KR0145551B1 - High vacuum refrigerating apparatus nd method using vacuum oil regenerating supplying apparatus - Google Patents

Abstract

The present invention uses water to which a special compound such as calcium chloride is added so as not to freeze to -20 ° C as a refrigerant, and vaporizes in a high vacuum state (1 to 5 Torr) to remove latent heat (539 kcal / l). Therefore, it is possible to reduce the temperature of the refrigerant from 0 ℃ to -20 ℃ so that the refrigerant can be used as a refrigerant, which is designed to perform the freezing and cooling functions without using refrigerants such as Freon (CFC) gas or ammonia solution. It relates to a high vacuum refrigeration cooling apparatus and method using a feeder.

Description

High vacuum refrigeration cooling system and method using vacuum oil regeneration supply device

1 is a partial cross-sectional view of a preferred embodiment of the present invention.

2 is a partially enlarged perspective view of the liquid refrigerant heat exchange cooling chamber of the present invention.

3 is a partially enlarged perspective view of the vacuum oil heating apparatus of the present invention.

* Explanation of symbols for main parts of the drawings

P1, P2: Liquid refrigerant circulation pump 11: Fluid-induced molecular pump

2: high vacuum evaporation chamber 12: first exhaust cylinder

3: Heat exchange cooling chamber 13: High vacuum pump

5: Heat exchange cooling tube 15: Condenser

7: Atomizer 16: Vacuum pump

8: vacuum extrusion pump 18: second exhaust cylinder

9: Radiator 19: True Share Filter

10A, 10B: overflow prevention chamber 22: vacuum sharing heater

26: shared vacuum evaporation chamber 28: shared vacuum cooler

R1 to R22: Pipe line V1 to V7: Valve

The present invention uses water to which a special compound such as calcium chloride is added so as not to freeze to -20 ° C as a refrigerant, and vaporizes in a high vacuum state (1 to 5 Torr) to remove latent heat (Latnet Heat, 539 kcal / l). Therefore, it is possible to reduce the temperature of the refrigerant from 0 ℃ to -20 ℃ so that the refrigerant can be used as a refrigerant, which is designed to perform the freezing and cooling functions without using refrigerants such as Freon (CFC) gas or ammonia solution. It relates to a high vacuum refrigeration cooling apparatus and method using a feeder.

Conventional refrigeration and cooling systems use so-called CFC or ammonia solution, called Freon gas, as a refrigerant, which has caused air pollution. As a means to lower the temperature, compressors and diffusion heat exchanger chillers are used. By using the light and the like, not only a large apparatus cost is required, but also a maintenance cost is also high because the loss rate of the refrigerant is very large.

However, since the present invention uses water containing a special compound which freezes only below a certain temperature, such as calcium chloride or PCM (Phase convertible material), as a refrigerant, there is no cause of environmental pollution, and the refrigerant cost is very low, especially the temperature of the refrigerant. Since high vacuum (1 to 5 Torr) devices are used as a means for lowering the temperature, the greater the freezing and cooling capacity, the lower the cost of the device and the simpler the maintenance.

As shown in FIG. 1, the present invention provides a liquid refrigerant heat exchange circulation circuit consisting of a refrigerant circulation radiator and a refrigerant circulation supply pipe for refrigeration and cooling purposes, and a liquid refrigerant having a temperature rise due to the heat exchange for heat exchange cooling. High vacuum evaporation chamber with built-in liquid refrigerant heat exchange cooling chamber, guide stator molecular pump or some kind of vacuum booster and oil rotation sealing to generate and maintain high vacuum (1-5torr) in high vacuum evaporation chamber Oil Sealing High Vacuum Pump and vacuum oil regeneration supply system which provides reliability of high vacuum pump by performing continuous flow sealing function by maintaining vacuum purity by removing moisture and impurities in vacuum oil. And the like.

