KR100191005B1 - Air dynamic pressure bearing - Google Patents

Air dynamic pressure bearing Download PDF

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Publication number
KR100191005B1
KR100191005B1 KR1019950036995A KR19950036995A KR100191005B1 KR 100191005 B1 KR100191005 B1 KR 100191005B1 KR 1019950036995 A KR1019950036995 A KR 1019950036995A KR 19950036995 A KR19950036995 A KR 19950036995A KR 100191005 B1 KR100191005 B1 KR 100191005B1
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South Korea
Prior art keywords
pneumatic
bearing
sleeve
shaft
tic
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KR1019950036995A
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Korean (ko)
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KR970021368A (en
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장동섭
김남응
유진형
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이형도
삼성전기주식회사
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Sliding-Contact Bearings (AREA)

Abstract

이 발명은 공기동압 베어링의 모재 및 코팅재에 관한 것이다.The present invention relates to a base material and a coating material of a pneumatic hydrodynamic bearing.

공기동압 베어링을 구성하는 샤프트, 슬리브, 트러스트 플레이트를 형성함에 있어서, Ti, Be과 SUS 계열의 모재에 TiN, TiC같은 세라믹 코팅을 하거나 Al2O3와 같은 세라믹을 원재로 하는 것을 특징으로 한다.In forming the shaft, sleeve, and thrust plate constituting the pneumatic bearing, the Ti, Be and SUS-based base material is characterized in that the ceramic coating such as TiN, TiC, or a ceramic such as Al 2 O 3 as a raw material.

이에 따라 스핀들 모터에 적용되는 공기동압 베어링의 내구성과 신뢰성을 보장하게 되며, 공압 베어링의 수명을 확실히 보장함으로써 HDD, D-VTR, LBP, 청소기 모터등 실제품에 적용할 수 있게 되는 효과가 있다.This ensures the durability and reliability of the pneumatic bearings applied to the spindle motor, and ensures the life of the pneumatic bearings, which can be applied to actual products such as HDDs, D-VTRs, LBPs, and vacuum cleaner motors.

Description

공기동압 베어링Pneumatic bearings

제1도는 공기동압 베어링을 적용한 스핀들 모터의 구성 단면도.1 is a cross-sectional view of a spindle motor to which a pneumatic hydraulic bearing is applied.

제2도는 공기동압 베어링의 분해 사시도이다.2 is an exploded perspective view of the pneumatic bearing.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 공기동압 베어링 2 : 베어링 샤프트1: pneumatic hydrodynamic bearing 2: bearing shaft

3 : 슬리브 4, 5 : 트러스트 플레이트3: sleeve 4, 5: trust plate

6 : 그루우브6: groove

이 발명은 공기동압 베어링을 구성하는 샤프트, 슬리브, 트러스트 플레이트의 내마모성을 향상시킨 공기동압 베어링에 관한 것이다.The present invention relates to a pneumatic hydrodynamic bearing having improved abrasion resistance of the shaft, sleeve, and thrust plate constituting the pneumatic hydrodynamic bearing.

일반적으로 하드디스크 드라이브, 디지틀 VTR, 레이저 빔 프린터등의 스핀들 모터에는 초정밀도가 요구되는 공기동압 베어링이 사용된다.Generally, spindle motors such as hard disk drives, digital VTRs, and laser beam printers use pneumatic hydrodynamic bearings that require high precision.

제1도는 종전의 공기동압 베어링을 적용한 스핀들 모터의 단면도를 도시한 것이다.1 is a cross-sectional view of a spindle motor to which a conventional pneumatic hydrodynamic bearing is applied.

공기동압 베어링(1)은 베어링 샤프트(2)와 슬리브(3) 또는 슬리브(3) 양 끝단과 트러스트 플레이트(4),(5)가 수마이크로미터 단위의 작은 간격을 유지하면서 고속회전시 그 간극 사이에 공압을 형성하여 구름회동되도록 하는 것이다.Pneumatic bearings (1) have a gap between the bearing shaft (2) and the sleeve (3) or both ends of the sleeve (3) and the thrust plates (4) and (5) at high speeds while maintaining a small distance of several micrometers. Pneumatic is formed between them so that they can rotate.

따라서, 간극으로 유입되는 공기와 작동면 사이에서 건성 마찰력이 크게 작용하고 그로 인해 열이 발생하면서, 작동면에 변형을 야기시키게 된다.Therefore, the dry frictional force acts greatly between the air flowing into the gap and the working surface, thereby generating heat, causing deformation of the working surface.

