JPWO2020022316A1 - Light radiation device and object information detection device - Google Patents

Abstract

It includes a coherent light source that emits coherent light, a spatial light modulation unit that modulates the light incident from the coherent light source and emits the modulated light in a predetermined direction, and a reflector having a reflecting surface that is at least a part of a spherical surface. , A transparent layer covering the reflective surface is laminated on the reflector, the surface of the transparent layer is composed of at least a part of a spherical surface, and the light incident on the transparent layer from the spatial light modulation unit is reflected by the reflective surface to the outside. The emitted light emitting device can emit light accurately over a wide angle range while ensuring high reliability while having a simple configuration at low cost.

Description

The present invention relates to a light emitting device and an object information detecting device that radiate a predetermined light to an object.

The LIDAR system described in Patent Document 1 includes a base, a head assembly, a rotating member for rotating the head assembly, a motherboard supported by the head assembly, a lens and a mirror arranged on the head assembly, and an emitter circuit board. The photon transmitter mounted on the detection circuit board and the detector mounted on the detection circuit board are provided. In this lidar system, the light from the photon transmitter can be reflected by a rotating plane mirror and radiated to a specific area.

The laser device described in Patent Document 2 is provided so as to provide one aspherical lens having at least one aspherical spherical surface on the optical path of the laser beam and to guide the laser beam from the aspherical lens to a processing point. The beam transmission optical system is a laser device that is a beam transmission optical system that transfers the focal position corresponding to the convergent spherical curvature component of the aspherical lens to the processing point. In this laser device, a laser beam can be emitted to a specific range with an practically uniform intensity distribution.

U.S. Pat. No. 8,767,190 Japanese Unexamined Patent Publication No. 2002-283805

However, in the LIDAR system described in Patent Document 1, since the head assembly in which the plane mirror is arranged is rotated by the rotating member, it is difficult to sufficiently secure reliability in fine control of the radiation direction, durability, and the like.

Further, the laser apparatus described in Patent Document 2 has a problem that the manufacturing cost is high because an aspherical shape having one or more surfaces is required to radiate a laser beam with high accuracy.

Therefore, the present invention uses a light radiating device capable of radiating light accurately over a wide angle range while ensuring high reliability in a simple configuration at a low cost, and such a light radiating device. An object of the present invention is to provide an object information detection device.

In order to solve the above problems, the light emitting device of the present invention includes a coherent light source that emits coherent light, a spatial light modulation unit that modulates the light incident from the coherent light source, and emits the modulated light in a predetermined direction. A light emitting device including a reflector having a reflecting surface which is at least a part of a spherical surface. The reflecting body is laminated with a transparent layer covering the reflecting surface, and the surface of the transparent layer is at least a part of the spherical surface. It is characterized in that the light incident on the transparent layer from the spatial light modulation unit is reflected by the reflecting surface and radiated to the outside.
As a result, it is possible to radiate light accurately over a wide angle range while ensuring high reliability in a simple configuration with reduced cost.

In the light emitting device of the present invention, it is preferable that the spherical surface forming the reflecting surface and the spherical surface forming the surface of the transparent layer have substantially the same center positions.

In the light emitting device of the present invention, one or more concave lenses, one or more convex lenses, or an optical element composed of a combination thereof is arranged on the optical path connecting the spatial light modulation unit and the transparent layer, and the concave surface of the concave lens is formed. It is preferable that the convex surfaces of the convex lenses are spherical surfaces.

In the light emitting device of the present invention, one or more meniscus lenses are arranged on the optical path connecting the spatial light modulation unit and the transparent layer, and it is preferable that both the convex surface and the concave surface of the meniscus lens are spherical surfaces.

In the light emitting device of the present invention, it is preferable that an optical element composed of a combination of one or more concave mirrors and one or more convex mirror spherical mirrors is arranged on the optical path connecting the spatial light modulation unit and the transparent layer.

In the light emitting device of the present invention, it is preferable that an optical element composed of a combination of a spherical lens and a spherical mirror is arranged on an optical path connecting the spatial light modulation unit and the transparent layer, and the positive and negative focal lengths of the spherical lens and the spherical mirror are different from each other. ..

In the light emitting device of the present invention, by adjusting the light emitted from the spatial light modulation unit, it is possible to reduce the difference in the projected area when the synchrotron radiation from the light emitting device is projected at the same distance and at different angles. preferable.