First, in the high vacuum refrigeration and cooling device of the present invention, the liquid refrigerant heat exchange circulation circuit under a high vacuum state is introduced through a pipe line (R1) in which a refrigerant inlet (1), a valve (V1), and a refrigerant circulation pump (P1) are installed. The refrigerant is introduced into the heat exchange cooling chamber 3 in the lower portion of the high vacuum evaporation chamber 2, and the liquid refrigerant heat exchange cooling chamber 3 passes through a plurality of refrigerants introduced by the inlet 4. Liquid refrigerant heat exchanger cooling tubes (5) are vertically installed, in order to improve the heat exchange ability, a plurality of plates (6) are installed horizontally at regular intervals across the heat exchange cooling tube (5), the heat exchange The lower portion of the cooling chamber (3) is formed through the cooling tube (5) and the space (S) for collecting the heat exchanged refrigerant is formed, the lower portion of the high vacuum evaporation chamber (2) the refrigerant circulation pump (P2) member Be A plurality of nozzles for drawing out the conduit R2 and spraying the refrigerant downward from the upper portion of the high vacuum evaporation chamber 2 are connected to the nebulizer 7 horizontally installed at regular intervals, and the high vacuum evaporation chamber 2 At the bottom, a conduit (R3) having a vacuum extrusion pump (8) is drawn out, and a conduit (R4) through which the refrigerant sucked by the conduit (R1) exchanges heat in the heat exchange cooling chamber (3) and flows out. The heat exchange cooling chamber 3 is drawn out from one side and connected to a radiator 9 in which a fan F is mounted on a rear front surface, and a lower part of the radiator 9 is connected to the pipe line R1. The upper part of the high vacuum evaporation chamber 2 is drawn with a conduit R5 through which vaporized steam is discharged, and a conduit R6 is drawn out from the lower part and communicated with the upper part of the side of the high vacuum evaporation chamber 2. ), To prevent the overflow The conduit R7 drawn out from the upper part of the chamber 10A is connected to the upper part of the fluid induction molecular pump 11, and the conduit R8 without the valve V2 is drawn out on the conduit R7 to form the first. It is connected to the upper part of the exhaust pipe 12, the lower end side of the fluid induction molecular pump 11, the conduit (R9) having the valve (V3) is drawn out is connected to the flow-type sealing high vacuum pump (13) do.

And, in the present invention, when looking at the configuration of the vacuum oil regeneration supply system in the flow-type sealing high vacuum pump for maintaining a high vacuum, the exhaust pipe passage (R10) drawn from the upper portion of the flow-through high vacuum pump 13 is It is connected to the upper side of the first exhaust pipe 12, the upper one side of the first exhaust pipe 12 and the upper side of the side of the condenser 15 in which a plurality of heat exchange tubes 14 are vertically installed by the pipeline (R11) In communication with the lower part of the condenser 15, a conduit R3 without the vacuum extrusion pump 8 and the valve V4 is drawn out and connected to the lower part of the high vacuum evaporation chamber 2. Pipe line R12 is drawn out from one side of 15 to be connected to the upper side of the overflow prevention chamber 10B, and the lower portion of the overflow prevention chamber 10B is connected to the condenser 15 by the conduit R13. Is in communication with the lower side of the overflow prevention chamber (10B) On one side of the pipe line (R14) without the valve (V5) is drawn and connected to the vacuum pump 16, the pipe line (R15) without the valve (V6) on the pipe line (R14) is drawn out and the first It is connected to the lower side of the exhaust cylinder 12, the upper portion of the vacuum pump 16 is connected to the upper side of the second exhaust cylinder 18 having the exhaust port 17 is drawn out of the conduit (R16) and the The pipe line R17 is drawn out from the lower side of the second exhaust cylinder 18 and connected to the lower side of the vacuum oil filter 19, and the vacuum oil passes through the pipe line R18 drawn from the upper portion of the vacuum oil filter 19. A plurality of vacuum oil heating tube 20 is horizontally insulted, and is connected to one end of the vacuum oil heating device 22 in which a plurality of diaphragms 21 are vertically insulted at regular intervals. 22) On the lower and upper one side, steam or heat medium oil is added to heat the vacuum oil by heat exchange. The inlet 24 and the outlet 25 which enter the team heat exchange chamber 23 are absent, and the other end of the vacuum oil heating device 22 has a pipe line R19 in which a valve V7 is installed is drawn out. It is inserted into and connected to the shared moisture evaporation chamber 26, and a conduit R20 is drawn out to an upper side of the vacuum oil moisture evaporation chamber 26 to be connected to an upper portion of the condenser 15. The lower part of the side surface of the water vaporization chamber 26 is connected to the upper part of the vacuum oil cooler 28 in which a plurality of cooling tubes 27 are vertically drawn and the pipe R21 is drawn out, and the vacuum oil cooler 28 is connected thereto. The inlet 2 and the outlet 30 of the cooling water for heat exchange are respectively absent from the lower side and the upper side of the side, and the vacuum oil supply line R22 is drawn out and communicates with the line R9 at the lower side.

