JPWO2024194986A1 - - Google Patents
Info
- Publication number
- JPWO2024194986A1 JPWO2024194986A1 JP2025507959A JP2025507959A JPWO2024194986A1 JP WO2024194986 A1 JPWO2024194986 A1 JP WO2024194986A1 JP 2025507959 A JP2025507959 A JP 2025507959A JP 2025507959 A JP2025507959 A JP 2025507959A JP WO2024194986 A1 JPWO2024194986 A1 JP WO2024194986A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/010894 WO2024194986A1 (ja) | 2023-03-20 | 2023-03-20 | 治具、工具回転装置、ｐｖｄ処理装置および被覆工具の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024194986A1 true JPWO2024194986A1 (enrdf_load_html_response) | 2024-09-26 |
Family
ID=92841347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025507959A Pending JPWO2024194986A1 (enrdf_load_html_response) | 2023-03-20 | 2023-03-20 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024194986A1 (enrdf_load_html_response) |
| WO (1) | WO2024194986A1 (enrdf_load_html_response) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS361018Y1 (enrdf_load_html_response) * | 1959-06-19 | 1961-01-21 | ||
| JPS5344260Y2 (enrdf_load_html_response) * | 1975-01-24 | 1978-10-24 | ||
| JPS5613010Y2 (enrdf_load_html_response) * | 1977-08-03 | 1981-03-26 | ||
| US20020062791A1 (en) * | 2000-10-11 | 2002-05-30 | Andrey Ginovker | Table |
| JP2009121614A (ja) * | 2007-11-15 | 2009-06-04 | Shigeki Nakamura | 自在継手 |
| JP2012067359A (ja) * | 2010-09-24 | 2012-04-05 | Nissin Electric Co Ltd | 膜形成対象物品支持装置及び膜形成装置 |
| KR101642188B1 (ko) * | 2014-08-19 | 2016-07-22 | 재단법인 하이브리드 인터페이스기반 미래소재 연구단 | 구조물의 균일 증착을 위하여 비틀림각을 연출하는 지그시스템 |
-
2023
- 2023-03-20 WO PCT/JP2023/010894 patent/WO2024194986A1/ja active Pending
- 2023-03-20 JP JP2025507959A patent/JPWO2024194986A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024194986A1 (ja) | 2024-09-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250724 |