KR100203832B1 - Optical magnetic recording media for short wave length - Google Patents
Optical magnetic recording media for short wave length Download PDFInfo
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- KR100203832B1 KR100203832B1 KR1019940003759A KR19940003759A KR100203832B1 KR 100203832 B1 KR100203832 B1 KR 100203832B1 KR 1019940003759 A KR1019940003759 A KR 1019940003759A KR 19940003759 A KR19940003759 A KR 19940003759A KR 100203832 B1 KR100203832 B1 KR 100203832B1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
- G11B11/10589—Details
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10584—Record carriers characterised by the selection of the material or by the structure or form characterised by the form, e.g. comprising mechanical protection elements
Abstract
본 발명은 단파장용 광자기 기록매체에 관한 것으로, 좀 더 상세하게는 기판(11)위에 유전체막(12)이 형성되고 그 위에 보호막(14) 및 반사막(15)이 순차적으로 형성되어 있는 단파장용 광자기 기록매체에 있어서, 상기 유전체막(12)과 보호막(14)의 사이에 Ndx(TbFeCoCr)100-X로 이루어진 재생막(16)과 TbFeCoCr로 이루어진 기록막(13)의 2층막을 순차적으로 형성시키므로써 단파장 영역에서도 동화상 처리가 가능하고 재생막과 기록막의 교환결합에 의해 높은 커 회전각과 수직자화값을 가지며, 재생시의 C/N 비가 50dB에 이르고 Cr원소의 존재로 인하여 내식성 및 내산화성을 향상시킬 수 있는 단파장용 광자기 기록매체에 관한 것이다.The present invention relates to a short-wavelength magneto-optical recording medium, and more particularly, to a short-wavelength, in which a dielectric film 12 is formed on a substrate 11 and a protective film 14 and a reflective film 15 are sequentially formed thereon. In the magneto-optical recording medium, between the dielectric film 12 and the protective film 14, a two-layer film of a reproducing film 16 made of Ndx (TbFeCoCr) 100-X and a recording film 13 made of TbFeCoCr are sequentially formed. By forming it, it is possible to process moving images even in the short wavelength region, and it has high Kerr rotation angle and vertical magnetization value by exchange coupling of the reproducing film and the recording film.The C / N ratio at the time of reproduction reaches 50dB and the corrosion resistance and oxidation resistance A short wavelength magneto-optical recording medium which can be improved.
Description
제1도는 종래의 단파장용 광자가 기록매체의 개략적인 단면도이고,1 is a schematic cross-sectional view of a conventional short wavelength photon recording medium,
제2도는 본 발명의 단파장용 광자가 기록매체의 개략적인 단면도이며,2 is a schematic cross-sectional view of a recording medium for short wavelength photons of the present invention,
제3도는 본 발명에 따른 재생막(Ndx(TbFeCoCr)100-x)/기록막(TbFeCoCr)의 Nd 조성함량에 따른 보자력(Hc)의 변화를 나타낸 그래프이고,3 is a graph showing a change in the coercive force (Hc) according to the Nd composition content of the reproduction film (Ndx (TbFeCoCr) 100-x ) / recording film (TbFeCoCr) according to the present invention.
제4도는 본 발명에 따른 재생막(Ndx(TbFeCoCr)100-x)/기록막(TbFeCoCr)의 Nd 조성함량에 따른 수직 자기이방성 상수(Ku)의 변화를 나타낸 그래프이며,4 is a graph showing the change in the perpendicular magnetic anisotropy constant Ku according to the Nd composition content of the reproduction film Ndx (TbFeCoCr) 100-x ) / the recording film TbFeCoCr according to the present invention.
제5도는 본 발명에 따른 재생막(Ndx(TbFeCoCr)100-x)/기록막(TbFeCoCr)의 Nd 조성함량에 따른 커(Kerr) 회전각(°)의 변화를 나타낸 그래프이고,5 is a graph showing a change in the Kerr rotation angle (°) according to the Nd composition content of the reproduction film (Ndx (TbFeCoCr) 100-x ) / recording film (TbFeCoCr) according to the present invention.
