voltages than commonly used emitters such as metals and silicon. Therefore, the field emission display having a diamond-like carbon emitter can be manufactured at a lower cost than that of a micro tip field emission display or a liquid crystal display which is mainly used for flat panel display devices due to its simple structure.

In general, resistive layers are used for micro tip field emission displays in which one pixel is composed of several tips. As an example, the French company Pix Tech. The company announced a prototype of a 6-inch color Mo tip field emission display using an amorphous silicon thin film as a resistive layer.

The reason why the resistive layer is used in the micro tip field emission display is as follows. For each tip of the numerous tips, the emission current is largely influenced by the size of the tip radius by Fowler-Nordheim theory, where the tip radius has a Gaussian distribution. Therefore, the uniformity of emission between pixels is degraded because the average emission current density of a pixel can be dominated by electrons emitted from a few tips of thousands of tips with a very small tip radius. In addition, the conduction path formed through one micro tip causes a short phenomenon in the field emission display, resulting in a fatal defect of the display.

Therefore, forming a resistive layer between the micro tip and the cathode electrode is a key element of the micro tip field emission display configuration in order to minimize the problem of emitter uniformity and lifetime of the field emission display.

Currently, diamond field emission displays made of 1.5-inch prototypes use amorphous diamond thin films manufactured by laser ablation as field emitters. The amorphous diamond is a kind of diamondic carbon and does not contain hydrogen and has a carbon bond sp ³ fraction of 75% or more, which is suitable for use as a field emitter because of excellent field emission characteristics.

However, the diamond field emission display has a structure where the entire diamond-like carbon thin film corresponds to one pixel, and one pixel size is about 10 ^-4 cm ² (100 μm × 100 μm), so that electron emission is uniform across the entire pixel area. It is fundamentally difficult to expect. Therefore, diamond field emission displays also require the application of a resistive layer, such as micro tip field emission displays, for the purpose of improving emitter uniformity between pixels. However, in the conventional resistive layer, an amorphous silicon thin film is used, and thus, a plasma chemical vapor deposition process is newly added, thereby increasing the manufacturing cost.

Therefore, the present invention solves the problem that the uniformity and lifetime of the emitter are reduced by forming a resistive layer between the cathode electrode and the diamondic carbon emitter, and the diamond carbon in the laser ablation chamber is made of the resistive layer material. It is an object of the present invention to prevent a further step due to resistance layer formation by forming a hydrogen-containing amorphous diamond-like carbon thin film that can be continuously manufactured without breaking the vacuum before the emitter manufacturing process.

In order to achieve the above object, the present invention provides a laser generating apparatus for generating a laser, a focusing lens for focusing a laser generated in the laser generating apparatus, an optical window through which the focused laser beam passes, and an inside for maintaining a vacuum state. An exhaust port is formed in the side wall, which corresponds to an ablation chamber, a target holder in a rotational motion in which a target installed in the chamber and a target formed by the focused laser beam is mounted, and a target holder on the upper chamber. A substrate holder having a rotational movement in which the substrate is formed such that the diamond carbon film is formed by the plume, and a hydrogen supply pipe and hydrogen flow installed at the side of the chamber for supplying hydrogen while the diamond carbon resistive layer is formed. Diamond-like carbon fill with a resistive layer comprising a controller It characterized by an apparatus for producing an emitter.

In addition, by mounting the graphite target and the substrate to the target holder and the substrate holder in the chamber using the apparatus to make the inside of the vacuum state, and to generate a laser beam from the laser generator inside the chamber in the vacuum state Irradiating a focused laser beam to a target, irradiating the laser beam and simultaneously supplying hydrogen into the chamber, and the carbon ions in a plume formed by the laser beam in the graphite target Reacting to form a diamond-like carbon thin film containing hydrogen on a substrate, and when the hydrogen-containing diamond-like carbon thin film is formed to a desired thickness, the hydrogen supply is cut off, and the inside of the chamber is vacuumed using an exhaust port. And the plume generated by the laser beam comprises the hydrogenated diamondoid carbon foil Characterized in that the method for producing a diamond-like carbon thin film having a resistance layer comprising the step of forming on the film to form a diamond-like carbon thin film.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Next, FIG. 2 shows a field emission display having a diamond-like carbon emitter without a gate electrode manufactured using a diamond-like carbon thin film having a resistive layer. First, a cathode substrate coated with the cathode electrode 21 ( 20) A diamond-like carbon thin film having a diamond-like carbon thin film containing hydrogen thereon as a resistive layer 29 is prepared. Next, a transparent electrode 26 is formed on the anode substrate 27 by using a material such as ITO, and then a phosphor 25 is formed on the transparent electrode 26. Next, the anode substrate 27 is aligned with the cathode substrate 20, and the distance between the two substrates 20 and 27 is bonded using the spacer 23 at intervals of 10-25 μm, and the two substrates are bonded to each other. A diamond-like carbon field emission display having a resistive layer 29 is fabricated by evacuating air between (20,27) to a vacuum of about 10 ⁻⁶ torr or less.

Since the diamond carbon thin film of the field emission display has a diamond carbon thin film containing hydrogen at the bottom as a resistive layer, the uniformity of emission between pixels is improved by preventing the pixel from being driven by several emitters per pixel. At the same time, shorting and arcing can be reduced to extend the life of the field emission display as a whole.

