KR100223971B1 - Titanium composite cleaning chemical for semiconductor process - Google Patents
Titanium composite cleaning chemical for semiconductor process Download PDFInfo
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- KR100223971B1 KR100223971B1 KR1019970000689A KR19970000689A KR100223971B1 KR 100223971 B1 KR100223971 B1 KR 100223971B1 KR 1019970000689 A KR1019970000689 A KR 1019970000689A KR 19970000689 A KR19970000689 A KR 19970000689A KR 100223971 B1 KR100223971 B1 KR 100223971B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
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Abstract
본 발명에 따른 반도체장치 제조용 알미늄 쉴드의 티타늄화합물 세정액은, 순수에 과산화수소와 EDTA(Ethylenediamine Tetraacetic Acid) 및 수산화칼륨을 첨가하여 이루어지는 것을 특징으로 한다.The titanium compound cleaning liquid of the aluminum shield for manufacturing a semiconductor device according to the present invention is characterized in that the pure water is added by adding hydrogen peroxide, ethylenediamine tetraacetic acid (EDTA) and potassium hydroxide.
이러한 세정액을 사용하여 세정공정을 실시할 경우, 종래의 알미늄 쉴드 세정방법에서 발생되는, 과다한 시간이 걸리고, 세정액을 수시로 교체시키야 하며, 알미늄 쉴드가 손상되고, 유해한 화학물질을 사용해야 하는 문제점을 줄이거나 없앨 수 있다는 효과가 있다.When the cleaning process is performed using such a cleaning solution, the excessive amount of time generated in the conventional aluminum shield cleaning method may be excessive, the cleaning solution may need to be replaced frequently, the aluminum shield may be damaged, and the harmful chemicals may be used. There is an effect that can be eliminated.
Description
본 발명은 반도체장치 제조용 알미늄 쉴드의 티타늄화합물 세정액에 관한 것으로서, 보다 상세하게는 반도체장치 제조용 알미늄 쉴드의 티타늄화합물 세정액의 조성에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a titanium compound cleaning solution for an aluminum shield for semiconductor device manufacturing, and more particularly to a composition of a titanium compound cleaning solution for an aluminum shield for semiconductor device manufacturing.
반도체장치의 제조에 있어서, 소자를 형성하는 과정에서 웨이퍼에 티타늄이나 질화티타늄을 침적(Deposition)하는 공정이 있다. 이러한 공정은 공정챔버에서 이루어지는데 공정챔버 내부의 쉴드(Shield)를 알미늄으로 하는 경우가 있다. 침적공정이 진행되면 챔버내에 드러난 전면에는 티타늄 혹은 티타늄화합물이 침적되고 이들은 공정상의 불량요인이 되므로 일정 기간 공정이 이루어지면 내부를 세정하여 침적된 티타늄화합물을 제거해야 한다. 그리고 알미늄 쉴드에 침적된 티타늄화합물도 세정되어야 한다.BACKGROUND OF THE INVENTION In the manufacture of semiconductor devices, there is a process of depositing titanium or titanium nitride on a wafer in the process of forming devices. Such a process is performed in a process chamber, but the shield inside the process chamber is made of aluminum in some cases. As the deposition process proceeds, titanium or titanium compounds are deposited on the entire surface exposed in the chamber, and these may cause defects in the process. Therefore, when the process is performed for a certain period, the inside of the deposition process should be cleaned to remove the deposited titanium compounds. The titanium compound deposited on the aluminum shield must also be cleaned.
그런데, 종래에는 알미늄 쉴드에 침적된 티타늄화합물을 제거하는 방법은 다음과 같다.However, conventionally, a method of removing the titanium compound deposited on the aluminum shield is as follows.
우선, 냉각된 수산화암모늄과 과산화수소의 용액을 마련한다. 이때 화학물질등은 대형 플래스틱 용기에 넣는다. 그리고, 교반중 냉각을 위한 용기에는 냉각수단을 마련한다. 반응중에는 많은 열이 발생하므로 화학물질이 27℃를 넘지 않도록 15℃ 내지 20℃로 유지한다. 우선 탱크에 순수를 넣고 여기에 과산화수소와 수산화암모늄을 넣어 희석시키는 방법을 사용한다. 과산화수소와 수산화암모늄과 순수의 비율은 질량대비 7:1:8로 한다.First, a solution of cooled ammonium hydroxide and hydrogen peroxide is prepared. At this time, put chemicals in a large plastic container. And a cooling means is provided in the container for cooling during stirring. Since much heat is generated during the reaction, the chemicals are kept at 15 ° C to 20 ° C so as not to exceed 27 ° C. First, pure water is added to the tank and hydrogen peroxide and ammonium hydroxide are added thereto. The ratio of hydrogen peroxide, ammonium hydroxide and pure water is 7: 1: 8 by mass.
