JPWO2022264599A1 - - Google Patents
Info
- Publication number
- JPWO2022264599A1 JPWO2022264599A1 JP2023529585A JP2023529585A JPWO2022264599A1 JP WO2022264599 A1 JPWO2022264599 A1 JP WO2022264599A1 JP 2023529585 A JP2023529585 A JP 2023529585A JP 2023529585 A JP2023529585 A JP 2023529585A JP WO2022264599 A1 JPWO2022264599 A1 JP WO2022264599A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Software Systems (AREA)
- Artificial Intelligence (AREA)
- General Physics & Mathematics (AREA)
- Evolutionary Computation (AREA)
- Medical Informatics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Data Mining & Analysis (AREA)
- Automation & Control Theory (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Health & Medical Sciences (AREA)
- Testing And Monitoring For Control Systems (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021101004 | 2021-06-17 | ||
| PCT/JP2022/013601 WO2022264599A1 (ja) | 2021-06-17 | 2022-03-23 | 基板処理装置、データ処理方法及びデータ処理プログラム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022264599A1 true JPWO2022264599A1 (ja) | 2022-12-22 |
Family
ID=84527046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023529585A Pending JPWO2022264599A1 (ja) | 2021-06-17 | 2022-03-23 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240272592A1 (ja) |
| JP (1) | JPWO2022264599A1 (ja) |
| KR (1) | KR20240022553A (ja) |
| CN (1) | CN117461040A (ja) |
| TW (1) | TW202314787A (ja) |
| WO (1) | WO2022264599A1 (ja) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012004181A (ja) * | 2010-06-14 | 2012-01-05 | Sharp Corp | 特性予測装置、特性予測方法、特性予測プログラムおよびプログラム記録媒体 |
| JP6374466B2 (ja) | 2016-11-11 | 2018-08-15 | ファナック株式会社 | センサインタフェース装置、測定情報通信システム、測定情報通信方法、及び測定情報通信プログラム |
| KR101917006B1 (ko) * | 2016-11-30 | 2018-11-08 | 에스케이 주식회사 | 머신 러닝 기반 반도체 제조 수율 예측 시스템 및 방법 |
| JP6704585B2 (ja) * | 2018-11-01 | 2020-06-03 | Ｆａｉｒｙ Ｄｅｖｉｃｅｓ株式会社 | 情報処理装置 |
| TWI829807B (zh) * | 2018-11-30 | 2024-01-21 | 日商東京威力科創股份有限公司 | 製造製程之假想測定裝置、假想測定方法及假想測定程式 |
-
2022
- 2022-03-23 US US18/567,534 patent/US20240272592A1/en active Pending
- 2022-03-23 CN CN202280041250.2A patent/CN117461040A/zh active Pending
- 2022-03-23 JP JP2023529585A patent/JPWO2022264599A1/ja active Pending
- 2022-03-23 KR KR1020247000887A patent/KR20240022553A/ko unknown
- 2022-03-23 WO PCT/JP2022/013601 patent/WO2022264599A1/ja active Application Filing
- 2022-06-06 TW TW111120862A patent/TW202314787A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN117461040A (zh) | 2024-01-26 |
| KR20240022553A (ko) | 2024-02-20 |
| US20240272592A1 (en) | 2024-08-15 |
| TW202314787A (zh) | 2023-04-01 |
| WO2022264599A1 (ja) | 2022-12-22 |