3 shows a device for producing a diamond-like carbon thin film having a resistive layer according to the present invention, from the laser generator 31 for generating a laser beam 32 and from the laser generator 31. A focusing lens 33 for focusing the generated laser beam 32 is installed outside the ablation chamber 35, and the ablation chamber 35 has an optical window through which the focused laser beam 32 will pass. 34) is provided, and an exhaust port is formed to exhaust air from the inside. Also within the ablation chamber 35, a target 37 which forms the plume 40 by the focused laser beam 32 can be mounted and a target holder 36 which can rotate itself is provided. It is provided on one side, the upper portion of the ablation chamber 35, the substrate 39 which can rotate itself at a position corresponding to the target holder 36 and the thin film is formed by the plum 40 A substrate holder 38 that can be mounted is provided. In addition, a hydrogen supply pipe 41 may be installed at an upper portion of the ablation chamber 35 to supply hydrogen from the outside, and a hydrogen flow controller capable of controlling hydrogen supplied at an end of the hydrogen supply pipe 41. (42) is provided.

In the method of manufacturing a thin film using the diamond carbon thin film manufacturing apparatus described above, the graphite target 37 and the substrate 39 are mounted on the target holder 36 and the substrate holder 38 in the ablation chamber 35. After the inside of the vacuum chamber, the laser beam 32 is generated from the laser generator 31 into the vacuum chamber, and the focused laser beam 32 is irradiated onto the graphite target 37. Hydrogen is supplied into the chamber 35. Carbon ions contained in the plume 40 formed in the target 37 by the laser beam 32 react with the supplied hydrogen to form a diamond-like carbon thin film on the substrate 39. Next, when the diamond-like carbon thin film containing hydrogen is formed to a desired thickness, the hydrogen supply is cut off, the hydrogen is discharged inside the chamber 35 using an exhaust port, and then generated by the laser beam 32. Carbon ions in the plume 40 to be formed on the diamond-like carbon thin film containing hydrogen to form a diamond-like carbon thin film so that the diamond-like carbon layer containing hydrogen on the substrate 40 as a resist layer A carbon thin film field emitter will be produced.

As described above, by forming an amorphous carbon thin film containing hydrogen as the resistive layer, a separate process for forming the resistive layer is unnecessary, and thus, the laser ablation chamber can be used as it is, resulting in lower manufacturing costs and continuous resistive layer. By forming the and emitters, the interface between the resistive layer and the emitters is improved, thereby improving the adhesion and the characteristics of the emitters.

In addition, it is possible to adjust the resistance of the thin film by adjusting the hydrogen content on the characteristics of the amorphous carbon thin film containing hydrogen, so that the resistance value of the resistance layer can be easily adjusted to meet the specifications of the field emission display.

In addition, since the diamond-like carbon thin film containing hydrogen is formed as the resistive layer, no additional process is required, and the resistive layer and the emitter are simultaneously manufactured in the ablation chamber for manufacturing the diamond-like carbon emitter. Improved interface and adhesion properties and emitter properties are improved. At this time, the diamond-like carbon thin film containing hydrogen is changed in the resistance value of the thin film according to the hydrogen content.

In the diamond-like carbon thin film containing hydrogen, hydrogen bonds with carbon to reduce dangling bond concentrations, thereby stabilizing sp ³ bonds of carbon and eliminating intermediate bonds caused by bonds in a band gap. As the amount of hydrogen in the thin film increases, the resistance increases. This means that the resistance of the thin film can be arbitrarily adjusted by adjusting the amount of hydrogen in the thin film.

As described above, by using a diamond-like carbon thin film having a resistive layer according to the present invention in a diamond field emission display as an emitter, emitter uniformity between pixels can be improved to improve display performance, and field emission display Significantly reduces shorting and arcing, a factor that destroys emitters during operation, increasing the life of the display.

Claims (3)

A laser generator for generating a laser, A focusing lens for focusing the laser generated by the laser generator; An ablation chamber in which an optical window through which the focused laser beam passes and an exhaust port for maintaining the inside in a vacuum state are formed on sidewalls; A target holder mounted inside the chamber and equipped with a graphite target which is formed by a focused laser beam to form a full room containing carbon ions, and which rotates; A substrate holder mounted on the chamber to correspond to a target holder and mounted with a substrate on which a diamond-like carbon thin film is formed by the plume; Apparatus for manufacturing a diamondoid carbon field emitter having a resistive layer comprising a hydrogen supply pipe and a hydrogen flow controller installed on the side of the chamber for supplying hydrogen at the initial stage of the diamond-like carbon thin film is formed. Mounting the graphite target and the substrate on the target holder and the substrate holder in the ablation chamber and vacuuming the interior; Irradiating a graphite target with a focused laser beam by generating a laser beam from a laser generator into the vacuum chamber; Irradiating the laser beam and simultaneously supplying hydrogen into the chamber; Reacting the carbon ions in the plum formed in the graphite target with the hydrogen to form a diamond-like thin carbon film on the substrate; Blocking the hydrogen supply when the diamond-like carbonaceous carbon thin film having a desired thickness is formed, and vacuuming the inside of the chamber using an exhaust port; A method of manufacturing a diamondoid carbon field emitter having a resistive layer comprising forming carbon ions in a plume generated by the laser beam on top of the hydrogenated diamondoid carbon thin film to form a diamondoid carbon thin film. . The method of claim 2, The resistive layer is a method of producing a diamond-like carbon field emitter having a resistive layer, characterized in that the resistance value can be adjusted by adjusting the content of hydrogen.