KR100205336B1 - Device for correcting a magnification - Google Patents

Abstract

The magnification correction device includes: a reticle engraved with a circuit pattern to be exposed and a first alignment mark formed; Optical means for condensing and imaging the light passing through the reticle at a set magnification; A plate on which a second alignment mark is formed, which is placed on the plate stage, onto which the light collected by the optical means is irradiated; Magnification check sensor means for detecting whether the first alignment mark of the reticle and the second alignment mark of the plate coincide; A central processing unit for determining the magnification of the first alignment mark and the second alignment mark of the reticle according to the signal output from the magnification check sensor means, and outputting a magnification correction signal corresponding to the difference when the magnification does not match Wow; It comprises a position shifting means for correcting the rate by varying the position of the optical means in accordance with the magnification correction signal output from the central processing unit, the magnification correction time is short, no additional maintenance cost for the alignment device, Mounting on the lens mounter saves installation space, and the optical sensor makes it easy to check the correction status of the magnification and to correct the magnification according to the degree of deformation of the exposed plate, saving time and economical efficiency. An improvement effect occurs.

Description

Magnification correction device

1 is a configuration diagram of a magnification correction device according to the prior art,

2 is a configuration diagram of another magnification correction device according to the prior art,

3 is a configuration diagram of a magnification correction device according to a first embodiment of the present invention,

4 is a detailed view of the alignment sensor unit of the magnification correction device structure according to the embodiment of the present invention,

5 is a diagram illustrating a connection state of an electronic device of a magnification correction device according to an embodiment of the present invention.

6 is a configuration diagram of a magnification correction device according to a second embodiment of the present invention,

7 is a configuration diagram of a magnification correction device according to a third embodiment of the present invention.

8 is a block diagram showing a PGA sensor unit according to an embodiment of the present invention,

9 is an exploded perspective view of the reticle and the plate stage according to the embodiment of the present invention,

FIG. 10 shows an operation state diagram for correcting the size change state and magnification of the deformed plate according to the embodiment of the present invention.

* Explanation of symbols for main parts of the drawings

10 prism 15 lens portion for magnification correction

20: lens unit 40: magnification correction lens

42: first lens 44: second lens

46: third lens 50: moving distance detector

52: alignment sensor unit 54: plate type step motor unit

56: position moving unit 60: reflector

70: reticle 80: plate

90 plate stage 100 magnification check sensor unit

110: TTL sensor unit 120: flat glass scale

130: position detection slit 140: limit check slit

150: first optical sensor 152: light emitting diode

155: first slit 160: second optical sensor

162: light emitting diode 165: second slit

170: central processing unit 180: step motor controller

190: motor 200: ball screw portion

210: drive motor portion 212: encoder

215: drive motor controller 220: magnification correction rotating lens unit

225: rotary lens controller 230: first alignment mark

250: light source 260: mirror

270: polarizing plate 280: lambda / 4 plate

290: second alignment mark 300: light detection sensor unit

310: PGA sensor unit

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnification correction device, which is adapted to the magnification required by the optical system in a semiconductor exposure device (equivalent magnification 1: 1 or reduction magnification 5: 1), magnification that the exposure device has at the time of assembly, or thermal deformation of a plate. When a cause of surface expansion or warpage and a surface error of a plate stage occurs, a magnification correction between the reticle and the plate using a projection reflective lens system is performed so that the circuit pattern of the reticle is accurately imaged and exposed on the plate. It relates to a magnification correction device for.

In general, in the manufacture of a liquid crystal display (LCD), an exposure process in which an electric circuit engraved on a reticle on a plate using light is engraved is the most important process.

The plate is coated with a material that is exposed to light of a specific wavelength, and an electrical circuit engraved on the reticle by an exposure light source is imaged at a magnification of 1: 1 on the plate, and is then exposed by the photosensitive material applied on the plate. do.

On the reticle stage there is a blinder to limit the exposure light source to the electrical circuit pattern on the reticle to illuminate the electrical circuit pattern on the reticle only on the plate.

The electrical circuit pattern of the reticle is exposed on the plate surface and the electrical circuit pattern is engraved on the center of the plate except for a portion of the plate periphery.

