KR0110056Y1 - Nitrogen supply of ion implant - Google Patents

Nitrogen supply of ion implant

Info

Publication number
KR0110056Y1
KR0110056Y1 KR91000508U KR910000508U KR0110056Y1 KR 0110056 Y1 KR0110056 Y1 KR 0110056Y1 KR 91000508 U KR91000508 U KR 91000508U KR 910000508 U KR910000508 U KR 910000508U KR 0110056 Y1 KR0110056 Y1 KR 0110056Y1
Authority
KR
South Korea
Prior art keywords
nitrogen supply
ion implant
implant
ion
nitrogen
Prior art date
Application number
KR91000508U
Other languages
Korean (ko)
Inventor
Hyun-Sub Kim
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR91000508U priority Critical patent/KR0110056Y1/en
Application granted granted Critical
Publication of KR0110056Y1 publication Critical patent/KR0110056Y1/en

Links

KR91000508U 1991-01-15 1991-01-15 Nitrogen supply of ion implant KR0110056Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR91000508U KR0110056Y1 (en) 1991-01-15 1991-01-15 Nitrogen supply of ion implant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR91000508U KR0110056Y1 (en) 1991-01-15 1991-01-15 Nitrogen supply of ion implant

Publications (1)

Publication Number Publication Date
KR0110056Y1 true KR0110056Y1 (en) 1997-11-28

Family

ID=19309796

Family Applications (1)

Application Number Title Priority Date Filing Date
KR91000508U KR0110056Y1 (en) 1991-01-15 1991-01-15 Nitrogen supply of ion implant

Country Status (1)

Country Link
KR (1) KR0110056Y1 (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050822

Year of fee payment: 9

EXPY Expiration of term