JPWO2021067160A5

JPWO2021067160A5 -

Info

Publication number: JPWO2021067160A5
Application number: JP2022520163A
Authority: JP
Publication date: 2023-09-07
Anticipated expiration: 2040-09-28

Description

図２は、変圧器２０２を含むＲＦ分配回路２０１を組み込んだ基板処理システム２００の一例の機能ブロック図である。ＲＦ分配回路２０１は、本明細書に開示されるＲＦ分配回路のいずれかと同一または類似して構成されてもよい。変圧器２０２は、本明細書に開示される任意の変圧器および／または変圧器結合コンバイナとして構成されてもよい。図２は容量結合プラズマ（ＣＣＰ）システムを示しているが、本明細書に開示される実施形態は、他のプラズマ処理システムに適用可能である。実施形態は、堆積、エッチング、および他の基板処理プロセスに適用可能である。他の基板処理プロセスは、プラズマ励起原子層堆積（ＰＥＡＬＤ）およびプラズマ励起化学気相堆積（ＰＥＣＶＤ）プロセスを含む。 FIG. 2 is a functional block diagram of an example of a substrate processing system 200 incorporating an RF distribution circuit 201 including a transformer 202. As shown in FIG. RF distribution circuit 201 may be configured identically or similarly to any of the RF distribution circuits disclosed herein. Transformer 202 may be configured as any transformer and/or transformer combination combiner disclosed herein. Although FIG. 2 depicts a capacitively coupled plasma (CCP) system, embodiments disclosed herein are applicable to other plasma processing systems. Embodiments are applicable to deposition, etching, and other substrate processing processes. Other substrate processing processes include plasma-enhanced atomic layer deposition (PEALD) and plasma-enhanced chemical vapor deposition (PECVD) processes.

ガス供給システム２３０は、１つまたは複数のガス源２３２－１、２３２－２、．．．、および２３２－Ｎ（総称してガス源２３２）を含む。ここで、Ｎは、０よりも大きい整数である。ガス源２３２は、１つまたは複数の前駆体およびそれらのガス混合物を供給する。また、ガス源２３２は、エッチングガス、キャリアガスおよび／またはパージガスを供給してもよい。また、気化した前駆体が使用されてもよい。ガス源２３２は、バルブ２３４－１、２３４－２、．．．、および２３４－Ｎ（総称してバルブ２３４）とマスフローコントローラ２３６－１、２３６－２、．．．、および２３６－Ｎ（総称してマスフローコントローラ２３６）とによってマニホールド２４０に接続されている。マニホールド２４０の出力は、処理チャンバ２０４に供給される。一例として、マニホールド２４０の出力は、シャワーヘッド２１０に供給される。 Gas supply system 230 includes one or more gas sources 232-1, 232-2, . . . , and 232-N (collectively gas sources 232). Here, N is an integer greater than 0. Gas source 232 provides one or more precursors and gas mixtures thereof. Gas source 232 may also supply etching gas, carrier gas, and/or purge gas. Also, vaporized precursors may be used. Gas source 232 includes valves 234-1, 234-2, . . . , and 234-N (collectively valves 234) and mass flow controllers 236-1, 236-2, . . . , and 236-N (collectively mass flow controllers 236) to manifold 240. The output of manifold 240 is provided to processing chamber 204. In one example, the output of manifold 240 is supplied to showerhead 210.

