JPWO2022158424A1 - - Google Patents
Info
- Publication number
- JPWO2022158424A1 JPWO2022158424A1 JP2022576672A JP2022576672A JPWO2022158424A1 JP WO2022158424 A1 JPWO2022158424 A1 JP WO2022158424A1 JP 2022576672 A JP2022576672 A JP 2022576672A JP 2022576672 A JP2022576672 A JP 2022576672A JP WO2022158424 A1 JPWO2022158424 A1 JP WO2022158424A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/007—Arrangements to check the analyser
- G01N33/0072—Arrangements to check the analyser by generating a test gas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0073—Control unit therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00465—Separating and mixing arrangements
- G01N2035/00475—Filters
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Medicinal Chemistry (AREA)
- Molecular Biology (AREA)
- Biomedical Technology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021008310 | 2021-01-21 | ||
| PCT/JP2022/001419 WO2022158424A1 (ja) | 2021-01-21 | 2022-01-17 | ガス検出方法、プログラム、制御システム及びガス検出システム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022158424A1 true JPWO2022158424A1 (ja) | 2022-07-28 |
Family
ID=82549379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022576672A Pending JPWO2022158424A1 (ja) | 2021-01-21 | 2022-01-17 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240085391A1 (ja) |
| JP (1) | JPWO2022158424A1 (ja) |
| CN (1) | CN116829920A (ja) |
| WO (1) | WO2022158424A1 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11493909B1 (en) * | 2021-04-16 | 2022-11-08 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for detecting environmental parameter in semiconductor fabrication facility |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4690530B2 (ja) * | 2000-09-18 | 2011-06-01 | 新コスモス電機株式会社 | 吸引式ガス検出システム |
| JP3912317B2 (ja) * | 2002-05-28 | 2007-05-09 | ソニー株式会社 | ガス検出装置 |
| JP5192653B2 (ja) * | 2006-03-31 | 2013-05-08 | 日本インスツルメンツ株式会社 | 水銀還元用触媒、水銀変換ユニットおよびこれを用いた排気ガス中の全水銀測定装置 |
| WO2008141418A1 (en) * | 2007-05-24 | 2008-11-27 | Odotech Experts-Odeurs | Methods and apparatuses for detecting odors |
| US20230063005A1 (en) * | 2020-02-27 | 2023-03-02 | Panasonic Intellectual Property Management Co., Ltd. | Gas detection system and control method for gas detection system |
-
2022
- 2022-01-17 US US18/261,172 patent/US20240085391A1/en active Pending
- 2022-01-17 WO PCT/JP2022/001419 patent/WO2022158424A1/ja active Application Filing
- 2022-01-17 CN CN202280009267.XA patent/CN116829920A/zh active Pending
- 2022-01-17 JP JP2022576672A patent/JPWO2022158424A1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20240085391A1 (en) | 2024-03-14 |
| CN116829920A (zh) | 2023-09-29 |
| WO2022158424A1 (ja) | 2022-07-28 |