또한, 베어링의 구동시에는 마찰 접촉면에서 마모 파티클(particle)이 간극 사이로 유입될 경우 베어링이 작동하지 않는 경우가 발생한다. 그러므로 공기동압 베어링을 구성하는 각 부품의 재질은 열팽창 계수가 작아야 하며, 접촉면의 마찰계수가 낮고, 경질의 내마모성이 있어야 한다.In addition, when the bearing is driven, the bearing does not operate when the wear particles (particles) flow in the gap between the friction contact surface occurs. Therefore, the material of each component constituting the pneumatic bearing should have a low coefficient of thermal expansion, a low coefficient of friction of the contact surface, and a hard wear resistance.

또한, 가공성이 좋아야 하며 내식성이 있어야 한다.In addition, workability should be good and corrosion resistance.

이러한 조건들을 감안하여 종래에는 베어링의 구동시 샤프트(2), 슬리브(3) 사이의 건성마찰(dry friction)로 인한 마모를 줄이기 위해 샤프트(2)를 스테인레스 스틸로 하고 니켈 도금된 스틸을 슬리브(3)로 채용하였다.In view of these conditions, the shaft 2 is made of stainless steel and the nickel plated steel is made of a sleeve in order to reduce wear caused by dry friction between the shaft 2 and the sleeve 3 when the bearing is driven. 3) was adopted.

즉, 종래의 방법은 Ni(Ni, Ni-P, Ni-B)를 전기화학도금 또는 무전해 침전방법을 이용 슬리브(3)에 도급하였다. 이때 니켈 필름의 두께는 샤프트, 슬리브 접촉시 받는 하중에 따라 달라진다.That is, in the conventional method, Ni (Ni, Ni-P, Ni-B) was applied to the sleeve 3 using an electrochemical plating or an electroless precipitation method. At this time, the thickness of the nickel film depends on the load received when the shaft and the sleeve contact.

니켈은 오래전부터 장식용, 방식용, 그리고 내마모용으로 많이 쓰여왔다. 니켈 코팅은 인(P), 붕소(B)의 양을 적절히 조절해서 경도를 700HV까지 올릴 수 있고, 열처리를 함으로써 1100HV까지도 높일 수가 있었다. 그러나, 니켈 코팅의 문제점은 경도를 올릴 수 있는데 한계가 있고(∼1100HV), 또한 이정도의 경도를 얻기 위해서는 열처리를 해야하는데, 열처리에 의한 치수변형과 코팅의 획일성(uniformity) 및 표면조도의 저하를 야기시키는 문제점이 있게 된다.Nickel has long been used for decorative, anticorrosion and wear resistance. The nickel coating was able to raise the hardness to 700 HV by appropriately adjusting the amounts of phosphorus (P) and boron (B), and increased to 1100 HV by heat treatment. However, the problem of nickel coating is that there is a limit to increase the hardness (~ 1100HV), and in order to obtain this degree of hardness, heat treatment is required, and the dimensional deformation and uniformity of the coating and the surface roughness decrease. There is a problem that causes.

이 발명의 목적은 상술한 종래의 공기동압 베어링을 구성하는 부품의 모재와 코팅재가 안게 되는 문제점을 해결하기 위한 것으로, 본 발명은 모재의 주면으로 경도가 높은 세라믹이 소정의 두께로 코팅되게 하므로서 모터의 내구력과 신뢰도를 향상시키도록 하는 공기동압 베어링을 제공하기 위한 것이다.An object of the present invention is to solve the problem that the base material and the coating material of the components constituting the conventional pneumatic hydrodynamic bearing described above, the present invention is to ensure that a high-hardness ceramic is coated with a predetermined thickness to the main surface of the base material motor To provide a pneumatic bearing to improve the durability and reliability of the.

이 발명의 이러한 목적을 달성하기 위해 이 발명은 공기동압 베어링을 구성하는 샤프트, 슬리브, 또는 트러스트 플레이트를 제조함에 있어서, 금속의 모재에 TiN과 같은 세라믹 코팅을 한 구성이 특징이다.In order to achieve this object of the present invention, the present invention is characterized in that a ceramic coating such as TiN is applied to a base metal of the shaft, sleeve, or thrust plate constituting the pneumatic bearing.

이하, 도면 및 실시예를 참조하여 상술한다.Hereinafter, with reference to the drawings and embodiments will be described in detail.

먼저, 공기동압 베어링의 재질 선택시 다음과 같은 사항이 고려되어야 한다. 즉, 열팽창 계수가 낮고, 접촉면의 마찰계수가 작아야 하고, 내마모성이 있어야 하며, 내식성이 있고, 가공성이 좋아야 한다.First, the following considerations should be taken into consideration when selecting the material of a pneumatic bearing. That is, the coefficient of thermal expansion should be low, the friction coefficient of the contact surface should be small, the wear resistance should be high, the corrosion resistance should be good, and the workability should be good.

이와 같은 조건들을 만족시키는 모재와 코팅재로 다음과 같은 재질이 사용된다.The following materials are used as the base material and coating material satisfying these conditions.