제6도는 본 발명에 따른 재생막(Ndx(TbFeCoCr)100-x)/기록막(TbFeCoCr)의 Nd 조성함량에 따른 C/N비(dB)의 변화를 나타낸 그래프이다.6 is a graph showing a change in the C / N ratio (dB) according to the Nd composition content of the reproduction film (Ndx (TbFeCoCr) 100-x ) / recording film (TbFeCoCr) according to the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1, 11 : 기판(2P 글래스) 2, 12 : 유전체막(SiN)1, 11 substrate (2P glass) 2, 12 dielectric film (SiN)
3 : 기록막(TbFeCo) 13 : 기록막(TbFeCoCr)3: recording film (TbFeCo) 13: recording film (TbFeCoCr)
4, 14 : 보호막(SiN) 5, 15 : 반사막(Al 또는 Al-Ti)4, 14: protective film (SiN) 5, 15: reflective film (Al or Al-Ti)
16 : 재생막(Ndx(TbFeCoCr)100-x)16: regeneration film (Ndx (TbFeCoCr) 100-x )
본 발명은 단파장용 광자기 기록매체에 관한 것으로, 좀 더 상세하게는 DC마그네트론 스퍼터링(magnetron sputtering)에 의해 단파장에서도 기존의 TbFeCo 기록막보다 자기 광학특성이 우수한 2층막 구조의 기록막을 형성시키므로써 종래의 것에 비해 제특성이 우수한 단파장용 광자기 기록매체에 관한 것이다.The present invention relates to a short-wavelength magneto-optical recording medium, and more particularly, by forming a recording film having a two-layer film structure having superior magneto-optical properties than a conventional TbFeCo recording film even in a short wavelength by DC magnetron sputtering. The present invention relates to a short-wavelength magneto-optical recording medium having excellent characteristics compared to the above.
단파장용 광자기 기록매체는 고밀도, 대용량의 정보를 처리하기 위한 단파장 영역에서의 광자기 디스크인데, 상기 기록매체는 PC기판에 기록막을 가지는 다층막 구조의 박막을 형성시켜 수직자기 이방성을 가지게 하여 레이저빔 조사시 큐리점(curie point) 이상에서 자화를 반전시켜 정보를 기록하고, 재생시에는 편광된 광이 자화된 박막으로부터 반사되어 나오는 편광면의 회전각(커회전각,θk)을 이용함으로써 HD-TV 화질급 동화상 처리 및 디지털-VDR등에 응용될 수 있다.The short-wavelength magneto-optical recording medium is a magneto-optical disk in a short-wavelength region for processing high-density and large-capacity information. The recording medium has a vertical magnetic anisotropy by forming a thin film of a multilayer structure having a recording film on a PC substrate. When irradiated, information is recorded by reversing magnetization above the curie point, and during reproduction, HD- by using the rotation angle (ker rotation angle, θ k ) of the polarization plane reflected from the magnetized thin film. It can be applied to TV quality video processing and digital-VDR.
1세대 광자기 디스크는 128MB, 650MB의 기록용량으로 3.5인치는 개인용 컴퓨터에 응용, 5.25인치는 광기록(filing) 시스템에 도입 사용되고 있다. 또한, 상기 광자기 디스크는 레이저 파장 830nm에서 기록막으로 TbFeCo를 이용하기 때문에 수직자화가 잘 되고 자기 광학효과가 높은(커 회전각이 높다) C/N(Carrier to Noise)비 45dB이상의 광자기 디스크가 실용화되고 있다.First-generation magneto-optical disks have 128MB and 650MB recording capacity, and 3.5 inches are applied to personal computers and 5.25 inches are used for optical recording systems. In addition, since the magneto-optical disk uses TbFeCo as the recording film at a laser wavelength of 830 nm, the magneto-optical disk having a good vertical magnetization and high magneto-optic effect (higher rotation angle) C / N (Carrier to Noise) ratio of 45 dB or more Has been put into practical use.
한편, 고밀도, 대용량의 정보물량을 소화해 내기 위해서는 단파장 영역에서 고밀도화가 이루어져 6GB 이상의 HD-TV 화질급 동화상 처리용 광자기 디스크 개발과 초대용량 컴퓨터 주변기기인 광기록 시스템, 디지털-VDR에 응용되는 단파장용 고밀도 광자기 디스크의 개발이 요구되고 있다.On the other hand, in order to digest high-density and large-capacity information information, high-density is achieved in the short wavelength area, and the development of magneto-optical disk for HD-TV quality moving image processing over 6GB, optical recording system, which is applied to ultra-high capacity computer peripheral, and short-wavelength applied to digital-VDR Development of high density magneto-optical disks is required.