The periphery of the plate is mounted on the periphery of the plate in the assembling step, which is the final stage of manufacturing the liquid crystal display device.

The exposure is basically required to maintain the same magnification in the exposure to each layer as the structure of the LCD panel overlaps about seven layers of pattern layers, respectively.

A magnification correction device is used to satisfy the above requirements.

Next, a conventional magnification correction device will be described in detail with reference to the accompanying drawings.

1 is a configuration diagram of a magnification correction device according to the prior art, and FIG. 2 is a configuration diagram of a magnification correction device according to another prior art.

As shown in FIG. 1, a conventional magnification correction device is a block of a multilayer mounted lens group in which about 25 lenses used in a projection optical system are mounted in a sealed state and then sealed in a multilayer-installed barrel in a sealed state. It is a device that can cause a change in magnification artificially by generating a change in transmittance between the lenses of the multilayer through the pressure of the nitrogen gas injected into the lens.

However, since the device seals several barrels having multiple layers of lenses and pressurizes and depressurizes nitrogen gas into the space between the multilayer-mounted range and the lens, it is possible to artificially change the transmittance between the lenses. An apparatus for accelerating and decompressing is required, and a range of magnification correction through this is not large.

In addition, as shown in FIG. 2, another conventional magnification correcting apparatus changes the position of the lens upon application of a current for holding and supporting two lenses that become masters that can cause magnification change in a multi-layered lens group. Magnification can be corrected by applying an appropriate power source to the piezoelectric element.

However, the apparatus changes the position of the master lens in the barrel using a piezoelectric element, but the change range is very fine, and there is a disadvantage that a separate piezoelectric element driving circuit is required.

Therefore, the conventional magnification correction apparatus has a problem that it is difficult to refine the exposure apparatus because the magnification correction is small when the cause of the deformation of the plate and the surface error of the plate stage occurs and the magnification correction is small, the error is large, and the correction is not easy. have.

SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem. In the semiconductor exposure apparatus, surface expansion and warpage occur due to thermal deformation of a plate, and the like. At the time of exposure to reduce the magnification ratio 5: 1), the exposure operation that always checks and corrects the magnification on the specification is corrected by the optical system using a projection reflective lens system, or the magnification difference due to thermal deformation of the reticle and plate. An object of the present invention is to provide a magnification correction device that enables accurate imaging operation.

As a means for achieving the above object, the constitution of the present invention includes: a reticle in which a circuit pattern to be exposed is engraved and a first alignment mark is formed; Optical means for condensing and imaging the light passing through the reticle at a set magnification; A plate on which a second alignment mark is formed, which is placed on the plate stage, onto which the light collected by the optical means is irradiated; Magnification check sensor means for detecting whether the first alignment mark of the reticle and the second alignment mark of the plate coincide; A central processing unit for determining the magnification of the first alignment mark and the second alignment mark of the reticle according to the signal output from the magnification check sensor means, and outputting a magnification correction signal corresponding to the difference when the magnification does not match Wow; And a position shifting means for correcting the rate by varying the position of the optical means in accordance with the magnification correction signal output from the central processing unit.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The most preferred embodiments which can be easily implemented by those skilled in the art will be described in detail with reference to the accompanying drawings.

3 is a configuration diagram of the magnification correction device according to the first embodiment of the present invention, and FIG. 4 is a detailed view of the alignment sensor unit of the structure of the magnification correction device according to the embodiment of the present invention, and FIG. 5 is an embodiment of the present invention. FIG. 6 is a configuration diagram illustrating a connection state of an electronic device of a magnification correction device according to an embodiment of the present invention. FIG. 6 is a configuration diagram of a magnification correction device according to a second embodiment of the present invention, and FIG. 7 is a magnification according to a third embodiment of the present invention. FIG. 8 is a block diagram showing a PGA sensor unit according to an embodiment of the present invention. FIG. 9 is an exploded perspective view of a reticle and a plate stage according to an embodiment of the present invention. An operation state diagram for correcting the size change state and magnification of the deformed plate according to the embodiment of the invention is shown.

