JPWO2021084684A1 - - Google Patents

Info

Publication number
JPWO2021084684A1
JPWO2021084684A1 JP2021553983A JP2021553983A JPWO2021084684A1 JP WO2021084684 A1 JPWO2021084684 A1 JP WO2021084684A1 JP 2021553983 A JP2021553983 A JP 2021553983A JP 2021553983 A JP2021553983 A JP 2021553983A JP WO2021084684 A1 JPWO2021084684 A1 JP WO2021084684A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021553983A
Other versions
JP7291235B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021084684A1 publication Critical patent/JPWO2021084684A1/ja
Application granted granted Critical
Publication of JP7291235B2 publication Critical patent/JP7291235B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/07—Arrangements for controlling convergence of a plurality of beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2021553983A 2019-10-31 2019-10-31 電子銃および電子線応用装置 Active JP7291235B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/042781 WO2021084684A1 (ja) 2019-10-31 2019-10-31 電子銃および電子線応用装置

Publications (2)

Publication Number Publication Date
JPWO2021084684A1 true JPWO2021084684A1 (ja) 2021-05-06
JP7291235B2 JP7291235B2 (ja) 2023-06-14

Family

ID=75714971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021553983A Active JP7291235B2 (ja) 2019-10-31 2019-10-31 電子銃および電子線応用装置

Country Status (4)

Country Link
US (1) US20240120168A1 (ja)
JP (1) JP7291235B2 (ja)
DE (1) DE112019007690T5 (ja)
WO (1) WO2021084684A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7054281B1 (ja) * 2021-10-19 2022-04-13 株式会社Photo electron Soul 電子線適用装置および電子線適用装置における検出データの作成方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11509360A (ja) * 1995-07-10 1999-08-17 インテバック・インコーポレイテッド 超微小放出領域を有する負電子親和力フォトカソードを利用した電子ソース
JP2019057387A (ja) * 2017-09-20 2019-04-11 浜松ホトニクス株式会社 電子放出管、電子照射装置及び電子放出管の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000123716A (ja) 1998-10-09 2000-04-28 Fujitsu Ltd 微小電子源
JP2001143648A (ja) 1999-11-17 2001-05-25 Hitachi Ltd 光励起電子線源および電子線応用装置
US6828574B1 (en) 2000-08-08 2004-12-07 Applied Materials, Inc. Modulator driven photocathode electron beam generator
WO2009119074A1 (ja) 2008-03-25 2009-10-01 国立大学法人名古屋大学 スピン偏極電子発生素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11509360A (ja) * 1995-07-10 1999-08-17 インテバック・インコーポレイテッド 超微小放出領域を有する負電子親和力フォトカソードを利用した電子ソース
JP2019057387A (ja) * 2017-09-20 2019-04-11 浜松ホトニクス株式会社 電子放出管、電子照射装置及び電子放出管の製造方法

Also Published As

Publication number Publication date
DE112019007690T5 (de) 2022-07-07
JP7291235B2 (ja) 2023-06-14
WO2021084684A1 (ja) 2021-05-06
US20240120168A1 (en) 2024-04-11

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