KR0180584B1 - System for measuring the permittivity and permeability of materials - Google Patents

Abstract

The present invention relates to a dielectric constant / permeability measuring device that can measure the dielectric constant and permeability irrespective of the sample position in the holder by the three-position reflection transmission method, the sample is mounted in a sample holder such as a rectangular waveguide, a circular waveguide, a coaxial air line After moving the sample to three positions, measure the scattering coefficient at each position, calculate the ABCD matrix values of these measurements to make the equivalence transformation matrix, and use the trace to detect the dielectric constant and permeability of the sample. In the case of detection, the dielectric constant is detected using the scattering coefficient measured while moving one sample to three positions, and when the permittivity and permeability of the sample are detected, the scattering coefficient measured while moving two different samples to three positions is measured. It is characterized by detecting the dielectric constant and permeability of the sample by using.

Description

Dielectric constant measuring device of sample and Dielectric constant / permeability measuring device of sample

1 is a model of the whole system to explain the three-position reflection transmission method of the present invention.

2 and 4 are cross-sectional views showing a cross section of a sample mounted in a holder for measuring the dielectric constant and permeability of the sample using the 3-position reflective transmission method of the present invention.

3 is a detailed configuration diagram for measuring the dielectric constant of a sample by the three-position reflection transmission method of the present invention.

5 is a detailed configuration diagram for measuring the dielectric constant and permeability of the sample by the three-position reflection transmission method of the present invention.

* Explanation of symbols for main parts of the drawings

31, 51, 52: measurement sample holder 32, 53, 54: three-position scattering coefficient measuring unit

33, 55: sample length input unit 34, 56: sample holder type input unit

35, 57: sample holder size input unit 36, 58: calculation unit

The present invention relates to a dielectric constant measuring device and a dielectric constant / permeability measuring device for measuring the dielectric constant and permeability of a low loss sample in the ultra-high frequency band (300MHz-30GHz), in particular to measure the dielectric constant of the sample by measuring the scattering coefficient at three positions The present invention relates to a dielectric constant measuring device and a dielectric constant / permeability measuring device for simultaneously measuring dielectric constant and permeability.

In general, the dielectric constant of low loss materials is measured using the resonator method. However, the resonator method has a disadvantage in that the frequency band that can be measured by one resonator is very limited, there is no accurate frequency information, and the dielectric constant is derived from an approximation equation, which limits the accuracy.

Another method for measuring the dielectric constant is to measure the dielectric constant of low-loss materials by making three samples of different lengths and measuring the reflection and transmission coefficients. However, there are difficulties in producing three samples. In addition, the conventional reflection transmission method has a very large influence on the measurement result, but it is not easy to know the exact position of the sample in the holder while the measurement is being made.

Accordingly, a first object of the present invention is to provide a dielectric constant measuring device and a dielectric constant / permeability measuring device capable of measuring dielectric constant and permeability regardless of the position of a sample in a holder by using one sample by three-position reflection transmission method. There is this.

In addition, the second object of the present invention is a dielectric constant measuring device, and a dielectric constant / permeability measuring device which is not affected by the discontinuity of the connection terminal and the loss of the holder itself and can eliminate the measurement error that may occur in the error correction error of the network analyzer. The purpose is to provide.

In order to achieve the above object, the present invention mounts a sample into a sample holder such as a spherical waveguide, a circular waveguide, and a coaxial air line, and then measures the scattering coefficient at each position while moving the sample to three positions. Calculate the dielectric constant and permeability of the sample using traces, but detect the permittivity using the scattering coefficients measured by moving one sample to three positions if only the dielectric constant of the sample is detected. When the dielectric constant and permeability of the sample are detected, the dielectric constant and permeability of the sample are detected by using scattering coefficients measured while moving two samples having different lengths to three positions.

Hereinafter, with reference to the accompanying drawings will be described in detail the present invention.

FIG. 1 is a model of the entire system for explaining the three-position reflection transmission method according to an embodiment of the present invention, Figure 2 is a sample mounted in the holder to measure the dielectric constant of the sample using the three-position reflection transmission method It is a figure which shows the cross section of.