As shown in FIG. 3 to FIG. 5 and FIG. 8 to FIG. 10, the configuration of the magnification correction device according to the first embodiment of the present invention is output from the light source unit 250 shown in FIG. TTL sensor unit 110 for transmitting the light to the corresponding position, and the first alignment mark 230 consisting of two marks irradiated by the light transmitted by the TTL sensor unit 110 and formed at a predetermined interval (L) A reticle 70 formed thereon, a magnification correction lens portion 15 disposed at a predetermined interval from the reticle 70, and a λ / 4 plate through which light passing through the magnification correction lens portion 15 passes ( 280, and a second alignment mark 290 formed of two marks at a predetermined interval L, and the plate to which the light passed by being polarized by λ / 4 is irradiated by the λ / 4 plate 280 ( 80, the plate stage 90 on which the plate 80 is located, and the plate stage 90 The position value of the magnification check sensor part 100 which is provided in the edge part, and confirms the required magnification of the magnification correction lens part 15, and the said 2nd alignment mark 290 detected by the said magnification check sensor part 100. And a position moving unit 56 connected to the central processing unit 170 to move the position of the magnification correcting lens unit 15.

As shown in FIG. 10, the TTL sensor unit 110 irradiates the light source 250 and the light output from the light source 250 toward the reticle 760 in order to irradiate light onto the reticle 70. A polarized beam splitter 270 that passes through the mirror 260 and the light irradiated by the mirror 260, and polarizes and outputs the light reflected and incident on the plate 80 in a corresponding direction; The photodetecting sensor unit 300 is configured to detect light that is reflected by the plate 60 polarized at 270 and output to the central processing unit 170.

As shown in FIG. 3, the magnification correcting lens unit 15 sets a prism 10 for dispersing and outputting alignment light passing through the reticle 70, and the light output from the prism 10. The lens unit 20, which is formed according to the magnification and whose position is changed according to the operation of the position shifter 56, and whose magnification changes, reflects the light formed by the lens unit 20 to the prism 10. It consists of a reflector 60.

As shown in FIG. 3, the lens unit 20 includes a first lens 42, a second lens 44, and the first lens 42 that condense the light output from the prism 10. The magnification correction lens 40 forms an image of light collected by the second lens 44.

As shown in FIG. 3, the position shifter 56 includes a step motor controller 180 connected to an output terminal of the central processing unit 170 and a magnification correcting lens connected to an output terminal of the step motor controller 180. A flat plate type step motor unit 54 for shifting the position of the magnification correcting lens 40 of the lens unit 20 of the unit 15, and the magnification correcting lens 40 connected to the magnification correcting lens 40 It consists of a movement distance detection unit 50 consisting of an alignment sensor unit 52 for detecting a movement distance.

In addition, as shown in FIG. 4, the alignment sensor unit 52 is configured to identify the precise positional change of the magnification correcting lens 40 of the lens unit 20 of the magnification correcting lens unit 15. moire phenomenon, the position detection slit 130 and the limit check slit 140 are engraved, except for the slits 130 and 140 are coated with chromium, the lens portion of the lens unit 15 for magnification correction The flattened glass scale 120 which cooperates with the movement of the magnification correcting lens 40 of 20, and the magnification correcting lens 40 of the lens unit 20 of the magnification correcting lens unit 15 by using a moir phenomenon. The first optical sensor 150 detects a driving position, and the second optical sensor 160 detects a driving range of the magnification correcting lens 40.

As shown in FIG. 4, the first optical sensor 150 is positioned at the lower end of the position detection slit 130 formed on the flat panel glass scale 120 and emits a predetermined amount of light. And a first slit positioned at an upper end of the position detection slit 130 of the flat glass scale 120 and having a diagonally formed diagonally to allow light passing through the position detection slit 130 to enter a moire phenomenon. 155 and a light receiving diode 150 for receiving the light output through the first slit 155.

As shown in FIG. 4, the second optical sensor 160 is positioned at the lower end of the limit check slit 140 of the flat panel glass scale 120 and emits a predetermined amount of light. A second slit 165 mounted to an upper end of the check slit 140 and a light receiving diode 1601 receiving light output through the limit check slit 140 and the second slit 165.

