KR0114988Y1 - Lift system of wafer transfer apparatus - Google Patents

Lift system of wafer transfer apparatus Download PDF

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Publication number
KR0114988Y1
KR0114988Y1 KR93030458U KR930030458U KR0114988Y1 KR 0114988 Y1 KR0114988 Y1 KR 0114988Y1 KR 93030458 U KR93030458 U KR 93030458U KR 930030458 U KR930030458 U KR 930030458U KR 0114988 Y1 KR0114988 Y1 KR 0114988Y1
Authority
KR
South Korea
Prior art keywords
transfer apparatus
wafer transfer
lift system
lift
wafer
Prior art date
Application number
KR93030458U
Other languages
Korean (ko)
Other versions
KR950021451U (en
Inventor
Hae-San Yu
Yong-Pyo Kim
Jae-Poong Ji
Ki-Yeun Lee
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR93030458U priority Critical patent/KR0114988Y1/en
Publication of KR950021451U publication Critical patent/KR950021451U/en
Application granted granted Critical
Publication of KR0114988Y1 publication Critical patent/KR0114988Y1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR93030458U 1993-12-29 1993-12-29 Lift system of wafer transfer apparatus KR0114988Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93030458U KR0114988Y1 (en) 1993-12-29 1993-12-29 Lift system of wafer transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93030458U KR0114988Y1 (en) 1993-12-29 1993-12-29 Lift system of wafer transfer apparatus

Publications (2)

Publication Number Publication Date
KR950021451U KR950021451U (en) 1995-07-28
KR0114988Y1 true KR0114988Y1 (en) 1998-04-15

Family

ID=19373466

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93030458U KR0114988Y1 (en) 1993-12-29 1993-12-29 Lift system of wafer transfer apparatus

Country Status (1)

Country Link
KR (1) KR0114988Y1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100252206B1 (en) * 1997-01-04 2000-04-15 윤종용 Apparatus for transferring wafers in the facility for manufacturing semiconductor device
KR100289848B1 (en) * 1998-09-18 2001-06-01 윤종용 Semiconductor Wafer Transfer Device

Also Published As

Publication number Publication date
KR950021451U (en) 1995-07-28

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