Looking at the operation and embodiment of the present invention by the configuration of the present invention described above in detail by the accompanying drawings as follows.

First of all, the vacuum pump 16 of the vacuum oil regeneration supply line operates the high vacuum evaporation chamber 2, the fluid induction molecular pump 11, the high vacuum pump 13 and the vacuum pump 16 to all the lines up to the vacuum environment. After the preparation of the fluid induction molecular pump 11 is completed, the fluid induction molecular pump 11 and the high vacuum pump 13 are operated to operate the high vacuum evaporation chamber 2 to the high vacuum pump 13. By creating a high vacuum (1 to 5 Torr) environment in all lines and lowering the temperature in the high vacuum evaporation chamber (2) to 0 ° C to -20 ° C, the liquid refrigerant temperature in the high vacuum evaporation chamber (2) is also lowered to 0 ° C to -20 ° C. Done. At this time, when the refrigerant circulation pump (P1) is operated, the liquid refrigerant for the purpose of refrigeration cooling in the refrigerant heat exchange cooling chamber (3) is sent to the radiator (9) through the conduit (R4), and installed on the rear front of the radiator (9) If the fan F is operated and the atmospheric temperature is 30 ° C., the air of 30 ° C. passes through the radiator 9 to exchange heat with the liquid refrigerant of 0 ° C.-20 ° C. in the radiator 9 to 5-10 ° C. It is supplied with a suitable cold air of the degree, and the liquid refrigerant at 0 ° C. to −20 ° C. in the radiator 9 heat-exchanged with 30 ° C. air increases as it heat exchanges, from -20 ° C. to −10 ° C. Assuming that the temperature has risen from 0 ° C to 10 ° C, the refrigerant whose temperature has risen from -20 ° C to 10 ° C is cooled by the liquid refrigerant circulation pump P1 in the refrigerant heat exchange cooling chamber 3 in the high vacuum evaporation chamber 2. To the bottom of the refrigerant heat exchange cooling chamber (3) along a conduit (R1) The refrigerant having a temperature of -10 ° C. entering the bottom of the refrigerant heat exchange cooling chamber 3 rises toward the conduit R4 in the refrigerant heat exchange cooling chamber 3 and the high vacuum evaporation chamber 2 and the refrigerant heat exchange cooling tube 5. Heat exchanged with another liquid refrigerant of -20 ° C in the chamber, and the temperature was lowered to -20 ° C and supplied to the radiator 9 through the conduit R4. The refrigerant of -10 ° C in the refrigerant heat exchange cooling chamber 3 was supplied. Refrigerant whose temperature has risen by exchanging heat by heat exchange with the refrigerant Assuming that the temperature of the refrigerant in the heat exchange cooling tube 5 has risen from -20 ° C. to -10 ° C., the refrigerant has risen to -10 ° C. in the refrigerant heat exchange cooling tube 5. Is sprayed and sprayed by a liquid refrigerant circulation pump (P2) to the sprayer (7) formed with a spray nozzle which is arranged to spray downwardly through the pipeline (R2) to the upper portion of the high vacuum evaporation chamber (2). Liquid refrigerant in the high vacuum evaporation chamber (2) reaches 1 Torr The latent heat (Latent Heat 539kal / l) is deprived in the process of evaporation and evaporation by the high vacuum environment. The liquid refrigerant in the refrigerant heat exchange cooling tube (5) cooled from -10 ° C to -20 ° C and cooled back to -20 ° C heat exchanges with air of 30 ° C in the radiator (9) to -10 ° C. The process of exchanging heat and cooling with the refrigerant in the refrigerant heat exchange cooling chamber 3 at which the temperature rises is repeated.

