KR0114988Y1 - Lift system of wafer transfer apparatus - Google Patents
Lift system of wafer transfer apparatus Download PDFInfo
- Publication number
- KR0114988Y1 KR0114988Y1 KR93030458U KR930030458U KR0114988Y1 KR 0114988 Y1 KR0114988 Y1 KR 0114988Y1 KR 93030458 U KR93030458 U KR 93030458U KR 930030458 U KR930030458 U KR 930030458U KR 0114988 Y1 KR0114988 Y1 KR 0114988Y1
- Authority
- KR
- South Korea
- Prior art keywords
- transfer apparatus
- wafer transfer
- lift system
- lift
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93030458U KR0114988Y1 (en) | 1993-12-29 | 1993-12-29 | Lift system of wafer transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93030458U KR0114988Y1 (en) | 1993-12-29 | 1993-12-29 | Lift system of wafer transfer apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950021451U KR950021451U (en) | 1995-07-28 |
KR0114988Y1 true KR0114988Y1 (en) | 1998-04-15 |
Family
ID=19373466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR93030458U KR0114988Y1 (en) | 1993-12-29 | 1993-12-29 | Lift system of wafer transfer apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0114988Y1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100252206B1 (en) * | 1997-01-04 | 2000-04-15 | 윤종용 | Apparatus for transferring wafers in the facility for manufacturing semiconductor device |
KR100289848B1 (en) * | 1998-09-18 | 2001-06-01 | 윤종용 | Semiconductor Wafer Transfer Device |
-
1993
- 1993-12-29 KR KR93030458U patent/KR0114988Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR950021451U (en) | 1995-07-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20081125 Year of fee payment: 12 |
|
EXPY | Expiration of term |