JPWO2020218600A1 - - Google Patents
Info
- Publication number
- JPWO2020218600A1 JPWO2020218600A1 JP2021516320A JP2021516320A JPWO2020218600A1 JP WO2020218600 A1 JPWO2020218600 A1 JP WO2020218600A1 JP 2021516320 A JP2021516320 A JP 2021516320A JP 2021516320 A JP2021516320 A JP 2021516320A JP WO2020218600 A1 JPWO2020218600 A1 JP WO2020218600A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/96—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings spiro-condensed with carbocyclic rings or ring systems
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/02—Condensation polymers of aldehydes or ketones with phenols only of ketones
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G85/00—General processes for preparing compounds provided for in this subclass
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/16—Condensation polymers of aldehydes or ketones with phenols only of ketones with phenols
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019085938 | 2019-04-26 | ||
PCT/JP2020/017901 WO2020218600A1 (ja) | 2019-04-26 | 2020-04-27 | 光学部品形成用組成物 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2020218600A1 true JPWO2020218600A1 (de) | 2020-10-29 |
Family
ID=72942645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021516320A Pending JPWO2020218600A1 (de) | 2019-04-26 | 2020-04-27 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2020218600A1 (de) |
TW (1) | TW202104202A (de) |
WO (1) | WO2020218600A1 (de) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5556773B2 (ja) * | 2010-09-10 | 2014-07-23 | 信越化学工業株式会社 | ナフタレン誘導体及びその製造方法、レジスト下層膜材料、レジスト下層膜形成方法及びパターン形成方法 |
US9598392B2 (en) * | 2011-08-12 | 2017-03-21 | Mitsubishi Gas Chemical Company, Inc. | Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom |
EP2743770B1 (de) * | 2011-08-12 | 2015-12-30 | Mitsubishi Gas Chemical Company, Inc. | Unterschichtfilmbildendes material für die lithografie, unterschichtfilm für die lithografie und verfahren zur strukturformung |
JP6094947B2 (ja) * | 2011-09-30 | 2017-03-15 | 三菱瓦斯化学株式会社 | フルオレン構造を有する樹脂及びリソグラフィー用下層膜形成材料 |
KR101855506B1 (ko) * | 2011-10-13 | 2018-05-08 | 주식회사 동진쎄미켐 | 방향족 고리 함유 고분자 및 이를 포함하는 레지스트 하층막 조성물 |
KR101873018B1 (ko) * | 2011-11-02 | 2018-07-03 | 주식회사 동진쎄미켐 | 페놀계 단량체, 이를 포함하는 레지스트 하층막 형성용 고분자 및 이를 포함하는 레지스트 하층막 조성물 |
KR102066229B1 (ko) * | 2013-03-26 | 2020-01-15 | 주식회사 동진쎄미켐 | 레지스트 하층막 조성물 및 이를 이용한 패턴 형성 방법 |
US9274426B2 (en) * | 2014-04-29 | 2016-03-01 | Az Electronic Materials (Luxembourg) S.A.R.L. | Antireflective coating compositions and processes thereof |
CN106462074B (zh) * | 2014-06-16 | 2020-06-09 | 日产化学工业株式会社 | 抗蚀剂下层膜形成用组合物 |
US9958781B2 (en) * | 2015-04-24 | 2018-05-01 | Jsr Corporation | Method for film formation, and pattern-forming method |
-
2020
- 2020-04-27 TW TW109114025A patent/TW202104202A/zh unknown
- 2020-04-27 WO PCT/JP2020/017901 patent/WO2020218600A1/ja active Application Filing
- 2020-04-27 JP JP2021516320A patent/JPWO2020218600A1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2020218600A1 (ja) | 2020-10-29 |
TW202104202A (zh) | 2021-02-01 |
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