KR0155534B1 - Method for manufacturing flat panel display - Google Patents
Method for manufacturing flat panel displayInfo
- Publication number
- KR0155534B1 KR0155534B1 KR1019950034143A KR19950034143A KR0155534B1 KR 0155534 B1 KR0155534 B1 KR 0155534B1 KR 1019950034143 A KR1019950034143 A KR 1019950034143A KR 19950034143 A KR19950034143 A KR 19950034143A KR 0155534 B1 KR0155534 B1 KR 0155534B1
- Authority
- KR
- South Korea
- Prior art keywords
- plate
- color filter
- glass plate
- flat panel
- thin film
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
본 발명은 대면적 플랫 패널 디스플레이의 제조방법에 관한 것으로, 유리판을 가공하기 전에 가공하고자 하는 면의 두께를 검사하여 두께오차가 적은 유리판으로 분류하는 단계와, 하부 유리판을 고정시키고 스페이스를 균일하게 산포하는 단계와, 그 위에 복수개의 유리판을 적층하는 단계와, 최상부와 최하부에 각각 판간물질을 개재시키면서 보조 유리판을 접착제를 통해 부착하는 단계와, 이 상태에서 그라인딩과 스무싱과 폴리싱작업을 하는 단계와, 부착된 상태를 해체하는 단계와, 측면가공된 두면에 두께가 거의 같은 보조기구를 사용하는 단계와, 유리판의 접합공정전에 보호막을 균일하게 도포하는 단계와, 박막 트랜지스터가 형성된 판과 칼라필터가 형성된 판을 형성하는 단계와, 광학적 기준면을 가지면서 진공 척이 내장된 초정밀 평면도를 유지하고 열팽창 계수가 0인 상태의 판위에 정렬하는 단계와, 박막 트랜지스터판과 칼라필터판의 측면 접합전에 보호막을 균일하게 도포하는 단계와, 측면 접합시 지지용 유리판과 칼라필터판 사이에 광경화성 접착제를 형성시키는 단계와, 보호막을 제거하고 액정으로 처리하는 단계를 포함하는 것으로, 고화질의 대면적 플랫 패널 디스플레이의 가공성을 좋게 하면서 생산수율의 극대화를 이루고자 한 것이다The present invention relates to a method for manufacturing a large-area flat panel display, and before processing the glass plate, inspecting the thickness of the surface to be processed and classifying it into a glass plate having a low thickness error, fixing the lower glass plate and spreading the space evenly. And laminating a plurality of glass plates thereon, attaching the auxiliary glass plate through the adhesive with the interplate material at the top and the bottom, respectively, and grinding, smoothing and polishing in this state. Disassembling the attached state, using an auxiliary device having almost the same thickness on the two side surfaces, uniformly applying a protective film before the glass plate bonding process, and a plate and a color filter on which the thin film transistor is formed. Forming a formed plate, and having an optical reference plane and having a vacuum chuck embedded therein And arranging on the plate with a coefficient of thermal expansion of 0, uniformly applying a protective film before the side bonding of the thin film transistor plate and the color filter plate, and between the supporting glass plate and the color filter plate during side bonding. Forming a chemical adhesive, and removing the protective film and processing with liquid crystal, to maximize the production yield while improving the processability of high-quality large-area flat panel display
Description
제1도는 본 발명에 따라 포개어진 판유리의 결합상태를 나타낸 확대 단면도.1 is an enlarged cross-sectional view showing a bonding state of the laminated glass plate according to the present invention.
제2도(a)(b)(c)는 본 발명에 따른 박막 트랜지스터판의 게이트 전극과 소스 전극의 배치 상태를 각각 나타낸 배치도.2 (a), 2 (b) and 2 (c) are layout views showing arrangement states of a gate electrode and a source electrode of the thin film transistor panel according to the present invention, respectively.
