JPWO2022230539A1 - - Google Patents
Info
- Publication number
- JPWO2022230539A1 JPWO2022230539A1 JP2023517185A JP2023517185A JPWO2022230539A1 JP WO2022230539 A1 JPWO2022230539 A1 JP WO2022230539A1 JP 2023517185 A JP2023517185 A JP 2023517185A JP 2023517185 A JP2023517185 A JP 2023517185A JP WO2022230539 A1 JPWO2022230539 A1 JP WO2022230539A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Molecular Biology (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021078086 | 2021-04-30 | ||
PCT/JP2022/015113 WO2022230539A1 (ja) | 2021-04-30 | 2022-03-28 | 放射線検出器及び放射線検出装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022230539A1 true JPWO2022230539A1 (ja) | 2022-11-03 |
Family
ID=83847387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023517185A Pending JPWO2022230539A1 (ja) | 2021-04-30 | 2022-03-28 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2022230539A1 (ja) |
WO (1) | WO2022230539A1 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001083253A (ja) * | 1999-09-10 | 2001-03-30 | Toshiba Corp | 放射線検出器及び放射線検出ボード |
DE102005037860A1 (de) * | 2005-08-10 | 2007-02-22 | Deutsches Elektronen-Synchrotron Desy | Röntgendetektormodul |
WO2018092551A1 (ja) * | 2016-11-17 | 2018-05-24 | 株式会社堀場製作所 | 放射線検出器及び放射線検出装置 |
EP3346296B1 (en) * | 2017-01-10 | 2021-10-27 | Oxford Instruments Technologies Oy | A semiconductor radiation detector |
JP7197506B2 (ja) * | 2017-12-15 | 2022-12-27 | 株式会社堀場製作所 | シリコンドリフト型放射線検出素子、シリコンドリフト型放射線検出器及び放射線検出装置 |
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2022
- 2022-03-28 WO PCT/JP2022/015113 patent/WO2022230539A1/ja active Application Filing
- 2022-03-28 JP JP2023517185A patent/JPWO2022230539A1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2022230539A1 (ja) | 2022-11-03 |