First, in order to measure the complex dielectric constant of an arbitrary material, a sample 11a manufactured in the form of a disk is mounted in the measurement sample holder 12 as shown in FIG. 1, and then the ABCD matrix A _sam of the portion filled with the sample and the ABCD of the input / output stage are mounted. Can be modeled by matrices X and Y.

That is, when the scattering coefficient of the sample is measured using a network analyzer and converted into the ABCD matrix, the value M _sam converted from the scattering coefficient into the ABCD matrix can be expressed as (Formula 1).

Also, if the measured sample is homogeneous and linear, and the condition that the frequency of the electromagnetic wave used to measure the scattering coefficient is transmitted only in the single mode in the sample holder is satisfied, then the ABCD matrix A _sam of length d is ( 2).

Is the internal propagation constant of the measurement sample of the sample holder, and Z is the characteristic impedance.

In addition, the ABCD matrix X of the input stage and the ABCD matrix Y of the output stage have influences such as the frequency mixer conversion loss of the air portions 13 and 14 of the sample holder and the network analyzer (not shown) as shown in FIG. Include comprehensively.

Therefore, in the present invention, as shown in FIG. 2 (a) (b) (c), the scattering coefficient of each position is measured while the sample having the length d is mounted at an arbitrary position in the sample holder and the sample is moved. The dielectric constant of the sample is detected by converting each scattering coefficient into an ABCD matrix and deriving an equation for determining the dielectric constant of the sample.

That is, as shown in FIG. 2A, the sample 11a is mounted at an arbitrary position a of the sample holder 12, and then scattering coefficients are measured to detect the ABCD matrix M _{p 1} , and FIG. ) And move the sample 11a by l ₁ , measure the scattering coefficient at the position (b) moved by l ₁ , and detect the ABCD matrix M _{p 2} , as shown in FIG. a l to derive a formula for determining the dielectric constant of the sample by the measurement value in the third position ₂ after moved by measuring the scattering coefficient at l ₂ the position (b) moves by detecting an ABCD matrix M _{p 3.}

In this case, the measured scattering coefficients M _{p 1} , M _{p 02, and} M _{p 03} converted into ABCD matrices may be represented by Equation 3, Equation 4, and Equation 5, respectively.

A _air , = ABCD matrix of air of length l ₁ , the difference between the position (a) and the position (b) of the sample

A _air , Is the ABCD matrix of air of length l ₂ , the difference between the position (b) and the position (c) of the sample.

X: ABCD matrix of input stage when sample is in each position (a, b, c)

Y: ABCD matrix of output stage when sample is in each position (a, b, c)

The ABCD matrix M _{p 1} obtained from the measurement is the inverse of the ABCD matrix M _{p 2} obtained from the measurement. Multiplying gives the following equation (Equation 6).

In addition to the measured value M _{p 01} Multiply the inverse of, and measure M _{p 2} If you multiply by, you get the following equation (Equation 7, Eight)

Where matrix (6) Is related to the equivalent transform. Similarly in matrix (7) The equivalence transformation relationship is established and the matrix in (8) And matrix Equivalence change relations are established.

In addition, the traces defined by the diagonal sum of each matrix have the same property between the two that constitute the equivalence transformation. Therefore, by the nature of the equivalence transformation matrix, The trace, which is the sum of the diagonal components of, is equal. Also a matrix Also matches the trace of, Also traces.

Therefore, by using each component of the sample ABCD matrix expressed in Equation 2, Each trace of can be found, and the traces of each matrix forming the equivalence transformation in (Equation 6), (Equation 7) and (Equation 8) can be summarized as (Equation 9), (Equation 10), ( 11).

In this case, d is a value that can be easily detected. When the combination of (Formula 9), (Formula 10) and (Formula 11) is put together, the following position information equation can be obtained (Formula 12).

Therefore, by substituting the twelfth formula into the ninth formula, the following formula can be obtained (formula 13).

In addition, the above-mentioned variables β ₀ , β _S , Ζ ₀ , Ζ _S are defined as follows depending on the sample holder.

i) When the measuring sample holder is a spherical waveguide

In (15) and (16), ω and k are easily detectable values, c ₀ is a known value, and μ _r is 1 for a nonmagnetic sample.

