KR0110056Y1 - Nitrogen supply of ion implant - Google Patents
Nitrogen supply of ion implantInfo
- Publication number
- KR0110056Y1 KR0110056Y1 KR91000508U KR910000508U KR0110056Y1 KR 0110056 Y1 KR0110056 Y1 KR 0110056Y1 KR 91000508 U KR91000508 U KR 91000508U KR 910000508 U KR910000508 U KR 910000508U KR 0110056 Y1 KR0110056 Y1 KR 0110056Y1
- Authority
- KR
- South Korea
- Prior art keywords
- nitrogen supply
- ion implant
- implant
- ion
- nitrogen
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR91000508U KR0110056Y1 (en) | 1991-01-15 | 1991-01-15 | Nitrogen supply of ion implant |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR91000508U KR0110056Y1 (en) | 1991-01-15 | 1991-01-15 | Nitrogen supply of ion implant |
Publications (1)
Publication Number | Publication Date |
---|---|
KR0110056Y1 true KR0110056Y1 (en) | 1997-11-28 |
Family
ID=19309796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR91000508U KR0110056Y1 (en) | 1991-01-15 | 1991-01-15 | Nitrogen supply of ion implant |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0110056Y1 (en) |
-
1991
- 1991-01-15 KR KR91000508U patent/KR0110056Y1/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050822 Year of fee payment: 9 |
|
EXPY | Expiration of term |