JPWO2022185793A1 - - Google Patents

Info

Publication number
JPWO2022185793A1
JPWO2022185793A1 JP2023503634A JP2023503634A JPWO2022185793A1 JP WO2022185793 A1 JPWO2022185793 A1 JP WO2022185793A1 JP 2023503634 A JP2023503634 A JP 2023503634A JP 2023503634 A JP2023503634 A JP 2023503634A JP WO2022185793 A1 JPWO2022185793 A1 JP WO2022185793A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023503634A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022185793A1 publication Critical patent/JPWO2022185793A1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2023503634A 2021-03-03 2022-01-26 Pending JPWO2022185793A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021033188 2021-03-03
PCT/JP2022/002799 WO2022185793A1 (ja) 2021-03-03 2022-01-26 研磨用組成物およびこれを用いた研磨方法

Publications (1)

Publication Number Publication Date
JPWO2022185793A1 true JPWO2022185793A1 (ja) 2022-09-09

Family

ID=83155332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023503634A Pending JPWO2022185793A1 (ja) 2021-03-03 2022-01-26

Country Status (6)

Country Link
US (1) US20240002697A1 (ja)
JP (1) JPWO2022185793A1 (ja)
KR (1) KR20230152020A (ja)
CN (1) CN116940648A (ja)
TW (1) TW202332533A (ja)
WO (1) WO2022185793A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023181810A1 (ja) * 2022-03-23 2023-09-28 株式会社フジミインコーポレーテッド 研磨用組成物およびこれを用いた研磨方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010064218A (ja) * 2008-09-12 2010-03-25 Jgc Catalysts & Chemicals Ltd 研磨用砥石
JP6156207B2 (ja) * 2013-04-02 2017-07-05 信越化学工業株式会社 合成石英ガラス基板の製造方法
JP6400897B2 (ja) * 2013-11-06 2018-10-03 ニッタ・ハース株式会社 研磨組成物
TWI761649B (zh) * 2017-12-27 2022-04-21 日商日揮觸媒化成股份有限公司 多孔二氧化矽粒子及其製造方法
KR102672869B1 (ko) * 2018-03-30 2024-06-05 닛키 쇼쿠바이카세이 가부시키가이샤 실리카 입자 분산액, 연마 조성물 및 실리카 입자 분산액의 제조 방법

Also Published As

Publication number Publication date
US20240002697A1 (en) 2024-01-04
TW202332533A (zh) 2023-08-16
CN116940648A (zh) 2023-10-24
WO2022185793A1 (ja) 2022-09-09
KR20230152020A (ko) 2023-11-02

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