Therefore, when (15) and (16) are substituted into (13), an unknown value in (13) leaves only the relative dielectric constant (ε _r ) of the sample.

Therefore, if the measuring sample holder 12 is a spherical waveguide, the relative dielectric constant of the sample can be detected by substituting (14) and (15) into (13) and solving the numerical rate numerically. In the equation (9), sin ² ( β ₀ l ₁ ) related to the sample position is replaced with the right side term of the equation (12) to detect the relative dielectric constant irrespective of the position of the sample, thereby reducing the sample error in the sample holder. Measurement error does not occur by.

2) When the measuring sample holder is a circular waveguide

Like the spherical waveguide, R is a value that can be easily detected in the above formula (17), (18) and (19).

Substituting the above (formula 18) and (19) into (formula 13) leaves only the relative dielectric constant (ε _r ) of the sample unknown in formula (13).

Therefore, if the measurement sample holder 12 is a circular waveguide, the relative dielectric constant of the sample can be detected by substituting (Equation 18) and (Equation 19) into (Equation 13) and solving the numerical rate numerically. In the equation (9), sin ² ( β ₀ l ₁ ) related to the sample position is replaced with the right side term of the equation (12) to detect the relative dielectric constant irrespective of the position of the sample, thereby reducing the sample error in the sample holder. Measurement error does not occur by.

3) If the measuring sample holder is a coaxial air line,

As in spherical waveguides, when (Formula 21) and (Formula 22) are substituted into (Formula 13), only the relative dielectric constant (ε _r ) of the sample unknown in Formula (13) remains.

Therefore, if the measurement sample holder 12 is a circular coaxial line, the relative dielectric constant of the sample can be detected by substituting (Equation 21) and (Equation 22) into (Equation 13) and solving the electrical conductivity numerically. In the equation (9), by replacing the sin ² ( β ₀ l ₁ ) related to the position of the sample with the right side of the equation (12), the sample in the sample holder can be detected by detecting the relative dielectric constant regardless of the position of the sample. Measurement error caused by the error does not occur.

Therefore, if the relative permittivity (ε _r ) of the sample is detected by (13), the permittivity (ε) of the sample can be known. (Relative permittivity (ε = ε ₀ · ε _r ) (ε ₀ : permittivity).

3 shows a dielectric constant measuring apparatus according to an embodiment of the present invention for measuring the dielectric constant of a sample by using the three-position reflection transmission method as described above.

In FIG. 3, the dielectric constant measuring device measures the position of the sample in the measurement sample holder portion 31 and the sample in the measurement sample holder, which are mounted at an arbitrary position (a) of the measurement sample holder, twice from the first position (a). 3-position scattering coefficient measuring unit for measuring the scattering coefficient at the initial position (a) and the changed position (b. C) according to the positional movement of the sample, and outputting the measured angular frequency of the electromagnetic wave used for measuring the scattering coefficient ( 32), a sample length input unit 33 providing information on the length of the sample, a sample holder type input unit 34 providing information on the type of the sample holder, and size information of the sample holder according to the type of the sample holder. After the scattering coefficients at the sample holder size input unit 35 and the three positions (a, b, c) are converted into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), Calculate the dielectric constant of the sample by equation (13) According to the equation (13), the formula 36 for calculating the dielectric constant of the sample by substituting the defined formula of the propagation constant and the specific dielectric constant and the characteristic impedance and the dielectric constant of each sample according to (13) is as follows. Perform the action.

First, when a sample is mounted at an arbitrary position (a) of the measuring sample holder, the scattering coefficient measuring unit 32 emits electromagnetic waves having a measuring frequency in the measuring sample holder in a range of 1 GHz to 18 GHz, thereby reflecting and The scattering coefficient by the transmittance is measured. In addition, the scattering coefficient measuring unit 32 measures the scattering coefficient at each position (b, c) while changing the sample position in the measurement sample holder, and the scattering coefficient and the electromagnetic wave measured at each position (a, b, c). The angular frequency of is output to the calculating part 36.

