KR100232946B1 - Loading and unloading device for ic inspection - Google Patents

Abstract

The present invention relates to an integrated circuit device inspection apparatus, which moves step by step so that boats are drawn out one by one from a mega rack loaded on a holder through a vertical guide on one side, and a horizontal guide on one side of the ball mega rack from which all boats are drawn out. Loading means for exiting the bed; First moving means for horizontally moving the drawn-out boat through a microscope / marking unit or the like; Including the unloading means for moving step by step so that the inspected boats are loaded one by one on the mega-rack rack reached to the holder through the horizontal guide on the other side, and retiring all the mega racks loaded on the vertical guide on the other side; Characterized in that made.

As a result, by automatically loading and exiting the mega rack in the CCD image pickup device inspection device, the reliability of the inspection is increased to stabilize the product quality, improve the productivity of the product, and eliminate the inspection trouble process. .

Description

Integrated circuit device charging and discharging device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated circuit device inspection apparatus, and more particularly, to a mega rack for loading a plurality of boats into which a plurality of CCD image pickup devices are inserted in a manufacturing process of a CCD (charge coupled device) image pickup device. An integrated circuit device charging and unloading device for automatically loading and unloading.

In order to perform foreign material inspection on the imaging surface of the CCD image pickup device in the manufacturing process of the CCD image pickup device, the boat, in which the CCD image pickup device is assembled, is removed from the mega rack and automatically transferred to the inspection site. The boat should be automatically loaded in the mega rack by the unloading part, in the present invention, the mega rack loaded with the boat is automatically loaded by the loading part and the empty mega rack is automatically loaded when the inspection of one mega rack is completed. In addition, the boats that have been inspected by the unloading unit should be loaded into the mega rack automatically. Therefore, the empty mega racks are automatically loaded into the unloading unit. Apparatus for conducting inspection, CCD type image pickup device inspection for automatic loading and unloading of the Mega rack to be inspected and automatic loading and unloading after the inspection is completed One of the key elements of the device technology.

The CCD image pickup device 14 as shown in FIG. 2 is produced under the cleanliness of class 10. In the related art, there is no device for automatically inspecting whether the foreign matter is mixed into the CCD image pickup device 14. Accordingly, as shown in FIG. 1, the worker carries the mounted mega-rack rack 11 into which the boat 12 is inserted to the work table, and then removes one boat 12 and the biaxial table 13 to which the microscope 15 is assembled. The image pickup surface 14a (FIG. 2) of the CCD image pickup element 14 was visually inspected. The boat 12 is moved in the process of inspection by operating the 2-axis table 13 manually. When the inspection of one boat 12 is completed, the worker takes out the defective CCD image pickup device 14 and processes it, and the boat 12 after the inspection is manually loaded again in the mega rack 11 and then processed. Move to.

As such, the conventional operation of carrying the mega rack 11 loaded with the boat 12 and drawing out and charging the boat 12 for inspection is performed, thereby reducing work efficiency and requiring the skill of the operator. In other words, there is a closed point that causes a decrease in reliability of the product.

Therefore, the present invention increases the reliability of the inspection process and improves the inspection difficulty process by automatically loading and exiting the mega-rack rack in which a plurality of boats loaded with a plurality of CCD-type image pickup elements are loaded in the manufacturing process of the CCD-type image pickup device. It is an object of the present invention to provide an integrated circuit device charging and discharging device that can be eliminated.

1 is a block diagram showing a conventional inspection apparatus for inspecting a CCD image pickup element;

FIG. 2 is an exploded perspective view illustrating a state in which a CCD type image pickup device is mounted on the boat of FIG. 1;

3 is a front view showing a CCD image pickup device inspection apparatus according to the present invention,

4 is a left side view of the mega rack loading unit of FIG. 3;

FIG. 5 is a right side view of the mega rack unloading unit of FIG. 3; FIG.