In addition, as shown in FIG. 5, the step motor controller 180 of the position shifter 56 is connected to the motor 190 and has a magnification correcting lens of the lens system 20 of the lens unit 15 for magnification correction. Change the position of 40).

The operation of the magnification correction device according to the first embodiment of the present invention by the above configuration is as follows.

First, as shown in FIG. 10, the light output from the light source unit 250 of the TTL sensor unit 110 is reflected by the mirror 260 and is irradiated to the reticle 70 through the polarizing plate 270.

An electric circuit pattern is engraved on the reticle 70, and the first alignment mark 230 is coated with a chromium component except for a portion where two first alignment marks 230 formed at a predetermined interval L are formed. The light passing through the polarizing plate 270 passes through, and the light does not pass through the remaining portions coated with the chromium component.

The light passing through the reticle 70 is incident on the lens unit 20 by the prism 10 of the lens unit 15 for correcting magnification.

The light incident on the ranger 20 is collected by the first lens 42 and the second lens 44 and then imaged by the magnification correcting lens 40.

The light formed by the magnification correcting lens 40 is reflected by the reflecting mirror 60 and then incident on the prism 10 through the lens unit 20 and reflected by the λ / 4 plate 280.

Then, the light reflected by the prism 10 of the magnification correcting lens unit 15 is irradiated onto the plate 80 through the λ / 4 plate 280, the λ / 4 plate 280 Only light incident in the vertical direction passes, and light incident in the horizontal direction is reflected.

The light irradiated onto the plate 80 is diffracted by the second alignment mark 290 and then incident on the polarizing plate 270 via the magnification correcting lens unit 15. Therefore, the polarizing plate 270 polarizes the light incident by being reflected by the second alignment mark 290 of the plate 80 by the corresponding angle and outputs the polarized light to the photodetecting sensor unit 300.

Therefore, the photodetecting sensor unit 300 detects the reflected light and outputs the corresponding signal to the central processing unit 170.

At this time, the central processing unit 170 is a plate stage 90 so that the magnification check sensor 100 installed on the outer end of the plate stage 90 is located below one mark of the second alignment mark 290 of the plate 80. ) And measure the coordinates (X, Y) of the plate stage 90 when the magnification check sensor 100 is accurately positioned below the second alignment mark 290.

The magnification check sensor 100 is formed of a light receiving sensor, and when the magnification check sensor 100 is positioned correctly under the second alignment mark 290, the magnification check sensor 100 communicates the second alignment mark 290 of the reticle 70. The signal corresponding to the light formed on the plate 80 is output to the central processing unit 170.

After the coordinate measurement, the central processing unit 170 drives the plate stage 90 so that the magnification check sensor 100 is positioned under the other one of the second alignment marks 290 of the plate 80. As described above, the coordinates (X1, Y1) of the plate stage 90 are measured, and then the distance between the two coordinates (X, Y) and (X1, Y1) measured above is measured.

The central processing unit 170 has a distance difference between the measured two coordinates (X, Y) and (X1, Y1) equal to the distance L between the first alignment marks 230 formed on the reticle 70. The optical system magnification of the lower surface exposure apparatus is determined to be the same magnification (1: 1).

If the distance between the compared coordinates and the distance L between the first alignment mark 230 of the reticle 70 are not the same, it is determined that the magnification is not the same, so as to correct the magnification by the distance difference. The position moving unit 56 is driven to adjust the magnification.

The step motor controller 180 of the position moving unit 56 drives the flat plate type step motor 54 according to the magnification correction signal applied from the central processing unit 170.

As the flat plate type step motor 54 mounted below the magnification correcting lens 40 is driven, the magnification correcting lens 40 moves in the X-axis direction, and the alignment sensing unit 52 moves in the magnification correcting lens 40. ) Detects the amount of movement and outputs the corresponding signal to the CPU 170.

As the magnification correcting lens 40 moves in the X-axis direction, the first light of the alignment sensor unit 52 moves in accordance with the movement of the flat glass scale 120 moving in conjunction with the movement of the magnification correcting lens 40. The signal output in the corresponding state from the sensor 150 and the second optical sensor 160 is variable.