In the light emission device of the present invention, the spatial light modulation unit is preferably a liquid crystal panel or LCOS having a liquid crystal layer.

In the light emission device of the present invention, the spatial light modulation unit is preferably a microelectromechanical system including a plurality of movable mirrors.

The object information detection device of the present invention is an object information detection device including any one of the above-mentioned light emitting devices, in which the reflected light from the reflecting surface irradiates the object, and receives the reflected light from the object. It is characterized by including a light receiving unit for detecting an object and an object information detecting unit for detecting the object information of the object based on the light receiving result in the light receiving unit.
As a result, it is possible to execute object information detection with high accuracy in a wide angle range with a simple configuration at low cost.

According to the present invention, a light radiating device capable of radiating light accurately over a wide angle range while ensuring high reliability in a simple configuration at a low cost, and such a light radiating device are used. An object information detection device can be provided.

It is a block diagram which conceptually shows the structure of the light emitting device and the object information detection device which concerns on 1st Embodiment of this invention. It is a figure which shows the structure of the light emitting device which concerns on 1st Embodiment of this invention. It is a figure which shows the structure of the light emitting device which concerns on 2nd Embodiment of this invention.

Hereinafter, the light emitting device and the object information detecting device according to the embodiment of the present invention will be described in detail with reference to the drawings.
<First Embodiment>
FIG. 1 is a block diagram conceptually showing the configurations of the light emitting device and the object information detecting device according to the first embodiment. FIG. 2 is a diagram showing a configuration of a light emitting device according to the first embodiment.

<Light radiation device>
As shown in FIG. 1 or 2, the light emitting device according to the first embodiment includes a light source 11, a spatial light modulator 20 as a spatial light modulation unit, and a reflector 30. Further, this light emitting device preferably includes a modulated light control unit 12 and an optical element 15. Here, as the object detection device described later, it is preferable to include a light receiving unit 41 and an object information detection unit 42 in addition to the light emitting device.

The light source 11 is a light source (coherent light source) that emits coherent light, and is, for example, a laser light source that emits a Gaussian beam. Further, as shown in FIG. 2, the collimating optical system 13 is provided in which the light L10 emitted from the light source 11 is used as collimated light and is emitted to the spatial light modulator 20, and the collimated light is reflected by the planar mirror 14 and is reflected by the spatial light modulator. It is incident on 20.

The spatial light modulator 20 modulates the incident light and emits it. Modulation includes, for example, changing at least one of the phase and intensity of the emitted light, and changing the exit direction. As the spatial light modulator 20, for example, a liquid crystal panel, an LCOS (Liquid Crystal On Silicon), or a microelectromechanical system is used. The liquid crystal panel and LCOS have a liquid crystal layer, and include a plurality of pixels as a region (modulation region) for generating modulated light. The microelectromechanical system has a plurality of movable mirrors as a modulation region.

The spatial light modulator 20 generates modulated light based on the incident light from the light source 11 under the control of the modulated light control unit 12. In the liquid crystal panel or LCOS, the modulated light is adjusted so that the emission direction is a predetermined direction, that is, an angle toward the reflector 30 side, for example, by changing the orientation direction of the liquid crystal molecules. Further, in a microelectromechanical system, the emission direction is adjusted by changing the angle or position of the movable mirror. The position information of the light source 11, the spatial light modulator 20, and the reflector 30 is input in advance to the modulated light control unit 12, and based on these, the modulated light control unit 12 emits light from the spatial light modulator 20. Adjust the direction.

As shown in FIG. 2, the reflector 30 includes a reflecting surface 31 composed of a part or all of a spherical surface, and a transparent layer 32 laminated so as to cover the reflecting surface 31. The modulated light emitted from the spatial light modulator 20 is refracted when it is incident on the transparent layer 32, then reflected by the reflecting surface 31, and is also refracted when emitted from the transparent layer 32 and radiated to the outside. In this way, the object S is irradiated with the reflected light from the reflecting surface 31 of the reflector 30.

The transparent layer 32 is preferably formed to have a uniform thickness with respect to the reflecting surface 31, thereby forming a spherical surface having a center position substantially the same as that of the spherical surface forming the reflecting surface 31. It can be covered with the transparent layer 32. The transparent layer 32 can be formed by any method, and its thickness can be arbitrarily set according to specifications such as a radiation range as a light emitting device.