제1도는 종래의 단파장용 장자기 기록매체의 개략적인 단면도로서, 상기 기록매체는 기판(1)위에 유전체막(2)이 형성되고 그 위에 TbFeCo로 이루어진 기록막(3)이 형성되어 보호막(4) 반사막(5)이 순차적으로 적층된 구조를 가진다.FIG. 1 is a schematic cross-sectional view of a conventional short-wavelength long-magnetic recording medium. The recording medium has a dielectric film 2 formed on a substrate 1 and a recording film 3 made of TbFeCo formed thereon. ) It has a structure in which the reflective films 5 are sequentially stacked.
그러나, 이러한 구조의 단파장용 광자기 기록매체는 TbFeCo성분의 희토류-천이금속 재질의 1층 기록막 구조를 가지므로 레이저 파장 830nm에서는 수직자화 및 기록이 잘 되고, 재생시 커 회전각값도 커서 재생이 잘 되는 특성을 보유하지만, TbFeCo성분으로 이루어진 1층 기록막을 단파장 영역(532nm 이하)에서 사용할 경우에는 830nm에서 보다 커회전각이 60%정도로 감소되어 동특성 평가시 45dB이하의 낮은 C/N 비를 가지므로 재생이 곤란한 문제점이 있었다.However, since the short-wavelength magneto-optical recording medium having such a structure has a single layer recording film structure made of rare earth-transition metal of TbFeCo component, it is well magnetized and recorded at a laser wavelength of 830 nm. In case of using single layer recording film made of TbFeCo component in short wavelength range (below 532nm), the rotation angle is reduced to about 60% than that of 830nm, and has low C / N ratio of less than 45dB when evaluating dynamic characteristics. Therefore, there was a problem that the reproduction is difficult.
따라서, 본 발명의 목적은 상기 문제점을 해결할 뿐만 아니라 단파장 영역에서도 제특성이 우수한 단파장용 광자기 기록매체를 제공하는데 있다.Accordingly, an object of the present invention is to solve the above problems and to provide a short wavelength magneto-optical recording medium having excellent characteristics even in a short wavelength region.
상기 목적을 달성하기 위한 본 발명의 단파장용 광자기 기록매체는 기판위에 유전체막이 형성되고 그 위에 보호막 및 반사막이 순차적으로 형성되어 있는 단파장용 광자기 기록매체에 있어서, 상기 유전체막과 보호막의 사이에 Ndx(TbFeCoCr) 로 이루어진 재생막과 TbFeCoCr로 이루어진 기록막을 순차적으로 형성시켜서 된 것으로 이루어진다 .The short-wavelength magneto-optical recording medium of the present invention for achieving the above object is a short-wavelength magneto-optical recording medium in which a dielectric film is formed on a substrate, and a protective film and a reflective film are sequentially formed therebetween, between the dielectric film and the protective film. It is made by sequentially forming a reproduction film made of Ndx (TbFeCoCr) and a recording film made of TbFeCoCr.
이하 첨부된 도면을 참조하여 본 발명을 좀 더 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
기존의 광자기 기록매체는 전술한 바와 같이 레이저 파장 830nm에서는 수직자화 및 기록이 잘 되고 재생시 커 회전각값도 커서 재생이 잘 되는 특성을 보유하는 반면, 단파장 영역(532nm 이하)에서 사용할 경우에는 830nm에서보다 커회전각이 60%정도로 감소되어 동특성 평가시 45dB 이하의 낮은 C/N 비를 가지므로 재생이 곤란한 문제점이 있다.Existing magneto-optical recording media have the characteristics of good vertical magnetization and recording at the laser wavelength of 830nm as described above, and large rotational angle at the time of reproduction, so that they can be easily reproduced, whereas when used in the short wavelength region (532nm or less), Since the rotation angle is reduced to about 60% and has a low C / N ratio of less than 45 dB when evaluating dynamic characteristics, regeneration is difficult.
본 발명자는 이러한 문제점을 해결하기 위하여 연구를 거듭한 결과, 유전체막과 보호막의 사이에 2층막 구조의 재생막/기록막을 형성시키므로써 단파장 영역에서도 자기 광학적인 특성이 우수한 본 발명의 단파장용 광자기 기록매체를 개발한 것이다.The present inventors have conducted extensive research to solve these problems. As a result, by forming a reproduction / recording film having a two-layer structure between the dielectric film and the protective film, the short-wavelength magneto-optical magnet of the present invention has excellent magneto-optical characteristics even in a short wavelength region. The recording medium was developed.