That is, the light output from the light emitting diode 152 of the first optical sensor 150 passes through the position detection slit 130 formed on the flat panel glass scale 120 and then passes through the first slit 155. The moire phenomenon is generated by the pattern of the detection slit 130 and the pattern of the first slit 155, and the light receiving diode 1501 converts an optical signal corresponding to the interference fringe generated by the moire phenomenon into an electrical signal. To the central processing unit 170.

The central processing unit 170 calculates the movement amount of the magnification correcting lens 40 by the interference fringe generated by the movement of the magnification correcting lens 40 of the lens unit 20 of the magnification correcting lens unit 15, It is determined whether the magnification correcting lens 40 is out of the driving range according to the signal output from the second optical sensor 160.

That is, when the optical signal is continuously output from the second optical sensor 160, it is determined that the magnification correcting lens 40 moves within the driving range set by the limit check slit 140, and the second optical sensor ( When the optical signal is not output at 160, it is determined that the magnification correcting lens 40 is out of the driving range, and the driving of the flat plate step motor unit 54 of the position moving unit 56 is stopped.

As described above, when the magnification does not match, the central processing unit 170 varies the position of the magnification correcting lens 40 of the magnification correcting lens unit 15 by the difference in the calculated magnification, and the position shifter 56 The step motor controller 180 so that the magnification correcting lens 40 is accurately positioned at the position for correcting the magnification difference generated by sensing the movement amount of the magnification correcting lens 40 according to the signal output from the alignment sensor unit 52 of the To control.

In addition, the position of the magnification correcting lens 40 of the magnification correcting lens unit 15 is changed to correct the magnification difference, and then the plate stage 90 is moved in the corresponding direction Z according to the position of the magnification correcting lens 40. To change the position of the plate 80.

Next, the operation of the magnification correction device according to the second embodiment of the present invention will be described with reference to FIG.

As shown in FIG. 6, the configuration of the magnification correction device according to the second embodiment of the present invention is the same as that of the first embodiment described above, and merely changes the position of the magnification correction lens 40. FIG. The position moving unit 560 is configured differently.

As shown in FIG. 6, the position shifting unit 560 according to the second embodiment of the present invention includes a driving motor controller 215 connected to an output terminal of the central processing unit 170, and the lens unit 15 for correcting magnification. The driving motor unit 210 for driving the magnification correction lens 40, the encoder 212 for detecting the rotation amount of the driving motor unit 210, and the driving motor unit 210 as a driving source. The ball screw part 200 which changes the position of the magnification correction lens 40 of the magnification correction lens part 15 is comprised.

The operation of the magnification correction device according to the second embodiment of the present invention made as described above is as follows.

The magnification check operation between the image of the reticle 70 and the plate 80 image is performed in the same manner as in the first embodiment.

When the magnification does not match after the magnification check operation between the image of the reticle 70 and the plate 80 is performed as described in the first embodiment, the central processing unit 170 positions the magnification correction signal corresponding to the magnification difference. Output to the drive motor controller 215 of the moving unit 560.

The driving motor controller 215 of the position shifting unit 560 operates the driving motor unit 210 according to the magnification correction signal applied from the central processing unit 170, and according to the operation of the driving motor unit 210. The ball screw device 200 moves in the horizontal direction so that the position of the magnification correcting lens 40 is changed. Therefore, the magnification of the lens portion 20 of the lens portion 15 for magnification correction is variable.

The driving motor unit 210 mounted at the bottom of the magnification correcting lens 40 moves the position of the magnification correcting lens 40 of the lens unit 20 of the magnification correcting lens unit 15 according to the rotational movement in the X-axis direction. The encoder 212 detects the amount of rotation of the driving motor unit 210 and outputs a corresponding signal to the central processing unit 170.

Therefore, the central processing unit 170 measures the amount of rotation of the driving motor unit 210 in accordance with the signal output from the encoder 212, the magnification correcting lens 40 of the lens unit 20 of the magnification correcting lens unit 15. Since the amount of movement of the c) is measured, the position of the plate 80 is also corrected in the same manner as in the above-described first embodiment.

