JPWO2023162658A1 - - Google Patents

Info

Publication number
JPWO2023162658A1
JPWO2023162658A1 JP2024502979A JP2024502979A JPWO2023162658A1 JP WO2023162658 A1 JPWO2023162658 A1 JP WO2023162658A1 JP 2024502979 A JP2024502979 A JP 2024502979A JP 2024502979 A JP2024502979 A JP 2024502979A JP WO2023162658 A1 JPWO2023162658 A1 JP WO2023162658A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024502979A
Other languages
Japanese (ja)
Other versions
JPWO2023162658A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023162658A1 publication Critical patent/JPWO2023162658A1/ja
Publication of JPWO2023162658A5 publication Critical patent/JPWO2023162658A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/092Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by backside coating or layers, by lubricating-slip layers or means, by oxygen barrier layers or by stripping-release layers or means
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0042Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
    • G03F7/0043Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP2024502979A 2022-02-28 2023-02-06 Pending JPWO2023162658A1 (https=)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022030209 2022-02-28
JP2022116675 2022-07-21
PCT/JP2023/003878 WO2023162658A1 (ja) 2022-02-28 2023-02-06 メタマテリアル及び積層体

Publications (2)

Publication Number Publication Date
JPWO2023162658A1 true JPWO2023162658A1 (https=) 2023-08-31
JPWO2023162658A5 JPWO2023162658A5 (https=) 2024-11-06

Family

ID=87765674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024502979A Pending JPWO2023162658A1 (https=) 2022-02-28 2023-02-06

Country Status (3)

Country Link
US (1) US20240402597A1 (https=)
JP (1) JPWO2023162658A1 (https=)
WO (1) WO2023162658A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5217494B2 (ja) * 2007-05-08 2013-06-19 旭硝子株式会社 人工媒質、その製造方法およびアンテナ装置
JP6169546B2 (ja) * 2014-09-11 2017-07-26 日本電信電話株式会社 誘電分光センサ、誘電分光センサを用いた測定システムおよび誘電分光センサを用いた測定方法
JP7720707B2 (ja) * 2020-03-31 2025-08-08 日鉄ケミカル&マテリアル株式会社 ポリイミド、架橋ポリイミド、接着剤フィルム、積層体、カバーレイフィルム、樹脂付き銅箔、金属張積層板、回路基板及び多層回路基板

Also Published As

Publication number Publication date
US20240402597A1 (en) 2024-12-05
WO2023162658A1 (ja) 2023-08-31

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Legal Events

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Effective date: 20240805

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