温度コントローラ２４２は、プレート２０６、２０７および基板（例えば、基板２０９）の温度を制御するために、ＴＣＥｓの動作、ひいては温度を制御してもよい。温度コントローラ２４２および／またはシステムコントローラ２６０は、ガス源２３２のうちの１つまたは複数からガスチャネルへの流れを制御することによって、基板を冷却するためのＥＳＣ２０４内のガスチャネルへの裏面ガス（例えば、ヘリウム）の流量を制御してもよい。また、温度コントローラ２４２は、ＥＳＣ２０４内のチャネルを通る第１の冷媒の流れ（冷却流体の圧力および流量）を制御するために、冷媒アセンブリ２４６と通信してもよい。第１の冷媒アセンブリ２４６は、リザーバ（図示せず）から冷却流体を受け取ってもよい。例えば、冷媒アセンブリ２４６は、冷媒ポンプとリザーバとを含んでもよい。温度コントローラ２４２は、冷媒アセンブリ２４６を動作して、チャネル２１６を通して冷媒を流し、ベースプレート２０７を冷却する。温度コントローラ２４２は、冷媒が流れる速度および冷媒の温度を制御してもよい。温度コントローラ２４２は、処理チャンバ２０５内のセンサ２４３から検出されたパラメータに基づいて、ＴＣＥｓに供給される電流と、チャネルに供給されるガスおよび／または冷媒の圧力および流量とを制御する。温度センサ２４３は、抵抗温度デバイス、熱電対、デジタル温度センサ、および／または他の適切な温度センサを含んでもよい。エッチングプロセス中、基板２０９は、高出力プラズマの存在下において所定の温度（例えば、摂氏１２０度（℃））で加熱される場合がある。チャネルを通るガスおよび／または冷媒の流れは、ベースプレート２０７の温度を下げ、これにより基板２０９の温度を下げる（例えば、１２０℃から８０℃までの冷却）。 Temperature controller 242 may control the operation, and thus the temperature, of the TCEs to control the temperature of plates 206, 207 and substrate (eg, substrate 209). Temperature controller 242 and/or system controller 260 may control flow of backside gas (e.g., , helium) may be controlled. Temperature controller 242 may also communicate with refrigerant assembly 246 to control the flow of the first refrigerant (cooling fluid pressure and flow rate) through the channels within ESC 204 . First coolant assembly 246 may receive cooling fluid from a reservoir (not shown). For example, refrigerant assembly 246 may include a refrigerant pump and a reservoir. Temperature controller 242 operates coolant assembly 246 to flow coolant through channels 216 to cool base plate 207 . Temperature controller 242 may control the rate at which the refrigerant flows and the temperature of the refrigerant. Temperature controller 242 controls the electrical current supplied to the TCEs and the pressure and flow rate of gas and/or coolant supplied to the channels based on parameters detected from sensors 243 within processing chamber 205 . Temperature sensor 243 may include a resistive temperature device, a thermocouple, a digital temperature sensor, and/or other suitable temperature sensor. During the etching process, the substrate 209 may be heated to a predetermined temperature (eg, 120 degrees Celsius (° C.)) in the presence of a high power plasma. The flow of gas and/or coolant through the channels reduces the temperature of base plate 207, thereby reducing the temperature of substrate 209 (eg, cooling from 120°C to 80°C).

ＬＦおよびＨＦ経路の入力インピーダンスの例は、図６のスミスチャート６００によって示されている。スミスチャート６００は、図５のＬＦおよびＨＦ経路５０２、５０４の負荷インピーダンスを提供する短絡、開回路、および５０Ωの入力インピーダンスを示す。図６では、円形のドットが示され、ＨＦ経路に対応しており、ならびに四角形のドットが示され、ＬＦ経路に対応している。スミスチャート６００は、可能性のある入力インピーダンス値の対数表現である。入力インピーダンスが変化すると、対応するドットは、スミスチャート上の異なる位置に移動する。 An example of the input impedance of the LF and HF paths is shown by Smith chart 600 in FIG. Smith chart 600 shows a short circuit, an open circuit, and an input impedance of 50Ω that provides the load impedance of the LF and HF paths 502, 504 of FIG. In FIG. 6, circular dots are shown, corresponding to the HF path, and square dots are shown, corresponding to the LF path. Smith chart 600 is a logarithmic representation of possible input impedance values. When the input impedance changes, the corresponding dot moves to a different position on the Smith chart.