Meanwhile, the sample length input unit 33, the sample holder type input unit 34, and the sample holder size input unit 35 respectively provide information about the length of the sample, the type of the sample holder, and the size of the sample holder to the calculation unit 36. do.

Therefore, the calculation unit 36 converts the scattering coefficients at the three positions (a, b, c) into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), and then uses the transformed values to calculate the equivalent values. After making the form, the dielectric constant of the sample is measured using (Formula 13) derived from the definition of the trace.

At this time, if the type of sample holder is a spherical waveguide, the sample length input unit 33 provides information about the length d of the sample to the calculation unit 36, and the sample holder size input unit 35 calculates data representing the spherical waveguide. And a sample holder size input section 35 provides the calculation section 36 with information on the length k of the wide side of the spherical waveguide.

Therefore, when the sample holder is a spherical waveguide, the calculation unit 36 substitutes (formula 15) and (formula 16) into (formula 13) to detect the specific dielectric constant of the sample.

In addition, if the type of sample holder is a circular waveguide, the sample length input unit 33 provides information about the length d of the sample to the calculation unit 36, and the sample holder type input unit 34 calculates data indicating the circular waveguide. Provided at 36, the sample holder size input 35 provides information to the computation 36 at the length R of the radius of the circular waveguide.

Therefore, when the sample holder is a circular waveguide, the calculating part 36 substitutes (formula 18) and (formula 19) into (formula 13) to detect the specific dielectric constant of the sample.

If the type of sample holder is a coaxial air line, the sample length input unit 33 provides information about the length d of the sample to the calculation unit 36, and the sample holder type input unit 34 provides data representing the coaxial air line. It is provided to the calculating part 36.

Therefore, when the sample holder is a coaxial air line, the calculating part 36 substitutes (formula 21) and (formula 22) into (formula 13) to detect the specific dielectric constant of the sample.

As can be seen from the above, the dielectric constant measurement by the three-position reflection transmission method of the present invention measures the error correction surface of the network analyzer in front of the connection terminal of the measurement sample holder 12 (FIG. 1, 13). The error correction is performed again so that it can move to the front surface (FIG. 1, 14) just before the inside sample 11a.

Therefore, in the present invention, the dielectric constant measurement by the three-position reflection transmission method compensates for the measurement error that may occur between the connecting terminal 15 of the measurement sample holder 12 and the front surface 16 of the sample 11a and the error correction of the network analyzer. Again, this can occur with incomplete error correction tools, which eliminates measurement errors and also allows for a wide selection of measurement sample holders.

At this time, taking into consideration the point of function of the frequency of the dielectric constant of the sample, while continuously changing the frequency of the electromagnetic wave used for the scattering coefficient measurement, it is possible to measure the scattering coefficient corresponding to the corresponding frequency, and thereby to detect the dielectric constant accordingly. have. Therefore, in the preferred embodiment of the present invention, the dielectric constant is detected using only electromagnetic waves of a single frequency, but the corresponding dielectric is detected while continuously changing the frequency of the electromagnetic waves used for the scattering coefficient measurement as necessary. You can do it.

In the above, the apparatus for measuring the dielectric constant of a sample by setting the specific permeability of the sample to 1 when the sample is a diamagnetic substance has been described.

On the other hand, according to another embodiment of the present invention, when the relative permeability of the sample is unknown, the dielectric constant and permeability of the sample can be detected at once, which will be described below.

First, as shown in FIG. 2, the sample 11a having a length d is mounted on the measurement sample holder 12, and then the relative dielectric constant ε _r of the sample is obtained by using the equation (13) as a result of the 3-position reflection transmission method. And one equation with unknown relative permeability (μ _r ).

Further, after attaching the sample 11b having a length d 'to the measurement sample holder 12 as shown in FIG. 4, the following equation is obtained by the three-position (e, f, g) reflection transmission method (Formula 23) ), (Formula 24))

Therefore, β ₀ , β _S , Ζ ₀ , Ζ _S ((Formula 14) to (Formula 22)) are substituted into (Formula 23), respectively, according to the type of sample holder to be measured. (Eq. 23), another equation with unknown relative permittivity (ε _r ) and relative permeability (μ _r ) of the sample is obtained (Equation 25).