The spherical surface forming the reflecting surface 31 may be a part of a convex mirror having a convex surface facing the object S side, or a part of a concave mirror having a concave surface facing the object S side.
Note that FIG. 2 shows only a part of the reflector 30, including the reflecting surface 31 and the transparent layer 32 covering the reflecting surface 31.

By providing the transparent layer 32 so as to cover the reflecting surface 31 as described above, the light emitted from the spatial light modulator 20 is not only reflected by the reflecting surface 31, but also incident / emitted to / from the transparent layer 32. It is refracted when. Therefore, light is emitted from the reflector 30 over a wider angle range.

Further, since the surface 33 forms the spherical transparent layer 32 so as to cover the spherical reflecting surface 31, it is possible to suppress the spread angle of the emitted light from the reflector 30 from being varied depending on the emission angle. .. Such suppression of the variation in the spreading angle can also be realized by forming the reflecting surface into a complicated shape such as an aspherical shape. On the other hand, in the reflector 30 of the first embodiment, by combining the spherical reflecting surface 31 and the transparent layer 32 whose surface 33 is spherical, it can be realized at low cost in both manufacturing and design. Is possible. Further, since the surface 33 and the reflecting surface 31 of the transparent layer 32 are formed of a spherical surface, if the position of the reflector 30 is known, it is not necessary to detect the posture, so that a sensor or detection for posture detection is not required. A circuit or the like is not required, and a simple configuration can be achieved.

In the reflector 30, for example, the surface of a plastic sphere having a certain degree of hardness or more is plated with metal to form a reflective surface 31, and further, a transparent layer 32 is formed of a plastic material so as to cover the reflective surface 31. Manufactured by

Examples of the plastic constituting the reflector 30 include polydiethylene glycol bisallyl carbonate and other polycarbonates, styrene resin, polymethylmethacrylate and other acrylic resins. As the plastic constituting the transparent layer 32, a material having transparency corresponding to the specifications of the light emitting device is preferable, and it may be the same as the material constituting the sphere of the reflector 30.

Examples of the metal plating forming the reflective surface 31 include silver, aluminum, nickel, and chromium, and silver is particularly preferable because of its high reflection characteristics and ease of manufacture. The reflective surface 31 may be formed by a thin film forming method other than metal plating.

The reflector 30 may be made of a material other than plastic having a certain degree of hardness, for example, glass or metal. When composed of metal, the surface may be used as the reflective surface 31 by utilizing the reflectivity of the surface.

<Optical element>
Optical elements including one or more lenses, such as the following (1) and (2), are arranged on the optical path connecting the spatial light modulator 20 and the transparent layer 32 of the reflector 30. In the examples shown in FIGS. 1 and 2, an optical element 15 composed of one meniscus lens is arranged.

By arranging the optical element on the optical path connecting the spatial light modulator 20 and the transparent layer 32, it is possible to adjust the spread of the luminous flux from the spatial light modulator 20 toward the transparent layer 32. Therefore, for example, when an optical element having a positive refractive power is used, the distance between the spatial light modulator 20 and the reflector 30 can be shortened, whereby the size of the light emitting device can be suppressed to a small size. It will be possible. Further, the incident surface to the optical element, the exit surface from the optical element, and the optical surface existing between them are incident on the transparent layer 32 by adjusting the radius of curvature, the direction of unevenness, and other optical characteristics. The spread of the luminous flux can also be adjusted according to the incident angle. That is, it is possible to adjust the light emitted from the spatial light modulator 20, thereby reducing the difference in projected area when the synchrotron radiation from the synchrotron radiation device is projected at the same distance and at different angles. ..

(1) An optical element composed of one or more concave lenses, one or more convex lenses, or a combination thereof arranged on an optical path connecting the spatial light modulator 20 and the transparent layer 32:
In this optical element, the concave surface of the concave lens and the convex surface of the convex lens are spherical surfaces, respectively. For one or more concave lenses, one or more convex lenses, or a combination of these optical elements, it is preferable that their respective optical axes are on the optical path connecting the spatial light modulator 20 and the transparent layer 32.

(2) An optical element composed of one or more meniscus lenses arranged on an optical path connecting the spatial light modulator 20 and the transparent layer 32:
The meniscus lens in this optical element has both convex and concave surfaces as spherical surfaces. For one or more meniscus lenses of this optical element, it is preferable that each optical axis is on an optical path connecting the spatial light modulator 20 and the transparent layer 32. In the example shown in FIG. 2, the configuration when there is one meniscus lens is shown.

