KR0115034Y1 - Bellows for preventing a vibration having both directions - Google Patents
Bellows for preventing a vibration having both directions Download PDFInfo
- Publication number
- KR0115034Y1 KR0115034Y1 KR2019940017354U KR19940017354U KR0115034Y1 KR 0115034 Y1 KR0115034 Y1 KR 0115034Y1 KR 2019940017354 U KR2019940017354 U KR 2019940017354U KR 19940017354 U KR19940017354 U KR 19940017354U KR 0115034 Y1 KR0115034 Y1 KR 0115034Y1
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- South Korea
- Prior art keywords
- pump
- bellows
- vibration
- pipe
- vacuum
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
- F04B45/033—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having fluid drive
- F04B45/0336—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having fluid drive the actuating fluid being controlled by one or more valves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating Pumps (AREA)
Abstract
본 고안은 승압펌프와 절연밸브 사이에 배관의 축방향 및 반경방향으로 신축되는 벨로우즈를 일체로 설치하여 진공펌프의 기계적 진동이 시스템에 전달되는 것을 방지할 수 있으므로 인해 시스템의 안정성 및 진공펌프의 효율성을 향상시킬 수 있는 것이다.The present invention can prevent the mechanical vibration of the vacuum pump from being transmitted to the system by integrally installing the bellows which are expanded and contracted in the axial and radial directions of the piping between the boosting pump and the isolation valve, thereby ensuring the stability of the system and the efficiency of the vacuum pump. To improve.
이를 위해, 본 고안은 승압펌프(2)와 절연밸브(4)사이에 배관(3)의 축방향으로 신축되는 주름부(5a)를 형성하도록 된것에 있어서, 상기 주름부(5a)의 일측에 반경방향으로 신축되는 또 다른 신축부(5b)를 형성하여서 된 양방향 진동방지형 벨로우즈이다.To this end, the present invention is to form a corrugated portion (5a) in the axial direction of the pipe (3) between the boosting pump (2) and the insulating valve (4), on one side of the corrugated portion (5a) It is a bidirectional anti-vibration bellows formed by forming another stretchable portion 5b that is stretched in the radial direction.
Description
제1도는 종래의 일방향 벨로우즈가 설치된 상태를 나타낸 정면도.1 is a front view showing a state in which a conventional one-way bellows is installed.
제2도는 본 고안이 설치된 상태를 나타낸 정면도.Figure 2 is a front view showing a state in which the subject innovation is installed.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 승압펌프 3 : 배관1: boosting pump 3: piping
4 : 절연밸브 5a : 주름부4: Insulation valve 5a: Corrugated part
5b : 신축부5b: stretch part
본 고안은 양방향 진동 방지형 벨로우즈에 관한 것으로서, 더욱 상세하게는 진공 펌프가 설치되는 시스템에서 관로의 축방향과 반경방향에서 발생하는 진동을 동시에 벨로우즈에서 흡수할 수 있도록 한 것이다.The present invention relates to a bidirectional anti-vibration bellows, and more particularly, to allow the bellows to simultaneously absorb vibrations occurring in the axial direction and the radial direction of the pipeline in a system in which a vacuum pump is installed.
일반적으로, 벨로우즈(Bellows)는 기기의 일부에 유연성, 밀봉성 등을 필요한 할 경우에 이용되는 주름상자형으로 된 이음용 신축자재로서 신축이음, 만곡관, 진동방지임 등에 사용되고, 또 자동제어, 자동조정 스위치, 서모스탯(Themostat)등 측정기, 진공기기, 항공기 분야에 널리 이용된다.Generally, bellows is a crimp box type expansion material used when flexibility, sealing property, etc. is required for a part of the device, and is used for expansion joints, curved pipes, anti-vibration, etc. It is widely used in measuring instruments such as automatic adjustment switches, thermostats, vacuum devices, and aircraft.
또한, 반도체 제조에 있어 진공펌프는 증착공정 등에서 반응용기 내를 진공상태로 유지하거나, 웨이퍼를 진공척등을 이용하여 핸들링할때 필수적인 요소이다.In addition, in semiconductor manufacturing, a vacuum pump is an essential element when maintaining the inside of a reaction vessel in a vacuum state in a deposition process, or handling a wafer using a vacuum chuck.
종래에는 제1도에 나타낸 바와 같이, 로터리펌프(1) 및 승압펌프(2)에 연결되어 상기 펌프들(1)(2)의 작용에 의해 시스템(6)내부에 진공을 형성시켜 주는 배관(3)라인의 승압펌프(2)와 절연밸브(4)사이에 벨로우즈(8)가 설치된다.Conventionally, as shown in FIG. 1, a pipe connected to the rotary pump 1 and the boost pump 2 to form a vacuum in the system 6 by the action of the pumps 1 and 2 ( 3) A bellows 8 is installed between the boosting pump 2 and the insulating valve 4 of the line.