* Explanation of symbols for main parts of the drawings

11: magazine rack 12: boat

13: 2-axis table 14: CCD type image pickup element

15 microscope 21 conveyor

22: linear motor 23: clamping mechanism

24: marking unit 25: high resolution camera

31: Vertical guides 32,47,57: Stoppers

33: holder 34: guide shaft

35, 55: Ball screw 41, 51: Timing pulley

42,52: Timing Belt 43,53: Stepping Motor

44: pushing cylinder 46,56: horizontal guide

In order to achieve the above object, the present invention moves step by step so that the boats are drawn out one by one from the mega racks loaded on the holder through the vertical guides on one side, and the ball mega racks from which all the boats are drawn out are discharged onto the horizontal guides on one side. Loading means for; First moving means for horizontally moving the drawn-out boat through a microscope / marking unit or the like; Including the unloading means for moving step by step so that the inspected boats are loaded one by one on the mega-rack rack reached to the holder through the horizontal guide on the other side, and retiring all the mega racks loaded on the vertical guide on the other side; An integrated circuit device charging and withdrawing device is provided.

Hereinafter, exemplary embodiment (s) of the present invention will be described in detail with reference to the accompanying drawings.

Referring to FIG. 3, an embodiment of the present invention includes a loading means disposed on the left side of the table, a first moving means disposed in the center, and an unloading means disposed on the right side. The loading means is a place where the mega rack 11 loaded with the boat 12 for inspection is loaded, and the first moving means is inspected while the boat 12 passes toward the microscope 15 and the marking unit 24. And at the same time the horizontal movement, the unloading means is a means for exiting the mega rack 11 loaded with the inspected boat 12.

The first moving means includes a clamping mechanism 23 for fixing the drawn boat 12 and a linear motor 22 for reciprocating the clamping mechanism 23 on the conveyor 21. The clamping mechanism 23 firmly supports the boat 12 by using the fixing hole 12b of FIG. 2. The linear motor 22 is controlled to linearly reciprocate the clamping mechanism 23 at a constant speed on the conveyor 21 or to stop it at any point. This configuration enables the present invention to automatically inspect using a high resolution camera 25 in addition to the conventional microscope 15.

3 and 4, the loading means moves step by step so that the boats 12 are drawn out one by one from the mega rack 11 loaded on the holder 33 through the vertical guide 31 on one side, and all the boats are pulled out. The ball mega rack 11 drawn out by (12) is discharged onto the horizontal guide 46 on one side. To this end, the loading means vertically moves the stopper 32 mounted on the middle portion of the vertical guide 31 and the mega rack 11 at regular height intervals to temporarily stop the descending of the mega rack 11. And a pushing cylinder 44 mounted on the lower portion of the vertical guide 31 so as to push the empty mega rack 11 onto the horizontal guide 46. The stopper 32 uses an electric or pneumatic solenoid, pressurizes one side of the mega rack 11 to stop its downward movement. The pushing cylinder 44 also uses an electric or pneumatic solenoid, which presses one side of the mega rack 11 and pushes it out of the vertical guide 31. The second moving means is provided in two places with the same configuration, and the detailed configuration will be described later.

3 and 5, the unloading means moves step by step so that the inspected boats 12 are loaded one by one on the mega rack 11 reaching the holder 33 through the horizontal guide 56 on the other side. Then, the mega rack 11 loaded with all the boats 12 is discharged onto the vertical guide 31 on the other side. To this end, the unloading means includes third moving means mounted on the lower portion of the horizontal guide 56 to guide the mega rack 11 onto the holder 33 and vertical movement of the mega rack 11 at regular height intervals. And a stopper 32 mounted to an intermediate portion of the vertical guide 31 so as to temporarily stop the lifting of the mega-rack 11. The vertical guide 31 and the stopper 32 use the same configuration as that of the above loading means.

At this time, the third moving means includes a ball screw 55 for horizontally moving the mega rack 11 by rotation, a stepping motor 53 with which the rotation speed is precisely controlled, a stepping motor 53, and a ball screw ( The timing pulley 51 and the timing belt 52 which are fixed so that the rotation ratio of 55 may be kept constant are provided. The stepping motor 53 is driven at a speed proportional to the number of pulses of the input applied, and this rotation is transmitted to the ball screw 55 through the timing pulley 51 and the timing belt 52. The ball screw 55 is installed along the horizontal guide 56, the rotation torque is small, it is easy to control by the stepping motor 53. When a predetermined pulse number is applied to the stepping motor 53 by this structure, the mega-rack 11 moves to the stopper 57 from the 11 'position. It is also possible to use a servo motor instead of the stepping motor 53.