<Object information detection device>
The object detection device according to the first embodiment includes a light receiving unit 41 and an object information detection unit 42 in addition to the above-mentioned light emitting device.

The light receiving unit 41 receives the modulated light (reflected light) reflected by the object S. The light receiving unit 41 can use various optical sensors as long as it can detect the intensity of the modulated light. The detection result is output to the object information detection unit 42.
The object information detection unit 42 detects the object information of the object S based on the light receiving result in the light receiving unit 41. The object information of the object S includes a position, an orientation, a shape, a color, and the like.

Hereinafter, examples of the first embodiment will be described.
(Example 1)
Table 1 is a table showing the simulation results based on the configuration of the light emitting device according to the first embodiment.

In Example 1, a Liquid Crystal On Silicon (LCOS) element was selected as the spatial light modulator 20 (spatial light modulation unit). A coordinate system was defined to explain the overall positional relationship. The origin was the plane center of the LCOS element of the spatial light modulator 20 and the interface between the cover glass of the LCOS element and air. The x-axis is the projection of the straight line connecting the origin and the center of the sphere of the reflector 30 onto the plane 21 on which the spatial light modulator 20 is installed. The z-axis was parallel to the normal vector of the plane 21 on which the spatial light modulator 20 was installed. The y-axis was defined as a right-handed system perpendicular to the x-axis and z-axis. The unit of the coordinate system was mm. The material of the reflector 30 which is a spherical mirror is polycarbonate. On the reflective surface 31 which is the surface of the reflector 30, a spherical shell having an inner surface diameter of 10.2 mm and an outer surface diameter of 12 mm was produced as a transparent layer 32 from polycarbonate. The inner surface (reflecting surface 31) of the spherical shell was metal-plated. The center of the inner surface and the center of the outer surface of this spherical shell were substantially the same. This spherical shell was installed so that the coordinates of the center position were (12.9, 0, 80).

Further, a polycarbonate meniscus lens was arranged as the optical element 15 on the optical path connecting the spatial light modulator 20 and the transparent layer 32. The diameter of this meniscus lens was 6 mm, and the radius of curvature of each surface was 19.5 mm for the convex surface and 40 mm for the concave surface. The thickness of the meniscus lens on the optical axis was 2.5 mm. The main axis (optical axis) of the meniscus lens was parallel to the z-axis, the concave surface was directed toward the spatial light modulator 20, and the intersection of the main axis and the convex surface was (2.6,0,14.5).

The wavelength of the emitted light L10 from the light source 11 was set to 905 nm. The emitted light L10 is converted into collimated light by the collimating optical system 13, reflected by the plane mirror 14, and incident on the spatial light modulator 20. Therefore, when the spatial light modulator 20 is incident on the LCOS, it is substantially parallel and is incident as a Gaussian beam having a radius of 1.6 mm. The vector when the light L10 emitted from the light source 11 is incident on the spatial light modulator 20 is (0.174, 0, −0.985). The modulated light (modulated light L11, L12, L13 illustrated in FIG. 2) emitted from the spatial light modulator 20 is refracted when incident on the surface 33 of the transparent layer 32, reflected by the reflecting surface 31, and then the surface 33. It also refracts when exiting from.

Next, the simulation conditions and results shown in Table 1 will be described.
In this simulation, the light L10 emitted from the light source 11 is divided into a plurality of beamlets, and the operation of the light rays by the LCOS as the spatial light modulator 20 is represented by the geometrical optics action. The operation of the light rays by the spatial light modulator 20 in the first embodiment is performed by periodically modulating the phase on the spatial light modulator 20 and manipulating the equiphase plane at a specific position. This is similar to the effect of diffraction gratings and lenses on light rays. From this background, the result of the light beam manipulation by the LCOS can be decomposed into the sum of the effect of bending all parallel rays in substantially the same direction and the effect of focusing or divergence by the lens as in the diffraction grating. An effect similar to this diffraction lattice is expressed by a rotation operation about a straight line with a specified direction vector passing through the intersection of the beamlet and LCOS, and the correction amount at each intersection is calculated by the intersection of the main axis and the lens surface (0, It is represented by the radius of curvature of a virtual lens whose material is equivalent to BK7 (general name of optical glass) in 0,0).