제3도는 본 발명에 따라 완성된 플랫 패널 디스플레이를 나타낸 확대 단면도.3 is an enlarged cross-sectional view showing a flat panel display completed in accordance with the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
2, 8 : 유리판 6 : 스페이스2, 8: glass plate 6: space
10 : 판간물질 12, 14 : 보조 유리판10: plate material 12, 14: auxiliary glass plate
15 : 접착제 16 : 박막 트랜지스터15 adhesive 16: thin film transistor
18 : 박막 트랜지스터판 19 : 게이트 전극선18: thin film transistor plate 19: gate electrode line
19' : 소스 전극선 20 : 칼라필터19 ': source electrode line 20: color filter
22 : 칼라필터판 24 : 배향막22 color filter plate 24 alignment film
25 : 블랙 매트릭스 26 : 시일제25: black matrix 26: sealant
28 : 액정 30 : 편광판28: liquid crystal 30: polarizing plate
32 : 지지용 유리판32: glass plate for support
본 발명은 대면적 플랫 패널 디스플레이(FLAT PANEL DISPLAY ; 이하 F.P.D.라 칭함)의 제조방법에 관한 것으로, 보다 상세하게는 보다 용이하게 제조할 수 있도록 한 것이다.The present invention relates to a method for manufacturing a large area flat panel display (hereinafter referred to as F.P.D.), and more particularly, to facilitate manufacturing.
일반적으로, F.P.D.는 비디오와 컴퓨터 및 그 관련기술중에서 핵심적인 기술로서, 여러형태의 제품들이 개발되고 있다. 이러한 F.P.D.의 대표적인 소자는 액정, FED, EL, PDP 등이 있다. 이들 F.P.D.의 중요한 점은 고화질 대면적화를 이룰때 디스플레이의 제조방법에 있는 것이다. 특히 각 화소에 트랜지스터와 같은 능동소자가 있는 경우에는 더욱 더 문제가 된다.In general, F.P.D. is a core technology among video, computer and related technologies, and various types of products are being developed. Representative elements of such F.P.D. include liquid crystal, FED, EL, PDP and the like. The important point of these F.P.D. is the manufacturing method of the display when achieving high quality large area. In particular, each pixel has an active element such as a transistor.
종래의 F.P.D. 제조방법으로서, 마이크로 렌즈를 이용하는 방법, 프로젝션 형태, 타일링(tiling)형태가 있는데, 각 형태는 장, 단점이 있으나, 타일링 기술을 이용한 방법이 가장 간편한 것으로 알려져 있다.Conventional F.P.D. As a manufacturing method, there are a method using a micro lens, a projection form, and a tiling form. Each form has advantages and disadvantages, but a method using a tiling technique is known to be the most convenient.
그러나, 상기와 같은 대부분의 방법은 F.P.D.의 제조공정상 매우 복잡하고, 초고정밀도가 요구되며, 고화질의 대면적화를 이루는 공정으로 매우 어려운 기술상의 문제점이 있었다.However, most of the methods described above are very complicated in the manufacturing process of F.P.D., require very high precision, and have a very difficult technical problem due to the process of achieving a large area of high quality.
이에 본 발명은 상기와 같은 문제점을 해소하기 위해 안출된 것으로, 능동소자가 있는 부분은 물론 칼라 발생용 판도 접합시키므로서 고화질의 대면적 화상 제공용 디스플레이의 제조수율을 극대화할 수 있는 대면적 플랫 패널 디스플레이의 제조방법을 제공함에 그 목적이 있다.Accordingly, the present invention has been made to solve the above problems, a large-area flat panel that can maximize the production yield of high-quality large-area image providing display by bonding the plate for color generation as well as the active element It is an object of the present invention to provide a method for manufacturing a display.
상기와 같은 목적을 달성하기 위한 본 발명은 먼저 유리판을 측면 가공하고, 박막 트랜지스터 및 칼라 필터판의 측면 접합에 의해 고화질의 대면적 화상정보를 제공할 수 있고, 디스플레이의 제조수율을 극대화할 수 있도록 함에 그 특징이 있다.The present invention for achieving the above object is to first process the glass plate, and to provide high-quality large-area image information by the side bonding of the thin film transistor and the color filter plate, to maximize the production yield of the display It has a feature.