The change amount of the image magnification and the change amount of the image focal plane, which are the change amounts of the magnification according to the moving distance of the magnification correcting lens 40, are stored in the central processing unit 170 after the exposure apparatus is assembled, and the magnification correction may be required during the actual process. At this time, the position adjustment of the magnification correcting lens 40 and the movement of the plate stage 90 are performed quickly and accurately only by the magnification change amount detected by the magnification check sensor unit 100.

Next, the operation of the magnification correction device according to the third embodiment of the present invention will be described.

As shown in FIG. 7, a configuration of a magnification correction device according to another exemplary embodiment of the present invention includes a TTL sensor unit 110 that transmits light output from the light source unit 250 shown in FIG. 10 to a corresponding position. And a reticle 70 in which the light transmitted by the TTL sensor unit 110 is irradiated and the first alignment mark 230 formed of two marks formed at a predetermined interval L is formed, and the reticle 70 is formed. ), And the light reflected by the reflecting mirror 60 is reflected by the prism 10, and each of the fixed magnifications having a circular rotation axis of the galarian method. A magnification-correcting rotating lens unit 220 composed of different lenses, a λ / 4 plate 280 for passing the light passing through the magnification-correcting lens unit 150, and two marks at a predetermined interval L. 2 alignment marks 290 are formed, and the λ / 4 plate 280 A lens 80 for magnification correction provided at the end of the plate 80, the plate stage 90 on which the plate 80 is positioned, and the plate stage 90 on which the light passed through is polarized by? A central processing unit which receives and processes the magnification check sensor unit 100 for confirming the required magnification of 150 and the position value of the second alignment mark 290 detected by the magnification check sensor unit 100 ( 170 and a rotation lens controller 225 that receives the position value processed by the central processing unit 170 and controls the magnification correction rotating unit 220.

Since the configuration of the TTL sensor unit 110 is configured as shown in FIG. 10, a description of the configuration is omitted.

As illustrated in FIG. 7, the magnification correcting lens unit 150 sets a prism 10 for dispersing and outputting alignment light passing through the reticle 70, and a magnification for setting the light output from the prism 10. And a reflector 60 reflecting the light formed in the lens unit 20 to the prism 10.

In addition, the configuration of the lens unit 200 includes a fixed first lens 42 for collecting the light output from the prism 10 and a second lens 44 for transmitting the light from the first lens 42. ) And a third lens 46 through which the light transmitted through the second lens 44 is collected.

The magnification correction rotating lens unit 220 has a central axis of a circular shelf shape is fixed and rotates about an axis, and the edge of the central axis is formed of a lens group 2201 having different magnifications.

The operation of the magnification correction device according to the third embodiment of the present invention having such a configuration is as follows.

The operation of the third embodiment according to the embodiment of the present invention is almost similar to that of the first embodiment described above, and only the third lens 46 fixed in the lens unit 200 without using the magnification correcting lens 40. ) Is the difference.

The operation of detecting the position of the reticle 70 and the plate 80 of the first embodiment is the same as the operation of the first embodiment described above to detect the positional difference between the reticle 70 and the plate 80.

In order to correct the magnification difference caused by the positional difference between the reticle 70 and the plate 80, in the third embodiment, the Garian instead of the magnification correcting lens 40 according to the control signal output from the central processing unit 170. The magnification correction rotating lens unit 220 having a lens group 2201 rotating in a circular manner and having different magnifications is operated.

That is, the signal processed by the central processing unit 170 is output to the rotation lens controller 225, and the rotation lens controller 225 controls the operation of the magnification correction rotation lens unit 220 to perform magnification correction. do.

In addition, as shown in FIG. 8, instead of the TTL sensor unit 110 that irradiates the light output from the light source units 250 according to the first to third embodiments of the present invention onto the reticle 70, The magnification check and correction of the plate 80 deformed using the laser may be performed using the plate global alignment (PGA) sensor unit 310.

The effect of this invention according to the first to third embodiments operating in this way directly corrects the position of the lens portion for magnification correction in the exposure process, so that the magnification correction time is short and is not required for the additional maintenance cost for the alignment device. Mounting on an existing lens mounter saves installation space.