As a representative, beamlets incident on the points listed below were extracted. That is, the points are on the LCOS (0.8, 0, 0), (-0.4, 0.693, 0), (-0.4, -0.693, 0), (1. 6,0,0), (0.8,1.386,0), (-0.8,1.386,0), (-1.6,0,0), (-0.8,- There are 9 points (1.386,0) and (0.8, -1.386, 0). The spread angle was calculated by comparing the vector of the beamlet that passed through these points and radiated to the object with that of the beamlet that passed through (0,0,0).

These results are summarized in Table 1. In the optical system of the first embodiment, the maximum radiation angle range in the xy plane direction is about 163 °, and the radiation angle range in the xz plane direction is 55 °. The spread of the emitted beam was 1.9 ° at the maximum when each beamlet was rotated at the same angle, but decreased to about 1 ° at the maximum when the virtual lens was used. This spread of angle corresponds to irradiating a circle with a diameter of about 2 m at a distance of 100 m. To further reduce the diameter of this illuminated circle, the center of the virtual lens fixed to the origin of the LCOS should be moved to optimize for each beamlet, and then the radius of curvature should be optimized. good.

(Example 2)
Tables 2 and 3 are tables showing simulation results according to the configuration of the light emitting device according to the second embodiment.

In Example 2, a Liquid Crystal On Silicon (LCOS) element was selected as the spatial light modulator 20 (spatial light modulation unit). The definition of the coordinate system conforms to Example 1. A metal-plated inner surface of a polycarbonate spherical shell having an inner surface diameter of 8 mm and an outer surface diameter of 10 mm was prepared. The center of the inner surface and the center of the outer surface of this spherical shell were substantially the same. This spherical shell was installed so that the coordinates of the center position were (10.6, 0, 60).

A polycarbonate meniscus lens was arranged as the optical element 15 on the optical path connecting the spatial light modulator 20 and the transparent layer 32. The diameter of this meniscus lens was 8 mm, and the radius of curvature of each surface was 20 mm for the convex surface and 27 mm for the concave surface. The thickness of the meniscus lens on the optical axis was 2.5 mm. The main axis (optical axis) of the meniscus lens was parallel to the z-axis, the concave surface was directed toward the LCOS side, and the intersection of the main axis and the convex surface was (3.2,0,16.5).

The wavelength of the emitted light L10 from the light source 11 was set to 905 nm. The emitted light was a Gaussian beam having a radius of 1.6 mm, which was substantially parallel when incident on the LCOS, as in Example 1. The vector at the time of light incident was (0.174, 0, −0.985).

The simulation conditions and results shown in Tables 2 and 3 will be described.
In this simulation as well, as in the first embodiment, the light L10 emitted from the light source 11 is divided into a plurality of beamlets, and the operation of the light rays by the LCOS is represented by the geometrical optics action. The simulation procedure was in accordance with Example 1. The amount of correction applied independently to each beamlet in order to obtain the target beam shape is a virtual lens whose material is equivalent to BK7, where the intersection of the spindle and the lens surface is (0, 0, 0). It was represented by the radius of curvature of.

As a representative example, beamlets incident on the points listed below were extracted. These are on the LCOS (0.471,0,0), (-0.235,0.408,0), (-0.235, -0.408,0), (0.858,0). , 0), (0.429, 0.743, 0), (-0.429, 0.743, 0), (-0.858, 0, 0), (-0.429, -0.743) , 0), (0.429, -0.743, 0) 9 points were used as the beam. In this simulation, the beam radiated into the space was set to have a spread angle of 20 ° and the illuminance distribution within the irradiation range was made close to uniform.

Therefore, the beamlet that has passed through the three points (0.471, 0, 0), (-0.235, 0.408, 0), and (-0.235, -0.408, 0) is a space. At the time of emission to, the angle formed by the beamlet that passed through (0, 0, 0) was set to 7.7 ° (Table 2). In addition, (0.858, 0, 0), (0.429, 0.743, 0), (-0.429, 0.743, 0), (-0.858, 0, 0), (-. The beamlet that has passed through the six points of 0.429, -0.743,0) and (0.429, -0.743,0) will have (0, 0, 0) when it is radiated into space. The angle formed with the passed beamlet was set to 9.8 ° (Table 3).