따라서, 시스템(6) 내부를 진공으로 해야할 경우에는 로터리펌프(1) 및 승압펌프(2)를 온시키게 되면 펌프의 펌핑작용에 의해 시스템(6) 내부의 공기가 배관(3)라인을 통해 외부로 방출되므로써, 시스템(6) 내부가 진공이 된다.Therefore, when the inside of the system 6 needs to be vacuumed, when the rotary pump 1 and the boosting pump 2 are turned on, the air inside the system 6 is pumped out through the pipe 3 line by the pumping action of the pump. By being discharged to, the interior of the system 6 becomes a vacuum.
이때, 로터리펌프(1) 및 승압펌프(2)의 작동시 펌프의 구동모터 및 각 기계요소에서의 진동은 배관(3)내에 유체에 그대로 전달되는데 그 진동은 배관(3)을 타고 시스템(6)에 전파되므로 시스템(6)내의 평형을 깨어 시스템(6)에 악영향을 끼칠 수 있게 된다.At this time, during operation of the rotary pump 1 and the boost pump 2, the vibration of the pump motor and each mechanical element is transmitted to the fluid in the pipe 3 as it is. And propagates in equilibrium within the system 6, thus adversely affecting the system 6.
그러므로, 이를 방지하기 위하여 배관(3)라인의 승압펌프(2)와 절연밸브(4)사이에 벨로우즈(8)를 배관(3)과 일치하도록 설치하므로써 진공펌프의 구동부 및 각 기계요소에서 발생되는 진동을 시스템(6)에 전달되지 못하도록 벨로우즈(8)의 주름부(5c)에서 흡수 차단하게 된다.Therefore, in order to prevent this, the bellows 8 is installed between the boosting pump 2 and the insulating valve 4 of the pipe 3 line so as to coincide with the pipe 3 so that Absorption is blocked at the pleats 5c of the bellows 8 so that vibrations are not transmitted to the system 6.
그러나 이와 같은 종래의 벨로우즈(8)는 그 주름이 배관(3)축 방향으로 신축 가능하므로 배관(3)의 축방향으로 발생하는 진동은 흡수할 수 있으나 배관(3)의 반경방향으로 발생되는 진동은 흡수할 수 없으므로 인해 시스템(6)으로 전파되는 기계적 진동을 완전하게 해소하지 못하여 여전히 시스템(6)이 불안정하게 되고 펌프(1)(2)에 의한 진공작용이 불완전하게 된다.However, since the bellows 8 of the related art can expand and contract in the axial direction of the pipe 3, the vibration generated in the axial direction of the pipe 3 can be absorbed, but the vibration generated in the radial direction of the pipe 3 can be absorbed. Silver cannot be absorbed and thus does not completely eliminate the mechanical vibrations propagating into the system 6, which still causes the system 6 to become unstable and the vacuum action by the pump 1 and 2 is incomplete.
특히, 반도체 공정의 각종 증착장비는 고정밀, 고진공을 요하므로 미세한 진동도 공정에 나쁜 영향을 일으켜 제품의 품질을 떨어뜨리므로 인해 생산성이 저하되는 등의 문제점이 있었다.In particular, since various deposition equipment of the semiconductor process requires high precision and high vacuum, there is a problem that the fine vibration also adversely affects the process, thereby degrading the product quality, thereby lowering the productivity.
본 고안은 상기한 제반 문제점을 해결하기 위한 것으로 진공펌프의 배관라인 일측에 배관의 축방향 및 반경방향의 진동을 흡수하도록 벨로우즈를 설치하여 진공펌프의 기계적 진동이 시스템에 전달되는 것을 방지하므로서 시스템의 안정성 및 진공펌프의 효율성을 향상시킬 수 있는 양방향 진동형 벨로우즈를 제공하는데 그 목적이 있다.The present invention is to solve the above problems, by installing a bellows to absorb the axial and radial vibration of the pipe on one side of the pipe line of the vacuum pump to prevent the mechanical vibration of the vacuum pump to be transmitted to the system The purpose is to provide a bidirectional vibrating bellows that can improve the stability and efficiency of the vacuum pump.
상기한 목적을 달성하기 위해, 본 고안은 승압펌프와 절연밸브 사이에 배관의 축방향으로 신축되는 주름부를 형성하도록 된것에 있어서, 상기 주름부의 일측에 반경방향으로 신축되는 또 다른 신축부를 형성하여서 된 양방향 진동 방지형 벨로우즈이다.In order to achieve the above object, the present invention is to form a corrugated portion that is stretched in the axial direction of the pipe between the boosting pump and the insulating valve, by forming another stretched portion that is stretched in the radial direction on one side of the corrugated portion Bidirectional anti-vibration bellows.
