JPWO2023013282A1 - - Google Patents

Info

Publication number
JPWO2023013282A1
JPWO2023013282A1 JP2023539695A JP2023539695A JPWO2023013282A1 JP WO2023013282 A1 JPWO2023013282 A1 JP WO2023013282A1 JP 2023539695 A JP2023539695 A JP 2023539695A JP 2023539695 A JP2023539695 A JP 2023539695A JP WO2023013282 A1 JPWO2023013282 A1 JP WO2023013282A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023539695A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023013282A1 publication Critical patent/JPWO2023013282A1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/148—Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2023539695A 2021-08-05 2022-06-23 Pending JPWO2023013282A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021129281 2021-08-05
PCT/JP2022/025183 WO2023013282A1 (ja) 2021-08-05 2022-06-23 電子源及びその製造方法、並びに電子源を備える装置

Publications (1)

Publication Number Publication Date
JPWO2023013282A1 true JPWO2023013282A1 (ja) 2023-02-09

Family

ID=85155811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023539695A Pending JPWO2023013282A1 (ja) 2021-08-05 2022-06-23

Country Status (4)

Country Link
JP (1) JPWO2023013282A1 (ja)
KR (1) KR20240041995A (ja)
TW (1) TW202307897A (ja)
WO (1) WO2023013282A1 (ja)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5993281A (en) 1997-06-10 1999-11-30 The Regents Of The University Of California Sharpening of field emitter tips using high-energy ions
JP2009146705A (ja) * 2007-12-13 2009-07-02 Sumitomo Electric Ind Ltd 電子放出素子、電子源、電子線装置、及び電子放出素子の製造方法
EP4050637A4 (en) * 2019-10-21 2023-12-20 National Institute for Materials Science TRANSMITTER, ELECTRON GUN USING SAME, ELECTRONIC DEVICE USING SAME AND METHOD FOR MANUFACTURING SAME

Also Published As

Publication number Publication date
TW202307897A (zh) 2023-02-16
KR20240041995A (ko) 2024-04-01
WO2023013282A1 (ja) 2023-02-09

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240111

A80 Written request to apply exceptions to lack of novelty of invention

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Effective date: 20240111

A521 Request for written amendment filed

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Effective date: 20240112

A80 Written request to apply exceptions to lack of novelty of invention

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Effective date: 20240209