KR100232285B1 - Three-dimensional surface shape measuring equipment - Google Patents

Abstract

The present invention relates to a three-dimensional surface shape measuring apparatus, which has a base 10 having a pair of X-axis guides 11 formed thereon, and an X-axis feed step motor 12 and a base 10 disposed thereon. The movable table 14 connected by the X-axis screw 13 and the rotary table 15 at the upper portion thereof were installed, and the support 16 was installed on both sides of the base 10 so as to face each other. A Y-axis feed step motor 20 and a Y-axis feed screw 22 connected thereto are installed on an upper portion of the support 16, and Y-axis guides 21 are installed on upper and lower portions of the Y-axis feed screw 22. In addition, the Y-axis guide 21 and the Y-axis feed screw 22 is provided with a movable body 32, the Z-axis step motor 30 is installed on the upper portion of the movable body 32, the Z-axis step The Z-axis feed screw 31 connected to the motor 30 is installed through the distance sensor fastener 32, and the distance sensor 34 is Using gyeolpin 35 is a 360 ° hayeoseo rotatably installed.

Description

3D surface shape measuring device

The present invention relates to a three-dimensional surface shape measuring apparatus, which will be described in more detail to enable to accurately measure the surface roughness, roundness, and cylindricalness of the measurement target having a variety of surface shapes.

Conventional three-dimensional coordinate measuring machine (CMM) is a measuring device that represents a large object in three-dimensional coordinates, using a contact probe to measure the three-dimensional shape with a precision of 1㎛ (1 / 1000mm) class.

In the case of the surface roughness tester (surface roughtness tester) is used (0.01㎛ class) for the purpose of measuring the surface roughness or fine surface flaw of the flat specimen mounted on the XY table.

In the case of circular specimens, a roundness tester (roundness tester, 0.1㎛) is used to measure the roundness by measuring the circumferential surface shape by one rotation of the rotary table using a rotary table and a contact probe. Is being commercialized.

However, in the case of 3D coordinate measuring instrument, it is impossible to measure the shape of small specimens due to the limitation of the probe size (usually several mm or more in diameter). For this purpose, the measuring distance is shortened (usually 1 µm or less) in order to maintain the 0.1 µm grade, and shape measurement of curved surfaces other than the three-dimensional surface roughness of the plate specimen is impossible.

In addition, in the case of the roundness measuring device, since only the rotary table is mounted, measurement is impossible except for the circular specimen, and since the rotary table is always moved by one rotation, it is impossible to measure the specimen having an arbitrary angle in the shape of a fan.

Therefore, conventionally, there is no measuring device or measuring method for accurately displaying the surface shape of various objects in three-dimensional coordinates and roundness.

The present invention has been made to solve the above problems in consideration of the above problems, and it is possible to easily and easily measure various types of objects having different surface shapes, as well as to make precise measurements in three dimensions The object is to provide a surface shape measuring apparatus.

1 is a perspective view of the device of the present invention.

2 (a) (b) (c) (d) is a state diagram in which the distance measuring sensor of the present invention is located on different three-dimensional surface shapes.

Figure 3 (a) (b) (c) is a state diagram in which the distance measuring sensor of the present invention is located in a shape different from the second.

* Explanation of symbols for main parts of the drawings

10: Base 11: X axis guide

12: X axis feed step motor 13: X axis screw

14: moving table 15: rotary table

16: Support 20: Y axis feed step motor

21: Y axis guide 22: Y axis screw

30: Z axis feed step motor 31: Z axis screw

32: movable body 33: fastener

34: distance measuring sensor 35: fastening pin

The three-dimensional surface shape measuring apparatus of the present invention for achieving the above object, the X-axis transfer step motor 12 on one side so as to be transported along a pair of X-axis guides 11 provided on the base 10 Fasten the movable base 14 to the X-axis screw 13 to which is connected, and install a rotary table 15 capable of divided rotation on the upper side of the movable base 14, and oppose each other on both sides of the base 10. The movable body 32 is fastened to the Y-axis screw 22 to which the Y-axis feed step motor 20 is connected to one side so as to be transported along the pair of Y-axis guides 21 between the supports 16 installed so as to be connected to each other. The fastener 33 is fastened to the Z-axis screw 31 to which the Z-axis transfer step motor 30 is connected to one side so as to be movable in the vertical direction of the movable body 32, and the fastening pin 35 to the fastener 33. It is characterized in that it is configured to install a non-contact distance measuring sensor 34 to be able to rotate back and forth, left and right by using.