1) 모재 : Ti, Al2O3, Austentic Stainless Steel(AISI303, 304), Martensitic Stainless Steel(AISI420, 440C)1) Base material: Ti, Al 2 O 3 , Austentic Stainless Steel (AISI303, 304), Martensitic Stainless Steel (AISI420, 440C)

이들의 물리적 특성은 표 1과 같다.Their physical properties are shown in Table 1.

경우에 따라서 베어링 슬리브를 AlO를 쓰기도 한다.In some cases, the bearing sleeve uses AlO.

이 경우 샤프트 모재에 TiN, TiC와 같은 경질의 재질로 코팅을 하여 접촉면이 저마찰, 내마모 특성을 갖도록 하는 것이다.In this case, the surface of the shaft is coated with a hard material such as TiN and TiC so that the contact surface has low friction and wear resistance.

2) 코팅재 : TiC, TiN, (TiC)N, TiN+DLC(Diamond Like Carbon, 인조 다이아몬드)와 같은 세라믹 코팅을 표 2와 같은 조합으로 입힌다.2) Coating materials: Ceramic coatings such as TiC, TiN, (TiC) N, TiN + DLC (Diamond Like Carbon, artificial diamond) are coated in the combination shown in Table 2.

금속의 모재에 세라믹을 코팅하는 방법은 종전에도 잘 알려진 진공속에서 이온화 또는 여기된 증발원자로 피복하는 이온 플레이팅 디포지션(Ion-plating depositon)기법을 사용하되 이때 코팅의 두께는 수마이크로미터이다.The method of coating a ceramic on a metal base material uses an ion-plating depositon technique, which is coated with an ionized or excited evaporation atom in vacuum, which is well known in the past, wherein the thickness of the coating is several micrometers.

이들 코팅들은 상기한 모재에 입혀서 사용될 경우 마모측면에서 우수한 특성을 나타낸다.These coatings exhibit excellent properties in terms of wear when used on the substrate described above.

이들의 경도(Hardness)는 다음과 같다.Their hardness is as follows.

(TiC)N : 2300HV, TiN : 1600∼1800HV,(TiC) N: 2300HV, TiN: 1600-1800HV,

TiC : 2300∼2700HV, DLC : 6000HVTiC: 2300-2700HV, DLC: 6000HV

이상에서 설명한 바와 같이, 이 발명에 따른 모재 및 코팅재를 사용함에 따라 공기동압 베어링의 내구성과 신뢰성을 보장하게 되며, 공압 베어링의 수명을 확실히 보장(출발, 정시 20,000회, 구동시간 50,000h) 함으로써 하드디스크 드라이버 및 청소기 모터등과 같은 실제품에 적용하면서 제품들의 성능을 증강시키게 되는 효과가 있다.As described above, by using the base material and the coating material according to the present invention to ensure the durability and reliability of the pneumatic bearings, and to ensure the life of the pneumatic bearings (starting, 20,000 times on time, 50,000h drive time) by hard Applied to real products such as disk drivers and cleaner motors, there is an effect of enhancing the performance of the products.

Claims (2)

면마찰되는 샤프트, 슬리브, 트러스트 플레이트는 금속의 모재에 티타늄계의 세라믹재인 Tic, TiN, (Tic)N 및 상기 티타늄계의 세라믹재인 Tin과 인조 다이아몬드를 결합시킨 세라믹재를 진공상태에서 이온화시켜 코팅되게 하므로서 세라믹 코팅층을 갖는 구성을 특징으로 하는 공기동압 베어링.The surface friction shaft, sleeve, and thrust plate are coated by ionizing a ceramic material, which combines Tic, TiN, (Tic) N, which are titanium-based ceramics, and Tin and artificial diamond, which are titanium-based ceramics, in a vacuum state. Pneumatic bearing characterized in that the configuration having a ceramic coating layer. 제1항에 있어서, 상기 샤프트와 트러스트 플레이트의 세라믹재 코팅층은 상기 슬리브의 세라믹재 코팅층보다 경도가 큰 재질로 됨을 특징으로 하는 공기동압 베어링.The pneumatic bearing according to claim 1, wherein the ceramic coating layer of the shaft and the thrust plate is made of a material having a hardness higher than that of the ceramic coating layer of the sleeve.
KR1019950036995A 1995-10-25 1995-10-25 Air dynamic pressure bearing KR100191005B1 (en)

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KR100191005B1 true KR100191005B1 (en) 1999-06-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101514483B1 (en) * 2011-01-04 2015-04-23 삼성전기주식회사 Spindle motor and driving device of recording disc of having the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100459875B1 (en) * 1997-05-13 2005-01-17 삼성전기주식회사 Hydrodynamic air bearings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101514483B1 (en) * 2011-01-04 2015-04-23 삼성전기주식회사 Spindle motor and driving device of recording disc of having the same

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