KR0110485Y1 - Device for door closing of low-pressure chemical deposition apparatus - Google Patents

Device for door closing of low-pressure chemical deposition apparatus

Info

Publication number
KR0110485Y1
KR0110485Y1 KR94007661U KR19940007661U KR0110485Y1 KR 0110485 Y1 KR0110485 Y1 KR 0110485Y1 KR 94007661 U KR94007661 U KR 94007661U KR 19940007661 U KR19940007661 U KR 19940007661U KR 0110485 Y1 KR0110485 Y1 KR 0110485Y1
Authority
KR
South Korea
Prior art keywords
low
deposition apparatus
door closing
pressure chemical
chemical deposition
Prior art date
Application number
KR94007661U
Other languages
Korean (ko)
Inventor
Moon-Ik Sonn
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR94007661U priority Critical patent/KR0110485Y1/en
Application granted granted Critical
Publication of KR0110485Y1 publication Critical patent/KR0110485Y1/en

Links

KR94007661U 1994-04-13 1994-04-13 Device for door closing of low-pressure chemical deposition apparatus KR0110485Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94007661U KR0110485Y1 (en) 1994-04-13 1994-04-13 Device for door closing of low-pressure chemical deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94007661U KR0110485Y1 (en) 1994-04-13 1994-04-13 Device for door closing of low-pressure chemical deposition apparatus

Publications (1)

Publication Number Publication Date
KR0110485Y1 true KR0110485Y1 (en) 1995-11-22

Family

ID=19380900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94007661U KR0110485Y1 (en) 1994-04-13 1994-04-13 Device for door closing of low-pressure chemical deposition apparatus

Country Status (1)

Country Link
KR (1) KR0110485Y1 (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20080820

Year of fee payment: 12

EXPY Expiration of term