이상 세정액이 만들어지면 티타늄화합물로 침적된 알미늄 쉴드를 세정액에 담그게 된다. 세정시간은 침적물의 양에 따라 다를 것이나, 침적물이 제거되기 위해서는 대략 72시간 정도가 소요된다. 제거되는 동안 쉴드 표면에는 기포가 발생하며, 공정중에 세정액의 온도를 27℃이하로 낮게 유지해야 한다.When the above cleaning solution is made, the aluminum shield deposited with the titanium compound is immersed in the cleaning solution. The cleaning time will vary depending on the amount of deposit, but it will take approximately 72 hours to remove the deposit. Bubbles will form on the shield surface during removal and the temperature of the cleaning liquid should be kept below 27 ° C during the process.
세정이 이루어지면, 쉴드 일부에 남은 티타늄화합물을 액중에서 연마패드를 이용하여 제거하고, 순수로 쉴드를 세척한다.When the cleaning is done, the titanium compound remaining in the part of the shield is removed from the liquid using a polishing pad, and the shield is washed with pure water.
한편, 세정기간동안 알미늄 쉴드 표면은 다소 변질되어 검게 변하며, 이 부분은 20%의 질산, 3%의 불산을 순수에 용해시킨 용액에 넣어 처리한다.On the other hand, during the cleaning period, the aluminum shield surface is slightly deteriorated and turns black. This part is treated by adding 20% nitric acid and 3% hydrofluoric acid in a solution of pure water.
이상의 처리가 끝나면, 쉴드는 순수로 세정되고, 순수의 온도는 45℃를 넘지 않도록 한다. 그리고 파티클을 필터로 제거한 질소가스를 불어서 쉴드를 건조시킨다.After the above treatment, the shield is washed with pure water so that the temperature of pure water does not exceed 45 ° C. The shield is then dried by blowing nitrogen gas from which particles are filtered.
그리고 표면을 거칠게 하기 위해 비드 블러스터로 쉴드 표면을 연마처리하기도 한다.The surface of the shield is also polished with a bead blaster to roughen the surface.
이상의 종래의 알미늄 쉴드 세정방법은 세정액이 알미늄 쉴드의 티타늄, 혹은 티타늄화합물과 반응하여 이를 제거시키는 소요시간이 길고, 한편 세정액은 자체로써도 분해되어 사용가능기간이 6시간 정도였다. 즉, 한 번의 알미늄 쉴드 세정을 위해서도 여러 번 세정액을 교환해야 하는 문제가 있었다.In the conventional aluminum shield cleaning method, the cleaning liquid reacts with titanium or a titanium compound of the aluminum shield to take a long time, while the cleaning liquid decomposes itself and has a usable time of about 6 hours. That is, there was a problem that the cleaning solution had to be replaced several times even for one cleaning of the aluminum shield.
또한, 세정액에 의해 티타늄 등이 제거되는 동안 알미늄도 함께 부식되어 수명을 단축시키는 문제가 있었고, 수산화암모늄은 암모니아 가스를 발생시키므로 작업자의 사용에 애로가 있었다. 더욱이, 세정과정에서 알미늄이 검게 변하므로 이를 제거하기 위한 별도의 공정이 필요하고, 이를 위해 질산과 불산등 인체에 해롭고 위험한 산을 사용하는 문제가 있다.In addition, while titanium and the like were removed by the cleaning liquid, aluminum was also corroded together to shorten the lifespan, and ammonium hydroxide generated ammonia gas, thus making it difficult for workers to use it. Moreover, aluminum is blackened in the cleaning process, so a separate process is required to remove it, and there is a problem of using an acid harmful to humans such as nitric acid and hydrofluoric acid.
본 발명의 목적은, 이상의 종래의 알미늄 쉴드 세정방법에서 발생되는 문제점, 즉, 과다한 시간이 걸리고, 세정액을 수시로 교체시키야 하며, 알미늄 쉴드가 손상되고, 유해한 화학물질을 사용해야 하는 점 등을 줄이거나 없앨 수 있는, 반도체장치 제조용 알미늄 쉴드의 티타늄화합물 세정액을 제공하는 데 있다.The object of the present invention is to reduce or eliminate the problems caused by the conventional aluminum shield cleaning method, i.e., excessive time, frequent replacement of the cleaning solution, damage to the aluminum shield, and the use of harmful chemicals. The present invention provides a titanium compound cleaning solution for an aluminum shield for semiconductor device manufacturing.
