JPWO2022092281A1 - - Google Patents
Info
- Publication number
- JPWO2022092281A1 JPWO2022092281A1 JP2022559272A JP2022559272A JPWO2022092281A1 JP WO2022092281 A1 JPWO2022092281 A1 JP WO2022092281A1 JP 2022559272 A JP2022559272 A JP 2022559272A JP 2022559272 A JP2022559272 A JP 2022559272A JP WO2022092281 A1 JPWO2022092281 A1 JP WO2022092281A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/15—Heterocyclic compounds having oxygen in the ring
- C08K5/151—Heterocyclic compounds having oxygen in the ring having one oxygen atom in the ring
- C08K5/1515—Three-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L65/00—Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Compositions of derivatives of such polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020182575 | 2020-10-30 | ||
PCT/JP2021/040078 WO2022092281A1 (en) | 2020-10-30 | 2021-10-29 | Polymerizable unsaturated group-containing alkali-soluble resin, photosensitive resin composition containing same as essential component, and cured product thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2022092281A1 true JPWO2022092281A1 (en) | 2022-05-05 |
Family
ID=81384025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022559272A Pending JPWO2022092281A1 (en) | 2020-10-30 | 2021-10-29 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPWO2022092281A1 (en) |
KR (1) | KR20230098173A (en) |
CN (1) | CN116348522A (en) |
TW (1) | TW202229370A (en) |
WO (1) | WO2022092281A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI812336B (en) * | 2022-07-08 | 2023-08-11 | 新應材股份有限公司 | Resin composition and cured film |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63205650A (en) * | 1987-02-20 | 1988-08-25 | Unitika Ltd | Alkaline development type photosensitive resin composition |
JPH01203424A (en) * | 1988-02-09 | 1989-08-16 | Toagosei Chem Ind Co Ltd | Curable composition |
JPH0371137A (en) * | 1989-08-11 | 1991-03-26 | Tamura Kaken Kk | Photosensitive resin composition |
JP6562249B2 (en) * | 2015-06-05 | 2019-08-21 | Dic株式会社 | (Meth) acrylate resin and resist member |
-
2021
- 2021-10-29 WO PCT/JP2021/040078 patent/WO2022092281A1/en active Application Filing
- 2021-10-29 JP JP2022559272A patent/JPWO2022092281A1/ja active Pending
- 2021-10-29 KR KR1020237014067A patent/KR20230098173A/en unknown
- 2021-10-29 CN CN202180072635.0A patent/CN116348522A/en active Pending
- 2021-10-29 TW TW110140443A patent/TW202229370A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN116348522A (en) | 2023-06-27 |
TW202229370A (en) | 2022-08-01 |
WO2022092281A1 (en) | 2022-05-05 |
KR20230098173A (en) | 2023-07-03 |