In addition, since the optical sensor is used, it is possible to easily check the correction state of the magnification and to correct the magnification according to the deformation degree of the exposed plate, thereby saving time and improving economic efficiency.

Claims (11)

A reticle on which a circuit pattern to be exposed is engraved and a first alignment mark is formed; Optical means for condensing and imaging the light passing through the reticle at a set magnification; A plate on which a second alignment mark is formed, which is placed on the plate stage, onto which the light collected by the optical means is irradiated; Magnification check sensor means for detecting whether the first alignment mark of the reticle and the second alignment mark of the plate coincide; A central processing unit for determining the magnification of the first alignment mark and the second alignment mark of the reticle according to the signal output from the magnification check sensor means, and outputting a magnification correction signal corresponding to the difference when the magnification does not match Wow; And a position shifting means for correcting the magnification by varying the position of the optical means in accordance with the magnification correction signal output from the central processing unit. The optical device of claim 1, further comprising: a prism for dispersing and outputting light passing through the reticle; Lens means for imaging the light output from the prism according to a set magnification; And a reflector reflecting the light transmitted by the lens means back to the prism. 3. The lens of claim 2, wherein the lens means comprises: a first lens for condensing the light output from the prism; A second lens that transmits light of the first lens; And a magnification correcting lens means for forming the light collected by the first lens and the second lens according to a set magnification. 4. The apparatus according to claim 1 or 3, wherein the position shifting means comprises: a step motor controller connected to an output end of the central processing unit; A plate type step motor unit connected to an output terminal of the step motor controller to move a position of a magnification correcting lens; And an alignment sensor unit connected to the magnification correcting lens and configured to sense a moving distance of the magnification correcting lens. 5. The alignment sensor means according to claim 4, wherein the position detection slit and the limit check slit are engraved, and a portion except for the slit is coated with chromium, and the flat glass scale is linked to the movement of the magnification correcting lens. ; A first optical sensor detecting a driving position of the magnification correction range; And a second optical sensor for sensing a driving range of the magnification correcting lens. The light emitting diode of claim 5, wherein the first optical sensor comprises: a light emitting diode positioned at a lower end of a position detection slit formed on the flat panel glass scale to emit a predetermined amount of light; A first slit positioned at an upper end of the position detection slit of the flat panel glass scale and formed in a diagonal direction, and having light passing through the position detection slit passing through the groove formed by incident light, and passing through the first slit; A magnification correction device comprising a light receiving diode that receives light. The light emitting diode of claim 5, wherein the second optical sensor is positioned at a lower end of a limit check slit formed on the flat glass scale and emits a predetermined amount of light, and is located at an upper end of the flat glass scale. And a second slit into which light passing through the slit is incident, and a light receiving diode receiving light passing through the second slit to receive light only when the magnification correcting lens is in a driving range. Correction device. The magnification check sensor according to claim 1, wherein the central processing unit measures the coordinates (X, Y) of the plate stage when the magnification check sensor is located below one mark of the second alignment mark of the plate, and again the magnification check sensor Measures the position of the coordinates (X1, Y1) of the plate stage when is positioned below another alignment mark, and then calculates the distance between the measured coordinates (X, Y), (X1, Y1), and the calculated coordinate distance is And the magnification correction control is not executed if the distance between the first alignment marks formed on the reticle is the same. The method of claim 1, wherein the position shifting means is in contact with the optical means and moves along the screw groove according to the magnification correction signal output from the central processing unit to change the position of the optical means to correct the magnification. Magnification correction device characterized in that. The method of claim 1, wherein the position shifting means, the magnification correction rotation lens group having a circular rotation axis having a different magnification value, respectively, and receives the signal processed by the central processing unit to control the magnification correction rotation lens group A magnification correction device comprising rotation lens controller means for selecting a lens suitable for magnification. 11. The method of claim 10, wherein the magnification correction rotation lens group, the central axis of the circular shelf shape is fixed in the galarian method is rotated about the axis, the edge of the central axis includes a range of different magnification range Magnification correction device.