상기 목적을 달성하기 위한 본 발명에 따른 반도체장치 제조용 알미늄 쉴드의 티타늄화합물 세정액은, 순수에 과산화수소와 EDTA(Ethylenediamine Tetraacetic Acid) 및 수산화칼륨을 첨가하여 이루어지는 것을 특징으로 한다.The titanium compound cleaning solution of the aluminum shield for semiconductor device manufacturing according to the present invention for achieving the above object is characterized in that the addition of hydrogen peroxide, ethylenediamine tetraacetic acid (EDTA) and potassium hydroxide to the pure water.
본 발명의 세정액은 경험적으로 바람직하게는 순수 : 과산화수소 : EDTA : 수산화칼륨을 질량대비 40 : 75 : 1 : 1 정도로 혼합하여 이루어지나, 각 성분이 전반적으로 20% 내외의 변이가 있어도 세정효과에서 좋은 결과를 얻을 수 있다.The cleaning solution of the present invention is empirically preferably made of a mixture of pure water: hydrogen peroxide: EDTA: potassium hydroxide 40: 75: 1: 1 by weight relative to the mass, even if each component has a variation of about 20% overall, good cleaning effect You can get the result.
본 발명에서 EDTA는 티타늄화합물을 제거시키는 데 특히 적합성을 가지는 조성물이며, 일반적인 상태에서 수산화칼륨용액은 알미늄을 부식시키나, 본 발명의 세정액에서는 알미늄은 거의 부식시키지 않는 상태로 티타늄화합물을 제거하는 작용을 돕고 있다.EDTA in the present invention is a composition that is particularly suitable for removing titanium compounds, potassium hydroxide solution in the general condition to corrode aluminum, but in the cleaning solution of the present invention to remove the titanium compound in a state that almost does not corrode aluminum. Is helping.
이하, 본 발명의 구체적인 실시예 및 그 적용예를 상세히 설명한다.Hereinafter, specific embodiments of the present invention and application examples thereof will be described in detail.
본 실시예에서는 순수 : 과산화수소 : EDTA : 수산화칼륨의 질량대비를 60 : 75 : 1 : 1로 하여 세정액을 조성하였다. 이 밖에도 과산화수소와 순수의 비율이 1 : 2 내지 2 : 1, 수산화칼륨의 절대량이 순수에 대해 10%이내나 기타 과다하지 않은 범위에서 EDTA와 수산화칼륨의 비율이 1 : 2 내지 2 : 1의 내외인 경우에도 각각 알미늄 쉴드 세정공정에서 종래에 비해 좋은 결과를 얻을 수 있었다.In this example, the cleaning solution was prepared with a mass ratio of pure water: hydrogen peroxide: EDTA: potassium hydroxide as 60: 75: 1: 1. In addition, the ratio of hydrogen peroxide and pure water is 1: 2 to 2: 1, the absolute amount of potassium hydroxide is less than 10% of pure water, but the ratio of EDTA and potassium hydroxide is about 1: 2 to 2: 1 in the range that is not excessive. Even in the case of the aluminum shield cleaning process was able to obtain good results compared to the conventional.
이하, 본 발명의 세정액에 따른 알미늄 쉴드에서의 티타늄화합물의 제거과정을 살펴보자.Hereinafter, the removal process of the titanium compound in the aluminum shield according to the cleaning solution of the present invention.
우선, 종래와 같이 큰 용기에 각 화학물질을 넣어 세정액을 조성한다. 수산화암모늄 대신에 EDTA 및 수산화칼륨이 포함된다. 본 발명의 세정액에서는 교반중과 세정액 완성 후, 종래와 같이 급격한 반응과 그로 인한 과열의 정도가 작으므로 조절이 용이하다. 혼합액은 처음에는 현탁액과 같이 뿌연 상태이나 잘 저어서 투명한 상태를 만들 수 있다.First, each chemical is put into a large container as in the prior art to form a cleaning liquid. EDTA and potassium hydroxide are included instead of ammonium hydroxide. In the cleaning liquid of the present invention, the adjustment is easy because the degree of rapid reaction and the resulting overheating is small, as during the stirring and after completion of the cleaning liquid. The mixed liquor may initially be cloudy or stir like a suspension to form a clear state.
