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JPWO2021213087A5
JPWO2021213087A5 JP2022563920A JP2022563920A JPWO2021213087A5 JP WO2021213087 A5 JPWO2021213087 A5 JP WO2021213087A5 JP 2022563920 A JP2022563920 A JP 2022563920A JP 2022563920 A JP2022563920 A JP 2022563920A JP WO2021213087 A5 JPWO2021213087 A5 JP WO2021213087A5
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更なる態様として、Rは、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C~C10のアルケニル基、C~Cのシクロアルカジニル基から選ばれるか、あるいは、基における水素原子は、それぞれ独立にC~C10の直鎖又は分岐鎖のアルキル基、C~C10のアルキルシクロアルキル基又はシクロアルキルアルキル基、C~C10のシクロアルキル基、C~C15のアリール基、C~C12のアルキルアリール基、C~C12のアリールアルキル基、C~C20のヘテロアリールにより置換される。Rは、水素、C~Cの直鎖又は分岐鎖のアルキル基から選ばれる。Rは、水素、C~Cの直鎖又は分岐鎖のアルキル基、ベンジル基から選ばれる。 In a further embodiment, R 1 is selected from a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, a carbazolyl group, an indolyl group, a C 2 -C 10 alkenyl group, a C 4 -C 8 cycloalkadienyl group. , or the hydrogen atoms in the group each independently represent a C 1 to C 10 linear or branched alkyl group, a C 4 to C 10 alkylcycloalkyl group or a cycloalkylalkyl group, a C 3 to C 10 cyclo Substituted by an alkyl group, a C 6 -C 15 aryl group, a C 6 -C 12 alkylaryl group, a C 6 -C 12 arylalkyl group, a C 2 -C 20 heteroaryl group. R 2 is selected from hydrogen, C 1 to C 6 straight chain or branched alkyl groups. R 3 is selected from hydrogen, a C 1 to C 6 straight or branched alkyl group, and a benzyl group.

更なる態様として、Rは、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C~Cのアルケニル基、C~Cのシクロアルカジニル基、C~Cのアルキル基で置換されたフェニル基、C~Cのシクロアルキル基で置換されたフェニル基、C~C10のアリール基で置換されたアルケニル基、C~C10のアルキルアリール基で置換されたアルケニル基、C~C10のアリールアルキル基で置換されたアルケニル基から選ばれる。 In a further embodiment, R 1 is a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, a carbazolyl group, an indolyl group, a C 2 to C 6 alkenyl group, a C 4 to C 6 cycloalkadienyl group, a C 1 to Phenyl group substituted with C 5 alkyl group, phenyl group substituted with C 3 to C 6 cycloalkyl group, alkenyl group substituted with C 6 to C 10 aryl group, C 6 to C 10 alkyl group It is selected from an alkenyl group substituted with an aryl group, and an alkenyl group substituted with a C 6 to C 10 arylalkyl group.

EO/PO変性ピラゾリン類有機物の総合性能をさらに向上させるために、1つの好適な実施形態において、Rは、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C~C10のアルケニル基、C~Cのシクロアルカジニル基から選ばれるか、あるいは、前記基における水素原子は、それぞれ独立にC~C10の直鎖又は分岐鎖のアルキル基、C~C10のアルキルシクロアルキル基又はシクロアルキルアルキル基、C~C10のシクロアルキル基、C~C15のアリール基、C~C12のアルキルアリール基、C~C12のアリールアルキル基、C~C20のヘテロアリールにより置換される。Rは、水素、C~Cの直鎖又は分岐鎖のアルキル基から選ばれる。Rは、水素、C1~C6の直鎖又は分岐鎖のアルキル基、ベンジル基から選ばれる。 In order to further improve the overall performance of the EO/PO-modified pyrazoline organic material, in one preferred embodiment, R 1 is a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, a carbazolyl group, an indolyl group, a C 2 - selected from a C 10 alkenyl group, a C 4 to C 8 cycloalkadienyl group, or the hydrogen atoms in the group are each independently selected from a C 1 to C 10 straight or branched alkyl group, a C 4 ~C 10 alkylcycloalkyl group or cycloalkylalkyl group, C 3 to C 10 cycloalkyl group, C 6 to C 15 aryl group, C 6 to C 12 alkylaryl group, C 6 to C 12 aryl Alkyl group, substituted by C 2 -C 20 heteroaryl. R 2 is selected from hydrogen, C 1 to C 6 straight chain or branched alkyl groups. R 3 is selected from hydrogen, a C1 to C6 straight or branched alkyl group, and a benzyl group.