同軸ケーブル８０６、８１０は、互いに平行して延びており、内部誘電絶縁体８２４、８３４によって導電性シールド８２２、８３２から絶縁される導電性コア８２５、８３５をさらに含む。導電性コア８２５、８３５は、導電線８２６Ａ、８２６Ｂによって直列ループで接続されている。導電線８２６Ａは、第１の同軸ケーブル８０６の第１の端部を第２の同軸ケーブル８１０の第１の端部に接続している。第２の同軸ケーブル８１０の第１の端部は、導電性インターコネクタ８０８における、第1の同軸ケーブル８０６の第1の端部側と反対側の端部にある。導電線８２６Ｂは、第１の同軸ケーブル８０６の第２の端部を第２の同軸ケーブル８１０の第２の端部に接続している。第２の同軸ケーブル８１０の第２の端部は、導電性インターコネクタ８０８における、第1の同軸ケーブル８０６の第2の端部側と反対側の端部にある。 Coaxial cables 806, 810 further include conductive cores 825, 835 that extend parallel to each other and are insulated from conductive shields 822, 832 by internal dielectric insulators 824, 834. Conductive cores 825, 835 are connected in a series loop by conductive wires 826A, 826B. Conductive wire 826A connects a first end of first coaxial cable 806 to a first end of second coaxial cable 810. The first end of the second coaxial cable 810 is at the opposite end of the conductive interconnect 808 from the first end of the first coaxial cable 806 . Conductive wire 826B connects the second end of first coaxial cable 806 to the second end of second coaxial cable 810. The second end of the second coaxial cable 810 is at the opposite end of the conductive interconnect 808 from the second end of the first coaxial cable 806 .