Meanwhile, the evaporation gas vaporized in the high vacuum evaporation chamber 2 and absorbing latent heat (Latent Heat 539 kcal / l) is passed through a fluid induction molecular pump 11 through an overflow stopper 10A. 13) The suction and compression exhaust of the high vacuum pump 13 together with a small amount of vacuum oil supplied from the vacuum oil supply pipe R22 immediately before the suction port is exhausted to the first exhaust cylinder 12, in which the high vacuum evaporation chamber 2 The evaporated gas is a high vacuum pump together with a vacuum oil having a relatively high temperature of 15 ° C. to 20 ° C. supplied from a regenerative vacuum sharing cooler 28 described below, which is installed immediately before the inlet of the high vacuum pump 13 at a low temperature cooled by a high vacuum environment. 13) While traveling in the cylinder, some of the mixture is promoted (by temperature difference) to be liquefied and converted into water and mixed in the vacuum oil.The vacuum oil, which has been mixed with water or other impurities, can be used again. Wu drop vaporized in the cylinder to drop the degree of vacuum, or because the sealing (Oil Sealing) feature is located not cause a high vacuum is not able to continue the high vacuum environment within a vacuum evaporation chamber (2).

However, the vacuum oil regeneration supply function of the vacuum oil regeneration supply system designed to improve these disadvantages is as follows.

The evaporation gas containing the water vaporized in the high vacuum evaporation chamber 2 exhausted into the first exhaust passage 12 enters the upper portion of the condenser 15 communicated by the conduit R11 on one side of the upper portion of the first exhaust passage 12. During the heat exchange tube 14 of the condenser 15, the condensation liquid is condensed and collected at the bottom of the condenser 15 with condensed water. Partially unliquefied gas is again sucked into the vacuum pump 16 through the overflow prevention device 10B. The vacuum oil which is discharged to the second exhaust cylinder 18 and mixed with water and other impurities discharged from the high vacuum pump 13 to the first exhaust cylinder 12 is disposed between the first exhaust cylinder 12 and the suction port of the vacuum pump 16. The evaporation gas which is sucked into the vacuum pump 16 along the conduit R15 and is discharged back to the second exhaust cylinder 18 and is not liquefied up to the second exhaust cylinder 18 is the final exhaust port of the second exhaust cylinder 18. (17) Exhaust to the atmosphere or exhaust if there are some toxic gases The vacuum oil mixed with water and the other impurities in the second exhaust vessel 18 is removed to some impurities through the vacuum oil filter 19 by the vacuum suction force in the vacuum oil moisture evaporation chamber 26. Next, a plurality of vacuum oil heating tubes 20 horizontally installed from one end to the other end of the vacuum oil heating device 22 are entered (see FIG. 3), wherein the vacuum oil is in the vacuum oil heating device 22. The vacuum oil water evaporation chamber is heated at 100 ° C. or more while passing through the vacuum oil heat exchange tube in the vacuum oil heater 22 by appropriate heating means such as steam, heat medium oil, or electrothermal heater introduced into the steam heat exchange chamber 23. 26), the water is evaporated and vaporized and sucked into the condenser 15 along the pipe line R20. The condensate is cooled and condensed in the condenser 15, and the water is collected at the bottom of the condenser 15 in the form of distilled water. Vacuum oil moisture evaporation The regenerated vacuum oil in the burr (26) is sent to the vacuum oil cooler (28), cooled to about 15 ° C to 20 ° C, and regenerated and supplied as needed by the high vacuum pump (13) through the regeneration vacuum sharing supply pipe (R22). The sealing function will be performed.