Therefore, two simultaneous equations with unknown relative permittivity (ε _r ) and relative permeability (μ _r ) can be obtained, and the analogy of the sample from the two simultaneous equations ((13), (25)) The total electrical power (ε _r ) and the specific permeability (μ _r ) can be obtained, respectively.

5 shows the dielectric constant / permeability measuring apparatus of the present invention for detecting the dielectric constant and permeability of a sample at a time when the specific permeability of the sample is unknown.

In FIG. 5, the dielectric constant / permeability measuring device has a length d 'in the measurement sample holder portion 51 and the measurement sample holder 12 in which the sample 11a, which is a sample of length d, is mounted in the sample holder 12. In FIG. The positions of the sample 11a on which the sample 11b is mounted and the sample 11a in the measurement sample holder 12 are moved twice each from the initial position a, so that the initial position a and the sample ( A 3-position scattering coefficient measuring unit 53 and a measurement sample holder 12 for measuring scattering coefficients at the changed positions b and c according to the positional movement of 11a) and outputting respective frequencies of measurement of electromagnetic waves used for scattering coefficient measurement. The scattering coefficient at the changed position (f, g) is changed by changing the position of the sample 11b in each of the two positions from the initial position e twice. Three-position scattering coefficient measuring unit 54 and samples 11a and 11b for measuring and outputting respective frequencies of measurement of electromagnetic waves used for scattering coefficient measurement. The scattering coefficients at the sample length input unit 55 which provides information about the length, the sample holder size input unit 57 which provides information about the type of the sample holder 12, and the three positions (a, b, c) are respectively Converted to ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) and the scattering coefficient at 3 position (e, f, g) derived from the definition of the trace is converted to ABCD matrix, respectively. ( M ' _{p 1} , M' _{p 02,} M ' _{p 3} ) and a calculation unit 58 for detecting the permittivity and permeability of the sample by calculating the system of equations (Formula 25) derived from the definition of the trace. Perform the same operation.

First, when the samples 11a and 11b are mounted at arbitrary positions a and e of two measuring sample holders 12 having different lengths, the scattering coefficient measuring units 53 and 54 respectively have high frequency, For example, by radiating an electromagnetic wave at a measurement frequency in the range of 1 GHz to 18 GHz to measure scattering coefficients based on the reflection and transmittance of the measurement frequency, each position (b, c and f, g) the scattering coefficients are measured and output to the scattering coefficient measured by the measuring sample holder 51 and the scattering coefficient calculating unit 36 measured by the measuring sample holder 52, while calculating the respective frequencies of electromagnetic waves. Output to 36).

On the other hand, the sample length input unit 55, the sample holder type input unit 56, and the sample holder size input unit 57 each have a length (d, d ') of two samples, a sample holder type, and a sample holder in the calculation unit 58, respectively. Provides information about the size of.

Therefore, the calculation unit 58 converts the scattering coefficients at the three positions (a, b, c) into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), and then uses the transformed values to form the equivalence transformation. after converting the scattering coefficient at the (13th expression) and, the 3-position (e, f, g) derived from the definition of the trace and then made to each of ABCD matrix _{(M 'p 1, M'} p 02, M ' _{p 3} ) Using this transformation value, make the form of equivalence transformation and measure the permittivity and permeability of the sample using (Formula 25) derived from the definition of trace.

In this case, if the type of sample holder is a spherical waveguide, the sample length input unit 55 provides information about the lengths d and d 'of the sample to the calculation unit 58, and the sample holder type input unit 56 supplies the spherical waveguide. The data shown is provided to the calculating section 58, and the sample holder size input section 57 provides the calculating section 58 with the length k information of the wide surface of the spherical waveguide.

Therefore, when the sample holder is a spherical waveguide, the calculation unit 58 calculates a system of equations of equation (13) and equation (25) in which equation (15) and equation (16) are substituted, respectively, so that the specific dielectric constant of the sample ( ε_r) And specific permeability (μ_r) And then the dielectric constant (ε) = ε _{0 ·} ε _r , ε ₀: Permittivity in air) and permeability of sample (μ = μ ₅ · μ ₀, μ₀: Permeability in air) is detected.

