JPWO2021140329A5 - - Google Patents
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- Publication number
- JPWO2021140329A5 JPWO2021140329A5 JP2022542168A JP2022542168A JPWO2021140329A5 JP WO2021140329 A5 JPWO2021140329 A5 JP WO2021140329A5 JP 2022542168 A JP2022542168 A JP 2022542168A JP 2022542168 A JP2022542168 A JP 2022542168A JP WO2021140329 A5 JPWO2021140329 A5 JP WO2021140329A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- pump
- rotor
- processing chamber
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 10
- 230000035699 permeability Effects 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910001220 stainless steel Inorganic materials 0.000 claims 2
- 239000010935 stainless steel Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000005339 levitation Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2000297.8A GB2592346B (en) | 2020-01-09 | 2020-01-09 | Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber |
| GB2000297.8 | 2020-01-09 | ||
| PCT/GB2021/050035 WO2021140329A1 (fr) | 2020-01-09 | 2021-01-07 | Pompe à vide, ensemble pompe à vide pour mettre sous vide une chambre de traitement de semi-conducteur et procédé de mise sous vide d'une chambre de traitement de semi-conducteur |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023509204A JP2023509204A (ja) | 2023-03-07 |
| JPWO2021140329A5 true JPWO2021140329A5 (fr) | 2023-12-28 |
Family
ID=69626236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022542168A Pending JP2023509204A (ja) | 2020-01-09 | 2021-01-07 | 真空ポンプ、半導体処理チャンバを排気するための真空ポンプセット、及び半導体処理チャンバを排気するための方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20230042886A1 (fr) |
| EP (1) | EP4088034A1 (fr) |
| JP (1) | JP2023509204A (fr) |
| KR (1) | KR20220119631A (fr) |
| CN (1) | CN114901951A (fr) |
| GB (1) | GB2592346B (fr) |
| IL (1) | IL294347A (fr) |
| TW (1) | TW202146771A (fr) |
| WO (1) | WO2021140329A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2590955B (en) | 2020-01-09 | 2022-06-15 | Edwards Ltd | Vacuum pump |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7077159B1 (en) * | 1998-12-23 | 2006-07-18 | Applied Materials, Inc. | Processing apparatus having integrated pumping system |
| GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
| JP2005155403A (ja) * | 2003-11-25 | 2005-06-16 | Boc Edwards Kk | 真空ポンプ |
| US7021888B2 (en) * | 2003-12-16 | 2006-04-04 | Universities Research Association, Inc. | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump |
| DE102006004314A1 (de) * | 2006-01-31 | 2007-08-02 | Leybold Vacuum Gmbh | Vakuumleitung |
| EP2620649B1 (fr) * | 2012-01-27 | 2019-03-13 | Edwards Limited | Pompe à vide de transfert gazeux |
| GB2498816A (en) * | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
| GB2533933A (en) * | 2015-01-06 | 2016-07-13 | Edwards Ltd | Improvements in or relating to vacuum pumping arrangements |
| JP7049052B2 (ja) * | 2016-09-27 | 2022-04-06 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる固定円板 |
| JP6706566B2 (ja) * | 2016-10-20 | 2020-06-10 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わるらせん状板、回転円筒体、ならびにらせん状板の製造方法 |
-
2020
- 2020-01-09 GB GB2000297.8A patent/GB2592346B/en active Active
-
2021
- 2021-01-07 JP JP2022542168A patent/JP2023509204A/ja active Pending
- 2021-01-07 CN CN202180008506.5A patent/CN114901951A/zh active Pending
- 2021-01-07 WO PCT/GB2021/050035 patent/WO2021140329A1/fr unknown
- 2021-01-07 US US17/790,843 patent/US20230042886A1/en active Pending
- 2021-01-07 EP EP21700335.9A patent/EP4088034A1/fr active Pending
- 2021-01-07 IL IL294347A patent/IL294347A/en unknown
- 2021-01-07 KR KR1020227023040A patent/KR20220119631A/ko active Search and Examination
- 2021-01-08 TW TW110100735A patent/TW202146771A/zh unknown
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