On the other hand, the condensed water at the bottom of the condenser is supplemented and supplied to the bottom of the high vacuum evaporation chamber 2 by the vacuum extrusion pump 8 again.

Looking at the operation and effect of the present invention on the basis of the above-described configuration and operation of the present invention, first, the high vacuum refrigeration cooling apparatus of the present invention is a high vacuum state (1 ~ 1) using water containing a special compound to freeze only a certain temperature is added as a refrigerant Under 5 Torr), the liquid refrigerant can be cooled at low temperature, i.e., 0 ° C. to -20 ° C., and it is almost impossible to lower the temperature to -20 ° C. without using a conventional refrigerator unless it is a high vacuum condition (1 to 5 Torr). In the present invention, the use of a flow sealing sealing four-curve single vane high vacuum pump 13 to create a high vacuum environment, and maintains a continuous high vacuum function of the flow sealing sealing high vacuum pump 13, The above-mentioned vacuum oil regeneration supply system is used to compensate for the problem that the purity of vacuum oil is deteriorated due to water or gas phase impurities introduced into the cylinder.

Therefore, the device of the present invention has the advantage of overcoming the problems of the refrigeration cooling device using the existing freon gas or ammonia solution as a refrigerant and reducing the cost.

The high vacuum refrigeration cooling device and method using the vacuum oil regeneration supply device that is operated as described above can assist the high vacuum pump function by using an appropriate vacuum booster or molecular pump as necessary, and mobilize various various heat exchange means and heating means. It can be applied to appropriate design changes to belong to the gist of the present invention, it is believed that those skilled in the art will clearly understand.

Claims (2)