If the type of the sample holder is a circular waveguide, the sample length input unit 55 provides information about the lengths d and d 'of the sample to the calculation unit 58, and the sample holder type input unit 56 represents the circular waveguide. The data is provided to the calculating unit 58, and the sample holder size input unit 37 provides the calculating unit 58 with information about the length R of the radius of the circular waveguide.

Therefore, when the sample holder is a circular waveguide, the calculation unit 58 calculates a system of equations of equation (13) and equation (25) in which equation (18) and equation (19) are substituted, respectively, and the relative dielectric constant of the sample The dielectric constant of the sample after detecting the specific permeability (ε = ε _{0 ·} ε _r , ε ₀: Permittivity in air) and permeability of sample (μ = μ ₅ · μ ₀, μ₀: Permeability in air) is detected.

If the type of sample holder is a coaxial air line, the sample length input unit 55 provides information about the lengths d and d 'of the sample to the calculation unit 58, and the sample holder type input unit 56 supplies the coaxial air line. The data shown is provided to the calculating unit 58.

Therefore, the calculation unit 58 calculates the relative dielectric constant of the sample by calculating the simultaneous equations of (Equation 13) and (Equation 25) in which the Equation 21 and Equation 22 are respectively substituted when the sample holder is a coaxial air line. The dielectric constant of the sample after detecting = ε _{0 ·} ε _r , ε ₀: Permittivity in air) and permeability of sample (μ = μ ₅ · μ ₀, μ₀: Permeability in air) is detected.

As described above, the dielectric constant and permeability measurement by the three-position reflection transmission method of the present invention can measure the dielectric constant and permeability regardless of the position of the sample in the holder using two samples, the discontinuity of the connection terminal and the loss of the holder itself It is not affected by this, and does not require an error correction tool for each sample holder.

Claims (6)

