JPWO2020217961A1 - - Google Patents

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Publication number
JPWO2020217961A1
JPWO2020217961A1 JP2021515956A JP2021515956A JPWO2020217961A1 JP WO2020217961 A1 JPWO2020217961 A1 JP WO2020217961A1 JP 2021515956 A JP2021515956 A JP 2021515956A JP 2021515956 A JP2021515956 A JP 2021515956A JP WO2020217961 A1 JPWO2020217961 A1 JP WO2020217961A1
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JP
Japan
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JP2021515956A
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Japanese (ja)
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JP7409694B2 (en
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Publication of JP7409694B2 publication Critical patent/JP7409694B2/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)
JP2021515956A 2019-04-26 2020-04-06 Diaphragm, valve, and film formation method Active JP7409694B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019086353 2019-04-26
JP2019086353 2019-04-26
PCT/JP2020/015585 WO2020217961A1 (en) 2019-04-26 2020-04-06 Diaphragm, valve, and film forming method

Publications (2)

Publication Number Publication Date
JPWO2020217961A1 true JPWO2020217961A1 (en) 2020-10-29
JP7409694B2 JP7409694B2 (en) 2024-01-09

Family

ID=72942268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021515956A Active JP7409694B2 (en) 2019-04-26 2020-04-06 Diaphragm, valve, and film formation method

Country Status (3)

Country Link
JP (1) JP7409694B2 (en)
TW (1) TW202111237A (en)
WO (1) WO2020217961A1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004060741A (en) * 2002-07-26 2004-02-26 Motoyama Eng Works Ltd Diaphragm, diaphragm valve, and film forming device
US8287981B2 (en) * 2008-03-14 2012-10-16 Tacmina Corporation Metal diaphragm

Also Published As

Publication number Publication date
JP7409694B2 (en) 2024-01-09
TW202111237A (en) 2021-03-16
WO2020217961A1 (en) 2020-10-29

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