JPWO2022230539A1 - - Google Patents

Info

Publication number
JPWO2022230539A1
JPWO2022230539A1 JP2023517185A JP2023517185A JPWO2022230539A1 JP WO2022230539 A1 JPWO2022230539 A1 JP WO2022230539A1 JP 2023517185 A JP2023517185 A JP 2023517185A JP 2023517185 A JP2023517185 A JP 2023517185A JP WO2022230539 A1 JPWO2022230539 A1 JP WO2022230539A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023517185A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022230539A1 publication Critical patent/JPWO2022230539A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/24Measuring radiation intensity with semiconductor detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/36Measuring spectral distribution of X-rays or of nuclear radiation spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Radiation (AREA)
JP2023517185A 2021-04-30 2022-03-28 Pending JPWO2022230539A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021078086 2021-04-30
PCT/JP2022/015113 WO2022230539A1 (ja) 2021-04-30 2022-03-28 放射線検出器及び放射線検出装置

Publications (1)

Publication Number Publication Date
JPWO2022230539A1 true JPWO2022230539A1 (ja) 2022-11-03

Family

ID=83847387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517185A Pending JPWO2022230539A1 (ja) 2021-04-30 2022-03-28

Country Status (2)

Country Link
JP (1) JPWO2022230539A1 (ja)
WO (1) WO2022230539A1 (ja)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001083253A (ja) * 1999-09-10 2001-03-30 Toshiba Corp 放射線検出器及び放射線検出ボード
DE102005037860A1 (de) * 2005-08-10 2007-02-22 Deutsches Elektronen-Synchrotron Desy Röntgendetektormodul
WO2018092551A1 (ja) * 2016-11-17 2018-05-24 株式会社堀場製作所 放射線検出器及び放射線検出装置
EP3346296B1 (en) * 2017-01-10 2021-10-27 Oxford Instruments Technologies Oy A semiconductor radiation detector
JP7197506B2 (ja) * 2017-12-15 2022-12-27 株式会社堀場製作所 シリコンドリフト型放射線検出素子、シリコンドリフト型放射線検出器及び放射線検出装置

Also Published As

Publication number Publication date
WO2022230539A1 (ja) 2022-11-03

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