A dielectric constant measuring apparatus for measuring a dielectric constant of a nonmagnetic sample, comprising: a measurement sample holder portion 31 having a sample mounted at a predetermined position in a spherical waveguide sample holder; While radiating the sample to the first position, the second position and the third position in the spherical waveguide sample holder, the electromagnetic wave of a predetermined high frequency is radiated in the sample holder to the first position, the second position, and the third position. A three-position scattering coefficient measuring unit 32 for measuring the corresponding scattering coefficients respectively and outputting the scattering coefficients and the measurement frequency of the electromagnetic waves used for the scattering coefficient measurement; A sample length input unit 33 for providing information on the length d of the sample; A sample holder size input unit 35 for providing information on the length k of the broad side of the spherical waveguide; The scattering coefficients measured at each of the first, second, and third positions are converted into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), respectively, and are derived from the definition of trace. 13) to calculate the dielectric constant of the sample, (Equation 15), which is a relation between internal propagation constant and specific permittivity of the rectangular waveguide, and (Equation 16), which is a relation between characteristic impedance and relative dielectric constant of the rectangular waveguide, is substituted into (Equation 13), A dielectric constant measuring apparatus for a sample, characterized by comprising a calculation unit (36) for detecting a dielectric constant (ε). A dielectric constant measuring apparatus for measuring a dielectric constant of a nonmagnetic sample, comprising: a measurement sample holder portion 31 having a sample mounted at a predetermined position in a circular waveguide sample holder; While moving the sample to the first position, the second position and the third position in the circular waveguide sample holder, the electromagnetic wave of a predetermined high frequency is radiated in the sample holder to correspond to the first position, the second position, and the third position. A three-position scattering coefficient measuring unit 32 for measuring scattering coefficients and outputting the scattering coefficient and a measurement frequency of electromagnetic waves used for the scattering coefficient measurement; A sample length input unit 33 for providing information on the length d of the sample; A sample holder size input unit 35 for providing information on the length R of the circular waveguide; The scattering coefficients measured at each of the first, second, and third positions are converted into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), respectively, and are derived from the definition of trace. 13) to calculate the dielectric constant of the sample, (Equation 18), which is a relation between the internal wave length of the circular waveguide and the relative permittivity, and (Equation 19), which is a relation between the characteristic impedance and the relative dielectric constant of the circular waveguide, are substituted into the above (Equation 13), A dielectric constant measuring apparatus for a sample, characterized by comprising a calculation unit (36) for detecting a dielectric constant (ε). A dielectric constant measuring device for measuring a dielectric constant of a nonmagnetic sample, comprising: a measurement sample holder portion 31 having a sample mounted at a predetermined position in a coaxial air sample holder; While moving the sample to the first position, the second position and the third position in the coaxial air sample holder, the electromagnetic wave of a predetermined high frequency is radiated in the sample holder to the first position, the second position, and the third position. A three-position scattering coefficient measuring unit 32 for measuring a corresponding scattering coefficient, respectively, and outputting the scattering coefficient and a measurement frequency of the electromagnetic wave used for the scattering coefficient measurement; A sample length input unit 33 for providing information on the length d of the sample; The scattering coefficients measured at each of the first, second, and third positions are converted into ABCD matrices ( M _{p 1} , M _{p 02,} M _{p 3} ), respectively, and are derived from the definition of trace. 13) to calculate the dielectric constant of the sample, (Equation 21), which is a relation between internal propagation constant and relative permittivity of the coaxial air line, and (Equation 22), which is a relation between characteristic impedance and relative dielectric constant of circular waveguide, is substituted into (Equation 13), ε ₀ : permittivity in air A dielectric constant measuring apparatus for a sample, characterized by comprising a calculation unit (36) for detecting a dielectric constant (ε). A dielectric constant / permeability measuring device for simultaneously measuring a dielectric constant and a transmittance of a sample, comprising: a first measurement sample holder portion 51 having a first sample having a first length d in a rectangular waveguide sample holder; A second measurement sample holder portion 52 in which a second sample having a second length d 'is mounted in a rectangular waveguide sample holder; Radiating electromagnetic waves of a predetermined high frequency into the sample holder while moving the first sample to first, second and third positions in the spherical waveguide sample holder of the first measurement sample holder 51; A first scattering coefficient measuring unit 53 for measuring scattering coefficients corresponding to the first position, the second position, and the third position, respectively, and outputting the scattering coefficient and a measurement frequency of the electromagnetic wave used to measure the scattering coefficient ; While radiating the second sample to a first position, a second position and a third position in the spherical waveguide sample holder of the second measurement sample holder 52, the electromagnetic wave of a predetermined high frequency is radiated in the holder, A second scattering coefficient measuring unit (54) for measuring scattering coefficients corresponding to the position, the second position, and the third position, respectively, and outputting the scattering coefficient and the measurement frequency of the electromagnetic wave used for the scattering coefficient measurement; A sample length input unit 55 for providing information (d, d ') on the lengths of the first and second samples, respectively; A sample holder size input unit (57) for providing information on the length (k) of the wide surface of the spherical waveguide sample holder; After converting the scattering coefficients measured at each of the first, second and third positions of the first sample in the first measurement sample holder 51 