と式(I)で示される増感剤との共役性を向上させて、その光感度を向上させるために、好ましくは、Rは、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C~Cのアルケニル基、C~Cのシクロアルカジニル基、C~Cのアルキル基で置換されたフェニル基、C~Cのシクロアルキル基で置換されたフェニル基、C~C10のアリール基で置換されたアルケニル基、C~C10のアルキルアリール基で置換されたアルケニル基、C~C10のアリールアルキル基で置換されたアルケニル基から選ばれる。EO/PO変性ピラゾリン類有機物の合成難度をさらに低下させるために、より好ましくは、Rは、下記の基から選ばれる1種である。
In order to improve the conjugation between R 1 and the sensitizer represented by formula (I) and improve the photosensitivity, R 1 is preferably a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, Carbazolyl group, indolyl group, C 2 to C 6 alkenyl group, C 4 to C 6 cycloalkadienyl group, phenyl group substituted with C 1 to C 5 alkyl group, C 3 to C 6 cycloalkyl group a phenyl group substituted with a C 6 to C 10 aryl group, an alkenyl group substituted with a C 6 to C 10 alkylaryl group, an alkenyl group substituted with a C 6 to C 10 arylalkyl group, selected from alkenyl groups. In order to further reduce the difficulty in synthesizing the EO/PO-modified pyrazoline organic material, R 1 is more preferably one selected from the following groups.

Claims (14)

下記式(I)で示される構造を有することを特徴とするエトキシ/プロポキシ変性ピラゾリン化合物
Figure 2021213087000001

[式中、前記X及びYは、それぞれ独立に-CH-CH-又は-CH(CH)-CH-を表す。
p及びqは、それぞれ独立に0~9の整数を表し、かつ、両者は同時に0ではない。
は、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C ~C 10 のアルケニル基、C ~C のシクロアルカジエニル基から選ばれ、これらの基における水素原子は、それぞれ独立にC ~C 10 の直鎖又は分岐鎖のアルキル基、C ~C 10 のシクロアルキル基、C ~C 15 のアリール基、C ~C 12 のアルキルアリール基、C ~C 12 のアリールアルキル基、C 20 のヘテロアリール基により置換されていてもよい。
は、水素、C~C10の直鎖又は分岐鎖のアルキル基、C~C10のアルキルシクロアルキル基又はシクロアルキルアルキル基を表す。
は、水素、C 直鎖又は分岐鎖のアルキル基、又はC~C20のアリールアルキル基を表す。]
An ethoxy/propoxy-modified pyrazoline compound characterized by having a structure represented by the following formula (I).
Figure 2021213087000001

