JPWO2023084634A1 - - Google Patents
Info
- Publication number
- JPWO2023084634A1 JPWO2023084634A1 JP2023559255A JP2023559255A JPWO2023084634A1 JP WO2023084634 A1 JPWO2023084634 A1 JP WO2023084634A1 JP 2023559255 A JP2023559255 A JP 2023559255A JP 2023559255 A JP2023559255 A JP 2023559255A JP WO2023084634 A1 JPWO2023084634 A1 JP WO2023084634A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2021/041307 WO2023084634A1 (ja) | 2021-11-10 | 2021-11-10 | 蒸着装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2023084634A1 true JPWO2023084634A1 (ja) | 2023-05-19 |
Family
ID=86335247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023559255A Pending JPWO2023084634A1 (ja) | 2021-11-10 | 2021-11-10 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2023084634A1 (ja) |
CN (1) | CN117941052A (ja) |
WO (1) | WO2023084634A1 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4553124B2 (ja) * | 2004-12-16 | 2010-09-29 | 株式会社日立ハイテクノロジーズ | 真空蒸着方法及びelディスプレイ用パネル |
JP6413045B2 (ja) * | 2016-03-10 | 2018-10-24 | 鴻海精密工業股▲ふん▼有限公司 | 蒸着方法及び有機el表示装置の製造方法 |
WO2020194469A1 (ja) * | 2019-03-25 | 2020-10-01 | シャープ株式会社 | 蒸着装置、および表示装置の製造方法 |
KR20210081700A (ko) * | 2019-12-24 | 2021-07-02 | 캐논 톡키 가부시키가이샤 | 성막장치 및 이를 사용하여 전자 디바이스를 제조하는 방법 |
JP7113861B2 (ja) * | 2020-03-13 | 2022-08-05 | キヤノントッキ株式会社 | マスク取付装置、成膜装置、マスク取付方法、成膜方法、電子デバイスの製造方法 |
-
2021
- 2021-11-10 CN CN202180102311.7A patent/CN117941052A/zh active Pending
- 2021-11-10 JP JP2023559255A patent/JPWO2023084634A1/ja active Pending
- 2021-11-10 WO PCT/JP2021/041307 patent/WO2023084634A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2023084634A1 (ja) | 2023-05-19 |
CN117941052A (zh) | 2024-04-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20240209 |