JPWO2022091218A1 - - Google Patents

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Publication number
JPWO2022091218A1
JPWO2022091218A1 JP2021570524A JP2021570524A JPWO2022091218A1 JP WO2022091218 A1 JPWO2022091218 A1 JP WO2022091218A1 JP 2021570524 A JP2021570524 A JP 2021570524A JP 2021570524 A JP2021570524 A JP 2021570524A JP WO2022091218 A1 JPWO2022091218 A1 JP WO2022091218A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021570524A
Other languages
Japanese (ja)
Other versions
JP7074267B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022091218A1 publication Critical patent/JPWO2022091218A1/ja
Application granted granted Critical
Publication of JP7074267B1 publication Critical patent/JP7074267B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/47Schottky barrier electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861Diodes
    • H01L29/872Schottky diodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP2021570524A 2020-10-27 2020-10-27 Manufacturing method of semiconductor device, power conversion device and semiconductor device Active JP7074267B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/040267 WO2022091218A1 (en) 2020-10-27 2020-10-27 Semiconductor device, power conversion device, and method for manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPWO2022091218A1 true JPWO2022091218A1 (en) 2022-05-05
JP7074267B1 JP7074267B1 (en) 2022-05-24

Family

ID=81382034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021570524A Active JP7074267B1 (en) 2020-10-27 2020-10-27 Manufacturing method of semiconductor device, power conversion device and semiconductor device

Country Status (2)

Country Link
JP (1) JP7074267B1 (en)
WO (1) WO2022091218A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014003191A (en) * 2012-06-20 2014-01-09 Hitachi Ltd Semiconductor device
JP6830627B2 (en) * 2016-12-22 2021-02-17 国立研究開発法人産業技術総合研究所 Semiconductor devices and methods for manufacturing semiconductor devices
JP6946764B2 (en) * 2017-06-09 2021-10-06 富士電機株式会社 Semiconductor devices and manufacturing methods for semiconductor devices
JP7176239B2 (en) * 2018-06-14 2022-11-22 富士電機株式会社 semiconductor equipment
US11894428B2 (en) * 2019-03-18 2024-02-06 Mitsubishi Electric Corporation Silicon carbide semiconductor device and power converter

Also Published As

Publication number Publication date
WO2022091218A1 (en) 2022-05-05
JP7074267B1 (en) 2022-05-24

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