KR100191501B1 - - Google Patents
Info
- Publication number
- KR100191501B1 KR100191501B1 KR19980091213A KR19980091213A KR100191501B1 KR 100191501 B1 KR100191501 B1 KR 100191501B1 KR 19980091213 A KR19980091213 A KR 19980091213A KR 19980091213 A KR19980091213 A KR 19980091213A KR 100191501 B1 KR100191501 B1 KR 100191501B1
- Authority
- KR
- South Korea
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930024749A KR950014981A (en) | 1993-11-19 | 1993-11-19 | Capacitor Manufacturing Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930024749A KR950014981A (en) | 1993-11-19 | 1993-11-19 | Capacitor Manufacturing Method of Semiconductor Device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950014981A KR950014981A (en) | 1995-06-16 |
KR100191501B1 true KR100191501B1 (en) | 1999-06-15 |
Family
ID=50272785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930024749A KR950014981A (en) | 1993-11-19 | 1993-11-19 | Capacitor Manufacturing Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950014981A (en) |
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1993
- 1993-11-19 KR KR1019930024749A patent/KR950014981A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR950014981A (en) | 1995-06-16 |