제2도는 본 발명의 단파장용 광자기 기록매체의 개략적인 단면도로서, 도면중 부호 11은 기판, 12는 유전체막, 13은 기록막, 14는 보호막, 15는 반사막, 16은 재생막이다.2 is a schematic cross-sectional view of the short-wavelength magneto-optical recording medium of the present invention, in which reference numeral 11 is a substrate, 12 is a dielectric film, 13 is a recording film, 14 is a protective film, 15 is a reflective film, and 16 is a reproducing film.
제2도에 의하면, 본 발명의 단파장용 광자기 기록매체는 2P 글래스기판(11)위에 SiN 재질의 유전체막(12)이 형성되고 그 위에 SiN 재질의 보호막(14)과 Al 또는 Al-Ti 재질의 반사막(15)이 순차적으로 형성되어 있는 단파자용 광자기 기록매체에 있어서, 상기 유전체막(12)과 보호막(14)의 사이에 Ndx(TbFeCoCr)100-x로 이루어진 재생막(16)과 TbFeCoCr로 이루어진 기록막(13)의 2층막이 순차적으로 형성된 구조이다. 이때, 상기 재생막의 Nd성분은 본 발명의 광자기 기록매체의 전체적인 특성에 상당히 중요한 영향을 미치는데, 상기 Nd성분의 함량은 5∼30atm.%범위이다. 만약 상기 범위를 벗어난다면, 즉 x30atm.%에서는 수직자화값이 급격히 떨어지고, 그에 따라 커회전각도 급격히 떨어지는 양상을 보인다. 또한, x5atm.%인 경우에는 기존 TbFeCo기록막의 커회전각과 거의 동일한 특성을 보여 특성향상을 기대하기 힘들다.According to FIG. 2, in the short wavelength magneto-optical recording medium of the present invention, a dielectric film 12 of SiN material is formed on a 2P glass substrate 11, and a protective film 14 of SiN material and Al or Al-Ti material are formed thereon. In the short-wavelength magneto-optical recording medium in which the reflective film 15 is formed sequentially, the reproducing film 16 and TbFeCoCr made of Ndx (TbFeCoCr) 100-x are disposed between the dielectric film 12 and the protective film 14. It is a structure in which a two-layer film of a recording film 13 made of a film is sequentially formed. At this time, the Nd component of the reproducing film has a significant influence on the overall characteristics of the magneto-optical recording medium of the present invention. The content of the Nd component is in the range of 5 to 30 atm.%. If it is out of the above range, that is, the vertical magnetization value drops sharply at x30atm.%, And thus the rotation angle drops sharply. In addition, in the case of x5atm.%, The characteristics are almost the same as the Kerr rotation angle of the existing TbFeCo recording film.
한편, 본 발명에 따른 재생막인 Ndx(TbFeCoCr)100-x의 두께는 10∼1000Å범위이고, 기록막인 TbFeCoCr의 두께는 10∼1500Å범위이며 상기 재생막 및 기록막의 전체두께는 20∼2500Å범위이다. 이때 레이저빔은 상기 재생각을 통과하여 기록막에 도달하여야 하므로, 재생막의 두께가 상기 범위를 벗어난 경우에는 레이저빔의 투과가 어렵고, 기록막 두께의 한정은 레이저빔의 파워에 따른 기록감도와 관련되므로 기록막의 두께가 상기 범위를 벗어난 경우에는 기록감도가 저하되는 문제점이 있다.On the other hand, the thickness of the reproducing film Ndx (TbFeCoCr) 100-x according to the present invention is in the range of 10 to 1000 microns, the thickness of the recording film of TbFeCoCr is in the range of 10 to 1500 microns, and the total thickness of the reproducing film and the recording film is in the range of 20 to 2500 microns. to be. At this time, since the laser beam must pass through the reproduction angle to reach the recording film, it is difficult to transmit the laser beam when the thickness of the reproduction film is out of the above range, and the limitation of the recording film thickness is related to the recording sensitivity according to the power of the laser beam. Therefore, when the thickness of the recording film is out of the above range, there is a problem that the recording sensitivity is lowered.