The second moving means includes a ball screw 35 for vertically moving the holder 33 by rotation, a stepping motor 43 whose rotation speed is precisely controlled electrically, and a rotation ratio of the stepping motor 43 and the ball screw 35. And a timing pulley 41 and a timing belt 42 which are fixed to keep the constant. The second moving means is applied to the loading means and the unloading means in the same configuration, and is supported by the guide shaft 34 and arranged vertically and the holder 33 is fixed to the upper and the third moving means described above; There is a difference. When a predetermined number of pulses is applied to the stepping motor 43 by this configuration, the holder 33 ascends or descends by the height between the boats 12 on the mega rack 11. The stepping motor 43 can also be replaced with a servo motor.

3 to 5, an embodiment of the operation of the device according to the invention is described. Initially, the holder 33 of the loading section moves to the top dead center, waits, the pushing cylinder 44 returns to its original position, and the holder 33 of the unloading section stops at the bottom dead center.

Next, when the operator who confirms that the holder 33 of the loading unit is waiting, loads the inspection target mega rack 11 to the holder 33, the first mega rack 11 is lowered by the holder 33 and the second Afterwards the mega rack 11 is stopped by the stopper 32. The mega rack 11 on the holder 33 is lowered by one pitch by the precision control by the stepping motor 43 at a predetermined point so that the boats 12 are drawn out one by one. When all the boats 12 are pulled out and become the ball mega rack 11, the holder 33 moves to the bottom dead center, and the pushing cylinder 44 pushes the ball mega rack 11 to the outer stopper 47. Serve This loading operation is repeated from the beginning to allow the boat 12 to be automatically and continuously inspected.

Thereafter, when the worker loads the ball mega rack 11, which is discharged from the loading unit, on the horizontal guide 56, the stepping motor 53 is operated to send the mega rack 11 to the holder 33 waiting. Again, another stepping motor 43 is operated to raise the ball mega-rack rack 11 by one pitch so that the inspected boat 12 is loaded. When the loading is completed, the holder 33 is moved to the top dead center and the mega rack 11 is caught by the stopper 32. This unloading operation is repeated again from the beginning so that the mega rack 11 can be ejected onto the vertical guide 31.

Although the embodiment according to the present invention is shown to be loaded in three stages of the mega-rack 11, increasing the length of the vertical guide 31 can be loaded in multiple stages it is possible to reduce the work maneuver.

The integrated circuit device loading and unloading device of the present invention having the above-described configuration and operation improves the reliability of the product by increasing the reliability of inspection by automatically loading and unloading the mega rack in the inspection device of the CCD-type image pickup device. It has the effect of improving the productivity and eliminating the inspection troublesome process.

Claims (6)

A loading means for moving the boats step by step so that the boats are drawn out one by one from the mega racks loaded on the holders through the vertical guides on one side, and exiting the ball mega racks from which all the boats are drawn out onto the horizontal guides on one side; First moving means for horizontally moving the drawn-out boat through a microscope / marking unit or the like; Including the unloading means for moving step by step so that the inspected boats are loaded one by one on the mega-rack rack reached to the holder through the horizontal guide on the other side, and retiring all the mega racks loaded on the vertical guide on the other side; An integrated circuit device charging and discharging device, characterized in that made. The method of claim 1, wherein the loading means is a stopper mounted to the middle portion of the vertical guide to temporarily stop the fall of the mega rack, and the second movement to move the mega rack vertically at a constant height interval Means and a pushing cylinder mounted to a lower portion of the vertical guide to push the empty mega rack onto the horizontal guide. The integrated circuit device charging and discharging device according to claim 1, wherein the first moving unit includes a clamping mechanism for fixing the drawn boat and a linear motor for reciprocating the clamping mechanism on a conveyor. The method of claim 1, wherein the unloading means is a third moving means mounted to the lower portion of the horizontal guide to guide the mega rack on the holder, and a second movement to move the mega rack vertically at a constant height interval Means and a stopper mounted on an intermediate portion of the vertical guide to temporarily stop the rise of the mega rack. The method according to claim 4, wherein the third moving means comprises: a ball screw for horizontally moving the mega rack by rotation, a stepping motor with an electrically controlled number of revolutions, and a rotation ratio between the stepping motor and the ball screw. An integrated circuit device charging and discharging device, comprising a fixed timing pulley and a timing belt. 5. The method according to claim 2 or 4, wherein the second moving means comprises a ball screw for vertically moving the holder by rotation, a stepping motor whose rotational speed is precisely controlled electrically, and a rotation ratio of the stepping motor and the ball screw. And a timing pulley and a timing belt fixed to hold the integrated circuit device.

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