Hereinafter, the apparatus of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing the apparatus of the present invention.

The X-axis feed step motor 12 is moved to the X-axis screw 13 provided on one side to move along the X-axis guide 11 on the base 10 on which the pair of X-axis guides 11 are formed. (14) Tighten.

The rotary table 15 is installed on the upper part of the movable table 14, but the motor is rotated once by using a step motor attached with an encoder (a device for measuring the rotation angle and a product capable of measuring up to 1/1000 degrees). Alternatively, the segmentation measurement can be made at any angle.

On the other hand, on both sides of the base 10 to install the support 16 so as to face each other, the Y-axis screw 22 connected to the Y-axis feed step motor 20 is installed on one side of the support 16, The moving body 32 is fastened to the Y-axis screw 22 so as to move along a pair of Y-axis guides 21 installed above and below the Y-axis screw 22.

The Z-axis transfer step motor 30 is installed on the upper portion of the movable body 32, and the fastener 33 is penetrated through the end of the Z-axis screw 31 connected to the Z-axis transfer step motor 30. do.

The fastener 33 is installed so that the distance measuring sensor 34 can be rotated 360 ° in front, rear, left and right by using the fastening pin 35.

The distance measuring sensor 34 used in the present invention preferably uses a non-contact optical sensor. Since the spot diameter of the optical sensor is generally several micrometers, the shape of the micro-object can be measured. Do.

In addition, the distance measuring sensor 34, as shown in Figure 2, can be rotated up to 90 ° in each of the front, rear, left and right, so that any shape of the horizontal, vertical and inclined specimens can be measured.

On the other hand, the X-axis, Y-axis, Z-axis transfer step motor 12, 20, 30 is a micro step motor and a ball screw that is recently used as a precision transfer mechanism is conveyed at a resolution of 1㎛ or less It is possible to measure micro-fibers of several micrometers.

In addition, the controller (not shown) controls the X, Y, and Z axis transfer step motors 12, 20 and 30 of the apparatus of the present invention, and amplifies the analog signal of the distance measuring sensor 34. And a device for controlling the rotation angle of the rotary table 15, a program of input / output of measurement data and a movement path of the distance measurement sensor 34, and a Z-axis direction within a measurement range of the distance measurement sensor 34. Computer and printer (not shown in the figure) to perform the automatic transfer (to stop the transfer in the Z-axis direction in the measurement range by detecting the signal of the distance measuring sensor 34).

The computer has a built-in A / D, D / A converter for converting the electrical signal of the distance measuring sensor 34 to digital, and converts the digital signal into an electrical signal in order to control the motor, the measured data is a three-dimensional shape Also performs a graphic function.

The distance measuring sensor 34 is transferred to the initial measuring position of the specimen, and in the case of curved specimens, the manual feeding of the X, Y, Z axes and the rotary table 15 for the programming of the feeding path of the distance measuring sensor 34 is performed. The device is attached.

In conclusion, this device is a three-dimensional precision measuring instrument that can measure up to several μm of micro-objects with a resolution of 0.01 μm, and the maximum measuring size is the height and spacing of two supports 16 shown in FIG. Depending on the diameter of (15), the three-dimensional shape measurement range is equal to the maximum travel distance of the X, Y, and Z axes.

The apparatus includes all of the functions of a conventional three-dimensional coordinate measuring machine (CMM), surface roughness measuring instrument and roundness measuring instrument, and can perform various functions that these three measuring instruments can not perform. The remarkable effects of using the device of the present invention will be described.

Example 1

As shown in FIG. 2 (a), the angle of the distance measuring sensor 34 is vertical when the specimen of the horizontal plate is measured. After inputting the measuring range and manually moving the distance measuring sensor 34 to the initial measuring position, the Z-axis is fixed and the Y-axis is moved by a constant distance, and the flat plate by the measuring data of the distance measuring sensor 34 is continuously moved by the X axis. The microsurface shape (surface flaw, surface roughness, shape, etc.) of is measured.