상기와 같은 구조를 갖는 본 발명의 단파장용 광자기 기록매체는 TbFeCo로 이루어진 기록막이 형성된 기존의 기록매체가 단파장 영역에서 가지는 문제점을 개선하기 위하여 1층막은 재생막으로 Ndx(TbFeCoCr)100-x, 2층막은 기록막으로 TbFeCoCr으로 구성되며, 이로 인한 교환결합 효과에 의해 자기광학 효과가 커지고 C/N 비가 높고 수직자화도 잘 되는 것이다. 즉, 레이저 파장이 단파장인 경우, TbFeCo로 이루어진 기존의 기록막의 경우에는 커 회전각값이 0.25에도 못미치는 단점을 지니고 있으나, 본 발명에 따른 경희토류인 Nd는 그 자체가 단파장 영역에서 큰 회전각을 가지므로 기존의 TbFeCo 기록막에 비해 전체적인 커 회전각의 상승을 가져오는 것이다.In the short wavelength magneto-optical recording medium of the present invention having the above structure, in order to solve the problem that the existing recording medium having the recording film made of TbFeCo is formed in the short wavelength region, the one-layer film is Ndx (TbFeCoCr) 100-x as a reproducing film. The two-layer film is composed of TbFeCoCr as a recording film. The exchange coupling effect causes the magneto-optical effect to be increased, the C / N ratio is high, and the vertical magnetization is also good. That is, when the laser wavelength is short wavelength, the conventional recording film made of TbFeCo has a disadvantage that the rotation angle value is less than 0.25, but the light rare earth Nd according to the present invention has a large rotation angle in the short wavelength region itself. This increases the overall rotation angle compared with the conventional TbFeCo recording film.
상기의 결과로 인해 커 회전각이 0.4∼0.45, C/N 비가 50dB 내외에 이르는 우수한 재생특성을 갖는 광자기 디스크를 제조할 수 있으며, 이것은 HD-TV 화질급 동화상의 MOD의 경우에 요구되는 스펙(spec)인 0.4˚이상의 커 회전각을 만족시키며 또한, Cr의 첨가로 인하여 공기중에서 산화가 되는 단점을 지닌 TbFeCo로 이루어진 기존의 기록막보다 내식성 및 내산화성을 향상시킬 수 있다.As a result, magneto-optical discs with excellent playback characteristics can be manufactured with a large rotation angle of 0.4 to 0.45 and a C / N ratio of about 50 dB, which is required for MOD of HD-TV quality moving images. It is possible to improve the corrosion resistance and oxidation resistance than the conventional recording film made of TbFeCo, which satisfies the spherical rotation angle of 0.4 ° or more and has the disadvantage of being oxidized in the air due to the addition of Cr.
하기 표 1은 본 발명의 재생막/기록막(Ndx(TbFeCoCr)100-x/TbFeCoCr)의 2층막 구조와 기존의 1층 기록막(TbFeCo) 구조의 자기적 특성 빛 자기 광학특성을 비교한 것으로, 본 발명에 따른 2층막 구조는 0.4∼0.45°의 커 회전각(θk)을 가지며, 재생시 C/N 비가 50dB 내외를 이루므로 단파장인 레이저 파장 532nm 이하에서도 우수한 동특성값을 나타낸다. 또한, 기록막으로 TbFeCoCr을 사용하므로써 보자력(Ho)도 비교적 크고 수직자화(Ku)도 용이하여 각형배(Loop Squareness, MR(잔류자화값)/Ms(포화자화값))가 거의 1에 가까운 우수한 자기적특성을 지닌다.Table 1 below compares the magnetic and light magneto-optical characteristics of the two-layer structure of the reproduction film / recording film (Ndx (TbFeCoCr) 100-x / TbFeCoCr) of the present invention and the conventional one-layer recording film (TbFeCo) structure. In addition, the two-layer film structure according to the present invention has a large rotation angle (θ k ) of 0.4 to 0.45 ° and a C / N ratio of about 50 dB during reproduction, thus exhibiting excellent dynamic characteristics even at short wavelengths of 532 nm. In addition, by using TbFeCoCr as the recording film, the coercive force (Ho) is relatively large and the vertical magnetization (Ku) is easy, so that the square fold (Loop Squareness, M R (residual magnetization value) / Ms (saturation magnetization value)) is almost 1 It has excellent magnetic properties.
