KR100206162B1 - Resin for resist material - Google Patents
Resin for resist material Download PDFInfo
- Publication number
- KR100206162B1 KR100206162B1 KR1019980709481A KR19980709481A KR100206162B1 KR 100206162 B1 KR100206162 B1 KR 100206162B1 KR 1019980709481 A KR1019980709481 A KR 1019980709481A KR 19980709481 A KR19980709481 A KR 19980709481A KR 100206162 B1 KR100206162 B1 KR 100206162B1
- Authority
- KR
- South Korea
- Prior art keywords
- resin
- resist material
- resist
- Prior art date
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/507,342 US5206317A (en) | 1990-04-10 | 1990-04-10 | Resist material and process for use |
PCT/US1991/001977 WO1991015810A1 (en) | 1990-04-10 | 1991-03-28 | Resist material and process for use |
KR1019920702506A KR100198408B1 (en) | 1990-04-10 | 1991-03-28 | Resist material and process for use |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100206162B1 true KR100206162B1 (en) | 1999-07-01 |
Family
ID=26629484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019980709481A KR100206162B1 (en) | 1990-04-10 | 1998-11-23 | Resin for resist material |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100206162B1 (en) |
-
1998
- 1998-11-23 KR KR1019980709481A patent/KR100206162B1/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A107 | Divisional application of patent | ||
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20080402 Year of fee payment: 10 |
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LAPS | Lapse due to unpaid annual fee |