이하 본 발명의 바람직한 실시예가 첨부된 예시도면에 의거 상세히 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
본 발명은 첨부된 예시도면 제1도에 도시된 바와 같이 유리판(2)을 가공하기 전에 가공하고자 하는 면의 두께를 검사하여 두께오차가 적은 유리판으로 분류하는 단계와, 하부 유리판을 고정시키고 스페이스(6)를 균일하게 산포하는 단계와, 그 위에 복수개의 유리판(8)을 적층하는 단계와, 최상부와 최하부에 각각 판간물질(10)을 개재시키면서 보조 유리판(12)(14)을 접착제(15)를 통해 부착하는 단계와, 이 상태에서 그라인딩과 스무싱과 폴리싱작업을 하는 단계와, 부착된 상태를 해체하는 단계와, 측면가공된 두면에 두께가 거의 같은 보조기구를 사용하는 단계와, 박막 트랜지스터(16)가 형성된 판(18)과 칼라필터(20)가 형성된 판(22)을 형성하는 단계와, 유리판의 접합공정전에 보호막을 균일하게 도포하는 단계와, 광학적 기준면을 가지면서 진공 척이 내장된 초정밀 평면도를 유지하고 열팽창계수가 0인 상태의 판위에 정렬하는 단계와, 보호막을 제거하고 액정으로 처리하는 단계로 이루어져 있다.According to the present invention, as shown in FIG. 1 of the accompanying drawings, before processing the glass plate 2, the thickness of the surface to be processed is inspected and classified into a glass plate having a low thickness error, and the lower glass plate is fixed and space ( 6) uniformly dispersing, laminating a plurality of glass plates 8 thereon, and the auxiliary glass plates 12, 14 with the interlayer material 10 at the top and the bottom, respectively, the adhesive 15 Attaching through the substrate, grinding, smoothing and polishing in this state, disassembling the attached state, using an auxiliary device having almost the same thickness on both side surfaces thereof, and a thin film transistor. Forming a plate 18 on which the 16 is formed and a plate 22 on which the color filter 20 is formed, uniformly applying a protective film before the bonding process of the glass plate, and embedding a vacuum chuck with an optical reference plane Maintaining a high precision, and a plan view and aligning over the state determination of the coefficient of thermal expansion is zero, removing the protective layer and consists of the step of treatment with a liquid crystal.
상기 그라인딩, 스무싱 및 폴리싱 작업시 가공면의 평탄도를 간섭계를 이용하여 측정하고, 원하는 간섭무늬(직접 간섭무늬)가 나오면 가공을 완료한다. 두면을 가공하는 경우에는 스무싱을 하면서 두면 사이의 직각도를 측정하고, 두면 사이의 직각도가 원하는 정밀도가 되면 한면씩 폴리싱 작업을 하는 것이다.During the grinding, smoothing and polishing operations, the flatness of the processed surface is measured by using an interferometer, and the processing is completed when a desired interference pattern (direct interference pattern) comes out. In the case of machining two surfaces, the squareness between the two surfaces is measured while smoothing, and polishing is performed one by one when the squareness between the two surfaces reaches the desired precision.
또한, 본 발명은 폴리싱 단계를 거친 다음에는 해체단계를 거치는데, 해체시에는 화학약품을 사용하여 판간물질(10)과 접착제(15)를 분해한다. 이때 해체속도를 조정하기 위해 초음파기기의 전력과 화학약품의 온도를 조절한다. 해체된 측면가공된 유리판들은 가공면에 손상이 가지 않도록 주의깊게 다룬다.In addition, the present invention is subjected to a dismantling step after the polishing step, at the time of disassembly to decompose the plate material 10 and the adhesive 15 using a chemical. At this time, to adjust the dismantling speed, the power of the ultrasonic device and the temperature of the chemical are controlled. Dismantled sidewalls are carefully treated to avoid damage to the machined surface.
한편, 해체된 다음에는 박막 트랜지스터(16)와 칼라필터(20) 제조작업에 투입된다. 여기서, 박막 트랜지스터판(18)의 도포작업전에 가장자리에서 도포두께가 거의 같은 보조기구를 사용한다. 즉 가장자리에서 도포 두께의 차이를 최소화함과 동시에 가공면을 보호하기 위해 사용하는 것이다.On the other hand, after dismantling, the thin film transistor 16 and the color filter 20 are put into work. Here, an auxiliary mechanism having a coating thickness substantially equal at the edge is used before the thin film transistor plate 18 is coated. In other words, it is used to protect the processed surface while minimizing the difference in coating thickness at the edge.
접합에 의해 대면적 액정소자를 제조할때 접합부위의 가공성을 용이하게 하기 위해 첨부된 예시도면 제2도(a), (b), (c)에 도시된 바와 같이 박막 트랜지스터판(18)을 제조할때, 게이트 전극선(19)과 소스 전극선(19')의 배치를 가공된 유리면에서 멀리 위치하도록 형성시킨다.In order to facilitate the processability of the junction at the time of manufacturing a large-area liquid crystal device by bonding, the thin film transistor plate 18 as shown in FIGS. 2A, 2B, and 3C is attached. In manufacturing, the arrangement of the gate electrode line 19 and the source electrode line 19 'is formed so as to be far from the processed glass surface.