하기 표 2는 Nd조성의 함량에 따른 본 발명의 재생막/기록막(Ndx(TbFeCoCr)/TbFeCoCr)의 2층막 구조의 자기적 특성 및 자기 광학특성의 변화를 나타낸 것으로, Nd 조성함량은 atm.%로 나타내었다. 또한, 비고란의 조성은 1CP(Inductively Coupled Plasma spectrometer)에 의해 Nd 조성을 정량분석한 것으로, 예를들면 5atm.%가 실제로는 4.2atm.%임을 말해준다.Table 2 below shows the change in magnetic properties and magneto-optical properties of the two-layer structure of the reproduction film / recording film (Ndx (TbFeCoCr) / TbFeCoCr) of the present invention according to the content of Nd composition, and the Nd composition content is atm. It is expressed in%. In addition, the composition of the remarks column is a quantitative analysis of the Nd composition by 1CP (Inductively Coupled Plasma spectrometer), for example, 5atm.% Actually tells that 4.2atm.%.
한편, 단파장용 레이저 파장은 532nm의 SHG를 사용하였고, 보자력(Hc)의 측정은 미국 DMS사의 VSM(Vibrating Sample Magnetometer)을 사용하였으며, 수직 자기이방성 상수(Ku)의 측정은 미국 DMS사의 토크 마그네토미터(Torque magnetometer)를 사용하였다. 또한, 커 회전각(θ)은 532nm 파장의 SHG 녹색 레이저를 광원으로 사용하는 자체 제작된 커 루프 트레이서(Kerr Loop Tracer)를 사용하여 측정하였으며, C/N비는 일본 Matsui사의 레이저 파장 488nm인 동특성 장비(Dynamic tester)로 측정하였다On the other hand, the short wavelength laser wavelength of 532nm SHG was used, the coercive force (Hc) was measured by the US DMS's Vibrating Sample Magnetometer (VSM), the vertical magnetic anisotropy constant (Ku) was measured by the torque magnetometer of DMS, USA (Torque magnetometer) was used. In addition, Kerr rotation angle (θ) was measured using a Kerr Loop Tracer manufactured by using a SHG green laser of 532nm wavelength as a light source, and the C / N ratio was a dynamic characteristic of 488nm laser wavelength of Matsui, Japan. Measured by instrument (Dynamic tester)
상기 방법으로 측정한 측정치들을 하기 표 2에 기재하였고, 제3∼6도의 그래프로 나타내었다.The measurements measured by this method are described in Table 2 below and are shown in graphs of FIGS. 3 to 6 degrees.
제3∼6도는 각각 본 발명에 따른 재생막(Ndx(TbFeCoCr)/기록막(TbFeCoCr)의 Nd조성함량에 따른 보자력(Hc)의 변화, 수직 자기이방성 상수(Ku)의 변화, 커 회전각(°)의 변화 및 C/N비(dB)의 변화를 나타낸 그래프이다.3 to 6 show changes in coercive force (Hc), change in perpendicular magnetic anisotropy constant (Ku), and kinematic rotation angle according to the Nd composition content of the reproduction film (Ndx (TbFeCoCr) / recording film (TbFeCoCr)) according to the present invention. It is a graph showing the change of °) and the change of C / N ratio (dB).
제3∼6도에 의하면, Nd조성의 함량을 변화시켰을 때 Nd 조성이 10∼20atm.%에서 보자력(Hc), 커 회전각(θ), C/N비가 높은 값을 나타냈었다. 그러나, 본 발명에 따른 Nd 조성의 함량범위에서는 대체로 만족할 만한 특성을 나타내었다.According to FIGS. 3 to 6, when the content of Nd composition was changed, the coercive force (Hc), the large rotation angle (θ), and the C / N ratio were high at the Nd composition of 10 to 20 atm.%. However, the content range of the Nd composition according to the present invention showed a generally satisfactory characteristic.
그러므로, 본 발명의 단파장용 광자기 기록매체를 사용할 경우, 단파장 영역에서도 동화상 처리가 가능하고, 재생막과 기록막의 교환결합에 의해 높은 커 회전각과 수직자화값을 가지며, 재생시의 C/N 비가 50dB에 이르고, Cr원소의 존재로 인하여 내식성 및 내산화성을 향상시킬 수 있는 잇점이 있다.Therefore, when the short-wavelength magneto-optical recording medium of the present invention is used, moving images can be processed even in the short-wavelength region, and a high kinematic rotation angle and vertical magnetization value are obtained by exchange coupling of the reproducing film and the recording film, and the C / N ratio during reproduction is 50 dB. In addition, the presence of the Cr element has the advantage of improving the corrosion resistance and oxidation resistance.
Claims (4)
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