As shown in Tables 2 and 3, in the optical system of Example 2, the radiation angle range in the xy plane direction was about 112 ° at the maximum, and the radiation angle range in the xz plane direction was 33 °. Table 2 summarizes the error from the target value of the emitted beam and the radius of curvature of the virtual lens used for correction. The error was reduced to a maximum of about 0.3 ° when using a virtual lens. In order to reduce this error, the center of the virtual lens fixed to the origin of the LCOS may be moved so as to be optimized for each beamlet, and then the radius of curvature may be optimized.

(Comparison example)
Table 4 is a table showing the simulation results according to the configuration of the light emitting device according to the comparative example.

Also in the comparative example, the Liquid Crystal On Silicon (LOCS) element was selected as the spatial light modulator 20 (spatial light modulation unit). The definition of the coordinate system conforms to Example 1. A sphere having a diameter of 12 mm with metal plating on the surface was prepared. It differs from Example 1 and Example 2 in that the transparent layer 32 (spherical shell) is not provided on the surface of the sphere. Then, this sphere was installed so that the coordinates of the center position were (13,2,0,81).

Similar to the first and second embodiments, a polycarbonate meniscus lens was arranged as the optical element 15 on the optical path connecting the spatial light modulator 20 and the transparent layer 32. The diameter of the meniscus lens was 6 mm, and the radius of curvature of each surface was 19 mm for the convex surface and 41 mm for the concave surface. The thickness of the meniscus lens on the optical axis was 2.5 mm. The main axis (optical axis) of the meniscus lens was parallel to the z-axis, the concave surface of the lens was directed toward the LCOS side, and the intersection of the main axis and the convex surface of the lens was (3.2,0,18).

The wavelength of the emitted light L10 from the light source 11 was set to 905 nm. The light was a Gaussian beam with a radius of 1.6 mm, which was substantially parallel when incident on the LCOS. The vector at the time of light incident was (0.174, 0, −0.985).

The simulation conditions and results shown in Table 4 will be described.
The method of simulation and correction was in accordance with Example 1. As a representative, beamlets incident on the points listed below were extracted. These are on the LCOS (0.8,0,0), (-0.4,0.693,0), (-0.4, -0.693,0), (1.6,0). , 0), (0.8, 1.386, 0), (-0.8, 1.386, 0), (-1.6, 0, 0), (-0.8, -1.386) , 0), (0.8, -1.386, 0) 9 points were used as the beam. The spread angle was calculated by comparing the vector of the beamlet that passed through these points and radiated to the object with that of the beamlet that passed through (0,0,0).

As shown in Table 4, in the optical system of the comparative example, the radiation angle range in the xy plane direction is about 159 ° at the maximum, and the radiation angle range in the xz plane direction is 50 °, which is slightly narrower than that in the first embodiment. It became. The spread of the emitted beam was 3.4 ° at maximum when each beamlet was rotated at the same angle, which was larger than that of Example 1. Even when the correction was performed with the same angular resolution as in Example 1 through the virtual lens, the spreading angle decreased only up to about 1.8 °.

<Second Embodiment>
FIG. 3 is a diagram showing a configuration of a light emitting device according to a second embodiment. In the second embodiment, instead of the optical element 15 in the first embodiment, an optical element including one or more mirrors is used. Other configurations are the same as in the first embodiment, and the same reference numerals are used for the same members.

In the light emitting device according to the second embodiment, as in the first embodiment, the light L20 emitted from the light source 11 is converted into collimated light by the collimating optical system 13, reflected by the plane mirror 14, and is reflected by the spatial light modulator 20. It is incident on. Further, the modulated light (modulated light L21, L22, L23 illustrated in FIG. 3) emitted from the spatial light modulator 20 is reflected by the convex mirror 16 and the concave mirror 17 as optical elements, respectively, and is incident on the transparent layer 32. This modulated light is refracted when it is incident on the surface 33 of the transparent layer 32, and is also refracted when it is emitted from the surface 33 after being reflected by the reflecting surface 31.

