JPWO2021039900A1 - - Google Patents

Info

Publication number
JPWO2021039900A1
JPWO2021039900A1 JP2021542999A JP2021542999A JPWO2021039900A1 JP WO2021039900 A1 JPWO2021039900 A1 JP WO2021039900A1 JP 2021542999 A JP2021542999 A JP 2021542999A JP 2021542999 A JP2021542999 A JP 2021542999A JP WO2021039900 A1 JPWO2021039900 A1 JP WO2021039900A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021542999A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021039900A1 publication Critical patent/JPWO2021039900A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021542999A 2019-08-28 2020-08-27 Pending JPWO2021039900A1 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019156108 2019-08-28
PCT/JP2020/032342 WO2021039900A1 (ja) 2019-08-28 2020-08-27 試料測定装置および試料測定方法

Publications (1)

Publication Number Publication Date
JPWO2021039900A1 true JPWO2021039900A1 (pt) 2021-03-04

Family

ID=74685140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021542999A Pending JPWO2021039900A1 (pt) 2019-08-28 2020-08-27

Country Status (2)

Country Link
JP (1) JPWO2021039900A1 (pt)
WO (1) WO2021039900A1 (pt)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2005863A (en) * 2009-12-28 2011-06-29 Asml Netherlands Bv Calibration method and apparatus.
WO2014084007A1 (ja) * 2012-11-29 2014-06-05 シチズンホールディングス株式会社 光変調素子
CN103048268B (zh) * 2013-01-10 2015-05-27 南京中迅微传感技术有限公司 基于微偏振片阵列的数字电子剪切散斑干涉仪
DE102013219181B4 (de) * 2013-09-24 2018-05-09 Olympus Soft Imaging Solutions Gmbh Vorrichtung und Verfahren zur optischen Bestimmung von Partikeleigenschaften
AU2014385273B2 (en) * 2014-03-07 2017-06-15 Halliburton Energy Services, Inc. Wavelength-dependent light intensity modulation in multivariate optical computing devices using polarizers
EP3243103B1 (en) * 2015-01-09 2020-04-29 Essilor International Liquid-crystal achromatic phase modulator
JP6697681B2 (ja) * 2016-08-17 2020-05-27 ソニー株式会社 検査装置、検査方法、およびプログラム
JP6817623B2 (ja) * 2016-11-28 2021-01-20 公立大学法人兵庫県立大学 偏光制御装置および偏光制御方法

Also Published As

Publication number Publication date
WO2021039900A1 (ja) 2021-03-04

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