上述のように、ツールによって実行される１つまたは複数のプロセスステップに応じて、コントローラは、１つまたは複数の他のツール回路またはモジュール、他のツール構成要素、クラスタツール、他のツールインターフェース、隣接するツール、近接するツール、工場全体に位置するツール、メインコンピュータ、別のコントローラ、あるいは半導体製造工場内のツール場所および／またはロードポートに対してウエハの容器を搬入および搬出する材料移送に使用されるツールと通信してもよい。
本発明は、たとえば、以下のような態様で実現することもできる。
適用例１：
変圧器であって、
一次コイルであって、
第１の同軸ケーブルの第１のシールドと、
第２の同軸ケーブルの第２のシールドと、
前記第１のシールドを前記第２のシールドに接続する導電性インターコネクタと
を備える一次コイルと、
二次コイルであって、
前記第１の同軸ケーブルの第１のコアと、
前記第２の同軸ケーブルの第２のコアと、
前記第１のコアを前記第２のコアに接続する一対の導電線と
を備える二次コイルと
を備える、変圧器。
適用例２：
適用例１の変圧器であって、
前記第１の同軸ケーブルは、前記第２の同軸ケーブルに平行して延びている、変圧器。
適用例３：
適用例１の変圧器であって、
前記第１のコア、前記第２のコアおよび前記一対の導電線の長さの合計は、前記第１の同軸ケーブルおよび前記第２の同軸ケーブルの各々の長さの倍数に基づくか、あるいは等しいかの少なくとも一方である、変圧器。
適用例４：
適用例１の変圧器であって、
前記第１の同軸ケーブルおよび前記第２の同軸ケーブルの各々の長さは、前記変圧器によって送信される無線周波数信号の波長の分数倍に基づくか、あるいは等しいかの少なくとも一方である、変圧器。
適用例５：
無線周波数分配回路であって、
無線周波数における周波数成分を含む第１の無線周波数信号を生成するための無線周波数発生器と、
適用例１の前記変圧器と
を備え、前記変圧器は、前記第１の無線周波数信号を第２の無線周波数信号に変換するためのものであり、前記第２の無線周波数信号は、前記第１の無線周波数における周波数成分を含む、無線周波数分配回路。
適用例６：
基板処理システムであって、
適用例５の前記無線周波数分配回路と、
プロセスチャンバと、
電極を含み、前記プロセスチャンバ内に実装されるシャワーヘッドと、
前記シャワーヘッドに隣接して前記プロセスチャンバ内に実装される基板支持体と
を備え、
前記変圧器は、前記第２の無線周波数信号を前記電極に供給するためのものである、基板処理システム。
適用例７：
無線周波数分配回路であって、
少なくとも１つの無線周波数発生器から第１の無線周波数信号および第２の無線周波数信号を受信し、前記第１の無線周波数信号をフィルタで遮断するための第１のフィルタであって、前記第１の無線周波数信号が、第１の周波数にあり、前記第２の無線周波数信号が、第２の周波数にあり、かつ前記第２の周波数が、前記第１の周波数よりも小さい第１のフィルタと、
前記少なくとも１つの無線周波数発生器から前記第１の無線周波数信号および前記第２の無線周波数信号を受信し、前記第１の無線周波数信号をフィルタで遮断するための第２のフィルタと、
前記少なくとも１つの無線周波数発生器の出力を前記第１のフィルタの入力に整合させるための第１の整合ネットワークと、
前記少なくとも１つの無線周波数発生器の出力を前記第２のフィルタの入力に整合させるための第２の整合ネットワークと、
前記第１の無線周波数信号を第３の無線周波数信号に変換し、前記第２の無線周波数信号を第４の無線周波数信号に変換し、かつ前記第１の無線周波数信号を前記第２の無線周波数信号と結合するか、あるいは前記第３の無線周波数信号を前記第４の無線周波数信号と結合するかのいずれかのための変圧器結合コンバイナであって、前記第３の無線周波数信号が、前記第１の無線周波数における周波数成分を含み、かつ前記第４の無線周波数信号が、前記第２の無線周波数における周波数成分を含む変圧器結合コンバイナと
を備える、無線周波数分配回路。
適用例８：
適用例７の無線周波数分配回路であって、
前記変圧器結合コンバイナは、
前記第１のフィルタの出力を受信するための第１の変圧器と、
前記第２のフィルタの出力を受信するための第２の変圧器と
を備える、無線周波数分配回路。
適用例９：
適用例８の無線周波数分配回路であって、
前記第１の変圧器は、
前記第１のフィルタに接続された一次コイルと、
二次コイルと
を備え、かつ
前記第２の変圧器は、
前記第２のフィルタおよび前記第１の変圧器の前記一次コイルに接続された一次コイルと、
前記第１の変圧器の前記二次コイルに接続された二次コイルと
を備える、無線周波数分配回路。
適用例１０：
適用例９の無線周波数分配回路であって、
前記第１の変圧器の前記一次コイルおよび前記二次コイルは、接地基準に接続されており、かつ
前記第２の変圧器の前記一次コイルおよび前記二次コイルは、前記接地基準に接続されている、無線周波数分配回路。
適用例１１：
適用例９の無線周波数分配回路であって、
前記第１の変圧器は、
一次コイルであって、
第１の同軸ケーブルの第１のシールドと、
第２の同軸ケーブルの第２のシールドと、
前記第１のシールドを前記第２のシールドに接続する導電性インターコネクタと
を備える一次コイルと、
二次コイルであって、
前記第１の同軸ケーブルの第１のコアと、
前記第２の同軸ケーブルの第２のコアと、
前記第１のコアを前記第２のコアに接続する一対の導電線と
を備える二次コイルと
を備える、無線周波数分配回路。
適用例１２：
適用例１１の無線周波数分配回路であって、
前記第１の同軸ケーブルは、前記第２の同軸ケーブルに平行して延びている、無線周波数分配回路。
適用例１３：
適用例１１の無線周波数分配回路であって、
前記第１のコア、前記第２のコアおよび前記一対の導電線の長さの合計は、前記第１の同軸ケーブルおよび前記第２の同軸ケーブルの各々の長さの倍数に基づくか、あるいは等しいかの少なくとも一方である、無線周波数分配回路。
適用例１４：
適用例１１の無線周波数分配回路であって、
前記第１の同軸ケーブルおよび前記第２の同軸ケーブルの各々の長さは、前記第１の無線周波数信号の波長の分数倍に基づくか、あるいは等しいかの少なくとも一方である、無線周波数分配回路。
適用例１５：
適用例７の無線周波数分配回路であって、
前記変圧器結合コンバイナは、第１の変圧器を備え、
前記第１の変圧器は、
前記第１のフィルタに接続された第１の一次コイルと、
前記第２のフィルタに接続された第２の一次コイルと、
前記第３の無線周波数信号を受信するために接続された第１の二次コイルと、
前記第４の無線周波数信号を受信するために接続された第２の二次コイルと
を備える、無線周波数分配回路。
適用例１６：
適用例１５の無線周波数分配回路であって、
前記第１の変圧器は、第３の二次コイルを備え、
前記第３の二次コイルは、第５の無線周波数信号を受信するためのものであり、かつ
前記第５の無線周波数信号は、前記第１の周波数における周波数成分と前記第２の周波数における周波数成分とを含む、無線周波数分配回路。
適用例１７：
適用例７の無線周波数分配回路であって、
前記変圧器結合コンバイナは、
前記第１のフィルタに接続された第１の一次コイルと、
前記第２のフィルタに接続された第２の一次コイルと、
前記第３の無線周波数信号を出力する第１の二次コイルであって、前記第３の無線周波数信号が、前記第１の無線周波数および前記第２の無線周波数における周波数成分をそれぞれ含む第１の二次コイルと、
前記第４の無線周波数信号を出力する第２の二次コイルであって、前記第４の無線周波数信号が、前記第１の無線周波数および前記第２の無線周波数における周波数成分をそれぞれ含む第２の二次コイルと
を備える、無線周波数分配回路。
適用例１８：
適用例１７の無線周波数分配回路であって、
前記変圧器結合コンバイナは、
第５の無線周波数信号を出力する第３の二次コイルであって、前記第５の無線周波数信号が、前記第１の無線周波数および前記第２の無線周波数における周波数成分をそれぞれ含む第３の二次コイルと、
第６の無線周波数信号を出力する第４の二次コイルであって、前記第６の無線周波数信号が、前記第１の無線周波数および前記第２の無線周波数における周波数成分をそれぞれ含む第４の二次コイルと
を備える、無線周波数分配回路。
適用例１９：
基板処理システムであって、
適用例７の前記無線周波数分配回路と、
プロセスチャンバと、
電極を備え、前記プロセスチャンバ内に実装されるシャワーヘッドと、
前記シャワーヘッドに隣接して前記プロセスチャンバ内に実装される基板支持体と
を備える、基板処理システム。
適用例２０：
基板処理システムにおいて、無線周波数電力を電極に供給するための無線周波数分配回路であって、前記無線周波数分配回路は、
第１の無線周波数信号を生成するための無線周波数発生器と、
前記第１の無線周波数信号を第２の無線周波数信号に変換し、前記第２の無線周波数信号を前記電極に供給して、前記基板処理システムのプロセスチャンバ内でプラズマ電離密度およびイオン化エネルギーを調整するための変圧器と、
前記無線周波数発生器の出力を前記変圧器の入力に整合させるための整合ネットワークと
を備える、無線周波数分配回路。 As described above, depending on one or more process steps performed by the tool, the controller may be connected to one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, Used for material transfer to move containers of wafers into and out of adjacent tools, adjacent tools, tools located throughout the factory, the main computer, another controller, or tool locations and/or load ports within a semiconductor manufacturing facility. may communicate with tools that are used.
The present invention can also be realized, for example, in the following manner.
Application example 1:
A transformer,
A primary coil,
a first shield of a first coaxial cable;
a second shield of a second coaxial cable;