In a high vacuum refrigeration cooling apparatus using a device for regenerating and supplying vacuum oil, a refrigerant for refrigeration and cooling purposes introduced through a conduit (R1) in which an inlet (1), a valve (V1), and a refrigerant circulation pump (P1) are installed. Is injected into the liquid refrigerant heat exchange cooling chamber 3 of the high vacuum evaporation chamber 2, and the liquid refrigerant heat exchange cooling chamber 3 is a plurality of liquid refrigerants through which another refrigerant for heat exchange introduced through the inlet 4 passes. Heat exchange cooling tubes 5 are arranged in a row, and a plurality of diaphragms 6 are traversed at regular intervals across the heat exchange cooling tubes 5, and the cooling tubes 5 are disposed below the heat exchange cooling chambers 3. A space (S) through which the heat exchanged refrigerant is collected is formed, and at one side of the high vacuum evaporation chamber (2), a conduit (R2) having a refrigerant circulation pump (P2) is drawn out and the high vacuum evaporation chamber ( 2) at the top of A plurality of spray nozzles for spraying the medium downwardly are connected to the sprayer 7 which is laid out at regular intervals, and the high vacuum evaporation chamber 2 has a pipe line R3 without the vacuum extrusion pump 8 therein. In addition, a conduit (R4) through which the refrigerant sucked by the conduit (R1) heat exchanges in the heat exchange cooling chamber (3) and is discharged is drawn out from one side of the heat exchange cooling chamber (3), so that the fan (F) It is connected to the installed radiator (9), the lower portion of the radiator (9) is circulated and connected to the pipe line (R1), the high vacuum evaporation chamber (2) is a pipe (R5) for discharging the vaporized vapor is drawn out, A conduit R7 drawn out from the lower part and connected to the overflow prevention chamber 10A communicating with the upper side of the high vacuum evaporation chamber 2 and drawn out from the overflow prevention chamber 10A. Is connected to the fluid induction molecular pump (11), and A conduit R8 without the valve V2 is drawn out on the conduit R7, and a conduit R9 without the valve V3 is drawn out on one side of the fluid induction molecular pump 11. (R3, R8, R9) are connected to the vacuum oil regeneration supply device; The vacuum oil regeneration supply device includes a first exhaust cylinder 12, a flow sealing high vacuum pump 13, a condenser 15, an overflow prevention chamber 10B, a vacuum pump 16, a second exhaust cylinder 18, It consists of a vacuum oil filter 19, vacuum oil heating device 22, vacuum oil water evaporation chamber 26 and vacuum oil cooler 28, the conduit R8 is connected to the first exhaust pipe (12) The pipe R9 is connected to the flow sealing high vacuum pump 13, and the pipe R10 drawn out from the flow sealing high vacuum pump 13 is connected to the first exhaust pipe 12. The first exhaust pipe 12 is connected to each other by a condenser 15 and a conduit R11 in which a plurality of heat exchange tubes 14 are arranged, and the conduit R3 drawn out from the condenser 15 is vacuumed. An extrusion pump 8 and a valve V4 are absent and connected to one side of the high vacuum evaporation chamber 2, and the conduit R12 drawn from the condenser 15 is an overflow prevention chamber. It is connected to one side of (10B), the overflow prevention chamber (10B) is in communication with one side of the condenser (15) by the conduit (R13), the conduit (R14) withdrawn from the overflow prevention chamber (10B) Is the valve (V5) is absent is connected to the vacuum pump 16, the pipe (R15) with the valve (V6) is drawn on the pipe (R14) is drawn out and connected to one side of the first exhaust pipe (12) The vacuum pump 16 is connected to the second exhaust cylinder 18 in which the exhaust port 17 is formed by the conduit R16, and is connected to the second exhaust cylinder 18 by the conduit R17. The common filter 19 has a plurality of vacuum oil heating tubes 20 through which the vacuum oil passes, and one side of the vacuum oil heating device 22 in which a plurality of diaphragms 21 are arranged at regular intervals. The vacuum oil heating device 22 is connected to the vacuum oil heater 22 through which steam or media oil passes to heat the vacuum oil by heat exchange. The inlet 24 and the outlet 25 of the team heat exchange chamber 23 are absent, and on the other side of the vacuum oil heating device 22, a pipe line R19 on which a valve V7 is attached is drawn out to evaporate vacuum oil moisture. Inserted into the chamber 26, the vacuum oil vapor chamber 26 is connected to the condenser 15 by a conduit (R20), one side of the vacuum oil vapor chamber 26 is a plurality of It is connected to the vacuum oil cooler 28 having a cooling tube 27 connected by a conduit R21, and is withdrawn from the vacuum oil cooler 28 having a heat exchange cooling water inlet 29 and an outlet 30 formed therein. The high-pressure refrigeration cooling device using a vacuum oil regeneration supply device, characterized in that the conduit (R22) is in communication with the conduit (R9). The vacuum pump 16 of the vacuum oil regeneration supply line is operated to generate a vacuum environment on all lines from the high vacuum evaporation chamber 2 to the fluid induction molecular pump 11, the high vacuum pump 13, and the vacuum pump 16. Composition to complete operation preparation