Also, as shown in FIG. 2 (b), the horizontally curved curved specimens, as shown in FIG. 2 (c), the inclined horizontal or curved specimens, and as shown in FIG. 2 (d), the perpendicularly positioned flat or curved specimens are measured. At the time, the angle of the distance measuring sensor 34 is first adjusted from 0 degrees to 90 degrees to be perpendicular to the specimen.

While moving the distance measuring sensor 34 manually along a plane or curved surface of the measurement specimen (when the surface has a constant curvature such as a plane or sphere) or when the distance measuring sensor 34 does not cause interference. Input and learn the measuring path and measuring area and program them.

Next, after manually moving the distance measuring sensor 34 to the first measuring position, the distance measuring sensor 34 is continuously moved in the Z axis and X axis according to the program of the movement path while the Y axis is stepped at a predetermined interval. 34) The microsurface shape (surface flaw, surface roughness, shape, etc.) of the curved specimen based on the data is automatically measured. From this it can be seen that the apparatus of the present invention can achieve the combined function of the automatic CMM and three-dimensional surface roughness measuring instrument.

Example 2

As shown in FIG. 3 (a), when measuring the circular specimen, the angle of the distance measuring sensor 34 is adjusted to be perpendicular to the specimen, and the distance measuring sensor 34 is manually moved to the initial measuring position.

Next, the X, Y, and Z axes are fixed, and the rotary table 15 is rotated once to measure the microsurface shape (surface flaw, surface roughness, roundness, etc.) of the circular specimen by the distance sensor 34 data. This indicates that it can perform the function of the conventional roundness measuring device.

As shown in FIG. 3 (b), in the cylindrical specimen measurement, the angle of the distance measuring sensor 34 is adjusted to be perpendicular to the specimen, and then the X or Y axis is spaced at a predetermined interval along the vertical or curved surface of the specimen. While moving the distance measuring sensor 34 manually, the measuring path is input and programmed.

After manually moving the distance measuring sensor 34 to the first measuring position, the rotary table 15 is rotated once in accordance with the program of the movement path of the distance measuring sensor 34 on the X axis or the Y axis while stepping the Z axis at a predetermined interval. The microsurface shape (surface flaw, surface roughness, roundness, etc.) of the cylindrical specimen by the distance sensor 34 data is measured. It can be seen that the conventional roundness measuring device is more advanced than only the cylindricalness can be measured.

As shown in FIG. 3 (c), the angle adjustment of the distance measuring sensor 34 and the measurement path program of the distance measuring sensor 34 are the same as those of FIG. After manually moving the distance measuring sensor 34 to the initial measuring position, the angle of the rotary table 15 is adjusted according to the program of the movement path of the distance measuring sensor 34 on the X axis or the Y axis while stepping the Z axis at a predetermined interval. It rotates by arbitrary measurement angles, and measures the microsurface shape (surface flaw, surface roughness, fan shape, etc.) of the fan-shaped test piece by the distance sensor 34 data. This is not possible with other conventional meters.

As described in detail above, the apparatus of the present invention adds a rotation function to the front, rear, left, and right of the distance measuring sensor in a form incorporating three types of conventional apparatuses, so that the two-dimensional profile ( Measurement of various three-dimensional shapes such as measurement of the second plane (a), measurement of the inclined plane and vertical profile (see also the second (c) (d)), and the measurement of the arc plane (see the third (c)) Can be enabled as one simple device.

Claims (1)

The moving table 14 is fastened to the X-axis screw 13 to which the X-axis feeding step motor 12 is connected to one side so that the X-axis guide 11 is conveyed along the pair of X-axis guides 11 installed on the base 10. A pair of Y-axis guides 21 are provided between the support tables 16 installed on the upper side of the movable table 14 to allow the rotary table 15 to be divided in rotation, and to be opposite to both sides of the base 10. Z-axis transfer step motor to one side to fasten the movable body 32 to the Y-axis screw 22 connected to the Y-axis feed step motor 20 to one side to be transported along the, and to move in the vertical direction of the movable body 32 The fastener 33 is fastened to the Z-axis screw 31 to which the 30 is connected, and the non-contact distance measuring sensor 34 is rotatable back, front, left, and right by using the fastening pin 35 at the fastener 33. Three-dimensional surface shape measurement apparatus characterized in that the installation.