a conductive interconnect connecting the first shield to the second shield;
a primary coil comprising;
A secondary coil,
a first core of the first coaxial cable;
a second core of the second coaxial cable;
a pair of conductive wires connecting the first core to the second core;
a secondary coil comprising
A transformer.
Application example 2:
The transformer of application example 1,
The first coaxial cable extends parallel to the second coaxial cable.
Application example 3:
The transformer of application example 1,
The total length of the first core, the second core, and the pair of conductive wires is based on a multiple of or equal to the length of each of the first coaxial cable and the second coaxial cable. At least one of them is a transformer.
Application example 4:
The transformer of application example 1,
a transformer, wherein the length of each of the first coaxial cable and the second coaxial cable is based on and/or equal to a fractional multiple of the wavelength of a radio frequency signal transmitted by the transformer; vessel.
Application example 5:
A radio frequency distribution circuit,
a radio frequency generator for generating a first radio frequency signal including frequency components at radio frequencies;
The transformer of application example 1 and
, the transformer is for converting the first radio frequency signal into a second radio frequency signal, and the second radio frequency signal has a frequency component at the first radio frequency. Including, radio frequency distribution circuit.
Application example 6:
A substrate processing system,
The radio frequency distribution circuit of Application Example 5,
a process chamber;
a showerhead including electrodes and implemented within the process chamber;
a substrate support mounted within the process chamber adjacent to the showerhead;
Equipped with
The substrate processing system, wherein the transformer is for supplying the second radio frequency signal to the electrode.
Application example 7:
A radio frequency distribution circuit,
a first filter for receiving a first radio frequency signal and a second radio frequency signal from at least one radio frequency generator and for filtering out the first radio frequency signal; a first filter, wherein the radio frequency signal is at a first frequency, the second radio frequency signal is at a second frequency, and the second frequency is less than the first frequency; ,
a second filter for receiving the first radio frequency signal and the second radio frequency signal from the at least one radio frequency generator and for filtering out the first radio frequency signal;
a first matching network for matching the output of the at least one radio frequency generator to the input of the first filter;
a second matching network for matching the output of the at least one radio frequency generator to the input of the second filter;
converting the first radio frequency signal to a third radio frequency signal, converting the second radio frequency signal to a fourth radio frequency signal, and converting the first radio frequency signal to the second radio frequency signal; a transformer-coupled combiner for either combining frequency signals or combining the third radio frequency signal with the fourth radio frequency signal, the third radio frequency signal comprising: a transformer-coupled combiner that includes a frequency component at the first radio frequency and wherein the fourth radio frequency signal includes a frequency component at the second radio frequency;
A radio frequency distribution circuit comprising:
Application example 8:
A radio frequency distribution circuit according to application example 7,
The transformer-coupled combiner includes:
a first transformer for receiving the output of the first filter;
a second transformer for receiving the output of the second filter;
A radio frequency distribution circuit comprising:
Application example 9:
A radio frequency distribution circuit according to Application Example 8,
The first transformer is
a primary coil connected to the first filter;
secondary coil and
and
The second transformer is
a primary coil connected to the second filter and the primary coil of the first transformer;
a secondary coil connected to the secondary coil of the first transformer;
A radio frequency distribution circuit comprising:
Application example 10:
A radio frequency distribution circuit according to Application Example 9,
The primary coil and the secondary coil of the first transformer are connected to a ground reference, and
A radio frequency distribution circuit, wherein the primary coil and the secondary coil of the second transformer are connected to the ground reference.
Application example 11:
A radio frequency distribution circuit according to Application Example 9,
The first transformer is
A primary coil,
a first shield of a first coaxial cable;
a second shield of a second coaxial cable;
a conductive interconnect connecting the first shield to the second shield;
a primary coil comprising;
A secondary coil,
a first core of the first coaxial cable;
a second core of the second coaxial cable;
a pair of conductive wires connecting the first core to the second core;
a secondary coil comprising
A radio frequency distribution circuit comprising:
Application example 12:
A radio frequency distribution circuit according to Application Example 11,
The first coaxial cable extends parallel to the second coaxial cable.
Application example 13:
A radio frequency distribution circuit according to Application Example 11,
The total length of the first core, the second core, and the pair of conductive wires is based on a multiple of or equal to the length of each of the first coaxial cable and the second coaxial cable. At least one of these is a radio frequency distribution circuit.
Application example 14:
A radio frequency distribution circuit according to Application Example 11,
a radio frequency distribution circuit, wherein the length of each of the first coaxial cable and the second coaxial cable is based on and/or equal to a fractional multiple of the wavelength of the first radio frequency signal; .
Application example 15:
A radio frequency distribution circuit according to application example 7,
The transformer combination combiner includes a first transformer;
The first transformer is
a first primary coil connected to the first filter;
a second primary coil connected to the second filter;
a first secondary coil connected to receive the third radio frequency signal;
a second secondary coil connected to receive the fourth radio frequency signal;
A radio frequency distribution circuit comprising:
Application example 16:
A radio frequency distribution circuit according to Application Example 15,
the first transformer includes a third secondary coil,
The third secondary coil is for receiving a fifth radio frequency signal, and
The fifth radio frequency signal includes a frequency component at the first frequency and a frequency component at the second frequency.
Application example 17:
A radio frequency distribution circuit according to application example 7,
The transformer-coupled combiner includes:
a first primary coil connected to the first filter;
a second primary coil connected to the second filter;
a first secondary coil that outputs the third radio frequency signal, the third radio frequency signal including frequency components at the first radio frequency and the second radio frequency, respectively; a secondary coil of
a second secondary coil that outputs the fourth radio frequency signal, wherein the fourth radio frequency signal includes frequency components at the first radio frequency and the second radio frequency, respectively; with the secondary coil of
A radio frequency distribution circuit comprising:
Application example 18:
A radio frequency distribution circuit according to Application Example 17,
The transformer-coupled combiner includes:
a third secondary coil that outputs a fifth radio frequency signal, wherein the fifth radio frequency signal includes frequency components at the first radio frequency and the second radio frequency, respectively; a secondary coil;
a fourth secondary coil that outputs a sixth radio frequency signal, the sixth radio frequency signal including frequency components at the first radio frequency and the second radio frequency, respectively; secondary coil and
A radio frequency distribution circuit comprising:
Application example 19:
A substrate processing system,
The radio frequency distribution circuit of Application Example 7,
a process chamber;
a showerhead comprising an electrode and mounted within the process chamber;
a substrate support mounted within the process chamber adjacent to the showerhead;
A substrate processing system comprising:
Application example 20:
In a substrate processing system, a radio frequency distribution circuit for supplying radio frequency power to an electrode, the radio frequency distribution circuit comprising:
a radio frequency generator for generating a first radio frequency signal;
converting the first radio frequency signal to a second radio frequency signal and providing the second radio frequency signal to the electrode to adjust plasma ionization density and ionization energy within a process chamber of the substrate processing system; and a transformer for
a matching network for matching the output of the radio frequency generator to the input of the transformer;
A radio frequency distribution circuit comprising:

Claims

A transformer,
A primary coil,
a first shield of a first coaxial cable;
a second shield of a second coaxial cable;
a primary coil comprising: a conductive interconnect connecting the first shield to the second shield;
A secondary coil,
a first core of the first coaxial cable;
a second core of the second coaxial cable;
A transformer comprising: a pair of conductive wires connecting the first core to the second core; and a secondary coil.

The transformer according to claim 1,
The first coaxial cable extends parallel to the second coaxial cable.

The transformer according to claim 1,
The total length of the first core, the second core, and the pair of conductive wires is based on a multiple of or equal to the length of each of the first coaxial cable and the second coaxial cable. At least one of them is a transformer.

The transformer according to claim 1,
a transformer, wherein the length of each of the first coaxial cable and the second coaxial cable is based on and/or equal to a fractional multiple of the wavelength of a radio frequency signal transmitted by the transformer; vessel.

A radio frequency distribution circuit,
a radio frequency generator for generating a first radio frequency signal including frequency components at radio frequencies;
2. The transformer of claim 1, wherein the transformer is for converting the first radio frequency signal into a second radio frequency signal, and the second radio frequency signal is A radio frequency distribution circuit containing frequency components at frequencies.

A substrate processing system,
The radio frequency distribution circuit according to claim 5;
a process chamber;
a showerhead including electrodes and implemented within the process chamber;
a substrate support mounted within the process chamber adjacent to the showerhead;
The substrate processing system, wherein the transformer is for supplying the second radio frequency signal to the electrode.

A radio frequency distribution circuit,
a first filter for receiving a first radio frequency signal and a second radio frequency signal from at least one radio frequency generator and for filtering out the first radio frequency signal; a first filter, wherein the radio frequency signal is at a first frequency, the second radio frequency signal is at a second frequency, and the second frequency is less than the first frequency; ,
a second filter for receiving the first radio frequency signal and the second radio frequency signal from the at least one radio frequency generator and for filtering out the first radio frequency signal;
a first matching network for matching the output of the at least one radio frequency generator to the input of the first filter;
a second matching network for matching the output of the at least one radio frequency generator to the input of the second filter;
converting the first radio frequency signal to a third radio frequency signal, converting the second radio frequency signal to a fourth radio frequency signal, and converting the first radio frequency signal to the second radio frequency signal; a transformer-coupled combiner for either combining frequency signals or combining the third radio frequency signal with the fourth radio frequency signal, the third radio frequency signal comprising: a transformer-coupled combiner including a frequency component at the first frequency and wherein the fourth radio frequency signal includes a frequency component at the second frequency .

The radio frequency distribution circuit according to claim 7,
The transformer-coupled combiner includes:
a first transformer for receiving the output of the first filter;
a second transformer for receiving the output of the second filter.

The radio frequency distribution circuit according to claim 8,
The first transformer is
a primary coil connected to the first filter;
and a secondary coil, and the second transformer includes:
a primary coil connected to the second filter and the primary coil of the first transformer;
a secondary coil connected to the secondary coil of the first transformer.

The radio frequency distribution circuit according to claim 9,
The primary coil and the secondary coil of the first transformer are connected to a ground reference, and the primary coil and the secondary coil of the second transformer are connected to the ground reference. Radio frequency distribution circuit.

The radio frequency distribution circuit according to claim 9,
The first transformer is
The primary coil,
a first shield of a first coaxial cable;
a second shield of a second coaxial cable;
the primary coil comprising a conductive interconnect connecting the first shield to the second shield;
The secondary coil,
a first core of the first coaxial cable;
a second core of the second coaxial cable;
a pair of conductive wires connecting the first core to the second core; and the secondary coil.

The radio frequency distribution circuit according to claim 11,
The first coaxial cable extends parallel to the second coaxial cable.

The radio frequency distribution circuit according to claim 11,
The total length of the first core, the second core, and the pair of conductive wires is based on a multiple of or equal to the length of each of the first coaxial cable and the second coaxial cable. At least one of these is a radio frequency distribution circuit.

The radio frequency distribution circuit according to claim 11,
a radio frequency distribution circuit, wherein the length of each of the first coaxial cable and the second coaxial cable is based on and/or equal to a fractional multiple of the wavelength of the first radio frequency signal; .

The radio frequency distribution circuit according to claim 7,
The transformer combination combiner includes a first transformer;
The first transformer is
a first primary coil connected to the first filter;
a second primary coil connected to the second filter;
a first secondary coil connected to receive the third radio frequency signal;
a second secondary coil connected to receive the fourth radio frequency signal.

The radio frequency distribution circuit according to claim 15,
the first transformer includes a third secondary coil,
The third secondary coil is for receiving a fifth radio frequency signal, and the fifth radio frequency signal has a frequency component at the first frequency and a frequency at the second frequency. A radio frequency distribution circuit comprising:

The radio frequency distribution circuit according to claim 7,
The transformer-coupled combiner includes:
a first primary coil connected to the first filter;
a second primary coil connected to the second filter;
a first secondary coil that outputs the third radio frequency signal, the third radio frequency signal including frequency components at the first frequency and the second frequency , respectively; Next coil and
a second secondary coil that outputs the fourth radio frequency signal, wherein the fourth radio frequency signal includes frequency components at the first frequency and the second frequency , respectively; A radio frequency distribution circuit comprising: a coil;

The radio frequency distribution circuit according to claim 17,
The transformer-coupled combiner includes:
a third secondary coil that outputs a fifth radio frequency signal, wherein the fifth radio frequency signal includes frequency components at the first frequency and the second frequency , respectively; coil and
a fourth secondary coil that outputs a sixth radio frequency signal, wherein the sixth radio frequency signal includes frequency components at the first frequency and the second frequency , respectively; A radio frequency distribution circuit comprising a coil and.

A substrate processing system,
The radio frequency distribution circuit according to claim 7;
a process chamber;
a showerhead comprising an electrode and mounted within the process chamber;
a substrate support mounted within the process chamber adjacent to the showerhead.

In a substrate processing system, a radio frequency distribution circuit for supplying radio frequency power to an electrode, the radio frequency distribution circuit comprising:
a radio frequency generator for generating a first radio frequency signal;
converting the first radio frequency signal to a second radio frequency signal and providing the second radio frequency signal to the electrode to adjust plasma ionization density and ionization energy within a process chamber of the substrate processing system; and a transformer for
a matching network for matching the output of the radio frequency generator to the input of the transformer.