of the fluid induction molecular pump 11; By operating the fluid induction molecular pump 11 and the high vacuum pump 13 to create a high vacuum (1 to 5 Torr) environment in all lines from the high vacuum evaporation chamber 2 to the high vacuum pump 13 to the high vacuum evaporation chamber 2 Liquid refrigerant temperature in the step of) to 0 ° C to -20 ° C; When the refrigerant circulation pump P1 is operated, the liquid refrigerant for refrigeration and cooling purposes in the refrigerant heat exchange cooling chamber 3 is sent to the radiator 9 through the conduit R4, and a fan installed on the rear surface of the radiator 9 ( In the process of passing the air through the radiator 9 by the operation of F), it heat-exchanges with the liquid refrigerant of 0 degreeC--20 degreeC in the radiator 9, and is supplied to a suitable cold air, and the radiator 9 which heat-exchanged with air | atmosphere Temperature rises as the liquid refrigerant in the heat exchanger enters into the refrigerant heat exchange cooling chamber (3) bottom in the high vacuum evaporation chamber (2) by the liquid refrigerant circulation pump (P1); In the refrigerant heat exchange cooling tube (5) in the high vacuum evaporation chamber (2) as the elevated temperature refrigerant entering the bottom of the refrigerant heat exchange cooling chamber (3) rises toward the outlet toward the upper one side (R4) of the refrigerant heat exchange cooling chamber (3). Heat-exchanging with another liquid refrigerant having a temperature of -20 ° C and again lowering the temperature to -20 ° C to supply the radiator 9 along the conduit R4; Refrigerant heat exchanger The refrigerant in the refrigerant heat exchange cooling tube (5) whose temperature rises as it exchanges heat with the refrigerant in the cooling chamber (3) is sprayed downward on the upper portion of the high vacuum evaporation chamber (2) by the liquid refrigerant circulation pump (P2). The liquid refrigerant in the high vacuum evaporation chamber (2) ejected and sprayed is sent to the atomizer (7) in which the spray nozzle is formed, and the latent heat in the process of evaporating and evaporating by the high vacuum environment of 1 to 5 Torr. 539 kal / l), and the liquid refrigerant ejected and sprayed in the high vacuum evaporation chamber (2) from which the latent heat is deprived is cooled down again as the temperature is lowered as the latent heat is deprived; Re-cooling the liquid refrigerant in the cooled refrigerant heat exchange cooling tube (5) and heat exchange with the atmosphere in the radiator (9) to repeat the heat exchange process with the refrigerant for refrigeration and cooling purposes in the refrigerant heat exchange cooling chamber (3), the temperature of which is raised; The evaporation gas containing the water vaporized in the high vacuum evaporation chamber 2 exhausted into the first exhaust passage 12 enters the upper portion of the condenser 15 communicated by the conduit R11 on one side of the upper portion of the first exhaust passage 12. Condensing the liquid through the heat exchange tube 14 of the condenser 15 and collecting the condensed water at the bottom of the condenser 15; Some of the gas which has not been liquefied is again sucked into the vacuum pump 16 via the overflow preventing device 10B and exhausted into the second exhaust cylinder 18; The vacuum oil mixed with water and other impurities discharged from the high vacuum pump 13 to the first exhaust cylinder 12 is vacuum pump 16 along the conduit R15 between the first exhaust cylinder 12 and the suction port of the vacuum pump 16. Suctioned into the outlet and discharged back into the second exhaust container 18; The vaporized gas which has not been liquefied even up to the second exhaust cylinder 18 is exhausted to the atmosphere through the final exhaust port 17 of the second exhaust cylinder 18 or sent to the exhaust purification apparatus when there is some toxic gas; The vacuum oil mixed with water and other impurities in the second exhaust vessel 18 is removed some impurities while passing through the vacuum oil filter 19 by the vacuum suction force in the vacuum shared moisture evaporation chamber 26, and then the vacuum oil heater A plurality of vacuum oil heating tubes 20 horizontally installed from one end to the other end of the 22 enters, wherein the vacuum oil is steam or thermal oil introduced into the steam heat exchange chamber 23 in the vacuum oil heating device 22. Or, by passing through the vacuum oil heat exchange tube in the vacuum oil heating device 22 by an appropriate heating means such as an electric heater, it is sent to the vacuum oil moisture evaporation chamber 26 while being heated at 100 ° C. or higher to condense and vaporize the condenser. Sucked into 15 and liquefied by condensation in the condenser 15 to be collected at the bottom of the condenser 15 in the form of distilled water; The regenerated vacuum oil in the vacuum shared moisture evaporation chamber 26 from which moisture and impurities have been removed is sent to the vacuum oil cooler 28 by the level difference and cooled to the high vacuum pump 13 through the regenerated vacuum shared supply pipe R22. Regenerating and supplying the required amount to perform the flow sealing function; The condensed water at the bottom of the condenser is supplemented and supplied to the bottom of the high vacuum evaporation chamber (2) by the vacuum extrusion pump (8).