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) (formula 13) derived from the definition of trace, After converting the scattering coefficients measured at each of the first, second and third positions of the second sample in the second measurement sample holder 52 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) of (25) derived from the definition of trace, Calculate the dielectric constant and permeability of the sample using the simultaneous equations, but the relation between the internal propagation constant and the relative dielectric constant of the rectangular waveguide and the relation between the characteristic impedance and the dielectric constant of the rectangular waveguide (Equation 16) ) Is substituted into Formula 13 and Formula 25, respectively, Relative dielectric constant of the sample (ε_r ) And specific permeability (μ_r) And then by (27) and (28), A dielectric constant / permeability measuring device for a sample, characterized in that it comprises a calculation unit 58 for detecting the dielectric constant of the sample and the magnetic permeability of the sample. A dielectric constant / permeability measuring device for simultaneously measuring a dielectric constant and a transmittance of a sample, comprising: a first measurement sample holder portion 51 in which a first sample having a first length d is mounted in a circular waveguide sample holder; A second measurement sample holder portion 52 in which a second sample having a second length d 'is mounted in the circular waveguide sample holder; Radiating electromagnetic waves of a predetermined high frequency into the sample holder while moving the first sample to first, second and third positions in the circular waveguide sample holder of the first measurement sample holder 51; A first scattering coefficient measuring unit 53 for measuring scattering coefficients corresponding to the first position, the second position, and the third position, respectively, and outputting the scattering coefficient and a measurement frequency of the electromagnetic wave used to measure the scattering coefficient ; While radiating the second sample to a first position, a second position, and a third position in the circular waveguide sample holder of the second measurement sample holder 52, the electromagnetic wave of a predetermined high frequency is radiated in the holder, A second scattering coefficient measuring unit 54 for measuring scattering coefficients corresponding to the first position, the second position, and the third position, respectively, and outputting the scattering coefficient and a measurement frequency of the electromagnetic wave used for the scattering coefficient measurement; A sample length input unit 55 for providing information (d, d ') on the lengths of the first and second samples, respectively; A sample holder size input unit (57) for providing information on the length (R) of the radius of the circular waveguide sample holder; After converting the scattering coefficients measured at each of the first, second and third positions of the first sample in the first measurement sample holder 51 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) (formula 13) derived from the definition of trace, After converting the scattering coefficients measured at each of the first, second and third positions of the second sample in the second measurement sample holder 52 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) of (25) derived from the definition of trace, Calculate the permittivity and permeability of the sample using the simultaneous equations, but the relation between internal propagation constant and specific permittivity of the circular waveguide (Equation 18) and the relation between characteristic impedance and relative dielectric constant of the circular waveguide (Equation 19) ) Into (13) and (25) respectively A dielectric constant / permeability measuring device for a sample, characterized in that it comprises a calculation unit 58 for detecting the dielectric constant of the sample and the magnetic permeability of the sample. A dielectric constant / permeability measuring device for simultaneously measuring a dielectric constant and a transmittance of a sample, comprising: a first measurement sample holder portion 51 having a first sample having a first length d in a coaxial airline sample holder; A second measurement sample holder portion 52 in which a second sample having a second length d 'is mounted in the coaxial air sample holder; Radiating electromagnetic waves of a predetermined high frequency into the sample holder while moving the first sample to the first, second and third positions in the coaxial air sample holder of the first measurement sample holder 51; A first scattering coefficient measuring unit 53 for measuring scattering coefficients corresponding to the first position, the second position, and the third position, respectively, and outputting the scattering coefficient and a measurement frequency of electromagnetic waves used for the scattering coefficient measurement; ); While radiating the second sample to the first position, the second position and the third position in the coaxial air line sample holder of the second measurement sample holder 52, the electromagnetic wave of a predetermined high frequency is radiated in the sample holder. And a second scattering coefficient measuring unit 54 for measuring scattering coefficients corresponding to the first position, the second position, and the third position, respectively, and outputting the scattering coefficient and a measurement frequency of the electromagnetic wave used for the scattering coefficient measurement. ); A sample length input unit 55 for providing information (d, d ') on the lengths of the first and second samples, respectively; After converting the scattering coefficients measured at each of the first, second and third positions of the first sample in the first measurement sample holder 51 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) (formula 13) derived from the definition of trace, After converting the scattering coefficients measured at each of the first, second and third positions of the second sample in the second measurement sample holder 52 to the ABCD matrix ( M _{p 1} , M _{p 02,} M _{p 3} ) of (25) derived from the definition of trace, Calculate the dielectric constant and permeability of the sample using the simultaneous equations, but the relation between the internal propagation constant and the relative dielectric constant of the coaxial airline (Equation 21) and the relation between the characteristic impedance and the relative dielectric constant of the coaxial airline Formula 22) is substituted into Formula 13 and Formula 25, respectively, After calculating the relative dielectric constant (ε _r ) and the relative permeability (μ _r ) of the sample, (Formula 27) and (Formula 28), A dielectric constant / permeability measuring device for a sample, characterized in that it comprises a calculation unit 58 for detecting the dielectric constant of the sample and the magnetic permeability of the sample.