[In the formula, X and Y each independently represent -CH 2 -CH 2 - or -CH(CH 3 )-CH 2 -.
p and q each independently represent an integer from 0 to 9, and both are not 0 at the same time.
R 1 is selected from a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, a carbazolyl group, an indolyl group, a C 2 to C 10 alkenyl group, and a C 4 to C 8 cycloalkadienyl group; Hydrogen atoms each independently represent a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cycloalkyl group, a C 6 to C 15 aryl group, or a C 6 to C 12 alkylaryl group. , a C 6 to C 12 arylalkyl group, or a C 2 to 20 heteroaryl group.
R 2 represents hydrogen, a C 1 to C 10 linear or branched alkyl group, a C 4 to C 10 alkylcycloalkyl group, or a cycloalkylalkyl group.
R 3 represents hydrogen, a C 1 to C 6 linear or branched alkyl group , or a C 6 to C 20 arylalkyl group. ]
p+q≦9あることを特徴とする請求項1に記載のエトキシ/プロポキシ変性ピラゾリン化合物 The ethoxy/propoxy-modified pyrazoline compound according to claim 1, characterized in that p+q≦9. 記Rは、水素、C~Cの直鎖又は分岐鎖のアルキル基から選ばれ、
前記Rは、水素、C~Cの直鎖又は分岐鎖のアルキル基、ベンジル基から選ばれることを特徴とする請求項に記載のエトキシ/プロポキシ変性ピラゾリン化合物
The R 2 is selected from hydrogen, a C 1 to C 6 straight chain or branched alkyl group,
The ethoxy/propoxy-modified pyrazoline compound according to claim 1 , wherein R 3 is selected from hydrogen, a C 1 to C 6 linear or branched alkyl group, and a benzyl group.
前記Rは、フェニル基、ナフチル基、ピロリル基、イミダゾリル基、カルバゾリル基、インドリル基、C~Cのアルケニル基、C~Cシクロアルカジエニル基、C~Cのアルキル基で置換されたフェニル基、C~Cのシクロアルキル基で置換されたフェニル基、C~C10のアリール基で置換されたアルケニル基、C~C10のアルキルアリール基で置換されたアルケニル基、C~C10のアリールアルキル基で置換されたアルケニル基から選ばれることを特徴とする請求項に記載のエトキシ/プロポキシ変性ピラゾリン化合物 R 1 is a phenyl group, a naphthyl group, a pyrrolyl group, an imidazolyl group, a carbazolyl group, an indolyl group, a C 2 to C 6 alkenyl group, a C 4 to C 6 cycloalkadienyl group, a C 1 to C 5 A phenyl group substituted with an alkyl group, a phenyl group substituted with a C 3 to C 6 cycloalkyl group, an alkenyl group substituted with a C 6 to C 10 aryl group, a C 6 to C 10 alkylaryl group The ethoxy/propoxy-modified pyrazoline compound according to claim 1, which is selected from substituted alkenyl groups and alkenyl groups substituted with C 6 to C 10 arylalkyl groups. 前記Rは、
Figure 2021213087000002

