JPWO2021125038A1 - - Google Patents

Info

Publication number
JPWO2021125038A1
JPWO2021125038A1 JP2021565528A JP2021565528A JPWO2021125038A1 JP WO2021125038 A1 JPWO2021125038 A1 JP WO2021125038A1 JP 2021565528 A JP2021565528 A JP 2021565528A JP 2021565528 A JP2021565528 A JP 2021565528A JP WO2021125038 A1 JPWO2021125038 A1 JP WO2021125038A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021565528A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021125038A1 publication Critical patent/JPWO2021125038A1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/06—Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
JP2021565528A 2019-12-17 2020-12-10 Pending JPWO2021125038A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019226938 2019-12-17
PCT/JP2020/046026 WO2021125038A1 (ja) 2019-12-17 2020-12-10 Ｍｅｍｓデバイスおよびｍｅｍｓデバイスの駆動方法

Publications (1)

Publication Number Publication Date
JPWO2021125038A1 true JPWO2021125038A1 (ja) 2021-06-24

Family

ID=76477466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021565528A Pending JPWO2021125038A1 (ja) 2019-12-17 2020-12-10

Country Status (3)

Country Link
US (1) US20230003996A1 (ja)
JP (1) JPWO2021125038A1 (ja)
WO (1) WO2021125038A1 (ja)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10730742B2 (en) * 2012-01-24 2020-08-04 Pioneer Corporation Actuator with plurality of torsion bars having varying spring constant

Also Published As

Publication number Publication date
US20230003996A1 (en) 2023-01-05
WO2021125038A1 (ja) 2021-06-24

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Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231017