KR100206162B1 - Resin for resist material - Google Patents

Resin for resist material Download PDF

Info

Publication number
KR100206162B1
KR100206162B1 KR1019980709481A KR19980709481A KR100206162B1 KR 100206162 B1 KR100206162 B1 KR 100206162B1 KR 1019980709481 A KR1019980709481 A KR 1019980709481A KR 19980709481 A KR19980709481 A KR 19980709481A KR 100206162 B1 KR100206162 B1 KR 100206162B1
Authority
KR
South Korea
Prior art keywords
resin
resist material
resist
Prior art date
Application number
KR1019980709481A
Other languages
Korean (ko)
Inventor
Walter Raymond Hertler
Dotsevi Yao Sogah
Gray Newton Taylor
Original Assignee
Lucent Technologies Inc
Du Pont Photomasks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/507,342 external-priority patent/US5206317A/en
Application filed by Lucent Technologies Inc, Du Pont Photomasks Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of KR100206162B1 publication Critical patent/KR100206162B1/en

Links

KR1019980709481A 1990-04-10 1998-11-23 Resin for resist material KR100206162B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US07/507,342 US5206317A (en) 1990-04-10 1990-04-10 Resist material and process for use
PCT/US1991/001977 WO1991015810A1 (en) 1990-04-10 1991-03-28 Resist material and process for use
KR1019920702506A KR100198408B1 (en) 1990-04-10 1991-03-28 Resist material and process for use

Publications (1)

Publication Number Publication Date
KR100206162B1 true KR100206162B1 (en) 1999-07-01

Family

ID=26629484

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980709481A KR100206162B1 (en) 1990-04-10 1998-11-23 Resin for resist material

Country Status (1)

Country Link
KR (1) KR100206162B1 (en)

Similar Documents

Publication Publication Date Title
EP0382548A3 (en) Thermoplastic resin composition
EP0476926A3 (en) Polypropylene-based resin composition
EP0472898A3 (en) Thermoplastic resin composition
EP0508409A3 (en) Photocurable resin composition
EP0483832A3 (en) Thermoplastic resin composition
GB2246356B (en) A resin composition and a process for making the same
EP0435504A3 (en) Thermoplastic resin composition
EP0454156A3 (en) Thermoplastic resin composition
EP0425207A3 (en) Thermoplastic resin composition
EP0469542A3 (en) Thermoplastic resin composition
EP0479560A3 (en) Stabilized thermoplastic resin composition
EP0430221A3 (en) Photosensitive resin composition
EP0439138A3 (en) Thermoplastic resin composition
EP0462785A3 (en) Resin composition for toners
GB2270523B (en) Phenolic resin molding material
EP0443736A3 (en) Thermoplastic resin composition
EP0472960A3 (en) Thermoplastic resin composition
KR0146485B1 (en) Photosensitive resin composition
EP0470557A3 (en) Resin composition
GB9006589D0 (en) Improved reinforcing material
KR100197644B1 (en) Thermoplastic resin composition
EP0443346A3 (en) Thermoplastic resin composition
NZ236981A (en) Photosensitive resin composition
EP0405935A3 (en) Thermoplastic resin composition
EP0483736A3 (en) Resin composition

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20080402

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee