JPWO2021060182A1 - - Google Patents
Info
- Publication number
- JPWO2021060182A1 JPWO2021060182A1 JP2020551436A JP2020551436A JPWO2021060182A1 JP WO2021060182 A1 JPWO2021060182 A1 JP WO2021060182A1 JP 2020551436 A JP2020551436 A JP 2020551436A JP 2020551436 A JP2020551436 A JP 2020551436A JP WO2021060182 A1 JPWO2021060182 A1 JP WO2021060182A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019175316 | 2019-09-26 | ||
PCT/JP2020/035439 WO2021060182A1 (en) | 2019-09-26 | 2020-09-18 | Impurity diffusion composition, method for manufacturing semiconductor element using same, and method for manufacturing solar cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021060182A1 true JPWO2021060182A1 (en) | 2021-04-01 |
JPWO2021060182A5 JPWO2021060182A5 (en) | 2023-06-12 |
Family
ID=75165758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020551436A Pending JPWO2021060182A1 (en) | 2019-09-26 | 2020-09-18 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPWO2021060182A1 (en) |
CN (1) | CN114342101A (en) |
TW (1) | TW202112950A (en) |
WO (1) | WO2021060182A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115148848A (en) * | 2022-06-27 | 2022-10-04 | 常州时创能源股份有限公司 | Chain type phosphorus source for impurity absorption and preparation method and application thereof |
WO2024057722A1 (en) * | 2022-09-16 | 2024-03-21 | 東レ株式会社 | Impurity diffusion composition, method for producing semiconductor element using same, and method for producing solar cell |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4481869B2 (en) * | 2005-04-26 | 2010-06-16 | 信越半導体株式会社 | SOLAR CELL MANUFACTURING METHOD, SOLAR CELL, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
WO2012161107A1 (en) * | 2011-05-20 | 2012-11-29 | 日本合成化学工業株式会社 | Coating liquid for diffusing impurity |
JP2016195203A (en) * | 2015-04-01 | 2016-11-17 | 東レ株式会社 | P-type impurity diffusion composition, method of manufacturing semiconductor element using the same, and solar cell |
JP2017103379A (en) * | 2015-12-03 | 2017-06-08 | 東レ株式会社 | Impurity diffusing composition and manufacturing method of semiconductor device using the same |
JP7172994B2 (en) * | 2018-03-16 | 2022-11-16 | 東レ株式会社 | Impurity diffusion composition, method for producing semiconductor device using same, and method for producing solar cell |
JP7459511B2 (en) * | 2018-12-07 | 2024-04-02 | 東レ株式会社 | Method for manufacturing semiconductor device and method for manufacturing solar cell |
-
2020
- 2020-09-18 WO PCT/JP2020/035439 patent/WO2021060182A1/en active Application Filing
- 2020-09-18 CN CN202080061387.5A patent/CN114342101A/en active Pending
- 2020-09-18 JP JP2020551436A patent/JPWO2021060182A1/ja active Pending
- 2020-09-22 TW TW109132785A patent/TW202112950A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN114342101A (en) | 2022-04-12 |
WO2021060182A1 (en) | 2021-04-01 |
TW202112950A (en) | 2021-04-01 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230602 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20230602 |