JPWO2023089846A1 - - Google Patents
Info
- Publication number
- JPWO2023089846A1 JPWO2023089846A1 JP2023562110A JP2023562110A JPWO2023089846A1 JP WO2023089846 A1 JPWO2023089846 A1 JP WO2023089846A1 JP 2023562110 A JP2023562110 A JP 2023562110A JP 2023562110 A JP2023562110 A JP 2023562110A JP WO2023089846 A1 JPWO2023089846 A1 JP WO2023089846A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Image Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021189118 | 2021-11-22 | ||
| PCT/JP2022/018250 WO2023089846A1 (ja) | 2021-11-22 | 2022-04-20 | 検査装置および検査方法並びにこれに用いるプログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2023089846A1 true JPWO2023089846A1 (https=) | 2023-05-25 |
Family
ID=86396563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023562110A Pending JPWO2023089846A1 (https=) | 2021-11-22 | 2022-04-20 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2023089846A1 (https=) |
| WO (1) | WO2023089846A1 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000275185A (ja) * | 1999-03-26 | 2000-10-06 | Toshiba Eng Co Ltd | 欠陥検査装置及び欠陥検査方法 |
| WO2020085327A1 (ja) * | 2018-10-23 | 2020-04-30 | 旭化成株式会社 | 診断装置及び診断方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017049974A (ja) * | 2015-09-04 | 2017-03-09 | キヤノン株式会社 | 識別器生成装置、良否判定方法、およびプログラム |
-
2022
- 2022-04-20 JP JP2023562110A patent/JPWO2023089846A1/ja active Pending
- 2022-04-20 WO PCT/JP2022/018250 patent/WO2023089846A1/ja not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000275185A (ja) * | 1999-03-26 | 2000-10-06 | Toshiba Eng Co Ltd | 欠陥検査装置及び欠陥検査方法 |
| WO2020085327A1 (ja) * | 2018-10-23 | 2020-04-30 | 旭化成株式会社 | 診断装置及び診断方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023089846A1 (ja) | 2023-05-25 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20231218 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240816 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20250127 |