이상의 세정액이 완성되면, 티타늄화합물이 침적된 알미늄 쉴드를 세정액에 담근다. 티타늄이 제거되기까지는 종래의 72시간에 비해 36시간 내지 72시간이 소요된다. 따라서 약간 세정시간이 짧아진다. 그러나, 이때 세정이 완료되면 알미늄 표면은 종래와 같이 검게 변색되지 않으므로 변색된 부분을 처리하기 위한 질산, 불산 용액을 이용한 처리가 생략될 수 있으므로 전체의 처리는 많이 간결해진다.When the above cleaning solution is completed, the aluminum shield in which the titanium compound is deposited is immersed in the cleaning solution. Titanium is removed from 36 to 72 hours as compared to the conventional 72 hours. Therefore, the washing time is shortened slightly. However, when the cleaning is completed, the aluminum surface is not blackened as in the prior art, so the treatment with nitric acid and hydrofluoric acid solution for treating the discolored portion may be omitted, so that the whole process is simplified.
더욱이, 세정과정에서 종래와 같은 알미늄 쉴드의 부식이 거의 없음을 다음 표1을 통해 알 수 있다.Furthermore, it can be seen from Table 1 that there is almost no corrosion of the aluminum shield as in the cleaning process.
상기 표1에서 수치는 질량(g)을 나타내고, A는 하나의 알미늄 쉴드로 최초시료무게에 120g 정도의 티타늄화합물이 침적된 시료이며, B는 또다른 알미늄 쉴드로 최초시료무게에 170g 정도의 티타늄화합물이 침적된 시료이다.In Table 1, the numerical value represents mass (g), A is a sample in which an aluminum shield is deposited with about 120 g of titanium compound at the initial sample weight, and B is another aluminum shield with 170 g of titanium at the initial sample weight. The compound is a sample deposited.
이상의 처리 후, 순수로 세정하고, 비드 블러스터를 이용하여 거친가공을 하고, 베이크를 통해 수증기와 아웃개스를 제거하면 된다.After the above treatment, it is washed with pure water, rough processing is performed using a bead blaster, and water vapor and outgas may be removed through baking.
이상의 실시예 외에도, 과산화수소와 순수의 비율이 1:2 내지 2:1, 수산화칼륨의 절대량이 순수에 대해 10%이내이거나 기타 과다하지 않은 범위에서 EDTA와 수산화칼륨의 비율이 1 : 2 내지 2 : 1의 내외인 경우에도 알미늄 쉴드 세정공정에서 좋은 결과를 얻을 수 있었다.In addition to the above embodiments, the ratio of hydrogen peroxide and pure water is 1: 2 to 2: 1, and the ratio of EDTA and potassium hydroxide is 1: 2 to 2: in an absolute amount of potassium hydroxide within 10% or other excess. Even in the case of 1, good results were obtained in the aluminum shield cleaning process.
따라서, 본 발명에 의하면 종래의 알미늄 쉴드 세정방법에서 발생되는, 과다한 시간이 걸리고, 세정액을 수시로 교체시키야 하며, 알미늄 쉴드가 손상되고, 유해한 화학물질을 사용해야 하는 문제점을 줄이거나 없앨 수 있는 효과가 있다.Therefore, according to the present invention, an excessive amount of time, which is generated in the conventional aluminum shield cleaning method, takes time to replace the cleaning solution, and the aluminum shield is damaged, and there is an effect of reducing or eliminating the problem of using harmful chemicals. .
이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.
Claims (5)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970000689A KR100223971B1 (en) | 1997-01-13 | 1997-01-13 | Titanium composite cleaning chemical for semiconductor process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019970000689A KR100223971B1 (en) | 1997-01-13 | 1997-01-13 | Titanium composite cleaning chemical for semiconductor process |
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| KR19980065607A KR19980065607A (en) | 1998-10-15 |
| KR100223971B1 true KR100223971B1 (en) | 1999-10-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019970000689A KR100223971B1 (en) | 1997-01-13 | 1997-01-13 | Titanium composite cleaning chemical for semiconductor process |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100223971B1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100319716B1 (en) * | 1998-04-07 | 2002-01-09 | 손정하 | shield washing system and the method of atmosphere pressure chemical vapor deposition apparatus |
| KR100439478B1 (en) * | 2001-12-22 | 2004-07-09 | 동부전자 주식회사 | Method for cleaning a shield of a metal film deposition apparatus |
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1997
- 1997-01-13 KR KR1019970000689A patent/KR100223971B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR19980065607A (en) | 1998-10-15 |
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