JPWO2023223535A1 - - Google Patents
Info
- Publication number
- JPWO2023223535A1 JPWO2023223535A1 JP2023530599A JP2023530599A JPWO2023223535A1 JP WO2023223535 A1 JPWO2023223535 A1 JP WO2023223535A1 JP 2023530599 A JP2023530599 A JP 2023530599A JP 2023530599 A JP2023530599 A JP 2023530599A JP WO2023223535 A1 JPWO2023223535 A1 JP WO2023223535A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
- G06N3/096—Transfer learning
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/10—Interfaces, programming languages or software development kits, e.g. for simulating neural networks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Software Systems (AREA)
- Computing Systems (AREA)
- General Physics & Mathematics (AREA)
- Artificial Intelligence (AREA)
- Mathematical Physics (AREA)
- Data Mining & Analysis (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Computational Linguistics (AREA)
- Biomedical Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Medical Informatics (AREA)
- Drying Of Semiconductors (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2022/020930 WO2023223535A1 (ja) | 2022-05-20 | 2022-05-20 | 探索装置および探索方法並びに半導体装置製造システム |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2023223535A1 true JPWO2023223535A1 (ja) | 2023-11-23 |
Family
ID=88834918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023530599A Pending JPWO2023223535A1 (ja) | 2022-05-20 | 2022-05-20 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2023223535A1 (ja) |
KR (1) | KR20230162770A (ja) |
CN (1) | CN117441175A (ja) |
TW (1) | TW202347188A (ja) |
WO (1) | WO2023223535A1 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6516531B2 (ja) * | 2015-03-30 | 2019-05-22 | 株式会社メガチップス | クラスタリング装置及び機械学習装置 |
EP3398123A4 (en) * | 2015-12-31 | 2019-08-28 | KLA - Tencor Corporation | ACCELERATED TRAINING OF A MODEL BASED ON AUTOMATIC LEARNING FOR SEMICONDUCTOR APPLICATIONS |
JP6959831B2 (ja) | 2017-08-31 | 2021-11-05 | 株式会社日立製作所 | 計算機、処理の制御パラメータの決定方法、代用試料、計測システム、及び計測方法 |
JP7396117B2 (ja) * | 2020-02-27 | 2023-12-12 | オムロン株式会社 | モデル更新装置、方法、及びプログラム |
JP7424909B2 (ja) | 2020-05-18 | 2024-01-30 | 株式会社日立製作所 | 処理条件探索装置および処理条件探索方法 |
JP2021182329A (ja) * | 2020-05-20 | 2021-11-25 | 株式会社日立製作所 | 学習モデル選択方法 |
-
2022
- 2022-05-20 CN CN202280008606.2A patent/CN117441175A/zh active Pending
- 2022-05-20 WO PCT/JP2022/020930 patent/WO2023223535A1/ja active Application Filing
- 2022-05-20 KR KR1020237021079A patent/KR20230162770A/ko unknown
- 2022-05-20 JP JP2023530599A patent/JPWO2023223535A1/ja active Pending
-
2023
- 2023-02-13 TW TW112104950A patent/TW202347188A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20230162770A (ko) | 2023-11-28 |
WO2023223535A1 (ja) | 2023-11-23 |
TW202347188A (zh) | 2023-12-01 |
CN117441175A (zh) | 2024-01-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230519 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240416 |