이하, 본 고안의 일실시예를 첨부도면 제2도를 참조하여 상세히 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
제2도는 본 고안을 나타낸 구성도로서, 진공펌프(1)(2)를 구성하는 로터리펌프(1) 및 승압펌프(2)에 연결되는 배관(3)라인의 승압펌프(2)와 절연밸브(4)사이에 배관(3)의 축방향 및 반경방향으로 신축되는 주름부(5a) 및 신축부(5b)가 일체로 설치되어 구성된다.2 is a block diagram showing the present invention, the boost pump (2) and the isolation valve of the line (3) connected to the rotary pump (1) and the boost pump (2) constituting the vacuum pump (1) (2) The corrugation part 5a and the expansion-contraction part 5b which expand and contract in the axial direction and the radial direction of the pipe 3 are comprised integrally between (4).
이와 같이 구성된 본 고안은, 시스템(6)내에 진공을 인가해주기 위하여 로터리펌프(1) 및 승압펌프(2)를 온시켜 가동하면 상기 펌프(1)(2)의 펌핑작용에 의해 시스템(6) 내부의 공기가 교축밸브(7) 및 절연밸브(4)를 통과하고 주름부(5a) 및 신축부(5b)를 지나 배관(3)라인을 타고 외부로 빠져 나가므로써 시스템(6) 내부가 진공상태로 된다.According to the present invention configured as described above, when the rotary pump 1 and the boosting pump 2 are turned on and operated to apply a vacuum in the system 6, the system 6 is operated by the pumping action of the pump 1, 2. The air inside the system (6) is evacuated by passing through the throttling valve (7) and the insulating valve (4) and passing through the pleating section (5a) and the stretching section (5b) to the outside through the pipe (3) line. It is in a state.
이러한 진공 작업시에는 진공펌프(1)(2)의 작동에 따른 기계적 배관(3) 및 배관(3) 내부의 유체에 전파되어 시스템(6)에 전달되어 지는데 진동은 배관(3)의 축방향 및 반경방향으로 동시에 일어나게 된다.In this vacuum operation, the mechanical pipe 3 and the fluid inside the pipe 3 are transmitted to the system 6 according to the operation of the vacuum pump 1 and 2 and the vibration is transmitted to the system 6. And radially at the same time.
이때, 승압펌프(2)와 절연밸브(4) 사이에는 배관(3)의 축방향과 반경방향으로 신축되는 주름부(5a) 및 신축부(5b)가 설치되므로써 배관(3)의 축방향과 반경방향의 진동을 전부 흡수할 수 있어서 시스템(6)으로 펌프(1)(2)의 진동이 전달되지 못하고 차단되므로 인해 시스템(6)의 안정성이 확보되고 보다 완전한 진공작업이 이루어질 수 있게 된다.At this time, between the boosting pump 2 and the insulating valve 4, corrugated portions 5a and telescopic portions 5b which are expanded and contracted in the axial direction and the radial direction of the pipe 3 are provided, The radial vibration can be absorbed so that the vibrations of the pumps 1 and 2 are not transmitted to the system 6 and are blocked, thereby ensuring the stability of the system 6 and allowing a more complete vacuum operation.
이상에서와 같이, 본 고안은 승압펌프(2)와 절연밸브(4)사이에 배관(3)의 축방향 및 반경방향으로 신축되는 주름부(5a) 및 신축부(5b)를 일체로 설치하여 진공펌프(1)(2)의 기계적 진동이 시스템(6)에 전달되는 것을 방지할 수 있으므로 인해 시스템(6)의 안정성 및 진공펌프(1)(2)의 효율성을 향상시킬 수 있는 매우 유용한 고안이다.As described above, the present invention is integrally provided between the boosting pump (2) and the insulating valve (4) by integrally installing the corrugated portion (5a) and the stretchable portion (5b) that is stretched in the axial and radial directions of the pipe (3) It is possible to prevent the mechanical vibration of the vacuum pump (1) (2) from being transmitted to the system (6), which is a very useful design to improve the stability of the system (6) and the efficiency of the vacuum pump (1) (2) to be.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940017354U KR0115034Y1 (en) | 1994-07-13 | 1994-07-13 | Bellows for preventing a vibration having both directions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019940017354U KR0115034Y1 (en) | 1994-07-13 | 1994-07-13 | Bellows for preventing a vibration having both directions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960006320U KR960006320U (en) | 1996-02-17 |
| KR0115034Y1 true KR0115034Y1 (en) | 1998-04-15 |
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ID=19388287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019940017354U KR0115034Y1 (en) | 1994-07-13 | 1994-07-13 | Bellows for preventing a vibration having both directions |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0115034Y1 (en) |
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1994
- 1994-07-13 KR KR2019940017354U patent/KR0115034Y1/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| KR960006320U (en) | 1996-02-17 |
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