Optical elements including one or more mirrors, such as the following (A) and (B), are arranged on the optical path connecting the spatial light modulator 20 and the transparent layer 32 of the reflector 30. The action / effect of this optical element is the same as that of the optical element in the first embodiment.
(A) An optical element composed of a combination of one or more concave mirrors and one or more convex mirror spherical mirrors arranged on an optical path connecting the spatial light modulator 20 and the transparent layer 32:
For the spherical mirrors of one or more concave mirrors and one or more convex mirrors in this optical element, it is preferable that their respective optical axes are on the optical path connecting the spatial light modulator 20 and the transparent layer 32. The example shown in FIG. 3 shows a configuration in which one concave mirror 17 arranged on the reflector 30 side and one convex mirror 16 arranged on the spatial light modulator 20 side are combined. According to this configuration, the distance between the spatial light modulator 20 and the reflector 30 can be shortened without changing the optical path length from the spatial light modulator 20 to the transparent layer 32, so that the size of the light emitting device can be reduced. It becomes possible to suppress it.

(B) An optical element composed of a combination of a spherical lens and a spherical mirror arranged on an optical path connecting the spatial light modulator 20 and the transparent layer 32:
The spherical lens and the spherical mirror in this optical element are shaped so that the positive and negative of the focal lengths are different from each other. Regarding the combination of the spherical lens and the spherical mirror of this optical element, it is preferable that each optical axis is on the optical path connecting the spatial light modulator 20 and the transparent layer 32.
The other actions, effects, and modifications are the same as those in the first embodiment.
Although the present invention has been described with reference to the above-described embodiment, the present invention is not limited to the above-described embodiment, and can be improved or modified within the purpose of improvement or the idea of the present invention.

As described above, the light emitting device according to the present invention is useful in that it can emit light accurately over a wide angle range while ensuring high reliability in a simple configuration with reduced cost.

11 Light source 12 Modulated light control unit 13 Collimated optical system 14 Planar mirror 15 Optical element 16 Convex mirror (optical element)
17 Concave mirror (optical element)
20 Spatial Light Modulator (Spatial Light Modulation Unit)
21 Plane 30 Reflector 31 Reflector 32 Transparent layer 33 Surface 41 Light receiving part 42 Object information detection part L10, L20 Emission light L11, L12, L13, L21, L22, L23 Modulated light S Object

Claims (10)

A coherent light source that emits coherent light,
A spatial light modulation unit that modulates the light incident from the coherent light source and emits the modulated light in a predetermined direction.
A light emitting device including a reflector having a reflecting surface that is at least a part of a spherical surface.
A transparent layer covering the reflective surface is laminated on the reflector.
The surface of the transparent layer is composed of at least a part of a spherical surface.
A light emitting device, characterized in that light incident on the transparent layer from the spatial light modulation unit is reflected by the reflecting surface and radiated to the outside. The light emitting device according to claim 1, wherein the spherical surface forming the reflecting surface and the spherical surface forming the surface of the transparent layer have substantially the same center positions. An optical element composed of one or more concave lenses, one or more convex lenses, or a combination thereof is arranged on an optical path connecting the spatial light modulation unit and the transparent layer, and the concave surface of the concave lens and the convex surface of the convex lens are arranged. The light emitting device according to claim 1 or 2, respectively, which is spherical. One or more of claims 1 to 3 in which one or more meniscus lenses are arranged on an optical path connecting the spatial light modulation unit and the transparent layer, and the meniscus lens has both convex and concave surfaces spherical. The light emitter described in the section. Any of claims 1 to 4, wherein an optical element composed of a combination of one or more concave mirrors and one or more convex mirrors is arranged on an optical path connecting the spatial light modulation unit and the transparent layer. The light emitting device according to item 1. Claims 1 to 5 in which an optical element composed of a combination of a spherical lens and a spherical mirror is arranged on an optical path connecting the spatial light modulation unit and the transparent layer, and the positive and negative focal lengths of the spherical lens and the spherical mirror are different from each other. The light emitting device according to any one of the above items. Claims 1 to 6 reduce the difference in projected area when the synchrotron radiation from the synchrotron radiation device is projected at the same distance and at different angles by adjusting the light emitted from the spatial light modulation unit. The light emitting device according to any one item. The light emitting device according to any one of claims 1 to 7, wherein the spatial light modulation unit is a liquid crystal panel or LCOS having a liquid crystal layer. The light emitting device according to any one of claims 1 to 7, wherein the spatial light modulation unit is a microelectromechanical system including a plurality of movable mirrors. An object information detection device comprising the light emitting device according to any one of claims 1 to 9, wherein the object is irradiated with the reflected light from the reflecting surface.
A light receiving unit that receives the reflected light from the object and
An object information detection device including an object information detection unit that detects object information of the object based on a light reception result in the light receiving unit.

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