JPWO2022102462A1 - - Google Patents
Info
- Publication number
- JPWO2022102462A1 JPWO2022102462A1 JP2022561836A JP2022561836A JPWO2022102462A1 JP WO2022102462 A1 JPWO2022102462 A1 JP WO2022102462A1 JP 2022561836 A JP2022561836 A JP 2022561836A JP 2022561836 A JP2022561836 A JP 2022561836A JP WO2022102462 A1 JPWO2022102462 A1 JP WO2022102462A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020189218 | 2020-11-13 | ||
| PCT/JP2021/040313 WO2022102462A1 (ja) | 2020-11-13 | 2021-11-01 | 圧電駆動素子 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022102462A1 true JPWO2022102462A1 (ja) | 2022-05-19 |
Family
ID=81601151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022561836A Pending JPWO2022102462A1 (ja) | 2020-11-13 | 2021-11-01 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230266580A1 (ja) |
| JP (1) | JPWO2022102462A1 (ja) |
| CN (1) | CN116390891A (ja) |
| WO (1) | WO2022102462A1 (ja) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5842467B2 (ja) * | 2010-11-16 | 2016-01-13 | 株式会社リコー | アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置 |
| JP5264954B2 (ja) * | 2011-03-30 | 2013-08-14 | 富士フイルム株式会社 | ミラー駆動装置及び方法 |
| CN111149372B (zh) * | 2017-09-27 | 2021-06-22 | 第一精工株式会社 | 超声波传感器 |
| IT201800008091A1 (it) * | 2018-08-14 | 2020-02-14 | St Microelectronics Srl | Dispositivo micromeccanico dotato di una struttura orientabile tramite attuazione quasi-statica di tipo piezoelettrico e avente elementi di irrigidimento |
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2021
- 2021-11-01 CN CN202180071524.8A patent/CN116390891A/zh active Pending
- 2021-11-01 WO PCT/JP2021/040313 patent/WO2022102462A1/ja active Application Filing
- 2021-11-01 JP JP2022561836A patent/JPWO2022102462A1/ja active Pending
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2023
- 2023-04-28 US US18/141,173 patent/US20230266580A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN116390891A (zh) | 2023-07-04 |
| US20230266580A1 (en) | 2023-08-24 |
| WO2022102462A1 (ja) | 2022-05-19 |