KR0108360Y1 - Apparatus for driving the door of a process chamber - Google Patents

Apparatus for driving the door of a process chamber

Info

Publication number
KR0108360Y1
KR0108360Y1 KR93017163U KR930017163U KR0108360Y1 KR 0108360 Y1 KR0108360 Y1 KR 0108360Y1 KR 93017163 U KR93017163 U KR 93017163U KR 930017163 U KR930017163 U KR 930017163U KR 0108360 Y1 KR0108360 Y1 KR 0108360Y1
Authority
KR
South Korea
Prior art keywords
door
driving
process chamber
chamber
Prior art date
Application number
KR93017163U
Other languages
Korean (ko)
Inventor
Hyung-Chang Kang
Sang-Yun Lee
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR93017163U priority Critical patent/KR0108360Y1/en
Application granted granted Critical
Publication of KR0108360Y1 publication Critical patent/KR0108360Y1/en

Links

KR93017163U 1993-08-31 1993-08-31 Apparatus for driving the door of a process chamber KR0108360Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93017163U KR0108360Y1 (en) 1993-08-31 1993-08-31 Apparatus for driving the door of a process chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93017163U KR0108360Y1 (en) 1993-08-31 1993-08-31 Apparatus for driving the door of a process chamber

Publications (1)

Publication Number Publication Date
KR0108360Y1 true KR0108360Y1 (en) 1997-10-23

Family

ID=19362420

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93017163U KR0108360Y1 (en) 1993-08-31 1993-08-31 Apparatus for driving the door of a process chamber

Country Status (1)

Country Link
KR (1) KR0108360Y1 (en)

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Legal Events

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Payment date: 20080728

Year of fee payment: 12

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