から選ばれることを特徴とする請求項に記載のエトキシ/プロポキシ変性ピラゾリン化合物
Said R 1 is
Figure 2021213087000002

The ethoxy/propoxy-modified pyrazoline compound according to claim 1 , characterized in that it is selected from the following.
前記Rは、水素、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、t-ブチル基又はCHC(CHCH-から選ばれることを特徴とする請求項に記載のエトキシ/プロポキシ変性ピラゾリン化合物。 2. The method according to claim 1 , wherein R 2 is selected from hydrogen, methyl group, ethyl group, propyl group, isopropyl group, butyl group, t-butyl group, or CH 3 C(CH 2 CH 3 ) 2 -. Ethoxy/propoxy modified pyrazoline compounds as described. 前記エトキシ/プロポキシ変性ピラゾリン化合物は、下記の化合物のうちから選ばれる1種又は2種以上であることを特徴とする請求項に記載のエトキシ/プロポキシ変性ピラゾリン化合物
Figure 2021213087000003
The ethoxy/propoxy modified pyrazoline compound according to claim 1 , wherein the ethoxy/propoxy modified pyrazoline compound is one or more selected from the following compounds .
Figure 2021213087000003
p+q≦6であることを特徴とする請求項1に記載のエトキシ/プロポキシ変性ピラゾリン化合物。The ethoxy/propoxy-modified pyrazoline compound according to claim 1, characterized in that p+q≦6. (A)アルカリ可溶性重合体と、(B)エチレン性不飽和二重結合を有する化合物と、(C)第1の増感剤と、(D)光開始剤及び/又は第2の増感剤と、(E)その他の任意の助剤と、を含み、前記第1の増感剤が請求項1~のいずれか1項に記載のエトキシ/プロポキシ変性ピラゾリン化合物であり、前記第2の増感剤が前記第1の増感剤と異なることを特徴とする光硬化性組成物。 (A) an alkali-soluble polymer, (B) a compound having an ethylenically unsaturated double bond, (C) a first sensitizer, and (D) a photoinitiator and/or a second sensitizer. and (E) any other auxiliary agent, wherein the first sensitizer is the ethoxy/propoxy-modified pyrazoline compound according to any one of claims 1 to 8 , and the second A photocurable composition characterized in that a sensitizer is different from the first sensitizer. 前記アルカリ可溶性重合体は、(メタ)アクリル系重合体、スチレン系重合体、エポキシ系重合体、脂肪族ウレタン(メタ)アクリレート重合体、芳香族ウレタン(メタ)アクリレート重合体、アミド系樹脂、アミドエポキシ系樹脂、アルキッド系樹脂及びフェノール系樹脂からなる群より選ばれる1種又は2種以上であることを特徴とする請求項に記載の光硬化性組成物。 The alkali-soluble polymers include (meth)acrylic polymers, styrene polymers, epoxy polymers, aliphatic urethane (meth)acrylate polymers, aromatic urethane (meth)acrylate polymers, amide resins, and amide resins. The photocurable composition according to claim 9 , characterized in that it is one or more selected from the group consisting of epoxy resins, alkyd resins, and phenolic resins. 前記エチレン性不飽和二重結合を有する化合物は、α,β-不飽和カルボン酸と多価アルコールとを反応させて得られる化合物、ビスフェノールA系(メタ)アクリレート化合物、α,β-不飽和カルボン酸とグリシジル基含有化合物とを反応させて得られる化合物、分子内にウレタン結合を有する(メタ)アクリレート化合物、ノニルフェノキシポリエチレンオキシアクリレート、γ-クロロ-β-ヒドロキシプロピル-β’-(メタ)アクリロイルオキシエチル-o-フタレート、β-ヒドロキシエチル-β’-(メタ)アクリロイルオキシエチル-o-フタレート、β-ヒドロキシプロピル-β’-(メタ)アクリロイルオキシエチル-o-フタレート、フタル酸系化合物、アルキル(メタ)アクリレートからなる群より選ばれる1種又は2種以上であることを特徴とする請求項9に記載の光硬化性組成物。 The compound having an ethylenically unsaturated double bond is a compound obtained by reacting an α,β-unsaturated carboxylic acid with a polyhydric alcohol, a bisphenol A-based (meth)acrylate compound, an α,β-unsaturated carboxylic acid, etc. Compounds obtained by reacting acids with glycidyl group-containing compounds, (meth)acrylate compounds having urethane bonds in the molecule, nonylphenoxypolyethyleneoxyacrylate, γ-chloro-β-hydroxypropyl-β'-(meth)acryloyl Oxyethyl-o-phthalate, β-hydroxyethyl-β'-(meth)acryloyloxyethyl-o-phthalate, β-hydroxypropyl-β'-(meth)acryloyloxyethyl-o-phthalate, phthalic acid compounds, The photocurable composition according to claim 9, characterized in that it is one or more selected from the group consisting of alkyl (meth)acrylates. 前記助剤は、水素供与体、染料、顔料、光発色剤、充填剤、可塑剤、安定化剤、塗布助剤及び剥離促進剤からなる群より選ばれる1種又は2種以上であることを特徴とする請求項9に記載の光硬化性組成物。 The auxiliary agent is one or more selected from the group consisting of a hydrogen donor, a dye, a pigment, a photochromic agent, a filler, a plasticizer, a stabilizer, a coating aid, and a release accelerator. The photocurable composition according to claim 9. 請求項1~のいずれか1項に記載のエトキシ/プロポキシ変性ピラゾリン化合物の、光硬化分野への使用。 Use of the ethoxy/propoxy-modified pyrazoline compound according to any one of claims 1 to 8 in the field of photocuring. 請求項に記載の光硬化性組成物を含むことを特徴とするフォトレジスト。 A photoresist comprising the photocurable composition according to claim 9 .
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