또한, 박막 트랜지스터(16)와 칼라필터(20)의 제조가 완료된 다음에는 유리판 접합공정을 하기전에 기계적, 전기적 충격에 의한 박막 트랜지스터(16)와 칼라필터(20)를 보호하기 위해 보호막을 균일하게 도포한다.In addition, after the manufacturing of the thin film transistor 16 and the color filter 20 is completed, the protective film is uniformly protected to protect the thin film transistor 16 and the color filter 20 by mechanical and electrical shock before the glass plate bonding process. Apply.
또한, 상기와 같은 단계를 거친 다음에는 정렬단계를 거치는 데, 이때 박막 트랜지스터(16)나 칼라필터(20)가 제조된 면과 위의 기준면을 향하도록 배열시킨다. 이것은 2개 또는 4개의 패널 접합연결 부위에서 두께차이로 인한 단차를 방지할 수 있는 것이다. 높은 단차가 생기는 경우에는 실제 액정소자의 동작시 접합부위에서 칼라가 달리 표현되어 고화질의 광정보를 재현하지 못하기 때문이다.In addition, after going through the above steps, the alignment step is performed, wherein the thin film transistor 16 or the color filter 20 is arranged to face the manufactured surface and the reference surface. This is to prevent the step difference due to the thickness difference at the two or four panel joints. If a high step occurs, the color is expressed differently at the junction when the liquid crystal device is actually operated, and thus high quality optical information cannot be reproduced.
정렬과정시 발생될 수도 있는 정전기에 의한 소자파괴를 방지하기 위해 기준면에 정전기 방지막을 도포하거나 정렬장치 주위에 정전방지용 장치를 설치할 수 있다.An antistatic layer may be applied to the reference surface or an antistatic device may be installed around the alignment device to prevent the destruction of the device due to static electricity that may be generated during the alignment process.
상기 칼라필터(20)가 제조된 판(22)도 박막 트랜지스터(16)가 제조된 판(18)과 동일하게 측면 접합을 통해 접합시킨다.The plate 22 on which the color filter 20 is manufactured is also bonded through the side junction in the same manner as the plate 18 on which the thin film transistor 16 is manufactured.
한편, 액정공정을 거치기전에 소자 보호용 막을 제거하고 배향막(24)의 도포, 배향막(24)의 열처리, 러빙, 시일제(26)의 도포, 액정(28)주입 마감재 실링 및 편광판(30)의 부착단계를 거치면서 측면접합에 의한 칼라 박막 트랜지스터 모듈이 완성된다.On the other hand, before passing through the liquid crystal process, the element protection film is removed and the alignment film 24 is applied, the heat treatment of the alignment film 24, rubbing, the coating of the sealing agent 26, the sealing of the liquid crystal 28 injection finish and the adhesion of the polarizing plate 30. Through the steps, the color thin film transistor module by the side junction is completed.
상기 접합에 의해 형성된 복수개의 칼라필터판(22)은 같은 공통전극에 연결된다.The plurality of color filter plates 22 formed by the bonding are connected to the same common electrode.
또한, 지지용 유리판(32)에 접착제를 통해 박막 트랜지스터판(18)과 칼라필터판(22)에 각각 접착하는데, 이것은 접합부위의 결합이 육안을 통해 거의 확인되지 않기 때문이다.In addition, the adhesive is bonded to the thin film transistor plate 18 and the color filter plate 22 through an adhesive to the supporting glass plate 32, because the bonding of the bonding portions is hardly confirmed through the naked eye.
위와 같이 본 발명은 여러공정을 거쳐 플랫 패널 디스플레이의 완성시 가공상의 난점을 해결하면서 고화질의 대면적화를 이루어 생산수율을 극대화할 수 있는 것이다.As described above, the present invention is to maximize the production yield by making a large area of high quality while solving the difficulties in processing at the completion of the flat panel display through several processes.
Claims (4)
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KR1019950034143A KR0155534B1 (en) | 1995-10-05 | 1995-10-05 | Method for manufacturing flat panel display |
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KR1019950034143A KR0155534B1 (en) | 1995-10-05 | 1995-10-05 | Method for manufacturing flat panel display |
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KR970022406A KR970022406A (en) | 1997-05-28 |
KR0155534B1 true KR0155534B1 (en) | 1998-11-16 |
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