JPWO2023032501A1 - - Google Patents

Info

Publication number
JPWO2023032501A1
JPWO2023032501A1 JP2023545148A JP2023545148A JPWO2023032501A1 JP WO2023032501 A1 JPWO2023032501 A1 JP WO2023032501A1 JP 2023545148 A JP2023545148 A JP 2023545148A JP 2023545148 A JP2023545148 A JP 2023545148A JP WO2023032501 A1 JPWO2023032501 A1 JP WO2023032501A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023545148A
Other versions
JPWO2023032501A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023032501A1 publication Critical patent/JPWO2023032501A1/ja
Publication of JPWO2023032501A5 publication Critical patent/JPWO2023032501A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP2023545148A 2021-08-31 2022-07-20 Pending JPWO2023032501A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021141346 2021-08-31
PCT/JP2022/028239 WO2023032501A1 (ja) 2021-08-31 2022-07-20 圧力センサ素子及び圧力センサ

Publications (2)

Publication Number Publication Date
JPWO2023032501A1 true JPWO2023032501A1 (ja) 2023-03-09
JPWO2023032501A5 JPWO2023032501A5 (ja) 2024-04-15

Family

ID=85412099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023545148A Pending JPWO2023032501A1 (ja) 2021-08-31 2022-07-20

Country Status (5)

Country Link
US (1) US20240167901A1 (ja)
JP (1) JPWO2023032501A1 (ja)
CN (1) CN117836598A (ja)
DE (1) DE112022003376T5 (ja)
WO (1) WO2023032501A1 (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4151898B2 (ja) * 2003-05-27 2008-09-17 株式会社山武 静電容量式圧力センサ
JP4545642B2 (ja) * 2005-06-07 2010-09-15 株式会社堀場エステック 静電容量型圧力計の取付構造
US10807862B1 (en) * 2019-04-03 2020-10-20 Infineon Technologies Ag Segmented stress decoupling via frontside trenching

Also Published As

Publication number Publication date
CN117836598A (zh) 2024-04-05
US20240167901A1 (en) 2024-05-23
DE112022003376T5 (de) 2024-05-02
WO2023032501A1 (ja) 2023-03-09

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240118

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240118